• 센서학회지
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• 제5권6호
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• pp.51-59
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• 1996

실리콘기판과의 스트레스균형이 이루어진 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ 다이아프레임위에 백금 박막히터 및 Bi-Sb 열전대배열을 형성하여 히터에서 실리콘기판으로 전달되는 열량의 차단효과가 현저히 개선된 유체센서를 제작하였다. 백금 박막히터는 유전체 다이아프레임의 열차단 효과때문에 비선형 전류-전압 특성을 나타내었고, 이 히터의 저항온도계수는 약 $0.00378\;/^{\circ}C$였으며, 또한 Bi-Sb 열전대의 Seebeck계수는 약 $97\;{\mu}V/K$였다. 기체의 열전도도가 증가할수록 유체센서가 나타내는 열기전력은 감소하였으며, 히터온도가 증가하거나 히터와 열전대사이의 거리가 감소할수록 센서의 감도는 증가하였다. 히터전압을 약 2.5V로 하였을 때 유체센서의 $N_{2}$유량에 대한 감도는 약 $1.27\;mV{\cdot}(sccm)^{-1/2}$였고, 열응답시간은 약 0.13 초였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.171-172
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• 2011

• 한국정밀공학회지
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• 제31권7호
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• pp.569-576
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• 2014

Sensor node means a device to include sensor, amplifier, and data acquisition (DAQ) equipment. The sensor converts physical signals to electric signals and weak signals from the sensor can be amplified through the amplifier. DAQ equipment converts analog signal to digital signal and collects converted digital signal. Since the sensor node is sensitive to the environment so that selection of mounting position and fixture design of sensor are applied differently depending on the characteristics of a target. This study is about designing and manufacturing sensor node to be used in a machine tool. The environment of machine tool is very severe due to noise, temperature fluctuation, and dust, etc. Hence, the sensor and amplifier must be designed and manufactured by considering the environmental issues. The designed and manufactured sensor node was tested for the reliability and effectiveness of the developed sensor nodes in the study.

• 센서학회지
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• 제23권4호
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• pp.234-237
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• 2014

In this paper, a copper foil-thick grapheme (thin graphite sheet)-copper foil structure is reported to achieve mechanically strong and high thermal conductive layer suitable for heat spreading components. Since graphene provides much higher thermal conductivity than copper, thick graphene embedded copper layer can achieve higher effective thermal conductivity which is proportional to graphene/copper thickness ratio. Since copper is nonreactive with carbon material which is graphene, chromium is used as adhesion layer to achieve copper-thick graphene-copper bonding for graphene embedded copper layer. Both sides of thick graphene were coated with chromium as an adhesion layer followed by copper by sputtering. The copper foil was bonded to sputtered copper layer on thick graphene. Angstrom's method was used to measure the thermal conductivity of fabricated copper-thick graphene-copper structure. The thermal conductivity of the copper-thick graphene-copper structures is measured as $686W/m{\cdot}K$ which is 1.6 times higher than thermal conductivity of pure copper.

• 대한기계학회논문집B
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• 제35권2호
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• pp.113-120
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• 2011

본 논문은 나노유체의 열확산율을 측정하는 센서와 주변회로 그리고 데이터의 처리방법을 제시한 것이다. 기존 비정상열선법을 이용하면 이론상 유체의 열전도율과 열확산율을 동시에 측정할 수 있으나 열전도율과 비교하여 열확산율은 많은 오차가 발생한다. 본 연구에서 제시한 방법은 측정변수가 단순하고 복잡한 센서의 교정과정을 생략할 수 있는 실용적 측면의 장점이 있다. 먼저 열확산율이 잘 알려진 유체들에 대한 검증실험을 실시하였고 나노유체의 열확산율을 측정하여 기본유체와 비교하는 과정을 예시적으로 설명하였다. 본 연구는 기존 열전도율측정에 한정되어 왔던 나노유체 연구의 범위를 열확산율 또는 비열의 개념으로 확장하였다는 관점에서 중요성을 갖는다.

• 환경영향평가
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• 제24권4호
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• pp.367-374
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• 2015

해수 표층 수온은 원자력발전소의 온배수 영향을 조사하기 위해서 위성원격탐사에 의해 관측되는 가장 중요한 정보들 중 하나이다. 하지만 Landsat 7 위성과 Landsat 8 위성의 열적외선 센서로부터 추출한 표층수온과 실측치를 비교한 연구는 부족하다. Landsat 8 위성은 표층수온을 추출하기 위해 열적외선 센서에 두 개의 분리된 밴드를 가지고 있지만, Landsat 7은 한 개의 밴드를 사용하고 있다. 그럼에도 불구하고 본 연구에서는 Landsat 7 ETM+센서가 Landsat 8 TIRS 보다 표층수온의 보정에 유용하다는 것을 제시하였다. 본 연구에서는 Landsat 114-36 지역의 15개 위성자료를 가지고 ENVI와 IDL을 이용한 표층수온 알고리즘을 처리하였다. 국립해양조사원으로부터 수집한 표층수온 실측자료와 위성에서 추출한 표층수온을 비교하였고, 위성관측 시계열 자료와 측정지점의 실측자료를 통해 정확도를 비교하였다.

• 대한기계학회논문집B
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• 제30권6호
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• pp.531-537
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• 2006

A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권5호
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• pp.278-285
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• 2006

A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

• 한국초전도ㆍ저온공학회논문지
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• 제14권4호
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• pp.46-49
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• 2012

The selection of the temperature sensor in the cryogenic system depends on the temperature range, shape and accuracy. The accuracy of the temperature sensor is essential to improve the reliability of experiment. We have developed the variable temperature cryostat using a two-stage cryocooler. In order to reduce heat load, thermal shield is installed at the first stage with MLI (Multiple layer insulation). We have also developed the sensor holder calibrating more than twenty sensors at the same time for saving time and money. The system can calibrate sensor at variable temperature by controlling electric heater. In this paper, we present design and fabrication of variable temperature cryostat and representative result of Cernox sensor calibration.

• 한국정밀공학회지
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• 제32권6호
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• pp.571-576
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• 2015

Temperature characteristics of supply oil in an ultra-precision hydrostatic table are largely influenced by parameter setting in an oil cooler such as the location of reference sensor and cooling temperature. In this paper, influences of the parameter setting on the temperature variation in the hydrostatic table are experimentally analyzed to suggest the guidelines for practical application. In case of using temperature of inlet oil as a reference sensor in the oil cooler, temperature rise of the supply oil is smaller and thermal settling time is faster than that of using temperature of outlet oil as a reference sensor. The experimental results also show that temperatures of table, rail and return oil can be made almost same, and thermal settling time can be decreased by setting cooling temperature in the oil cooler to be lower than atmospheric temperature.