• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.163-163
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• 2015

본 연구는 금속 캐리어 소재상에 화학 동도금(Chemical Copper)으로 형성된 극박 동박 표면 및 석출막의 특성을 평가하기 위하여 다양한 진공 분석장비들을 활용하여 평가한 결과이다. 연구에 사용된 극박 동박은 현재 캐리어박 선점률이 높은 M, J, Y사의 제품이다. 최상층 구리 표면에서 조직, 조성, 표면조도를 평가하였고, 계면 평가에서는 copper layer 및 nodule layer, adhesion layer, anti-corrosion layer, release layer, substrate에서의 물성 및 특성 정밀평가 결과 각 특성치 및 구조는 Cr, Zn, Ni, Co, Cr계 thermal anti layer임의 확인이 가능하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.252.2-252.2
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• 2013

ZnO nanostructures have a lot of interest for decades due to its varied applications such as light-emitting devices, power generators, solar cells, and sensing devices etc. To get the high performance of these devices, the factors of nanostructure geometry, spacing, and alignment are important. So, Patterning of vertically- aligned ZnO nanowires are currently attractive. However, many of ZnO nanowire or nanorod fabrication methods are needs high temperature, such vapor phase transport process, metal-organic chemical vapor deposition (MOCVD), metal-organic vapor phase epitaxy, thermal evaporation, pulse laser deposition and thermal chemical vapor deposition. While hydrothermal process has great advantages-low temperature (less than $100^{\circ}C$), simple steps, short time consuming, without catalyst, and relatively ease to control than as mentioned various methods. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using of nanosphere template with various precursor concentration and components via hydrothermal process. The brief experimental scheme is as follow. First synthesized ZnO seed solution was spun coated on to cleaned Si substrate, and then annealed $350^{\circ}C$ for 1h in the furnace. Second, 200nm sized close-packed nanospheres were formed on the seed layer-coated substrate by using of gas-liquid-solid interfacial self-assembly method and drying in vaccum desicator for about a day to enhance the adhesion between seed layer and nanospheres. After that, zinc oxide nanowires were synthesized using a low temperature hydrothermal method based on alkali solution. The specimens were immersed upside down in the autoclave bath to prevent some precipitates which formed and covered on the surface. The hydrothermal conditions such as growth temperature, growth time, solution concentration, and additives are variously performed to optimize the morphologies of nanowire. To characterize the crystal structure of seed layer and nanowires, morphology, and optical properties, X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, and photoluminescence (PL) studies were investigated.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.55-60
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• 2012

고효율, 저가격의 태양전지를 위해 습식공정 중 하나인 Ni-P 무전해 도금을 이용한 실리콘 태양전지 웨이퍼를 열처리에 따른 4점굽힘시험을 통해 정량적인 계면 접착에너지를 평가하였다. 실험 결과 실리콘 태양전지 웨이퍼와 Ni-P 박막 사이의 계면접착에너지는 $14.83{\pm}0.76J/m^2$이며, 후속 열처리에 따른 실리콘 태양전지 웨이퍼와 Ni-P 무전해 도금은 $300^{\circ}C$ 처리 시 $12.33{\pm}1.16J/m^2$, $600^{\circ}C$ 처리 시 $10.83{\pm}0.42J/m^2$로써 전반적으로 높은 계면접착에너지를 가지나 열처리 온도가 증가할수록 계면접착에너지가 서서히 감소하였다. 4점굽힘시험 후 박리된 파면의 미세구조를 관찰 및 분석하여 내부의 파괴경로를 확인하였으며, X-선 광전자 분광법을 통하여 표면화학 결합상태를 분석한 결과 열처리 시 Ni-O와 Si-O 형태의 결합이 존재하여 약한 계면을 형성하기 때문인 것으로 판단된다.

• 방사선산업학회지
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• 제3권1호
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• pp.7-11
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• 2009

Hard magnet was usually used by coating $SiO_2$ ceramic thick films followed by the thermal annealing process. In this work, the alternative annealing process for NdFeB magnets using e-beam sources (1~2 MeV, 50~400 kGy) was investigated. NdFeB magnets was coated with ceramic thick films using the spray method. The optimal annealing parameter for e-beam source reveals to be 1 MeV and 300 kGy. The sample prepared at 1 MeV and 300 kGy was characterized by the analysis of the surface morphology, film hardness, adhesion and chemical stability. The mechanical property of thick film, especially film hardness, is better than that of thermal annealed samples at $180^{\circ}C$. As a result, e-beam annealing process will be one of candidate and attractive heat treatment process. In future, manufacturing process will be carried out in cooperation with the magnet company.

• Structural Engineering and Mechanics
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• 제83권4호
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• pp.551-561
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• 2022

In this paper, the effect of fire conditions according to ISO 834 standard on the behavior of carbon fibre-reinforced plastic (CFRP) reinforced steel beams coated with gypsum-based mortar has been investigated numerically. To study the efficiency of these beams, 3D coupled temperature-displacement finite element analyzes have been conducted. Mechanical and thermal characteristics of three different parts of composite beams, i.e., steel, CFRP plate, and fireproof coating, were considered as a function of temperature. The interaction between steel and CFRP plate has been simulated employing the adhesion model. The effect of temperature, CFRP plate reinforcement, and the fireproof coating thickness on the deformation of the beams have been analyzed. The results showed that within the first 120 min of fire exposure, increasing the thickness of the fireproof coating from 1 mm to 10 mm reduced the maximum temperature of the outer surface of the steel beam from 380℃ to 270℃. This increase in the thickness of the fireproof layer decreased the rate of growth in the temperature of the steel beam by approximately 30%. Besides excellent thermal resistance and gypsum-based mortar, the studied fireproof coating method could provide better fire resistance for steel structures and thus can be applied to building materials.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 추계학술대회 초록집
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• pp.84.1-84.1
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• 2010

Since the discovery of the carbon nanotube(CNTs), they have attracted much attention because of unique properties that may impact many fields of science and technology. The considerable properties of CNTs include high surface area, outstanding thermal, electrical conductivity and mechanical stability. However, uniform deposition of Pt nanoparticles on carbon surface remains inaccessible territory because of the inert carbon surface. In this study, we prepared directly oriented CNTs on carbon paper as a catalyst support in cathode electrode. carbon surface was functionalized using aryl diazonium salt for increasing adhesion of Ni particles which is precursor for growing CNTs. For fabricate electrode, CNTs on carbon paper were grown by chemical vapor deposition using Ni catalyst and Pt nanoparticles were deposited on CNTs oriented carbon paper by polyol method. The performance was measured using Proton electrolyte Membrane Fuel Cell(PEMFC). The structure and morphology of the Pt nanoparticles on CNTs were characterized by Scanning electron Microscopy(SEM) and Transmission electron Microscopy (TEM). The average diameter of Pt nanoparticles was 3nm.

• 한국재료학회지
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• 제12권3호
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• pp.225-230
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• 2002

Sn was selected as an alloying element of Cu. The Cu-Sn thin layers were deposited on the Si substrates by the electroplating method and their properties were studied. By rapidly thermal annealing(RTA) up to 40$0^{\circ}C$ after electroplating, sheet resistance decreased and adhesion strength increased, but that trend was reversed at the 50$0^{\circ}C$ RTA. Cu-Sn particles grew dense and the surface was uniform up to 40$0^{\circ}C$, but at 50$0^{\circ}C$, empty area was introduced and the surface became rough owing to oxidation and particle coarsening and agglomeration. Deposited layer contained significant amount of Si, while pure Cu-Sn layer with the composition ratio of 90:10 was present only on the top surface. However, no significant change in the Cu composition within alloy layers occured by the RTA regardless of its temperature. This indicates that the Cu diffusion into the Si was suppressed by the presence of Sn.

• 마이크로전자및패키징학회지
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• 제28권1호
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• pp.39-46
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• 2021

Cu 배선(interconnect) 적용을 위한 다층박막의 적층 구조에 따른 최적 계면접착에너지(interfacial adhesion energy, Gc) 평가방법을 도출하기 위해, Ta, Cu 및 tetraethyl orthosilicate(TEOS-SiO2) 박막 계면의 정량적 계면접착에너지를 double cantilever beam(DCB) 및 4-점 굽힘(4-point bending, 4-PB) 시험법을 통해 비교 평가하였다. 평가결과, Ta확산방지층이 적용된 시편(Cu/Ta, Cu/Ta/TEOS-SiO2)에서는 두 가지 평가방법 모두 반도체 전/후 공정에서 박리가 발생하지 않는 산업체 통용 기준인 5 J/㎡ 보다 높게 측정되었다. Ta/Cu 시편의 경우 DCB 시험에서만 5 J/㎡ 보다 낮게 측정되었다. 또한, DCB시험 보다 4-PB시험으로 측정된 Gc가 더 높았다. 이는 계면파괴역학 이론에 따라 이종재료의 계면균열 선단에서 위상각의 증가로 인한 계면 거칠기 및 소성변형에 의한 에너지 손실이 증가 하는것에 기인한다. 4-PB시험결과, Ta/Cu 및 Cu/Ta계면은 5 J/㎡ 이상의 높은 계면접착에너지를 보이므로, 계면접착에너지 관점에서는 Ta는 Cu배선의 확산방지층(diffusion barrier layer) 및 피복층(capping layer)으로 적용 가능할 것으로 생각된다. 또한, 배선 집적공정 및 소자의 사용환경에서 열팽창 계수 차이에 의한 열응력 및 화학적-기계적 연마 (chemical mechanical polishing)에 의한 박리는 전단응력이 포함된 혼합모드의 영향이 크므로 4-PB 시험으로 측정된 Gc와 연관성이 더 클 것으로 판단된다.

• 한국재료학회지
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• 제15권3호
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• pp.149-154
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• 2005

Teflon like fluorocarbon thin films have been deposited on silicon and oxide molds as an antistiction layer for the hot embossing process by an inductively coupled plasma (ICP) chemical vapor deposition (CVD) method. The process was performed at $C_4F_8$ gas flow rate of 2 sccm and 30 W of plasma power as a function of substrate temperature. The thickness of film was measured by a spectroscopic ellipsometry. These films were left in a vacuum oven of 100, 200 and $300^{\circ}C$ for a week. The change of film thickness, contact angle and adhesion and friction force was measured before and after the thermal test. No degradation of film was observed when films were treated at $100^{\circ}C$. The heat treatment of films at 200 and $300^{\circ}C$ caused the reduction of contact angles and film thickness in both silicon and oxide samples. Higher adhesion and friction forces of films were also measured on films treated at higher temperatures than $100^{\circ}C$. No differences on film properties were found when films were deposited on either silicon or oxide. A 100 nm silicon template with 1 to $500\;{\mu}m$ patterns was used for the hot embossing process on $4.5\;{\mu}m$ thick PMMA spun coated silicon wafers. The antistiction layer of 10 nm was deposited on the silicon mold. No stiction or damages were found on PMMA surfaces even after 30 times of hot embossing at $200^{\circ}C$ and 10 kN.

• 한국세라믹학회지
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• 제48권6호
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• pp.537-542
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• 2011

Magnesium hydroxide as a non-halogen flame retardant has increasing attention due to its non-toxicity, high decomposition temperature and smoke suppressant ability during combustion. For the application of magnesium hydroxide retardant to the textile by soaking and coating method, the prerequisite for the coating is a small particle size, stable dispersion, and adhesion to the textile. The dispersion of $Mg(OH)_2$ particles and stability of the coating was checked by monitoring the change of transmittance and backscattering by varying the types of dispersion agents, binder, solvent, and $Mg(OH)_2$ source, and their compositions in the coating. The $Mg(OH)_2$ dispersion coating was applied to PET(poly(ethylene terephthalate)) non-woven textile. The physical properties are characterized by surface morphology, amount of coating, particle dispersion, and adhesion test. The flame retardant $Mg(OH)_2$ coated textile has been compared by limited oxygen index(LOI) and thermal gravimetry and differential scanning calorimetry(TG-DSC). It was found that phosphorous additive may give synergistic effect on $Mg(OH)_2$ flame retardant coating to make the flame retardant PET non-woven textile.