• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.142.2-142.2
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• 2015

Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

• 한국지반공학회논문집
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• 제23권7호
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• pp.47-55
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• 2007

본 연구에서는 흙-벤토나이트월과 같은 차단벽체에 대한 전기전도도 모니터링 기법의 적용성을 평가하였다. 벤토나이트 함량, 투수계수 및 중금속 농도에 따른 전기전도도 변화를 파악하기 위하여 투수실험과 주상실험을 실시하였다. 흙-벤토나이트 혼합 다짐시편의 전기전도도는 벤토나이트 함량이 증가함에 따라 선형적으로 증가하는 경향을 나타내었다. 또한 흙-벤토나이트 차단벽체의 투수계수는 벤토나이트 함량과 반비례하는 경향을 나타내었으며, 전기전도도와도 반비례하는 경향을 나타내었다. 주상실험을 통하여 전기전도도 파과곡선과 농도 파과곡선을 동시에 구할 수 있었다. 이 결과는 전기전도도 측정기법이 벽체 내부의 임의 지점에서 중금속의 이동을 감지하고 오염물질의 누출 가능성을 확인하는 유용한 방법으로 활용될 수 있음을 나타낸다. 본 연구결과에 의하면 전기전도도 측정기법이 차단벽체 모니터링에 효과적으로 적용될 수 있을 것으로 기대된다.

• Journal of Mechanical Science and Technology
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• 제18권9호
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• pp.1537-1548
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• 2004

This paper presents a novel diagnostic technique for monitoring the system conditions and detecting failure modes and precursors based on wavelet-packet analysis of external noise/vibration measurements. The capability is based on extracting relevant features of noise/vibration data that best discriminate systems with different noise/vibration signatures by analyzing external measurements of noise/vibration in the time-frequency domain. By virtue of their localized nature both in time and frequency, the identified features help to reveal faults at the level of components in a mechanical system in addition to the existence of certain faults. A prima-facie case is made via application of the proposed approach to fault detection in scroll and rotary compressors, although the methods and algorithms are very general in nature. The proposed technique has successfully identified the existence of specific faults in the scroll and rotary compressors. In addition, its capability of tracking the severity of specific faults in the rotary compressors indicates that the technique has a potential to be used as a prognostic tool.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.54-58
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• 2007

This paper describes an atomic force microscope (AFM)-based instrument for measuring the nanoscale cutting edge profiles of diamond cutting tools. The instrument consists of a combined AFM unit and an optical sensor to align the AFM tip with the top of the diamond cutting tool edge over a submicron range. In the optical sensor, a aser beam is emitted from a laser diode along the Y-axis and focused to a small beam spot with a diameter of approximately $10{\mu}m$ at the beam waist, which is then received by a photodiode. The top of the tool edge is first brought into the center of the beam waist by adjusting it in the X-Z-plane while monitoring the variation in the photodiode output. The cutting tool is then withdrawn and its top edge position at the beam center is recorded. The AFM tip can also be positioned at the beam center in a similar manner to align it with the top of the cutting edge. To reduce electronic noise interference on the photodiode output and thereby enhance the alignment accuracy, a technique is applied that can modulate the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements of a diamond cutting tool were carried out to verify the performance of the proposed system.

• 인터넷정보학회논문지
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• 제18권4호
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• pp.79-87
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• 2017

Company A, an embedded system manufacturer, provides its products to Company P which is the parent company of Company A. Both companies learned that they needed to find over 4,000 bugs before market release in order to meet the acceptable quality level. Traditionally, they had utilized time-series line graphs as their common performance measurement tool. These graphs compared accumulated numbers of bugs fixed with accumulated numbers of bugs found. Engineers in Company A had been under pressure to improve the process capacity because the line for bugs fixed was always below than the line for bugs found. By using a newly designed Bipolar diagram, engineers in Company A analyzed the process performance. And they were in a position to be more flexible for internal or inter-companies meeting. Authors explain an empirical study of a graphical and practical performance measurement tools relating to mainly the Bipolar diagram. As a result, the Bipolar diagram provides workload monitoring and performance measurement functions in a given timeframe by using the concepts of Optimum Process Line (or band) and Fair Process Capacity Zone.

• Structural Monitoring and Maintenance
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• 제4권3호
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• pp.237-253
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• 2017

Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

• 분석과학
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• 제15권4호
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• pp.341-345
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• 2002

UV 광 중합 반응의 진행정도를 near-IR 분광학적 방법을 사용하여 관찰하였다. 광중합반응의 반응체는 4차 암모늄염을 포함하고 있는 아크릴 모노머를 사용하였으며 광 개시제로는 Darocur 1174를 사용하였다. 반응의 진척도는 광중합 반응의 정도를 나타내 주는 척도가 되는 중합 반응체인 아크릴 모노머의 -C=$CH_2$ 기와 관련된 흡수 띠인 1615 nm(6190 $cm^{-1}$)와 2105 nm(4750 $cm^{-1}$)에서 관찰된 띠 세기의 전환율로부터 구하였다. Near-IR 분광법이 광 중합 반응의 진행정도를 관찰하는데 효과적인 방법이 될 수 있음을 알 수 있었다.

• 한국가금학회:학술대회논문집
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• 한국가금학회 2003년도 제20차 정기총회 및 학술발표회
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• pp.138-139
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• 2003

본 연구는 proteomics의 방법을 이용하여 가금의 면역시스템에 관련된 단백질을 찾고자 수행하였다. 면역활성 물질을 처리한 후 면역활성화시 발현되는 단백질을 찾아보았다. 이 결과는 가금의 면역과 관련된 단백질 마커의 이용뿐 아니라 현재까지 밝혀지지 않은 가금의 2D map을 만드는데 역시 중요하게 이용이 될 것이다.

• 한국산학기술학회논문지
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• 제13권8호
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• pp.3779-3784
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• 2012

산업체 공정의 실시간 공정 모니터링과 진단은 생산 제품의 품질과 안전을 보장하는데 반드시 필요한 활동들의 하나이다. 그중에서 공정 진단은 공정에 발생된 특정 이상상황의 원인을 밝혀내는 것으로서 조업자들이 이상상황의 근본원인을 보다 효과적으로 도출하는데 도움을 줄 수 있다. 본 논문에서는 비선형 KFDA 기법과 데이터 전처리기법을 이용한 이상원인 진단방법을 적용하고 이의 진단 성능을 기존 선형 기법에 기반한 PCA 진단방법과 비교한다. 실제 공정을 모사한 Tennessee Eastman 공정 시뮬레이터의 공정 데이터를 통한 사례연구를 수행한 결과 기존 선형 진단 방법론 대비 신뢰할 수 있는 진단 결과를 얻을 수 있었다.

• 대한의생명과학회지
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• 제26권4호
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• pp.302-309
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• 2020

Human Coxsackievirus B5 (HuCoxV-B5) infection has been associated with various diseases such as myocarditis, aseptic meningitis, hand-foot-and mouth-disease, and insulin-dependent diabetes. HuCoxV-B5 is a virus transmitted through the fecal-oral route and is detected in clinics, aquatic environments, food, shellfish, etc. and is one of the more important viruses in public health because of its incidence rate reported worldwide. In this study, a combination of SYBR Green-based real-time PCR primers for molecular diagnosis including monitoring of HuCoxV-B5 was selected and the optimal reaction conditions were established. Compared with the previously reported TaqMan probe-based real-time PCR method, assessments including a sample applicability test were performed. Results showed that the real-time PCR method developed in this study was suitable for a molecular diagnostic technique for detecting HuCoxV-B5. This study is expected to contribute to efforts in responding to safety accidents in public health because the proposed method facilitates rapid diagnosis of clinical patients. It can also be used as a specific monitoring tool of HuCoxV-B5 in non-clinical areas such as aquatic environments among others.