• Advances in nano research
• /
• v.1 no.2
• /
• pp.111-124
• /
• 2013

Surface-enhanced Raman scattering (SERS) effect deals with the enhancement of the Raman scattering intensity by molecules in the presence of a nanostructured metallic surface. The first observation of surface-enhanced Raman spectra was in 1974, when Fleischmann and his group at the University of Southampton, reported the first high-quality Raman spectra of monolayer-adsorbed pyridine on an electrochemically roughened Ag electrode surface. Over the last thirty years, it has developed into a versatile spectroscopic and analytical technique due to the rapid and explosive progress of nanoscience and nanotechnology. This review article describes the recent development in field of surface-enhanced Raman scattering research, especially fabrication of various SERS active substrates, mechanism of SERS effect and its various applications in both surface sciences and analytical sciences.

• Bulletin of the Korean Chemical Society
• /
• v.33 no.5
• /
• pp.1748-1752
• /
• 2012

We carried out the tip-enhanced Raman scattering (TERS) with a tip that is functionalized with a Aunanoparticle (AuNP, with a diameter of 250 nm). The AuNP tip is fabricated by a direct mechanical pickup of a AuNP from a flat substrate, and the TERS signal from the AuNP tip - organic monolayer - Au thin film (thickness of 10 nm) is recorded. We find that such a AuNP-tip interacting with a thin film routinely yields signal enhancement larger than ${\sim}10^4$, which is sufficient not only for local (with detection area of ~200 $nm^2$) Raman spectroscopy, but also the nanometric imaging of organic monolayers within a reasonable acquisition time (~20 minutes/image).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.87.2-87.2
• /
• 2016

As an era of nano science approaches, the understanding on the shape and optical properties of various materials in a nanoscale range is getting important more seriously than ever. Accordingly the development of high spatial-temporal-spectral resolution measurement tools for characterization of nanomaterials/structures is highly required. Generally, the various properties of sample can be measured independently, e.g. to observe the structural property of sample, we use the scanning electron microscopy or atomic force microscopy, and to observe optical property, we have to use another independent measurement tool such as photoluminescence spectroscopy or Raman spectroscopy. In the case of nano-materials, however, it is very difficult to find out the same position of sample at every different measurement processes, and the condition of sample can be changed by the influence of first measurement. The tip enhanced Raman scattering(TERS), which can simultaneously measure the two or more information of sample with nanoscale spatial resolution, is one of solutions of this problem. In this talk, I will present our recent nano Raman scattering data of graphene that measured by TERS and optimized tip fabrication method for efficient experiment.

• Journal of Surface Science and Engineering
• /
• v.57 no.2
• /
• pp.71-85
• /
• 2024

This article provides an overview of Raman spectroscopy and its practical applications for surface analysis of semiconductor processes including real-time monitoring. Raman spectroscopy is a technique that uses the inelastic scattering of light to provide information on molecular structure and vibrations. Since its inception in 1928, Raman spectroscopy has undergone continuous development, and with the advent of SERS(Surface Enhanced Raman Spectroscopy), TERS(Tip Enhanced Raman Spectroscopy), and confocal Raman spectroscopy, it has proven to be highly advantageous in nano-scale analysis due to its high resolution, high sensitivity, and non-destructive nature. In the field of semiconductor processing, Raman spectroscopy is particularly useful for substrate stress and interface characterization, quality analysis of thin films, elucidation of etching process mechanisms, and detection of residues.