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Fabrication of [320×256]-FPA Infrared Thermographic Module Based on [InAs/GaSb] Strained-Layer Superlattice ([InAs/GaSb] 응력 초격자에 기초한 [320×256]-FPA 적외선 열영상 모듈 제작)

  • Lee, S.J.;Noh, S.K.;Bae, S.H.;Jung, H.
    • Journal of the Korean Vacuum Society
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    • v.20 no.1
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    • pp.22-29
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    • 2011
  • An infrared thermographic imaging module of [$320{\times}256$] focal-plane array (FPA) based on [InAs/GaSb] strained-layer superlattice (SLS) was fabricated, and its images were demonstrated. The p-i-n device consisted of an active layer (i) of 300-period [13/7]-ML [InAs/GaSb]-SLS and a pair of p/n-electrodes of (60/115)-period [InAs:(Be/Si)/GaSb]-SLS. FTIR photoresponse spectra taken from a test device revealed that the peak wavelength (${\lambda}_p$) and the cutoff wavelength (${\lambda}_{co}$) were approximately $3.1/2.7{\mu}m$ and $3.8{\mu}m$, respectively, and it was confirmed that the device was operated up to a temperature of 180 K. The $30/24-{\mu}m$ design rule was applied to single pixel pitch/mesa, and a standard photolithography was introduced for [$320{\times}256$]-FPA fabrication. An FPA-ROIC thermographic module was accomplished by using a $18/10-{\mu}m$ In-bump/UBM process and a flip-chip bonding technique, and the thermographic image was demonstrated by utilizing a mid-infrared camera and an image processor.

Effects of Interface Soaking on Strain Modulation in InAs/GaSb Strained-Layer Superlattices (계면 흡착에 의한 InAs/GaSb 초격자의 응력변조 효과)

  • Shin, H.W.;Choe, J.W.;Kim, J.O.;Lee, S.J.;Kim, C.S.;Noh, S.K.
    • Journal of the Korean Vacuum Society
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    • v.20 no.1
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    • pp.35-41
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    • 2011
  • In this study, the interface soaking effect in InAs/GaAs strained-layer superlattice (SLS) on crystalline phase modulation has been analyzed by the x-ray diffraction (XRD) curve. The strain variation induced by As and/or Sb soaking was determined by the separation angle between the substrate peak and the 0th-order superlattice satellite peak in the XRD spectra. Contrated that the As/InAs soaking arises minor GaAs-like interfacial layer, the Sb/GaSb soaking induces InSb-like one. The Fourier-transformed curves of the Pendellosung interference oscillation shows that the optimum soaking times of As/InAs and Sb/GaSb are 2 sec and 12 sec, at which the highest crystallineity has, respectively. An anomalous twin-peak phenomenon that a satellite peak splits into two peaks was observed in the SLS structure co-soaked by As and Sb at InAs${\rightarrow}$GaSb interfaces. We suggest that it may be resulted from coexistence of two kinds crystalline phases of InAsSb and GaAsSb due to intermixing of In${\leftrightarrow}$Ga and Sb${\leftrightarrow}$As.

First-principles Study on the Half-metallicity and Magnetism of the (001) Surfaces of (AlP)1/(CrP)1 Superlattice ((AlP)1/(CrP)1 초격자계에서 (001) 표면의 자성과 반쪽금속성에 대한 제일원리 연구)

  • Bialek, Beata;Lee, Jae Il
    • Journal of the Korean Magnetics Society
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    • v.25 no.6
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    • pp.175-179
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    • 2015
  • The half-metallicity and magnetism of the (001) surfaces of $(AlP)_1/(CrP)_1$ superlattice were investigated by means of FLAPW (Full-potential Liniarized Augmented Plane Wave) method. We considered four types of (001) surface termination, i.e., Al(S)-, Cr(S)-, P(S)Al(S-1)- and P(S)Cr(S-1)-term systems. We found that only Cr(S)-term system maintains the half-metallicity at the surface as only this system has the calculated magnetic moment of integer number of bohr magnetons. The magnetic moment of Cr(S) atom in the system was $3.02{\mu}_B$ which was increased from the bulk value by the effects of band narrowing and increased spin-splitting at the surface. The electronic density of states of the P(S) atom in the P(S)Al(S-1)-term showed very sharp surface states due to the broken $p_z$ bonds at the surface. We found there is still a strong p-d hybridization between the P(S) and Cr(S-1) layers in the P(S)Cr(S-1)-term which causes a considerable increase of magnetic moment of P(S) atom.

Study on Growth Optimization of InAs/GaSb Strained-Layer Superlattice Structures by High-Resolution XRD Analysis (고분해능 XRD 분석에 의한 InAs/GaSb 응력초격자 구조의 성장 최적화 연구)

  • Kim, J.O.;Shin, H.W.;Choe, J.W.;Lee, S.J.;Kim, C.S.;Noh, S.K.
    • Journal of the Korean Vacuum Society
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    • v.18 no.4
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    • pp.245-253
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    • 2009
  • For the growth optimization of InAs/GaSb (8/8-ML) strained-layer superlattice (SLS), the structure has been grown under various conditions and modes and characterized by the high-resolution x-ray diffraction (XRD) analysis. In this study, the strain modulation is induced by changing parameters and modes, such as the growth temperature, the ratio of V/III beam-equivalent-pressure (BEP), and the growth interruption (GI), and the strain variation is analyzed by measuring the angle separation of 0th-order satellite peak in XRD patterns. The XRD results reveal that the growth temperature and the V/III(Sb/Ga) ratio are major parameters to change the crystallineity and the strain modulation in SLS structures, respectively. We have observed that the SLS samples with compressive strain prepared in this study are show a transition to tensile strain with decreasing V/III(Sb/Ga) ratio, and the GI process is a sensitive factor giving rise to strain modulation. These results obtained in this study suggest that optimized growth temperature and V/III(Sb/Ga) ratio are $350^{\circ}C$ and 20, respectively, and the appropriate GI time is approximately 3 seconds just before InAs growth that the crystallineity is maximized and the strain relaxation is minimized.

Design and Fabrication Optical Interference Filters using Multiple and Inhomogeneous Dielectric Layers (다층 및 불균일 SiON 박막을 이용한 광간섭필터의 설계 및 제작)

  • Lim, Sung kyoo
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.11
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    • pp.44-51
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    • 1995
  • Homogeneous, compositionally graded, and superlattice-like silicon oxynitride(SiON) dielectric layers, with the refractive index varying from 1.46 to 2.05 as a function of film thickness, were grown by computer-controlled plasma-enhanced chemical vapor deposition (PECVD) using silane, nitrogen, and nitrous oxide reactant gases. An antireflection(AR) coating and thin-film electroluminescent(TFEL) devices with multiple dielectrics were designed and fabricated using real time control of reactant gases of the PECVD system.

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MBE Growth and X-ray Analysis of (InAs)n(AlAs)n Short Period Superlattice ((InAs)n(AlAs)n 단주기 초격자의 MBE 성장과 X선화질)

  • 우덕하;우종천
    • Journal of the Korean Vacuum Society
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    • v.1 no.3
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    • pp.395-399
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    • 1992
  • In0.5Al0.5As와 같은 조성을 갖는 합금인 n=1~4인 (InAs)n(AlAs)n 형태의 완벽한 층 상구조의 단주기 초격자를 MBE 방법으로 성장하였다. 저온 PL 측정을 통하여 광학적 특성 을 조사하였으며, Raman 산란실험을 통하여 구조적 특성을 조사하였다. X선화질 실험을 통하여 홀수 번호의 회적을 관측할 수 있었는데 이것은 초격자에 의한 새로운 주기의 형성 을 직접적으로 보여 주는 것이다.

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Crystal Growth and Characterization of Compound Semiconductor Materials (화합물 반도체 재료의 결정성장과 특성평가)

  • 민석기
    • Korean Journal of Crystallography
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    • v.1 no.2
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    • pp.115-125
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    • 1990
  • We have investigated bulk and hetero-epitaxial growth of GaAs single crystal. Various growth techniques such as HB, HZM, and VGF for high quality bulk GaAs were successfully developed by appling the specially designed DM(direct monitoring) furnace. Al GaAs/GaAs superlattice structure and In(x)Ga(1-x) As/GaAs epilayers were also grown by MOCVD and VPE, respectively. The characterization of GaAs single crystals and epilayers was made by X-ray diffraction, Hall effect, PL, chemical etching and angle lapping technique.

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Tunable Narrow-Bandwidth Optical Filter Based on Acoustically Modulated Fiber Bragg Grating (음파에 의한 광섬유 브래그 격자 변조를 이용한 좁은 선폭의 파장가변 광학필터)

  • 염동일;박희수;김병윤
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.07a
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    • pp.198-199
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    • 2003
  • 광섬유 브래그 격자(Fiber Bragg Grating, FBG)는 좁은 선폭과 적은 삽입손실 등의 뛰어난 스펙트럼 특성을 가지고 있어, 고밀도 파장분할 다중화 방식을 이용한 광통신 시스템과 여러 종류의 광섬유센서에 응용되고 있다. 브래그 격자의 광학적 스펙트럼을 능동적으로 조절하기 위하여, 광섬유에 열이나 스트레인을 인가하거나, 음파와 빛의 결합을 이용한 방법이 제안되었으며, 특히 음향 광학 브래그 격자 변조기(Acousto-Optic Superlattice Modulator)는 종 방향 음파(Longitudinal Acoustic Wave)를 이용하여 파장과 크기의 조절이 가능한 사이드 밴드(Side Band)를 생성해 내었다. (중략)

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