• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.07a
• /
• pp.874-877
• /
• 2001

SOI(Silicon-On-Insulator) technology is proposed as an alternative to bulk silicon for MEMS(Micro Electro Mechanical System) manufacturing. In this paper, we fabricated the SOI wafer with uniform active layer thickness by silicon direct bonding and mechanical polishing processes. Specially-designed electrostatic bonding system is introduced which is available for vacuum packaging and silicon-glass wafer bonding for SOG(Silicon On Glass) wafer. We demonstrated thermopile sensor and RF resonator using the SOI wafer, which has the merits of simple process and uniform membrane fabrication.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2005.08a
• /
• pp.137-137
• /
• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.699-700
• /
• 2010

• Journal of Sensor Science and Technology
• /
• v.6 no.1
• /
• pp.6-15
• /
• 1997

This paper presents the multi-objective optimal design of thermopile sensor having beam or membrane structure. The thermopile sensor is composed of $Si_{3}N_{4}/SiO_{2}$ dielectric membrane, Al-polysilicon thermocouples and $RuO_{2}$ thin film for black body. The sensing method is based on the Seebeck effect which is originated from the temperature difference of the two positions, black body and silicon rim. The objective functions of the presented design are sensitivity, detectivity and thermal time constant. The modelling of the sensor is proposed including the package. The multi-objective optimization technique is applied to the design of the sensor not only inspecting the modelling equation but also simulating mathematical programming method. Especially, fuzzy optimization technique is adapted to get the optimal solution which enables the designer to reach the more practical solution. The design constraint of the voltage output originated from the change of the environmental temperature is included for practical use.

• Journal of Sensor Science and Technology
• /
• v.15 no.3
• /
• pp.179-185
• /
• 2006

We have developed a noncontact temperature sensor using a silver halides infrared optical fiber. An infrared radiation from a heat source is transferred by a silver halides infrared optical fiber and measured by infrared sensors such as a thermopile and a thermal optical power-meter. The relationships between the temperature of a heat source and the output voltage of the thermopile and the optical power of a thermal optical power-meter are determined. The measurable temperature range using a thermopile and a thermal optical power-meter are from 100 to $750^{\circ}C$ and from 30 to $750^{\circ}C$ respectively. It is expected that a noncontact temperature sensor using infrared optical fiber can be developed for medical and industrial usages based on the results of this study.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.2
• /
• pp.5-12
• /
• 2000

Uncooled metallic thin-film thermopile infrared detectors have been fabricated, and the figures of merit for the detectors were examined. The hot junctions of a thermopile were prepared on a $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$-membrane which acts as a thermal isolation layer, the cold junctions on the membrane supported with the silicon rim which functions as a heat sink, and Au-black was used as an infrared absorber. Infrared absorbance of Au-black, which strongly depends on the chamber pressure during Au-evaporation and its mass per area, was found to be about 90 ％ in the wavelength range from 3${\mu}{\textrm}{m}$ to 14${\mu}{\textrm}{m}$. Voltage responsivity, noise equivalent power, and specific detectivity of Bi-Sb thermopile infrared detector at 5 Hz-chopping frequency were about 10.5V/W, 2.3 nW/Hz$^{1/2}$, 및 $1.9\times10^{7}$ cm.Hz$^{1/2}$/w at room temperature in air, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.365-366
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.10a
• /
• pp.591-592
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.171-172
• /
• 2011

• Journal of Sensor Science and Technology
• /
• v.28 no.5
• /
• pp.305-310
• /
• 2019

The purpose of this study is to classify the concentration of HbA1c (glycosylated hemoglobin), which is an indicator in the management of accurate blood glucose level in diabetic patients, using a non-invasive optical property measurement method. To measure the optical properties of HbA1c, the optical source uses LEDs and laser diodes of 400 nm in the visible region and 1450 nm in the nearinfrared region using thermopile to detect the Raman scattering intensity. An HbA1c control solution was used. As a result, the optical properties of 5% (normal) and 9% (abnormal) HbA1c control solutions showed specificity in which the output values were reversed at 850 nm and 950 nm, respectively. This property was applied to distinguish between normal and abnormal values in diabetes. In addition, considering tissue penetration depths for non-invasive measurements, two wavelengths were determined to be effective in distinguishing the concentrations of HbA1c control solutions at 5%, 7%, and 9%.