• Title/Summary/Keyword: supercritical 2

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Effect of Alcohols on the Dry Etching of Sacrificial SiO2 in Supercritical CO2 (초임계 이산화탄소를 이용한 웨이퍼의 건식 식각에서 알콜 첨가제의 효과)

  • Kim, Do-Hoon;Jang, Myoung-Jae;Lim, Kwon-Taek
    • Clean Technology
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    • v.18 no.3
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    • pp.280-286
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    • 2012
  • The dry etching of sacrificial $SiO_2$ was performed in supercritical carbon dioxide. The etching of boron phosphor silica glass (BPSG), tetraethyl orthosilicate (TEOS), thermal $SiO_2$, and Si-nitride (SiN) was investigated by using a two chamber system with HF/py etchant and alcohol additives. The etch rate of sacrificial $SiO_2$ increased upon the addition of methanol. The etch selectivity of BPSG with respect to SiN was highest with IPA although the highest etch rate was resulted from methanol except BPSG. The etch rate increased with the temperature in HF/py/MeOH system. Especially the increase of the etch rate was much higher for BPSG with an increase in the reaction temperature. The etch residue was not reduced apparently upon the addition of alcohol cosolvents to HF/py. While the etch rate in HF/$H_2O$ was higher than HF/py/alcohol system, the rate decreased with the addition of alcohols to HF/$H_2O$. The cantilever beam structure of high aspect ratios was released by the dry ething in supercritical carbon dioxide without damage.

Evaluation of base shield plates effectiveness in reducing the drag of a rough circular cylinder in a cross flow

  • EL-Khairy, Nabil A.H.
    • Wind and Structures
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    • v.11 no.5
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    • pp.377-389
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    • 2008
  • An experimental investigation has been conducted to determine the effectiveness of base shield plates in reducing the drag of a rough circular cylinder in a cross flow at Reynolds numbers in the range $3{\times}10^4{\leq}Re{\leq}10.5{\times}10^4$. Three model configurations were investigated and compared: a plane cylinder (PC), a cylinder with a splitter plate (MC1) and a cylinder fitted with base shield plates (MC2). Each configuration was studied in the sub and supercritical flow regimes. The chord of the plates, L, ranged from 0.22 to 1.50D and the cavity width, G, between the plates was in the range from 0 to 0.93D. It is recognized that base shield plates can be employed more effectively than splitter plates to reduce the aerodynamic drag of circular cylinders in both the sub- and supercritical flow regimes. For subcritical flow regime, one can get 53% and 24% drag reductions for the MC2 and MC1 models with L/D=1.0, respectively, compared with the PC model. For supercritical flow regime however, the corresponding drag reductions are 38% and 7%.

The applications of ozone-based advanced oxidation processes for wastewater treatment: A review

  • Hussain, Mujtaba;Mahtab, Mohd Salim;Farooqi, Izharul Haq
    • Advances in environmental research
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    • v.9 no.3
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    • pp.191-214
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    • 2020
  • The rise in population and industrialization accounts for the generation of a huge amount of wastewaters. The treatment of this wastewater is obligatory to safeguard the environment and various life forms. Conventional methods for high strength wastewater treatment coming out to be ineffective. Advanced oxidation processes (AOPs) for such wastewater treatment proved to be very effective particularly for the removal of various refractory compounds present in the wastewater. Ozone based AOPs with its high oxidizing power and excellent disinfectant properties is considered to be an attractive choice for the elimination of a large spectrum of refractory compounds. Furthermore, it enhances the biodegradability of wastewaters after treatment which favors subsequent biological treatments. In this review, a detailed overview of the AOPs (like the Fenton process, photocatalysis, Electrochemical oxidation, wet air oxidation, and Supercritical water oxidation process) has been discussed explicitly focusing on ozone-based AOPs (like O3, O3/H2O2, O3/UV, Ozone/Activated carbon process, Ozone/Ultrasound process, O3/UV/H2O2 process). This review also comprises the involved mechanisms and applications of various ozone-based AOPs for effective municipal/industrial wastewaters and landfill leachate treatment. Process limitations and rough economical analysis were also introduced. The conclusive remarks with future research directions also underlined. It was found that ozonation in combination with other effective AOPs and biological methods enhances treatment efficacies. This review will serve as a reference document for the researchers working in the AOPs field particularly focusing on ozone-based AOPs for wastewater treatment and management systems.

A Study on Optimization of Alumina and Catalysts Coating on Tube Reactor for Endothermic Reaction of n-Dodecane Under Supercritical Conditions (고온, 고압 조건에서 n-dodecane 액체연료의 흡열분해를 위한 관벽 내 알루미나 및 촉매 코팅 최적화 연구)

  • Kim, Sung Su;Lee, Sang Moon;Lee, Ye Hwan;Lee, Dong Yoon;Gwak, Ji-Yeong
    • Journal of the Korean Society of Propulsion Engineers
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    • v.25 no.3
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    • pp.56-61
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    • 2021
  • In this study, Al2O3 and H-ZSM-5 were coated on the inner wall of the stainless steel tube for the stable use of liquid hydrocarbon fuel and an endothermic catalyst used as coolant for hypersonic flying vehicles. Coke production is inevitable by the endothermic decomposition reaction of the liquid hydrocarbon fuel, and Fe, Ni metals induce the production of the filamentous coke by using a stainless steel tube reactor as a cooling channel. By coating the stainless steel with H-ZSM-5, Fe and Ni metals are prevented from being directly exposed to the liquid hydrocarbon fuel, and the formation of the filamentous coke is inhibited. In addition, Al2O3 is coated between the stainless steel and H-ZSM-5 to enhance adhesion bond strength.

Numerical Analysis of Phase Behavior and Flow Properties in an Injection Tubing during Gas Phase CO2 Injection : Application of Demonstration-scale Offshore CO2 Storage Project in the Pohang Basin, Korea (기체상태의 CO2 주입시 주입관내 상변화 및 유동 특성의 수치해석적 연구 : 포항분지 해상 중소규모 CO2 지중저장 사업에 적용)

  • Jung, Woodong;Sung, Wonmo;Han, Jeong-Min;Song, Youngsoo;Wang, Jihoon
    • Journal of the Korean Institute of Gas
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    • v.25 no.4
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    • pp.10-18
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    • 2021
  • CO2 storage technology in an aquifer is one of the most effective way to decrease global warming due to a high storage capacity and economics. A demonstration-scale offshore CO2 storage project was performed in a geological deep aquifer in the Pohang Basin, Korea for a technological development of large-scale CO2 storage. A challenging issue in the early design stage of the project was to establish the proper injectivity during CO2 injection. To solve this issue, injection conditions were calculated by calculating injection rate, pressure, temperature, CO2 phase change, and thermodynamic properties. For this study, we simulated and numerically analyzed CO2 phase change from gas to supercritical phase and flow behavior in transport piping and injection tubing using OLGA program. Our results provide the injectivity conditions of CO2 injection system combined with a bottomhole pressure of an aquifer.

Removal of Post Etch/Ash Residue on an Aluminum Patterned Wafer Using Supercritical CO2 Mixtures with Co-solvents and Surfactants: sc-CO2 Mixture for the Removal of Post Etch/Ash Residue

  • You, Seong-sik
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.1
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    • pp.22-28
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    • 2017
  • The result of stripping process for the removal of the post etch/ash Photoresist (PR) residue on an aluminum patterned wafer by using supercritical $CO_2$ ($sc-CO_2$) mixture, was investigated by scanning of electron microscope (SEM) inspection of wafer, measuring the cloud points and visual observation of the state of $sc-CO_2$ mixtures. It was found that $sc-CO_2$ mixtures were made by mixing additives and $sc-CO_2$ should form homogeneous and transparent phase (HTP) in order to effectively and uniformly remove the post etch/ash PR residue on the aluminum patterned wafer using them. The additives were formulated by mixing and co-solvents like an amine compound and fluorosurfactants used as HTP agents, and the PR residue on the wafer were able to be rapidly and effectively removed using the $sc-CO_2$ mixture of HTP. The five kinds of additives were formulated by the recipe of mixing co-solvents and surfactants, which were able to remove PR residue on the wafer by mixing with $sc-CO_2$ at the stripping temperature range from 40 to $80^{\circ}C$. The five kinds of $sc-CO_2$ mixtures which were named as PR removers were made, which were able to form HTP within the above described stripping temperature. The cloud points of $sc-CO_2$ mixtures were measured to find correlation between them and HTP.

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Introduction to supercritical CO2 power conversion system and its development status (초임계 CO2 발전시스템 소개 및 개발동향)

  • Lee, Jeong Ik;Ahn, Yoonhan;Cha, Jae Eun
    • The KSFM Journal of Fluid Machinery
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    • v.17 no.6
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    • pp.95-103
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    • 2014
  • During the international effort to develop the next generation nuclear reactor technologies, many new power cycle concepts were derived to improve efficiency and reduce the capital cost. Among many innovative power cycles, it was identified that the supercritical $CO_2$ (S-$CO_2$) Brayton cycle technology has a big potential to outperform the existing steam cycle and eventually replace it. The S-$CO_2$ cycle achieves high efficiency with very compact size, which is the ultimate advantage for a power cycle to have. The S-$CO_2$ cycle has a great potential not only for the future nuclear applications but also for general heat sources such as coal, natural gas, and concentrated solar. In this paper, a brief introduction to the S-$CO_2$ power cycle technologies will be first provided, and a short summary of current research and development status of the power cycle technology around the world will be followed. Especially the research works performed by KAIST, KAERI and several related research institutions in Korea will be reviewed in more detail, since they have recently developing a strong infrastructure to test these ideas by constructing a demonstration facility while producing many innovative ideas to improve and realize the concept.

Manufacture of Cement-Bonded Particleboards from Korean Pine and Larch by Curing of Supercritical CO2 Fluid

  • Suh, Jin-Suk;Hermawan, Dede;Kawai, Shuichi
    • Journal of the Korean Wood Science and Technology
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    • v.28 no.4
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    • pp.41-50
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    • 2000
  • Cement-bonded particleboard is being used as outdoor siding material all over the world, because this composite particularly bears a light weight, high resistance against fire, decay, and crack by cyclic freezing and thawing, anti-shock property, and strength enhancement. Construction systems are currently changing into a frame-building style and wooden houses are being constructed with prefabrication type. Therefore, they require a more durability at outdoor-exposed sides. In this study, the cement hydration property for Korean pine particle, Japanese larch particle and face- and middle layer particles (designated as PB particle below) used in Korean particleboard-manufacturing company was investigated, and the rapid manufacturing characteristics of cement-bonded particleboard by supercritical $CO_2$ curing was evaluated. Korean pine flour showed a good hydration property, however, larch flour showed a bad one. PB particle had a better hydration property than larch flour. The addition of $Na_2SiO_3$ indicated a negative effect on hydration, however, $MgCl_2$ had a positive one. Curing by supercritical $CO_2$ fluid gave a conspicuous enhancement in the performances of cement-bonded particleboards compared to conventional curing. $MgCl_2$ 3%-added PB particle had the highest properties, and $MgCl_2$ 1%-added Korean pine particle had the second class with the conditions of cement/wood ratio of 2.7, a small fraction-screened particle and supercritical curing. On the contrary, the composition of non-hammermilled or large fraction-screened particle at cement/wood ratio of 2.2 was poorer. Also, the feasibility for actual use of 3%-added, small PB particle-screened fraction was greatest of all the conventional curing treatments. Relative superiority of supercritical curing vs. conventional curing at dimensional stability was not so apparent as in strength properties. Through the thermogravimetric analysis, it was ascertained that the peak of a component $CaCO_3$ was highest, and the two weak peaks of calcium silicate hydrate and ettringite and $Ca(OH)_2$ were present in supercritical treatment. Accordingly, it was inferred that the increased formation of carbonates in board contributes to strength enhancement.

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Preexsiting Suprathermal Electrons and Preacceleration at Quasi-Perpendicular Shocks in Merging Galaxy Clusters

  • Ha, Ji-Hoon;Ryu, Dongsu;Kang, Hyesung;Kim, Sunjung
    • The Bulletin of The Korean Astronomical Society
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    • v.46 no.2
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    • pp.51.1-51.1
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    • 2021
  • Merger shocks with Ms < ~ 3 - 4 have been detected in galaxy clusters through radio observations of synchrotron radiations emitted from cosmic-ray (CR) electrons. The CR electrons are believed to be produced by the so-called diffusive shock acceleration (DSA) at the merger shocks. To describe the acceleration of electrons, the injection into DSA has to be understood. Recent studies have showed that electrons could be energized through stochastic shock drift acceleration (SSDA), a mechanism mediated by multi-scale plasma waves at shock transition zone. However, such preacceleration process seems to be effective only at the supercritical shocks with Ms > ~ 2.3, implying that further studies should be done to explain radio relics with weaker shocks. In this talk, we present the results obtained by fully kinetic 2D particle-in-cell (PIC) simulations, which include pre-existing suprathermal electrons possibly ejected from active galactic nuclei (AGNs) or produced by previous episodes of turbulence/shocks. The simulations indicate that the pre-existing electrons enhance the upstream plasma waves in shocks with Ms < ~ 2.3. However, the wavelength of such waves is not long enough to scatter off suprathermal electrons and energize them to the injection momentum for DSA. Hence, we conclude that preexciting suprathermal electrons alone would not solve the problem of electron acceleration at radio relic shocks.

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