• Title/Summary/Keyword: time annealing

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ANALYSIS OF THIN FILM POLYSILICON ON GLASS SYNTHESIZED BY MAGNETRON SPUTTERING

  • Min J. Jung;Yun M. Chung;Lee, Yong J.;Jeon G. Han
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2001.11a
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    • pp.68-68
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    • 2001
  • Thin films of polycrystalline silicon (poly-Si) is a promising material for use in large-area electronic devices. Especially, the poly-Si can be used in high resolution and integrated active-matrix liquid-crystal displays (AMLCDs) and active matrix organic light-emitting diodes (AMOLEDs) because of its high mobility compared to hydrogenated _amorphous silicon (a-Si:H). A number of techniques have been proposed during the past several years to achieve poly-Si on large-area glass substrate. However, the conventional method for fabrication of poly-Si could not apply for glass instead of wafer or quartz substrate. Because the conventional method, low pressure chemical vapor deposition (LPCVD) has a high deposition temperature ($600^{\circ}C-1000^{\circ}C$) and solid phase crystallization (SPC) has a high annealing temperature ($600^{\circ}C-700^{\circ}C$). And also these are required time-consuming processes, which are too long to prevent the thermal damage of corning glass such as bending and fracture. The deposition of silicon thin films on low-cost foreign substrates has recently become a major objective in the search for processes having energy consumption and reaching a better cost evaluation. Hence, combining inexpensive deposition techniques with the growth of crystalline silicon seems to be a straightforward way of ensuring reduced production costs of large-area electronic devices. We have deposited crystalline poly-Si thin films on soda -lime glass and SiOz glass substrate as deposited by PVD at low substrate temperature using high power, magnetron sputtering method. The epitaxial orientation, microstructual characteristics and surface properties of the films were analyzed by TEM, XRD, and AFM. For the electrical characterization of these films, its properties were obtained from the Hall effect measurement by the Van der Pauw measurement.

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Evaluation of Dosimetric Characteristics of Reproducibility, Linearity and Dose Dependence of Optically Stimulated Luminescence Dosimeters in Co-60 Gamma-rays (Co-60 감마선을 이용한 광자극발광선량계의 재현성, 선형성, 선량의존성에 대한 특성평가)

  • Han, Su Chul;Choi, Sang Hyoun;Park, Seungwoo;Kim, Chul Hang;Jung, Haijo;Kim, Mi-Sook;Yoo, Hyung Jun;Kim, Chan Hyeong;Ji, Young Hoon;Yi, Chul Young;Kim, Kum Bae
    • Progress in Medical Physics
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    • v.25 no.1
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    • pp.31-36
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    • 2014
  • We aimed to evaluate the dosimetric characteristics of reproducibility, linearity and dose dependence of optical stimulated luminance dosimeter (OSLD) in the Co-60 Gamma-rays and to analyze with a precedent study in field of the diagnostic radiography and radiotherapy. The reproducibility was 0.76% of the coefficient of variation, the homogeneity was within 1.5% of the coefficient of variation and OSLD had supra-linear response more than 3 Gy. So the correlation between dose and count was fitted by quadratic function. The count depletion by repeated reading was 0.04% per reading regardless of the irradiated dose. And the half time of decay curve according to the irradiated dose was 0.68 min. with 1 Gy, 1.04 min. with 5 Gy, and 1.10 min. with 10 Gy, respectively. In case of annealing for 30 min, the removal rate was 88% with 1 Gy, 90% with 5 Gy, and 92% with 10 Gy, respectively and 99% in case of annealing time for 4 hour. It is feasible to use OSLDs for dose evaluation in Co-60 Gamma-rays when considering the uncertainty on the procedure according to the irradiated dose.

Development of Loop-mediated Isothermal Amplification (LAMP) for Detection of Vibrio alginolyticus (Loop-mediated isothermal amplification (LAMP)법을 이용한 Vibrio alginolyticus의 신속 진단법 개발)

  • Hong, Seung-hyun;Heo, Moon-Soo
    • Journal of Life Science
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    • v.25 no.8
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    • pp.903-909
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    • 2015
  • Loop-mediated isothermal amplification (LAMP), a PCR-based diagnostic method, is based on autocycling strand displacement DNA synthesis in the presence of exonuclease-negative Bst DNA polymerase under isothermal conditions. With the help of four specific primers that recognize six different sequences of a target DNA, LAMP has high specificity in pathogenic identification in a short time. Hence, in the present study, LAMP is used as a diagnostic tool in the identification of the most dreadful aquatic pathogenic species, Vibrio alginolyticus, and to develop species-specific LAMP primers and optimization of LAMP reaction conditions such as annealing temperature, elongation time, and other PCR chemical concentrations, including MgSO4, dNTPs, Betaine, and Bst polymerase. The optimized LAMP primers were also checked for specificity with other Vibrio species, which showed that the designed primers were very specific to V. alginolyticus After the first introduction of a species name like this one, the first part (“Vibrio” in this case) should be abbreviated to only the first letter.only. These are usually the most harmful pathogens of the Vibrio species that appear in shrimp and crabs. The results also revealed that the LAMP assay could be 10-fold more sensitive than conventional PCR in detecting V. alginolyticus. This could be the first report on using a rapid and highly sensitive technique, the LAMP assay, in the effective diagnosis of the pathogenic bacteria V. alginolyticus, which could help in the early detection of diseases, particularly in aquaculture.

An Introduction to Kinetic Monte Carlo Methods for Nano-scale Diffusion Process Modeling (나노 스케일 확산 공정 모사를 위한 동력학적 몬테칼로 소개)

  • Hwang, Chi-Ok;Seo, Ji-Hyun;Kwon, Oh-Seob;Kim, Ki-Dong;Won, Tae-Young
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.6
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    • pp.25-31
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    • 2004
  • In this paper, we introduce kinetic Monte Carlo (kMC) methods for simulating diffusion process in nano-scale device fabrication. At first, we review kMC theory and backgrounds and give a simple point defect diffusion process modeling in thermal annealing after ion (electron) implantation into Si crystalline substrate to help understand kinetic Monte Carlo methods. kMC is a kind of Monte Carlo but can simulate time evolution of diffusion process through Poisson probabilistic process. In kMC diffusion process, instead of. solving differential reaction-diffusion equations via conventional finite difference or element methods, it is based on a series of chemical reaction (between atoms and/or defects) or diffusion events according to event rates of all possible events. Every event has its own event rate and time evolution of semiconductor diffusion process is directly simulated. Those event rates can be derived either directly from molecular dynamics (MD) or first-principles (ab-initio) calculations, or from experimental data.

Stress Behavior of PSG/SiN Film for Passivation in Semiconductor Memory Device (반도체 소자의 표면보호용 PSG/SiN 절연막의 스트레스 거동)

  • Kim, Yeong-Uk;Sin, Hong-Jae;Ha, Jeong-Min;Choe, Su-Han;Lee, Jong-Gil
    • Korean Journal of Materials Research
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    • v.1 no.1
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    • pp.46-53
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    • 1991
  • The stress of PSG (Phosphosilicate glass), USG (Undoped-silicate grass) and SiN films, which are mainly used as passivation layers in semiconductor memory devices, deposited by CVD methods has been studied as a function of film thickness and holding time in air. The stress of the PSG film or the USG film is increased in tensile state with increasing film thickness. On the other hand the stress level of the SiN film in compressive stress does not change as film thickness changes. The stress of PSG film shows the drastic change from the tensile stress to the compressive stress after the film is left 2 days in air. FTIR spectra indicated that the stress variation was due to the penetration of water molecule. It looks possible to recover the stress of about $2.5{\times}{10^9}dyne/cm^2$ by annealing treatment at $300^{\circ}C$ for 20min. The total stress of multi-layered films having the PSG film is determined mainly by the stress variation of PSG layer with holding time. The total stress of multi-layered film appears to have a functional relationship with the stress in the thickness of each film. The resistance against stress-migration of sputtered Al line increases with increasing the tensile stress for the PSG film or the USG film.

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New Magnetic Phases of Fe-N and Mn-Al Alloys Produced by Mechanochemical Milling (기계적 밀링 및 화학적 추출법에 의해 제조한 Fe-N 및 Mn-Al계의 새로운 자성재료)

  • Kyu-Jin Kim;Tae-Hwan Noh;Kenji Suzuki
    • Journal of the Korean Magnetics Society
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    • v.4 no.4
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    • pp.347-354
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    • 1994
  • The structural change and magnetic properties of mechanically milled Fe-N and Mn-Al alloy powders have been investigated by XRD, TEM, VSM, $M\"{o}ssbauer$ spectroscopy and inelastic neutron scattering measurements. During milling of ${\gamma}'-Fe_{4}N$ powders, and fcc ${\gamma}'-Fe_{4}N$ phase is transformed to a bct ${\alpha}'-Fe(N)$ phase by stress-induced martensitic transformation, being accompanied by an initial increase in saturation magnetization. During annealing the bct ${\alpha}'-Fe(N)$ nanocrystalline phase which is obtained by mechanical grinding for a long time, an ${\alpha}'-Fe_{16}N_{2}$ phase partially appears as an intermediate phase at 673~773 K, causing an increase in saturation magnetization. During milling of Mn-45, 70 and 85 at.% Al mixed powders, Al atoms are partially solubilized into an ${\alpha}-Mn$ phase. The Al supersaturated ${\alpha}-Mn-type$ phases change from paramagnetic to ferromagnetic : the saturation magnetization is 11 emu/g for the as-milled Mn-70 at.% Al powders. Moreover, by removing almost all Al atoms from the as-milled Mn-85 at.% Al powders using chemical leaching, the saturation magnetization increases up to 36 emu/g. The above bct ${\alpha}'-Fe(N)$ and ferromagnetic ${\alpha}-Mn$ type alloys are the magnetic materials found for the first time, by using the present mechanochemical process.

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Synthesis and Magnetic Properties of Nanosized Ce-substituted Yttrium Iron Garnet Powder Prepared by Sol-gel Method (졸-겔법에 의한 Cerium 치환 Nanosize YIG 분말의 합성 및 자기적 특성)

  • 장학진;김광석;윤석영;김태옥
    • Journal of the Korean Ceramic Society
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    • v.38 no.11
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    • pp.1008-1014
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    • 2001
  • Nanosize YIG powders added by Cerium which is exellent element in magneto-optical effect were synthesized by Sol-Gel method using Ethylene Glycol solvent. In 120 to 150 minute reaction time, stable sol solution which showed no change in viscosity, pH, and aging time was obtained. Monolithic YIG was synthesized at 80$0^{\circ}C$ with DTA and XRD measurement and its lattice parameter had a tendency to increase from 12.3921 $\AA$. Increasing annealing temperature from 80$0^{\circ}C$ to 105$0^{\circ}C$, average particle size was in the range of 40 nm to 330 nm. Saturation magnetization (M$_{s}$) value was increased from 18.37 to 21.25 emu/g due to enhancement of YIG crystallity and decreasing of orthoferrite phase. On the other hand, coercivity (H$_{c}$) value increased up to 90$0^{\circ}C$ and then decreased above 90$0^{\circ}C$. With increasing Ce addition, coercivity was almost not changed but saturation magnetization value was maximum at Ce 0.1 mol% and then decreased because of increasing a orthoferrite amount. Also, curie temperature (T$_{c}$) of YIG were not changed with Ce addition.ion.

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Removal of Fe Impurities on Silicon Surfaces using Remote Hydrogen Plasma (리모트 수소 플라즈마를 이용한 Si 표면 위의 Fe 불순물 제거)

  • Lee, C.;Park, W.;Jeon, B.Y.;Jeon, H.T.;Ahn, T.H.;Back, J.T.;Shin, K.S.;Lee, D.H.
    • Korean Journal of Materials Research
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    • v.8 no.8
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    • pp.751-756
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    • 1998
  • Effects of remote hydrogen plasma cleaning process parameters on the removal of Fe impurities on Si surfaces and the Fe removal mechanism were investigated. Fe removal efficiency is enhanced with decreasing the plasma exposure time and increasing the rf-power. The optimum plasma exposure time and rf-power are 1 min and 100W. respectively, in the range below 10 min and 100W. Fe removal efficiency is better under lower pressures than higher pressures, and the optimum $\textrm{H}_2$ flow rate was found to be 20 and 60sccm, respectively, under a low and a high pressure. The post-RHP(remote hydrogen plasma) annealing enhanced metallic contaminants removal efficiency, and the highest efficiency was achieved at $600^{\circ}C$. According to the AFM analysis results Si surface roughness was improved by 30-50%, which seems to be due to the removal of particles by the plasma cleaning. Also. Fe impurities removal mechanisms by remote hydrogen plasma are discussed.

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Development of a multiplex qRT-PCR assay for detection of African swine fever virus, classical swine fever virus and porcine reproductive and respiratory syndrome virus

  • Chen, Yating;Shi, Kaichuang;Liu, Huixin;Yin, Yanwen;Zhao, Jing;Long, Feng;Lu, Wenjun;Si, Hongbin
    • Journal of Veterinary Science
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    • v.22 no.6
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    • pp.87.1-87.12
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    • 2021
  • Background: African swine fever virus (ASFV), classical swine fever virus (CSFV), and porcine reproductive and respiratory syndrome virus (PRRSV) are still prevalent in many regions of China. Co-infections make it difficult to distinguish their clinical symptoms and pathological changes. Therefore, a rapid and specific method is needed for the differential detection of these pathogens. Objectives: The aim of this study was to develop a multiplex real-time quantitative reverse transcription polymerase chain reaction (multiplex qRT-PCR) for the simultaneous differential detection of ASFV, CSFV, and PRRSV. Methods: Three pairs of primers and TaqMan probes targeting the ASFV p72 gene, CSFV 5' untranslated region, and PRRSV ORF7 gene were designed. After optimizing the reaction conditions, including the annealing temperature, primer concentration, and probe concentration, multiplex qRT-PCR for simultaneous and differential detection of ASFV, CSFV, and PRRSV was developed. Subsequently, 1,143 clinical samples were detected to verify the practicality of the assay. Results: The multiplex qRT-PCR assay could specifically and simultaneously detect the ASFV, CSFV, and PRRSV with a detection limit of 1.78 × 100 copies for the ASFV, CSFV, and PRRSV, but could not amplify the other major porcine viruses, such as pseudorabies virus, porcine circovirus type 1 (PCV1), PCV2, PCV3, foot-and-mouth disease virus, porcine parvovirus, atypical porcine pestivirus, and Senecavirus A. The assay had good repeatability with coefficients of variation of intra- and inter-assay of less than 1.2%. Finally, the assay was used to detect 1,143 clinical samples to evaluate its practicality in the field. The positive rates of ASFV, CSFV, and PRRSV were 25.63%, 9.36%, and 17.50%, respectively. The co-infection rates of ASFV+CSFV, ASFV+PRRSV, CSFV+PRRSV, and ASFV+CSFV+PRRSV were 2.45%, 2.36%, 1.57%, and 0.17%, respectively. Conclusions: The multiplex qRT-PCR developed in this study could provide a rapid, sensitive, specific diagnostic tool for the simultaneous and differential detection of ASFV, CSFV, and PRRSV.

Use of Real-Time PCR and Internal Standard Addition Method for Identifying Mixed Ratio of Chicken Meat in Sausages (Real-Time PCR과 Internal Standard Addition법을 이용한 돼지고기 소시지에 혼합된 닭고기의 정량)

  • Lee, Namrye;Joo, Jae-Young;Yeo, Yong-Heon
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.46 no.9
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    • pp.1097-1105
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    • 2017
  • This study examined how much chicken meat was in sausage made with pork. Both real-time polymerase chain reaction (PCR) and internal standard addition were used. Fifty ng of chicken DNA was added to the sausages as an internal standard. The addition of standard DNA increased the amplification efficiency of PCR and confirmed the possibility of quantitative analysis. A QIAamp DNA Micro Kit was used to improve the DNA recovery and amplification efficiency. The density of template DNA and primer were suitable for $3.0{\sim}5.0{\mu}L$ and $0.5{\mu}L$, respectively. Each DNA of pig and chicken was diluted in 10-fold from steps 50 ng to 0.05 ng. The detection limit of both pig and chicken meat was more than 0.05 ng and the correlation coefficient of the standard curve was at least 0.98. The result of the quantitative analysis after heat treatment of 3 samples of pigs and chickens mixed at 70:30 showed a 5.7% difference (64.3:35.7) between the expected value and measured value. The quantitative value was changed by affecting the DNA according to the heat treatment ($70^{\circ}C$, 10 min). An analysis of the pork and chicken content in sausages showed that it was difficult to detect chicken meat and the quantitative value of DNA according to the Ct value was very low. On the other hand, when adding standard material (50 ng of chicken DNA) to the sausages, the Ct value decreased gradually with increasing chicken mixing ratio. Thus, the mixing ratio of chicken in sausages could be estimated.