• Korean Journal of Materials Research
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• v.8 no.2
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• pp.147-153
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• 1998

Tungsten nitride is very attractive as absorber for X-ray lithographic mask and as a diffusion barrier for interconnecting metallization in Si VLSI technology. Microstructure of tungsten nitride films prepared by RF magnetron sputtering has been investigated as a function of deposition parameter. The crystal structure of sputtered films on silicon nitride membrane depends strongly on the NJAr gas flow ratio(0~18%1, gas pressure(l0~43mTorr). RF power (60~150W), target-substrate distance(4~8cm). Tungsten nitride films deposited at the $N_2/Ar$ gas flow ratio(- 10%). gas pressure(~10mmTorr), RF power(~150W) and target-substrate distance(6cm) are amorphous, but at other conditions are almost rough -surfaced polycrystalline. Amorphous films are very smooth($3.1\AA$ rms) and expected to be excellent absorber for X-ray mask.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.77.2-77
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• 1998

• Journal of Surface Science and Engineering
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• v.36 no.2
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• pp.128-134
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• 2003

Alloys of Ti-43%Al-2%W-0.1%Si were oxidized isothermally and cyclically between $900^{\circ}C$ and$ 1050^{\circ}C$, and their oxidation characteristics were studied. During isothermal tests, the alloys oxidized slowly up to 100$0^{\circ}C$, but fast at $1050^{\circ}C$. Though the scale adherence was not good above $900^{\circ}C$, the alloys displayed better oxidation behavior than unalloyed TiAl alloys. The oxide scales consisted primarily of an outer $TiO_2$ layer, intermediate $Al_2$$O_3$-rich layer, and an inner mixed layer of (TiO$_2$ $+Al_2$$O_3$). Tungsten was present mainly at the lower part of the oxide scale, while Si over the whole oxide scale.

• Journal of Powder Materials
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• v.14 no.6
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• pp.410-414
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• 2007

Carbon contamination from the binder resin is an inherent problem with the metal powder injection molding process. Residual carbon in the W-Cu compacts has a strong impact on the thermal and electric properties. In this study, uncertainty was quantified to evaluate determination of carbon in a W-15%Cu MIM body by the combustition method. For a valid generalization about this evaluation, uncertainty scheme applied even to the repeatability as well as the uncertainty sources of each analyse step and quality appraisal sources. As a result, the concentration of carbon in the W-Cu part were measured as 0.062% with expanded uncertainty of 0.003% at 95% level. This evaluation example may be useful to uncertainty evaluation for other MIM products.

• Journal of Powder Materials
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• v.11 no.2
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• pp.130-136
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• 2004

The passivation and oxidation process of tungsten and molybdenum narlopowders, produced by electrical explosion of wires was studied by means of FE-SEM, XPS. XRD, TEM, DIA-TGA and sire distribution analysis. In addition, the phase transformation of W and Mo nanopowders under oxidation in air was investigated. A chemical process is suggested for the oxidation of W and Mo nano-particles after a comprehensive testing of passivated and oxidized powders.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.4
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• pp.407-412
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• 2010

The objective of this study is the estimation of the mechanical properties of HIP-treated MMCs by an optimized manufacturing process. The Ti-MMCs were fabricated by HIP and rotary swaging (RS) for secondary processing. The Ti-MMCs with different tungsten fiber contents of 0, 6, 9, and 12 vol% were subjected to tensile tests, fatigue tests, and hardness tests. The results show that the hardness values of Ti-MMCs increased with the increasing volume percent of tungsten fibers, the tensile strength increased by approximately 50% (specific strength: 38%) at the 9 vol%. The value of tungsten-fiber orientation F affects the tensile strength. The fatigue strengths of the Ti-MMCs did not improve. HIP is a useful manufacturing method for Ti-MMCs and RS is an important process for improving fiber orientation during secondary processing.

• Korean Journal of Materials Research
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• v.8 no.11
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• pp.977-981
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• 1998

Controlling the wafer temperatures from 200 to$500^{\circ}C$, low resistive tungsten thin films used for VLSI metallization are deposited by PECVD method. Resistivities of plasma deposited tungsten thin films are very sensitive to the $H_2/WF_6 $ partial pressure ratios. Residual stress behaviors of the films as a function of plasma power density were also studied. At the power density under the $0.7W/\textrm{cm}^2$, residual stress of W film is about $2.4\times10^9dyne/\textrm{cm}^2$. When the power density is. however, increased from 1.8 to $2.7W/\textrm{cm}^2$, residual stress is suddenly increased from $8.1\times10^9$ to $1.24\times10^{10}dyne/\textrm{cm}^2$ ue to the ion or radical bombardment at high power density.

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.488-494
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• 2014

The effect of tungsten (W) addition on the hardenability of low-carbon boron steels was investigated using dilatometry, microstructural observations and secondary ion mass spectroscopy. The hardenability was discussed with respect to transformation behaviour aspects depending on the segregation and precipitation of boron at austenite grain boundaries. A critical cooling rate producing a hardness corresponding to 90 % martensite structure was measured from a hardness distribution plot, and was used as a criterion to estimate hardenability at faster cooling rates. In the low-carbon boron steel, the addition of 0.50 wt.% W was comparable to that of 0.20 wt.% molybdenum in terms of critical cooling rate, indicating hardenability at faster cooling rates. However, the addition of 0.50 wt.% W was not more effective than the addition of .0.20 wt.% molybdenum at slower cooling rates. The addition of 0.20 wt.% molybdenum completely suppressed the formation of eutectoid ferrite even at the slow cooling rate of $0.2^{\circ}C/s$, while the addition of 0.50 wt.% W did not, even at the cooling rate of $1.0^{\circ}C/s$. Therefore, it was found that the effect of alloying elements on the hardenability of low-carbon boron steels can be differently evaluated according to cooling rate.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.12
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• pp.1245-1251
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• 2009

This paper describes the research on the non-eroding throat insert materials under condition of high-temperature, high-pressure, and long-burn time. C/SiC, CIT and W/$Y_2O_3$ were chosen and tested in thermal protection evaluation motor of burning time 20 seconds. From the test results, a heat resistance of W/$Y_2O_3$ was the most excellent among them, but was happened crack on material surface. Thermal reaction characteristics and heat resistance of these materials and feasibility of W/$Y_2O_3$ as throat material were ascertained.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.7
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• pp.568-574
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• 2000

We have been optimized tungsten(W) plug CMP(chemical mechanical polishing) characteristics using two different kinds of component of slurry and two different kinds of pad which have different hardness. The comparison of oxide film roughness on around W plug after polishing has been carried out. And W plug recess for consumable sets and dishing effect at dense area according to the rate of over-polishing has been investigated. Also the analysis of residue on surface after cleaning have been performed. As a experimental result we have concluded that the consumable set of slurry A and hard pad was good for W plug CMP process. After decreasing the rate of chemical reaction of silica slurry and adding two step buffering we could reduce the expanding of W plug void however we are still recognizing to need a more development for those kinds of CMP consumables.