• 제목/요약/키워드: thermal diffusion

검색결과 936건 처리시간 0.027초

다결정 Si기판 위에서의 Co/Ti 이중층의 실리사이드화 (Silicidation of the Co/Ti Bilayer on the Doped Polycrystalline Si Substrate)

  • 권영재;이종무;배대록;강호규
    • 한국재료학회지
    • /
    • 제8권7호
    • /
    • pp.579-583
    • /
    • 1998
  • P가 고농도로 도핑된 다결정 Si 기판 위에 Co/Ti 이중층막을 스퍼터 증착하고 급속열처리함으로써 얻어지는 실리사이드 층구조, 실리사이드막의 응집, 그리고 도펀트의 재분포 등을 단결정 Si 기판 위에서의 그것들과 비교하여 조사하였다. 다결정 Si 기판위에 형성한 Co/Si 이중층을 열처리할 때 단결정 기판에서의 경우보다 $CoSi_2$로의 상천이는 약간 더 낮은 온도에서 시작되며, 막의 응집은 더 심하게 일어난다. 또한, 다결정 Si 기판내의 도펀트보다 웨이퍼 표면을 통하여 바깥으로 outdiffusion 함으로써 소실되는 양이 훨씬 더 많다. 이러한 차이는 다결정 Si 내에서의 결정립계 확산과 고농도의 도펀트에 기인한다. Co/Ti/doped-polycrystalline si의 실리사이드화 열처리후의 층구조는 polycrystalline CoSi2/polycrystalline Si 으로서 Co/Ti(100)Si을 열처리한 경우의 층구조인 Co-Ti-Si/epi-CoSi2/(100)Si 과는 달리 Co-Ti-Si층이 사라진다.

  • PDF

DIFFUSIVE SHOCK ACCELERATION WITH MAGNETIC FIELD AMPLIFICATION AND ALFVÉNIC DRIFT

  • Kang, Hyesung
    • 천문학회지
    • /
    • 제45권5호
    • /
    • pp.127-138
    • /
    • 2012
  • We explore how wave-particle interactions affect diffusive shock acceleration (DSA) at astrophysical shocks by performing time-dependent kinetic simulations, in which phenomenological models for magnetic field amplification (MFA), Alfv$\acute{e}$nic drift, thermal leakage injection, Bohm-like diffusion, and a free escape boundary are implemented. If the injection fraction of cosmic-ray (CR) particles is ${\xi}$ > $2{\times}10^{-4}$, for the shock parameters relevant for young supernova remnants, DSA is efficient enough to develop a significant shock precursor due to CR feedback, and magnetic field can be amplified up to a factor of 20 via CR streaming instability in the upstream region. If scattering centers drift with Alfv$\acute{e}$n speed in the amplified magnetic field, the CR energy spectrum can be steepened significantly and the acceleration efficiency is reduced. Nonlinear DSA with self-consistent MFA and Alfv$\acute{e}$nic drift predicts that the postshock CR pressure saturates roughly at ~10 % of the shock ram pressure for strong shocks with a sonic Mach number ranging $20{\leq}M_s{\leq}100$. Since the amplified magnetic field follows the flow modification in the precursor, the low energy end of the particle spectrum is softened much more than the high energy end. As a result, the concave curvature in the energy spectra does not disappear entirely even with the help of Alfv$\acute{e}$nic drift. For shocks with a moderate Alfv$\acute{e}$n Mach number ($M_A$ < 10), the accelerated CR spectrum can become as steep as $E^{-2.1}$ - $E^{-2.3}$, which is more consistent with the observed CR spectrum and gamma-ray photon spectrum of several young supernova remnants.

대구신서혁신도시 내 공공건축물의 신재생에너지 시스템 도입시 경제성 평가에 관한 연구 (A study on economic evaluation when renewable energy system is introduced in public buildings inside of Daegu Sin-seo innovation city)

  • 김보라;김주영;홍원화
    • 한국주거학회:학술대회논문집
    • /
    • 한국주거학회 2009년 춘계학술발표대회 논문집
    • /
    • pp.175-180
    • /
    • 2009
  • According to an increasing demand of political support and development on renewable energy as a solution for the energy problem in Korea, the government has established a goal to raise renewable energy supply from 2.27% to 5% until 2011. Especially in the case of public building in which energy use is in great demand, it would bring a great advantage to develop and utilize the Photovoltaic System as an electric energy and Geothermal Heat Pump System as a thermal energy. On the occasion of Photovoltaic System, Photovoltaic module can be used as an architectural material so that it can reduce construction cost and when we use solar energy, it is possible to make building's own power supply. As for Geothermal Heat Pump System, It can be used infinitely as long as the solar energy exist and operation cost is cheap and yearly efficiency is stable. However, we need to make a plan to reduce early investment expanses for these two renewable energy systems and to expand a diffusion rate as we develop a competitive domestic technology level. So in this study, we are going to perform evaluation of economical efficiency according to the introduction of Photovoltaic System and Geothermal Heat Pump System in public buildings which will be built up inside of Daegu Sin-seo innovation city. As a first step, we will investigate present installation condition of these two renewable energy systems and based upon that, will seek efficient introduction program of renewal energy systems that can be applied in public buildings.

  • PDF

Annealing temperature dependence on the positive bias stability of IGZO thin-film transistors

  • Shin, Hyun-Soo;Ahn, Byung-Du;Rim, You-Seung;Kim, Hyun-Jae
    • Journal of Information Display
    • /
    • 제12권4호
    • /
    • pp.209-212
    • /
    • 2011
  • The threshold voltage shift (${\Delta}V_{th}$) under positive-voltage bias stress (PBS) of InGaZnO (IGZO) thin-film transistors (TFTs) annealed at different temperatures in air was investigated. The dramatic degradation of the electrical performance was observed at the sample that was annealed at $700^{\circ}C$. The degradation of the saturation mobility (${\mu}_{sat}$) resulted from the diffusion of indium atoms into the interface of the IGZO/gate insulator after crystallization, and the degradation of the subthreshold slope (S-factor) was due to the increase in the interfacial and bulk trap density. In spite of the degradation of the electrical performance of the sample that was annealed at $700^{\circ}C$, it showed a smaller ${\Delta}V_{th}$ under PBS conditions for $10^4$ s than the samples that were annealed at $500^{\circ}C$, which is attributed to the nanocrystal-embedded structure. The sample that was annealed at $600^{\circ}C$ showed the best performance and the smallest ${\Delta}V_{th}$ among the fabricated samples with a ${\mu}_{sat}$ of $9.38cm^2/V$ s, an S-factor of 0.46V/decade, and a ${\Delta}V_{th}$ of 0.009V, which is due to the passivation of the defects by high thermal annealing without structural change.

A Study on Distributions of Boron Ions Implanted by Using B and BF2 Dual Implantations in Silicon

  • Jung, Won-Chae
    • Transactions on Electrical and Electronic Materials
    • /
    • 제11권3호
    • /
    • pp.120-125
    • /
    • 2010
  • For the fabrication of PMOS and integrated semiconductor devices, B, $BF_2$ and dual elements with B and $BF_2$ can be implanted in silicon. 15 keV B ions were implanted in silicon at $7^{\circ}$ wafer tilt and a dose of $3.0{\times}10^{16}\;cm^{-2}$. 67 keV $BF_2$ ions were implanted in silicon at $7^{\circ}$ wafer tilt and a dose of $3.0{\times}10^{15}\;cm^{-2}$. For dual implantations, 67 keV $BF_2$ and 15keV B were carried out with two implantations with dose of $1.5{\times}10^{15}\;cm^{-2}$ instead of $3.0{\times}10^{15}\;cm^{-2}$, respectively. For the electrical activation, the implanted samples were annealed with rapid thermal annealing at $1,050^{\circ}C$ for 30 seconds. The implanted profiles were characterized by using secondary ion mass spectrometry in order to measure profiles. The implanted and annealed results show that concentration profiles for the ${BF_2}^+$ implant are shallower than those for a single $B^+$ and dual ($B^+$ and ${BF_2}^+$) implants in silicon. This effect was caused by the presence of fluorine which traps interstitial silicon and ${BF_2}^+$ implants have lower diffusion effect than a single and dual implantation cases. For the fabricated diodes, current-voltage (I-V) and capacitance-voltage (C-V) were also measured with HP curve tracer and C-V plotter. Electrical measurements showed that the dual implant had the best result in comparison with the other two cases for the turn on voltage characteristics.

초소형 촉매 이상 분해 반응기 해석 모델 개발 (Development of Analysis Model for Down Scaled Two Phase Catalytic Reactor)

  • 이대훈;권세진
    • 대한기계학회논문집B
    • /
    • 제28권1호
    • /
    • pp.24-30
    • /
    • 2004
  • Analysis model for the two-phase catalytic reactor is presented. With the progress in development of micro thermofluidic devices, needs fur understanding of the phenomena in two phase reaction in cm scale has been arisen. To investigate thermal and reactive performance of down scaled two phase reactor simple analysis model that is a kind of lumped flow model is proposed. Analysis model presented is based on the experiment on mm scale model reactor. Target experiment is catalytic decomposition of 70wt% hydrogen peroxide with existence of perovskite L $a_{0.8}$S $r_{0.2}$Co $O_3$ catalyst. It is composed of balance equations of mass and energy. Each phase is considered to be a species fur the simplicity. Axial diffusion and transversal distribution of properties are neglected. Two phase catalytic reaction is modeled as successive gasification of liquid lump around catalyst and reaction in gas phase. Heat transfer is modeled by model function ofNu number. Modeled Nu is expressed as Nu=N $u_{0}$ (1+ $a_1$( $a_2$ $T^{-}$ $a_3$)exp( $a_4$ $T^{-1}$)exp( $a_{5}$ z). Transfer coefficients are determined by the comparison of experimental results. With the model, heat transfer characteristics are investigated. Also by the mass transfer coefficient, characteristics in mass transfer is investigated. With the result basic understanding on design and analysis of mm scale two-phase reactive device is obtained. Also it can be further applied to micro scale reactive device fabricated by micromachining.ing..

연료 개질장치의 적용에 따른 디젤 LNT 환원성능 개선 특성 (Improvement in Reduction Performance of LNT-Catalyst System with Micro-Reformer in Diesel Engine)

  • 박철웅;김창기;김관태;이대훈;송영훈
    • 대한기계학회논문집B
    • /
    • 제34권7호
    • /
    • pp.689-696
    • /
    • 2010
  • 디젤엔진은 높은 열효율과 우수한 연비 성능 등의 장점을 가지고 있으나, 기화된 연료와 주변 공기가 혼합된 후 착화되는 과정을 거치기 때문에 이론 공연비 영역에서는 질소산화물(NOx) 배출이 증가되는 문제점을 가지고 있다. 최근 활발히 연구되고 있는 높은 정화 효율을 가진 LNT 촉매는 희박 분위기 조건에서는 NOx를 흡장하게 되고 과농한 분위기에서는 환원 분위기 형성을 통하여 NOx를 저감시키게 된다. 희박 공연비에서 동작하는 디젤 엔진에서는 이러한 환원 과정을 이루기 위해 주기적으로 과농한 분위기를 형성해주어야만 하는데, 이러한 연구는 NOx 저감을 위해 HC를 포함한 환원제의 농도를 제어하는 기술로서 본 연구에서는 디젤을 연료로 하는 수소농후가스 발생장치를 이용하여 LNT 촉매에 환원제로서 수소농후가스를 직접 공급하는 방식으로 LNT 촉매의 NOx 저감 특성을 파악하였다.

경막형 용융결정화에 의한 벤젠-사이클로헥산 혼합물로부터 벤젠의 결정화-결정의 불순물 내포현상- (Crystallization of Benzene from Benzene-Cyclohexane Mixtures by Layer Melt Crystallization - Phenomena of Impurity Inclusion in Crystal -)

  • 김광주;이정민;유승곤
    • 공업화학
    • /
    • 제8권3호
    • /
    • pp.389-394
    • /
    • 1997
  • 경각형 결정화에 의하여 벤젠-사이클로헥산 혼합물로부터 벤젠의 결정화에서 결정에 내포된 불순물(사이클로헥산)의 분포가 조사되었다. 결정의 순도에 미치는 결정성장속도의 영향을 파악하였으며 모든 실험결과는 Wintermantel 모델에 의해 도시될 수 있었다. 결정의 순도는 과냉각 정도가 클수록, 주입조성이 낮을 수록, 결정성장속도가 클 수록 낮았으며 결정성장속도는 불순물의 내포를 지배하는 가장 중요한 변수이다. 결정화 초기에 형성된 결정은 불순물을 많이 내포하고 있으며 결정의 두께가 증가함에 따라 불순물은 잔여용융액쪽으로 이동되어 배제됨을 알 수 있었다. 경막결정화에서 결정에 내포된 불순물은 일정두께의 결정층에 온도구배를 이용하여 결정을 부분용해시키면 불순물의 확산에 의하여 제거될 수 있음을 알 수 있었다.

  • PDF

High Performance of SWIR HgCdTe Photovoltaic Detector Passivated by ZnS

  • ;안세영;서상희;김진상
    • 센서학회지
    • /
    • 제13권2호
    • /
    • pp.128-132
    • /
    • 2004
  • Short wave infrared (SWIR) photovoltaic devices have been fabricated from metal organic vapour phase epitaxy (MOVPE) grown n- on p- HgCdTe films on GaAs substrates. The MOVPE grown films were processed into mesa type discrete devices with wet chemical etching employed for meas delineation and ZnS surface passivatlon. ZnS was thermally evaporated from effusion cell in an ultra high vacuum (UHV) chamber. The main features of the ZnS deposited from effusion cell in UHV chamber are low fixed surface charge density, and small hysteresis. It was found that a negative flat band voltage with -0.6 V has been obtained for Metal Insulator Semiconductor (MIS) capacitor which was evaporated at $910^{\circ}C$ for 90 min. Current-Voltage (I-V) and temperature dependence of the I-V characteristics were measured in the temperature range 80 - 300 K. The Zero bias dynamic resistance-area product ($R_{0}A$) was about $7500{\Omega}-cm^{2}$ at room temperature. The physical mechanisms that dominate dark current properties in the HgCdTe photodiodes are examined by the dependence of the $R_{0}A$ product upon reciprocal temperature. From theoretical considerations and known current expressions for thermal and tunnelling process, the device is shown to be diffusion limited up to 180 K and g-r limited at temperature below this.

A Study of the Diffusion and Rise of Stack Plumes at Coastal Region by Using LIDAR Observation Data

  • Yoon, Ill-Hee
    • International Union of Geodesy and Geophysics Korean Journal of Geophysical Research
    • /
    • 제26권1호
    • /
    • pp.43-58
    • /
    • 1998
  • The Kwinana Shoreline Fumigation Experiment (KSFE) took place at Fremantle, WA, Australia between January 23 and February 8, 1995. The CSIRO DAR LIDAR measured plume sections from near the Kwinana Power Station (KPS) stacks to up to about 5 km downstream. It also measured boundary layer aerosols and the structure of the boundary layer on some occasions. Both stages A and C of KPS were used as tracers at different times. The heart of the LIDAR system is a Neodymium-doped Yttrium-aluminum-garnet (Nd:YAG) laser operating at a fundamental wavelength of 1064 nm, with harmonics of 532 nm and 355 nm. For these experiments the third harmonic was used because the UV wavelength at 355 nm is eye safe beyond about 50 m. The laser fires a pulse of light 6 ns in duration (about 1.8 m long) and with an energy (at the third harmonic) of about 70 mJ. This pulse subsequently scattered and absorbed by both air molecules and particles in the atmosphere. A small fraction of the laser beam is scattered back to the LIDAR, collected by a telescope and detected by a photo-multiplier tube. The intensity of the signal as a function of time is a measure of the particle concentration as a function of distance along the line of the laser shot. The smoke plume was clearly identifiable in the scans both before and after fumigation in the thermal internal boundary layer (TIBL). Both power station plumes were detected. Over the 9 days of operation, 1,568 plumes scans (214 series) were performed. Essentially all of these will provide instantaneous plume heights and widths, and there are many periods of continuous operation over several hours when it should be possible to compile hourly average plume statistics as well. The results of four days LIDAR observations of the dispersion of smoke plume in the TIBL at a coastal site are presented for the case of stages A and C.

  • PDF