• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05b
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• pp.16-19
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• 2002

(Ba,Sr)TiO3(BST) thin film is an attractive material for the application in high-density dynamic random access memories (DRAMs) because of the high relative dielectric constant and small variation in dielectric properties with frequency. In this study, (Ba0.6,Sr0.4)TiO3 thin films on Pt/Ti/SiO2/Si substrates were deposited by a sol-gel method and the CF4/Ar inductively coupled plasma (ICP) etching behavior of BST thin films had been investigatedby varying the process parameters such as chamber pressure, ICP power, and substrate bias voltage. To analysis the composition of surface residue following etching BST films etched with different Ar/CF4 gas mixing ratio were investigated using x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometer (SIMS).

• Korean Chemical Engineering Research
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• v.45 no.3
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• pp.209-214
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• 2007

Sr hexaaluminate($Sr_{1-x}La_xMnAl_{11}O_{19-\alpha}$) were prepared by sol-gel method of metal alkoxide with 1-butanol or ethylene glycol as a solvent. The physical properties of prepared hexaaluminates were examined by TG/DTA, XRD and $N_2$ adsorption. When ethylene glycol was used as a solvent, the decomposition reaction and dehydroxylation reaction was observed above $400^{\circ}C$ and the temperature of the formation of a crystal structure of hexaaluminate was also increased resulting in small specific surface area and low catalytic activity of methane compared to Sr-hexaaluminate with 1-butanol.

• Polymer(Korea)
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• v.31 no.2
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• pp.111-116
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• 2007

Polyurethane modified acrylate $(PUA)/SiO_2$ hybrid films were prepared by ultraviolet curing and their surface properties were investigated by hardness and adhesion test. The films were examined by the manipulation of mole-ratio of organic to inorganic components. Under the silica content controlled, highly desirable films were achieved and scratch resistance and hardness property of film were also enhanced, which indicates that the crosslinked silica particles are homogeneously dispersed within PUA film.

• Journal of Sensor Science and Technology
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• v.16 no.6
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• pp.395-400
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• 2007

Ambient drying sol-gel processing was used for monolithic silica ambigels in the temperature range of $130-250^{\circ}C$. A new method of mesopore ambigels, which mean the aerogels prepared by ambient pressure drying process synthesis, is suggested at first. This method includes two important approaches. The first point is that $SiO_{2}$ surface modification of wet gel was performed by trimethylchlorosilane in n-butanol solution. This procedure is provided the silica gel mesopore structure formation. The second point is a creation of the ternary azeotropic mixture water/n-butanol/octane as porous liquid, which is effectively provided removing of water such a low temperature by 2 step drying condition under ambient pressure. The silica aerogels, which were prepared by ambient pressure drying from azeotropic mixture of water/n-butanol/octane, are transparent, crack-free and mesoporous (pore size ${\sim}$ 5.6 nm) with surface area of ${\sim}$ $923{\;}m^2/g$, bulk density of $0.4{\;}g/cm^3$ and porosity of 85 %.

• Corrosion Science and Technology
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• v.8 no.4
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• pp.157-161
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• 2009

The corrosion resistance of reinforcing bar was studied to endure the marine environment during shipment. The red rust on the surface did not damage the adherence in the concrete structures, especially in highly alkaline environment, but made the consumer doubt of the quality. The passivation process by alkalization of the quenching water in the tempcore process failed to endure the long shipping period. The ceramic coating by sol-gel process improved the corrosion resistance without damaging the mechanical properties and adherence between concrete and reinfiorcing bar. Optimal concentration of the coating solution and coating temperature were tested. No additional energy was necessary for the coating process by spraying during cooling process, resulting simplified process and low cost. Salt spray test, cyclic corrosion test and atmospheric test were employed to confirm the resistance. The corrosion rates were presented by rating number and polarization resistance. The coating layer was examined by FIB, XRD and SEM etc.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1448-1449
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• 2006

Pb(Zr,Ti)$O_3$ is one of the most attractive ferroelectric materials for realizing the FeRAM due to its higher remanant polarization and the ability to withstand higher coercive fields. Generally, the ferroelectric materials were patterned by a plasma etching process for high-density FeRAM. The applicable possibility of CMP process to pattern Pb(Zr,Ti)$O_3$ instead of plasma etching process was investigated in our previous study for improvement of an angled sidewall which prevents the densification of ferroelectric memory and is apt to receive the plasma damage. Our previous study showed that good removal rate with the excellent surface roughness compared to plasma etching process were obtained by CMP process for the patterning of Pb(Zr,Ti)$O_3$. The suitable selectivity to TEOS without any damage to the structural property of Pb(Zr,Ti)$O_3$ was also guaranteed. In this study, the removal mechanism of $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ coated by sol-gel method was investigated. Surface analysis of polished specimens at the best and worst conditions was carried out by XPS.

• Journal of Adhesion and Interface
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• v.20 no.4
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• pp.146-154
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• 2019

In this study, alkoxysilane-functionalized amphiphilic polymer (AFAP), which have hydrophilic segment and hydrophobic segment functionalized by alkoxysilane group at the same backbone, was synthesized and used as a dispersant and control agent for reaction rate in the preparation of colloidally stable organic-inorganic (O-I) hybrid sols. After reaction with fluorosilane compounds, fluorinated O-I hybrid sols were prepared and coated onto glass substrate to form hydrophobic O-I hybrid coating films through low-temperature curing process. Surface hardness and hydrophobicity of cured coating films were varied with type of solvent and composition of AFAP and fluorinated alkoxysilane compounds. At appropriate solvent and composition of fluorinated alkoxysilane compounds, O-I hybrid coating film having high transparency and surface hardness could be prepared, which could be applicable to cover window of solar cell and displays.

• 한국연소학회:학술대회논문집
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• 2007.05a
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• pp.37-44
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• 2007

A nickel foam, one of metal foams was seleced as a catalyst support instead of conventional ceramic materials. $Al_2O_3$ was coated on the surface of nickel foam to increase the surface area. $Al_2O_3$ coating process was based on sol-gel process. SEM image was obtained and $Al_2O_3$ coverage was confirmed. Combustion experiments were carried out using SUS combustor and $H_2$/air mixture. Temperatures were measured with different equivalence ratios and $H_2$ flow rates. $H_2$ conversion rates were calculated by the analysis of product gas using gas chromatography. Catalytic combustion of $H_2$ was complete and stable with Pt/$Al_2O_3$ coated nickel foam and influences of water vapor were confirmed during the beginning of combustion.

• Journal of the Korean Ceramic Society
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• v.33 no.12
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• pp.1319-1324
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• 1996

Silica aerogels were synthesis by the sol-gel-supercritical drying process using isopropanol as a solvent. Effets of the heat-treatment and the surface modification through propoxylation on the structural reinforcement as well as the surface hydrophobic/hydrophilic characteristics of aerogels were investigated. Silica aerogels synthesized by supercritical drying were hydrophobic but aerogels heat-treated above 20$0^{\circ}C$ were transformed to be hydrophilic. In particular it was found that the skeletal structure of aerogels heat-treated at 50$0^{\circ}C$ was strong enough not to crack after adsorbing a large amount of water vapor. Hydrophilic aerogels modified by propoxylation at 28$0^{\circ}C$ for 20 h were reversed to the hydrophobic form. Transition between hydrophobicity and hydrophilicity was reversible. The hydrophobicvity and the hydrophilicity of silica aerogels were attributed to the Si-Oh bond and the nonpolar C-H bond groups of orgainc species respectively.

• Journal of the Korean Electrochemical Society
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• v.16 no.3
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• pp.157-161
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• 2013

Porous $LiMn_{0.6}Fe_{0.4}PO_4$ (LMFP) was synthesized by a sol-gel process. Uniform dispersion of the conductive carbon source throughout LMFP with uniform carbon coating was achieved by heating a stoichiometric mixture of raw materials at $600^{\circ}C$ for 10 h. The crystal structure of LMFP was investigated by Rietveld refinement. The surface structure and pore properties were investigated by SEM, TEM and BET. The LMFP so obtained has a high specific surface area with a uniform, porous, and web-like nano-sized carbon layer at the surface. The initial discharge capacity and energy density were 152 mAh/g and 570 Wh/kg, respectively, at 0.1 C current density, and showed stable cycle performance. The combined effect of high porosity and uniform carbon coating leads to fast lithium ion diffusion and enhanced electrochemical performance.