• 제목/요약/키워드: tool monitoring technique

검색결과 189건 처리시간 0.18초

CIGS 박막 태양전지용 CdS 버퍼층 제조 공정의 in-situ 모니터링 기술 (In-situ monitoring technique for deposition process of CdS buffer layer for CIGS thin film solar cells)

  • 권영준;안세진;윤재호;윤경훈
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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    • pp.434-435
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    • 2008
  • An in-situ monitoring technique for deposition process of CdS buffer layer was developed in this work. A quartz crystal microbalance (QCM) was used to measure the frequency change during the CdS deposition process and the relation ship between frequency change and film thickness and optical transmittance was investigated. The film thickness shows a linear relationship with frequency change, demonstrating that frequency change measured by QCM can be used a in-situ monitoring tool for CdS deposition process.

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Real-Time Small Exposed Area $SiO_2$ Films Thickness Monitoring in Plasma Etching Using Plasma Impedance Monitoring with Modified Principal Component Analysis

  • 장해규;남재욱;채희엽
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.320-320
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    • 2013
  • Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

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음향주파수 분석에 의한 엔드밀의 마모상태 추정에 관한 연구 (A study on the Wear Estimation of End Mill Using Sound Frequency Analysis)

  • 조택동;이창희;손장영
    • 한국음향학회:학술대회논문집
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    • 한국음향학회 2002년도 하계학술발표대회 논문집 제21권 1호
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    • pp.209-212
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    • 2002
  • The wear process of end mill is a so complicated process that a more reliable technique is required for the monitoring and controling the tool life and its performance. This research presents a new tool wear monitoring method based on the sound signal generated on the machining. The experiment carried out continuous-side-milling for 4 cases using the high-speed steel slot drill under wet condition. The sound pressure was measured at 0.5m from the cutting zone by a dynamic microphone, and was analyzed at frequency domain. The tooth passing frequency appears as a harmonics form, and end mill wear is related with the first harmonic. It can be concluded from the result that the tool wear is correlate with the intensity of the measured sound at tooth passing frequency estimation of end mill wear using sound is possible through frequency analysis at tooth passing frequency under the given circumstances.

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합금공구강재의 절삭음 음향주파수 분석에 의한 엔드밀 마모 검출에 관한 연구 (A Study on the End Mill Wear Detection by the Analysis of Acoustic Frequency for the Cutting Sound(KSD3753))

  • 이창희;김낙철
    • 융합신호처리학회논문지
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    • 제5권4호
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    • pp.281-286
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    • 2004
  • FMS, FMC, FA, IMS의 구축에 있어서 최하위 단위인 공작기계의 자동화가 중요하다. 이를 위해서는 공작기계의 공구 감시기능(tool monitoring system)이 수행되어야 한다. 본 논문은 공구 감시기능의 자동화를 위해 종전의 공구마모 검출방법과는 달리 엔드밀의 마모상태에 따라 발생하는 절삭음의 음향주파수 분석을 통해 마모정도를 검출하는 방법을 제안하였다. 즉, 머시닝센터에서 공구마모가 잘되는 합금공구강재를 사용하고 이때 발생하게 되는 절삭음(cutting sound)을 음향 분석하여 공구 마모와 관련이 있는 가진 주파수(tooth passing frequency)를 찾아내고 또한 이 주파수의 크기 값과 공구마모(flank wear) 변화를 연구하여 엔드밀의 마모 상태를 추정하였다 이를 위해 본 연구에서는 실험 장비를 구성하고 절삭속도, 엔드밀마모, 공구직경을 절삭조건으로 하여 측정된 절삭음을 FFT 처리하였다. 또한 측정된 값을 회귀분석으로 모델링한 결과 엔드밀 마모 검출오차범위가 5.8% 이내로 나타나 음향주파수 분석에 의한 엔드밀 마모검출 방법의 유효성을 확인할 수 있었다.

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유전자 알고리즘을 이용한 낙동강 유역의 수질 측정망 설계에 관한 연구 (Design of a Water Quality Monitoring Network in the Nakdong River using the Genetic Algorithm)

  • 박수영;왕수균;최정현;박석순
    • 한국물환경학회지
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    • 제23권5호
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    • pp.697-704
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    • 2007
  • This study proposes an integrated technique of Genetic Algorishim (GA) and Geographic Information System (GIS) for designing the water quality monitoring networks. To develop solution scheme of the integrated system, fitness functions are defined by the linear combination of five criteria which stand for the operation objectives of water quality monitoring stations. The criteria include representativeness of a river system, compliance with water quality standards, supervision of water use, surveillance of pollution sources and examination of water quality changes. The fitness level is obtained through calculations of the fitness functions and input data from GIS. To find the most appropriate parameters for the problems, the sensitivity analysis is performed for four parameters such as number of generations, population sizes, probability of crossover, and probability of mutation. Using the parameters resulted from the sensitivity analysis, the developed system proposed 110 water quality monitoring stations in the Nakdong River. This study demonstrates that the integrated technique of GA and GIS can be utilized as a decision supporting tool in optimized design for a water quality monitoring network.

Advances and challenges in impedance-based structural health monitoring

  • Huynh, Thanh-Canh;Dang, Ngoc-Loi;Kim, Jeong-Tae
    • Structural Monitoring and Maintenance
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    • 제4권4호
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    • pp.301-329
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    • 2017
  • Impedance-based damage detection method has been known as an innovative tool with various successful implementations for structural health monitoring of civil structures. To monitor the local critical area of a structure, the impedance-based method utilizes the high-frequency impedance responses sensed by piezoelectric sensors as the local dynamic features. In this paper, current advances and future challenges of the impedance-based structural health monitoring are presented. Firstly, theoretical background of the impedance-based method is outlined. Next, an overview is given to recent advances in the wireless impedance sensor nodes, the interfacial impedance sensing devices, and the temperature-effect compensation algorithms. Various research works on these topics are reviewed to share up-to-date information on research activities and implementations of the impedance-based technique. Finally, future research challenges of the technique are discussed including the applicability of wireless sensing technology, the predetermination of effective frequency bands, the sensing region of impedance responses, the robust compensation of noise and temperature effects, the quantification of damage severity, and long-term durability of sensors.

Simulation of PZT monitoring of reinforced concrete beams retrofitted with CFRP

  • Providakis, C.P.;Triantafillou, T.C.;Karabalis, D.;Papanicolaou, A.;Stefanaki, K.;Tsantilis, A.;Tzoura, E.
    • Smart Structures and Systems
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    • 제14권5호
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    • pp.811-830
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    • 2014
  • A numerical study has been carried out to simulate an innovative monitoring procedure to detect and localize damage in reinforced concrete beams retrofitted with carbon fiber reinforced polymer (CFRP) unidirectional laminates. The main novelty of the present simulation is its ability to conduct the electromechanical admittance monitoring technique by considerably compressing the amount of data required for damage detection and localization. A FEM simulation of electromechanical admittance-based sensing technique was employed by applying lead zirconate titanate (PZT) transducers to acquire impedance spectrum signatures. Response surface methodology (RSM) is finally adopted as a tool for solving inverse problems to estimate the location and size of damaged areas from the relationship between damage and electromechanical admittance changes computed at PZT transducer surfaces. This statistical metamodel technique allows polynomial models to be produced without requiring complicated modeling or numerous data sets after the generation of damage, leading to considerably lower cost of creating diagnostic database. Finally, a numerical example is carried out regarding a steel-reinforced concrete (RC) beam model monotonically loaded up to its failure which is also retrofitted by a CFRP laminate to verify the validity of the present metamodeling monitoring technique. The load-carrying capacity of concrete is predicted in the present paper by utilizing an Ottosen-type failure surface in order to better take into account the passive confinement behavior of retrofitted concrete material under the application of FRP laminate.

음압을 이용한 선삭공정 상태 감시 및 제어

  • 이성일;정성종
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.269-273
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    • 1997
  • In order to maker unmanned machining systems with satisfactory performances, it is necessary to incorporate appropriate condition monitoring systems in the machining workstations to provide the required intelligence of the expert. This paper deals with condition monitoring for chatter, tool wear and fracture during turning operation. To develop economic sensing and identification methods for turning processes, sound pressure measurement and digital signal processing technique were proposed. We suppressed chatter by stability control methodology, which was studied through manipulation of spindle speeds regarding to chatter frequencies. It was shown that tool wear and fracture were identified and to be estimated by using the wear indices. The validity of the proposed system was confirmed through the large number of cutting tests.

정면밀링가공시 공구 파손 검출에 관한 실험적 연구 (An Experimental Study onthe Detection of Tool Failure I Face Milling Processes)

  • 김우순
    • 한국생산제조학회지
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    • 제5권3호
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    • pp.73-79
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    • 1996
  • In this paper present a new technique (strain-telemetering)for detection of coated tool failure in face milling processes. In the cutter body the strain signals received fro the transmitter is transformed in to frequency modulation(FM) signals in face milling processes. A receiver which is place near by the Vertical milling machine receives the FM signals, then the signals will be sent to a computer which determines whether th tool is failure. And machined surface of workpiece is detected by the SEM. In this paper, A on-line monitoring of the tool failure detection system based on the strain -telemetering apparatus has bee represented.

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자종공무마모계측시스템개발 (System Development for Automatic Tool Wear Measurement)

  • Kim, Y.I.
    • 한국정밀공학회지
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    • 제11권6호
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    • pp.185-199
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    • 1994
  • This study has been performed to present a new automatic tool wear measurement by digital image processing. The purpose of this paper is to develop an automatic tool wear measuring system based on the image processing which can be applied to the quasi-real time measurement of the characteristics of insert tip in turning. Tool wear monitoring is one of the key-problems, for the development of control systems of modern unmanned factory which are not completely solved now. In oredr words at present complete qualitative and quantitative information on tool wear morphology is required, at least on the following aspects : flank wear, its dimensions and distribution on the maximum and mean values on VB pqrqmeter in the various zones of the wearland. crater wear, its main dimensions and values of KT parameters. This research has been performed to this technique made possible by designing a proper lighting system to the worn tool with following features : The flank wear is measured by observing the active cutting part from a proper direction and by lighting the wearland by a diffuser optic system. The crater wear is visualized by lighting the tool by a He-Ne gas laser system developed in this study. By means of this system it is research to evaluate classical parameters of tool wear and to have complete information about tool wear morphology.

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