• Title/Summary/Keyword: the preferred orientation

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The Relations of Acculturation and Parenting Behaviors of Korean-Chinese Mothers in Yanbian Area to Adjustment of their Children (연변 조선족 어머니의 문화접변 및 양육행동과 청소년의 적응간의 관계)

  • 박성연;김미경;도현심
    • Journal of the Korean Home Economics Association
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    • v.38 no.12
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    • pp.159-175
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    • 2000
  • This study examined the relations of acculturation and parenting behaviors of 279 Korean-Chinese mothers living in Yanbian Area in China to Adjustment of their eighth- and ninth-grade children. The mothers completed a questionnaire consisted of items regarding daily eating habits(food life) and language use, the acculturation scale, and the parenting scale, and their children completed the depression, self-esteem, and social competence scale. While most of mothers preferred Korean food to Chinese food, they preferred Chinese to Korean in daily language use. The mothers'ethnic identity was negatively related to depression of their children, whereas their out-group orientation was positively related to social competence of their children. In general, the relation between mothers'acculturation and adjustment of their children was not mediated by their parenting behaviors. But maternal warmth and acceptance partly mediated the relation between their out-group orientation and social competence of their children. These results imply that their acculturation tends to have direct effects on adjustment of their children.

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Deposition of ZnO Films for FBAR Device Fabrication

  • Song Hae-il;Mai Linh;Yim Munhyuk;Yoon Giwan
    • Journal of information and communication convergence engineering
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    • v.3 no.3
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    • pp.131-136
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    • 2005
  • The effects of the deposition temperature on the growth characteristics of the ZnO films were studied for film bulk acoustic wave resonator (FBAR) device applications. All films were deposited using a radio frequency (RF) magnetron sputtering technique. It was found that the growth characteristics of the ZnO films have a strong dependence on the deposition temperature from 25 to $350^{\circ}C$. The ZnO films deposited below $200^{\circ}C$ exhibited reasonably good columnar grain structures with a highly preferred c-axis orientation while those above 200°C showed very poor columnar grain structures with a mixed-axis orientation. This study seems very useful for the future FBAR device applications.

Preferred orientation of TiN thin films produced by Ion Beam Assist Deposition

  • Won, J.Y.;Kim, J.H.;Kang, H.J.;Baeg, C.H.;Park, S.Y.;Hong, J.W.;Wey, M.Y.
    • Journal of the Korean Vacuum Society
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    • v.6 no.S1
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    • pp.154-159
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    • 1997
  • The crystal structure properties of TiN thin films deposited on SKD61 steel and Si(100) substrates by Ion Beam Assisted Deposition have been studied to clarify the thin film growth mechanism by using XRD, RBS, SEM, and AFM. The preferred orientation of TiN thin films changes from (111) to (100) as increasing the assisted energy. This tendency is independent of the substrate structure. The TiN thin film grow with (100) direction having surface free energy minimum as the assisted energy increases.

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A study on c-axis preferred orientation at a various substrate temperature of ZnO thin film deposited by RF magnetron sputtering (RF magnetron sputtering법으로 ZnO박막 제조시 기판온도에 따른 c축 배향성에 관한 연구)

  • 이종덕;송준태
    • Electrical & Electronic Materials
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    • v.9 no.2
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    • pp.196-203
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    • 1996
  • The highly c-axis oriented zinc oxide thin films were deposited on Sapphire(0001) substrates by reactive RF magnetron sputtering. The characteristics of zinc oxide thin films on RF power, substrate-target distance, and substrate temperature were investigated by XRD, SEM and EDX analyses. The physical characteristics of zinc oxide thin films changed with various deposition conditions. The higher substrate temperatures were, The better crystallinity of zinc oxide thin films. The highly c-axis oriented zinc oxide thin films were obtained at sputter pressure 5mTorr, rf power 200W, substrate temperature 350.deg. C, substrate-target distance 5.5cm. In these conditions, the resistivity of zinc oxide thin films deposited on pt/sapphire was 12.196*10$^{9}$ [.ohm.cm].

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A Comparative Study of Superhard TiN Coatings Deposited by DC and Inductively Coupled Plasma Magnetron Sputtering (DC 스퍼터법과 유도결합 플라즈마 마그네트론 스퍼터법으로 증착된 수퍼하드 TiN 코팅막의 물성 비교연구)

  • Chun, Sung-Yong
    • Journal of the Korean institute of surface engineering
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    • v.46 no.2
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    • pp.55-60
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    • 2013
  • Superhard TiN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 300 W, on coating microstructure, preferred orientation mechanical properties were systematically investigated with HR-XRD, SEM, AFM and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of TiN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Grain sizes of TiN coatings were decreased from 12.6 nm to 8.7 nm with increase of ICP power. The maximum nanohardness of 67.6 GPa was obtained for the coatings deposited at ICP power of 300 W. Preferred orientation in TiN coatings also vary with ICP power, exerting an effective influence on film nanohardness.

Electrical characteristics of ZnO Thin Film according to deposition conditions (증착조건에 따른 ZnO 박막의 전기적 특성)

  • Lee, Dong-Yoon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.131-135
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    • 2003
  • Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films, $\theta/2\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity, and surface roughness highly depended on $Ar/O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7{\Omega}cm$ was obtained at a working pressure of 10 mTorr with $Ar/O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with $Ar/O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

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A Study on the ZnO Thin Film SAW Filter by RF Sputter (RF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구)

  • 박용욱;신형용;박정흠;강종윤;심성훈;최지원;윤석진;김현재;김경환
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.6
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    • pp.481-486
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    • 2001
  • ZnO thin films on glass substrate were depostied by RF magnetron reactive sputter with various argon/oxygen gas ratios and substrate temperatures. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, XPS and electrometer(keithley 617). All films showed a strong preferred orientation along the c-axis on glass substrate, and the chemical stoichiometry was obtained at Ar/O$_2$.=50/50. The propagation velocity of ZnO SAW filter was about 2,590 m/sec and insertion loss was a minimum value of abut -21dB.

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Characterization of Electrical Properties of $Ba_{0.65}Sr_{0.35}TiO_3$Thin Films Deposited by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법에 의해 증착된 $Ba_{0.65}Sr_{0.35}TiO_3$ 박막의 전기적 특성 분석)

  • 양기덕;조호진;조해석;김형준
    • Journal of the Korean Ceramic Society
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    • v.32 no.4
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    • pp.441-447
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    • 1995
  • Ba0.65Sr0.35TiO3 (BST) thin films were deposited on Pt/SiO2/Si(100) substrate by rf magnetron sputtering. The substrate temperature changed from 35$0^{\circ}C$ to 55$0^{\circ}C$ and crystalline BST thin films were deposited above 45$0^{\circ}C$. Most of the films had (111) preferred orientation regardless of deposition temperature, but the films changed to (100) preferred orientation as gas pressure increased. The dielectric constant increased with increasing substrate temperature and film thickness, and ranged from 100 to 600 at room temperature. The leakage current increased as substrate temperature increased or as film thickness decreased.

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PREFERRED ORIENTATION AND MICROSTRUCTURE OF MOD DERIVED SrBi$_{2x}$Ta$_2$O$_9$ THIN FILMS WITH Bi CONTENT x

  • Yeon, Dae-Joong;Park, Joo-Dong;Oh, Tae-Sung
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.621-627
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    • 1996
  • $SrBi_{2x}TaO_9$ ferroelectric thin films were prepared on platinized silicon substrates using MOD proces, and crystallization behavior of the films was investigated with variation of the annealing temperature and Bi content x. Crystalline phase of bismuth layered perovskite structure was formed even by baking the films at $800^{\circ}C$ for 5 minutes in air, and was not changed by annealing at temperatures raning from $700^{\circ}C$ to $900^{\circ}C$ for 1 hour in oxygen ambient. When $SrBi_{2x}TaO_9$ thin films ($0.8\lex\ie1.6$) were annealed at $800^{\circ}C$, Preferred orientation of the films along c-axis was observed with $x\ge1.2$. With increasing Bi content x, surface morphology of the films was changed from equiaxed grains to elongated grains.

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A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering (RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구)

  • 최형욱;김경환;김상종;강종윤;안병국;윤석진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.9
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    • pp.798-807
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    • 2002
  • ZnO thin films on Si wafer were deposited by RF magnetron reactive sputter with various RF power, chamber pressure, argon/oxygen gas ratios ana substrate temperatures. Crystallinities, surface morphologies, and electrical properties of the films were investigated by XRD, AFM, RBS, and electrometer(keithley 617). ZnO films showed a strong c-axis preferred orientation. Surface roughness and resistivity were changed by the argon/oxygen gas ratio. The minimum surface roughness of 12${\AA}$ and maximum resistivity of $10^8\Omega cm$ were achieved at Ar/O$O_2$=0/100.