• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• Advances in materials Research
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• v.12 no.4
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• pp.309-330
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• 2023

The humid thermal vibration characteristics of a nonhomogeneous thermopiezoelectric nonlocal plate of polygonal shape are addressed in the purview of generalized nonlocal thermoelasticity. The plate is initially stressed, and the three-dimensional linear elasticity equations are taken to form motion equations. The problem is solved using the Fourier expansion collocation method along the irregular boundary conditions. The numerical results of physical variables have been discussed for the triangle, square, pentagon, and hexagon shapes of the plates and are given as dispersion curves. The amplitude of non-dimensional frequencies is tabulated for the longitudinal and flexural symmetric modes of the thermopiezoelectric plate via moisture and thermal constants. Also, a comparison of numerical results is made with existing literature, and good agreement is reached.

• Smart Structures and Systems
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• v.21 no.2
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• pp.163-170
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• 2018

The dynamic response of a finite length thermo-piezoelectric rod with variable material properties is investigated in the context of the fractional order theory of thermoelasticity. The rod is subjected to a moving heat source and fixed at both ends. The governing equations are formulated and then solved by means of Laplace transform together with its numerical inversion. The results of the non-dimensional temperature, displacement and stress in the rod are obtained and illustrated graphically. Meanwhile, the effects of the fractional order parameter, the velocity of heat source and the variable material properties on the variations of the considered variables are presented, and the results show that they significantly influence the variations of the considered variables.