• Composites Research
• /
• 제31권5호
• /
• pp.260-266
• /
• 2018

본 논문에서는 C/C-SiC 복합재료의 하프늄 탄화물 코팅재에 대한 열적, 기계적 특성을 평가하였으며 특히 코팅에 의한 내산화성과 내마모성의 향상여부를 평가하였다. 하프늄 탄화물(HfC)을 용사시켜 코팅한 샘플들을 가공한 후, 공기 중에서 열적 특성평가 및 마모, 압입시험 평가에 대한 연구를 수행하였다. 공기 중에서 $1200^{\circ}C$의 온도까지 승온시킨 후 1시간 유지하는 싸이클을 10싸이클 진행하여 각 싸이클마다의 무게변화를 통해 탄소의 산화저항성을 평가하였고, 초경 구(tungsten carbide)를 사용하여 마모시험과 압입시험을 수행하여 그 결과를 비교하였다. 열피로 시험 수행 결과 하프늄 탄화물 코팅재가 상대적으로 무게감소가 적어 상대적으로 내산화성이 높은 것으로 평가되었다. 코팅된 하프늄 탄화물에 의해 탄성계수가 상대적으로 증가하였으며, 또한 C/C-SiC 복합재료는 하프늄 탄화물의 코팅에 의하여 내마모성이 향상되어 동일조건에서 마모량이 상대적으로 적었고 낮고 안정된 마찰계수가 유지되었다.

• 한국표면공학회지
• /
• 제34권5호
• /
• pp.486-493
• /
• 2001

Partially stabilized zirconia (PSZ) is an attractive material for thermal barrier coating. Zirconia exists in three crystallographic phases: cubic, tetragonal and monoclinic. Especially, the phase transformation of tetragonal phase to monoclinic phase accompanies significant volume expansion, so this transition generally results in cracking and contributes to the failure of the TBC system. Both the plasma sprayed ZrO$_2$-8Y$_2$O$_3$ (YSZ) coat and the ZrO$_2$,-25CeO$_2$,-2.5Y$_2$O$_3$ (CYSZ) coat are isothermally heat -treated at 130$0^{\circ}C$ and 150$0^{\circ}C$ for 100hr and cooled at different cooling rates. The monoclinic phase is not discovered in all the CYSZ annealed at 130$0^{\circ}C$ and 150$0^{\circ}C$. In the 150$0^{\circ}C$ heat-treated specimens, the YSZ contains some monoclinic phase while none exists in the 130$0^{\circ}C$ heat-treated YSZ coat. For the YSZ, the different phase transformation behaviors at the two temperatures are due to the stabilizer concentration of high temperature phases and grain growth. For the YSZ with 150$0^{\circ}C$-100hr annealing, the amount of monoclinic phase increased with the slower cooling rate. The extra oxygen vacancy, thermal stress, and c to t'phase transformation might suppress the t to m martensitic phase transformation.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.100-101
• /
• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국결정성장학회지
• /
• 제29권6호
• /
• pp.283-293
• /
• 2019

우주공간, 고에너지 플라즈마, 방사선 조사 환경과 같은 극한환경에서의 응용 분야가 증가함에 따라 더 높은 용융점 및 기계적 강도, 열전도도의 향상을 필요로 하는 재료에 대한 수요가 계속적으로 증가하고 있다. 이에 따라 대표적인 내열 소재인 탄소-탄소 복합체의 내산화/내삭마 특성을 개선하기 위하여 초고온 세라믹스를 이용하는 방법에 대하여 리뷰하였다. 초고온 세라믹스를 합성하는 가장 간단한 방법인 CVD 코팅법과 다른 코팅법인 pack cementation, 용사법의 장단점을 서로 비교하였다. 복잡한 형상의 C/C 복합체에 CVD 코팅법을 적용하기 위한 방법으로 열역학 계산 및 CFD 시뮬레이션의 활용 가능성을 제안하였다. 또한 이런 방법을 통하여 제작한 TaC/SiC 이중 층 코팅과 TaC/SiC 다중 층 코팅의 내산화 특성을 비교한 결과, 다중 층 코팅을 적용하였을 때 더 뛰어난 내산화성을 보이는 것을 확인하였다.

• 한국재료학회지
• /
• 제25권5호
• /
• pp.226-232
• /
• 2015

본 연구에서는 손상된 알루미늄 금형의 복원을 위해 고온플라즈마 용사법을 이용하여 금형의 표면에 $Al/Al_2O_3$ 혼합분말을 용사한 후 코팅층과 모재의 증착강도에 대한 평가를 수행하였다. 증착강도의 평가는 분사노즐의 이동속도, 순수한 알루미늄 bond coat 층의 유무에 따라 평가되었으며, bond coat 층을 생성시키지 않았을 때, 코팅층의 두께는 열팽창에 의한 잔류인장응력의 감소를 위해 두껍지 않아야 하지만 일정두께 이상이 되어야 최대의 증착강도를 얻을 수 있음이 나타났다. 또한 순수한 알루미늄 bond coat 층은 내부 결함이 없는 응고된 금속이기 때문에 두께에 따른 증착강도의 영향을 그대로 받아 두께가 두꺼울수록 bond coat 층을 생성시키지 않은 시험편보다 증착강도가 매우 낮게 측정되었다. 반면, 가장 얇게 bond coating 된 시험편 Bc3(3회의 bond coating층과 분사건의 이동속도가 20 cm/sec인 시험편) 는 bond coating을 하지 않은 시험편 중 가장 높은 증착강도를 가지는 시험편 Wbc20(bond coating층이 없고 분사건의 이동속도가 20 cm/sec인 시험편)보다 약 2배 이상증착강도가 향상되었다. 따라서 금형의 복원시에 중간층의 형성이 반드시 필요하며, 이는 코팅층의 잔류 인장응력을 보완시키며 고인성의 순수한 알루미늄과 같은 코팅층과 유사한 층을 코팅하는 것이 필요한 것으로 사료된다.

• 한국정밀공학회지
• /
• 제29권4호
• /
• pp.409-416
• /
• 2012

Recently, surface modification technology is of importance to improve the wear resistance and the corrosive resistance for high accurate mechanical parts such as LM guide, Ball Screw and Roller Bearing etc., Those has generally featured on rolling contact mechanism to improve not only the wear and the friction, but also the accuracy and the corrosion performances. For surface modifications of high accurate mechanical parts, normally thermal spray, PVD, CVD and E.P. processes have been used with many materials such as DLC, raydent, W, Ni, Ti etc. Diamondlike carbon (DLC) films possess a combination of attractive properties and have been largely employed to modify the tribological behaviors such as friction, wear, corrosion, fretting fatigue, biocompatibility, etc. However, for rolling contact mechanism mechanical parts DLC films are needed to study for commercial benefit. Rolling contact mechanism has features on effects of cyclic motions and stresses, and also not simply sliding motions. The papers focused on the performance test of wear and corrosive resistance according to Me-DLC film thickness. And also, its thickness effect of wear analysis was carried out through the simulation of the maximum shear stress under the rolling contact surface. As the results, Me-DLC films have more potential to improve the wear resistance for high precision mechanical parts than raydent films.

• 한국재료학회지
• /
• 제30권7호
• /
• pp.350-358
• /
• 2020

A variety of composite powders having different aluminum and carbon contents are prepared using various organic solvents having different amounts of carbon atoms in unit volume as ball milling agents for titanium and aluminum ball milling. The effects of substrate temperature and post-heat treatment on the texture and hardness of the coating are investigated by spraying with this reduced pressure plasma spray. The aluminum part of the composite powder evaporates during spraying, so that the film aluminum content is 30.9 mass%~37.4 mass% and the carbon content is 0.64 mass%~1.69 mass%. The main constituent phase of the coating formed on the water-cooled substrate is a non-planar α₂ phase, obtained by supersaturated carbon regardless of the alloy composition. When these films are heat-treated at 1123 K, the main constituent phase becomes γ phase, and fine Ti₂AlC precipitates to increase the film hardness. However, when heat treatment is performed at a higher temperature, the hardness is lowered. The main constitutional phase of the coating formed on the preheated substrate is an equilibrium gamma phase, and fine Ti₂AlC precipitates. The hardness of this coating is much higher than the hardness of the coating in the sprayed state formed on the water-cooled substrate. When hot pressing is applied to the coating, the porosity decreases but hardness also decreases because Ti₂AlC grows. The amount of Ti₂AlC in the hot-pressed film is 4.9 vol% to 15.3 vol%, depending on the carbon content of the film.

• 한국융합학회논문지
• /
• 제12권12호
• /
• pp.145-151
• /
• 2021

Ti Gr4에 TPS 법을 이용하여 HA 코팅을 수행하여 코팅층에 대한 물리적특성 및 생체적합성을 판단하여 의료용 부품으로서의 활용성에 대한 평가를 하였다. 직경 25mm Ti Gr4 합금 시험편을 기계가공 후 #120, #400, #1,000 샌드페이퍼 및 바렐 연마로 표면을 연마를 하여 ASTM F1185-88로 HA 코팅은 한 후 HA 코팅층의 두께, 표면조도, 강도 및 접착력 측정 시험과 세포독성 시험을 하였다. Ti Gr4에 대한 HA 코팅 결정도는 75.51%, Ca/P 비는 1.67의 값을 얻을 수 있었다. HA 코팅층의 두께는 Ti 소재의 표면거칠기가 거칠수록 증가하고, 코팅의 강도 및 접착력은 시험장치의 지그 형상, 에폭시 성분, 크로스헤드 속도 등에 따라 변화가 있을 것으로 예측된다. 세포독성 시험은 Grade 3의 반응성으로 적합한 것으로 나타났다. 본 실험 결과 TPS에 의한 Ti Gr4 소재의 HA 코팅 두께 향상과 골융합을 촉진이 가능할 것으로 확인되어 인체삽입용으로 상용화가 가능할 것으로 판단된다.

• 한국세라믹학회지
• /
• 제52권6호
• /
• pp.410-416
• /
• 2015

Recently, a new $Y_2O_3$ coating deposited using the EB-PVD method has been developed for erosion resistant applications in fluorocarbon plasma environments. In this study, surface crack formation in the $Y_2O_3$ coating has been analyzed in terms of residual stress and elastic modulus. The coating, deposited on silicon substrate at temperatures higher than $600^{\circ}C$, showed itself to be sound, without surface cracks. When the residual stress of the coating was measured using the Stoney formula, it was found to be considerably lower than the value calculated using the elastic modulus and thermal expansion coefficient of bulk $Y_2O_3$. In addition, amorphous $SiO_2$ and crystalline $Al_2O_3$ coatings were similarly prepared and their residual stresses were compared to the calculated values. From nano-indentation measurement, the elastic modulus of the $Y_2O_3$ coating in the direction parallel to the coating surface was found to be lower than that in the normal direction. The lower modulus in the parallel direction was confirmed independently using the load-deflection curves of a micro-cantilever made of $Y_2O_3$ coating and from the average residual stress-temperature curve of the coated sample. The elastic modulus in these experiments was around 33 ~ 35 GPa, which is much lower than that of a sintered bulk sample. Thus, this low elastic modulus, which may come from the columnar feather-like structure of the coating, contributed to decreasing the average residual tensile stress. Finally, in terms of toughness and thermal cycling stability, the implications of the lowered elastic modulus are discussed.

• Composites Research
• /
• 제33권5호
• /
• pp.235-240
• /
• 2020

본 연구에서는 B₄C tile 삽입 B₄C_p/Al7075 하이브리드 복합재의 내충격성을 향상시키기 위하여 B₄C/Al7075 계면의 제어법을 개발하고 제어된 계면의 특성에 관하여 분석하였다. 이를 위해 B₄C 타일 표면에 B₂O₃, Ni, 그리고 Si을 각각 열산화, 무전해도금, 그리고 플라즈마 용사법을 이용하여 코팅하였다. 이후 코팅된 B₄C 타일을 액상 가압법을 이용하여 B₄C/Al7075 복합재 내부에 삽입하여 B₄C tile 삽입 B₄C_p/Al7075 하이브리드 복합재를 제작하였다. 코팅의 효과를 체계적으로 분석하기 위해 계면에너지, 접합 강도, 그리고 내충격성을 측정하였다. 모든 코팅이 계면에너지, 계면강도, 내충격성을 증가시켰으며 특히 B₂O₃ 코팅 시 내충격성이 86.8% 증가하였다. 본 연구는 차세대 경량 장갑, 방탄소재로 주목받고 있는 B₄C/Al 계열 복합재의 성능을 향상시키는 핵심적인 표면처리법을 개발, 분석한 것에 의의가 있다.