• Title/Summary/Keyword: substrate resistance

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Effect of Annealing in Nitrogen Atmosphere on the Characteristics of Ga Doped ZnO Films (Ga doped ZnO 박막의 질소분위기 열처리에 따른 특성 변화)

  • Heo, Sung-Bo;Lee, Young-Jin;Lee, Hak-Min;Kim, Sun Kwang;Kim, Yu Sung;Kong, Young Min;Kim, Dae-Il
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.6
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    • pp.338-342
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    • 2011
  • Ga doped ZnO (GZO) thin films were deposited with RF magnetron sputtering on glass substrate and then the effect of post deposition annealing at nitrogen atmosphere on the structural, optical and electrical properties of the films was investigated. The post deposition annealing process was conducted for 30 minutes at different temperature of 150, 300 and $450^{\circ}C$, respectively. As increase annealing temperature, GZO films show the increment of the prefer orientation of ZnO (002) diffraction peak in the XRD pattern and the optical transmittance in a visible wave region was also increased, while the electrical sheet resistance was decreased. The figure of merit obtained in this study means that GZO films which vacuum annealed at $450^{\circ}C$ have the highest optoelectrical performance in this study.

Study on Electrical Conductivity, Transmittance and Gas Barrier Properties of DLC Thin Films (DLC 박막의 전기전도성, 투과율 및 가스베리어 특성에 관한 연구)

  • Park, S.B.;Kim, C.H.;Kim, T.G.
    • Journal of the Korean Society for Heat Treatment
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    • v.31 no.4
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    • pp.187-193
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    • 2018
  • In this study, the electrical conductivity, transmittance and gas barrier properties of diamond-like carbon (DLC) thin films were studied. DLC is an insulator, and has transmittance and oxygen gas barrier properties varying depending on the thickness of the thin film. Recently, many researchers have been trying to apply DLC properties to specific industrial conditions. The DLC thin films were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) process. The doping gas was used for the DLC film to have electrical conductivity, and the optimum conditions of transmittance and gas barrier properties were established by adjusting the gas ratio and DLC thickness. In order to improve the electrical conductivity of the DLC thin film, $N_2$ doping gas was used for $CH_4$ or $C_2H_2$ gas. Then, a heat treatment process was performed for 30 minutes in a box furnace set at $200^{\circ}C$. The lowest sheet resistance value of the DLC film was found to be $18.11k{\Omega}/cm^2$. On the other hand, the maximum transmittance of the DLC film deposited on the PET substrate was 98.8%, and the minimum oxygen transmission rate (OTR) of the DLC film of $C_2H_2$ gas was 0.83.

Milling of NiCo Composite Silicide Interconnects using a FIB (FIB를 이용한 니켈코발트 복합실리사이드 미세 배선의 밀링 가공)

  • Song, Oh-Sung;Yoon, Ki-Jeong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.3
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    • pp.615-620
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    • 2008
  • We fabriacted thermal evaporated $10nm-Ni_{1-x}Co_x$(x=0.2, 0.6, and 0.7) films on 70 nm-thick polysilicon substrate with $0.5{\mu}m$ line width. NiCo composite silicide layers were formed by rapid thermal annealing (RTA) at the temperatures of $700^{\circ}C$ and $1000^{\circ}C$. Then, we checked the microstructure evaluation of silicide patterns. A FIB (focused ion beam) was used to micro-mill the interconnect patterns with low energy condition (30kV-10pA-2 sec). We investigated the possibility of selective removal of silicide layers. It was possible to remove low resistance silicide layer selectively with the given FIB condition for our proposed NiCo composite silicides. However, the silicides formed from $Ni_{40}Co_{60}$ and $Ni_{30}Co_{70}$ composition showed void defects in interconnect patterns. Those void defects hinder the selective milling for the NiCo composite silicides.

A study on the Color and Texture of Ti$_{x}$N Coating with Sputtering Condition (Suputtering 조건에 따른 Ti$_{x}$N Coating 층의 색상과 집합조직에 관한 연구)

  • 김학동;조성식
    • Journal of the Korean institute of surface engineering
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    • v.31 no.3
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    • pp.133-141
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    • 1998
  • Stainless is widely used for various purposes due to its good corrosion resistance. There has been much research to produce the color stainless steel by several methods. In this experiment, TixN films have been deposited on the SUS304 substrate by the DC magnetron sputtering system and the color and texture of the films as a function of coating conditions has been studies. The TixN films showed a (111) preferred orintation in bias-free conditions. The texture of coated later was changed from (111) to (200) to (2200 with a change of the bias from -1000V to -3000V. When the bias is low, coated elements have low energy. Therefore, the texturct (111) of low surface energy. The mobility of atoms was increased with the increase of the blas and texture was changed to the other plane. Non-etched specimens all exhibited strong (111) texture. This result shows that (111) is a loose plane and of non-etched specimens all exhibited. High growing velocity of (111) of especially was main texture of Non-etched specimens. Low working pressure($4\times10^{-3}$torr) was more effective than figh working pressure ($6\times10^{-3}$torr) for the gold color of $Ti_xN$ film. L and b were increased and a was decreased with the increase of bias voltage. Accordingly, We obtained the near gold color of $Ti_xN$ film(L;92, a;1~1.5 b:24~29.50. As a result of reflectance. And as the bias increased, the reflectance was proportional to the increasing bias voltage, but we took the top reflectance when the bias voltage was -200V.

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Spray coating of electrochemically exfoliated graphene/conducting polymer hybrid electrode for organic field effect transistor

  • Kim, Youn;Kwon, Yeon Ju;Hong, Jin-Yong;Park, Minwoo;Lee, Cheol Jin;Lee, Jea Uk
    • Journal of Industrial and Engineering Chemistry
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    • v.68
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    • pp.399-405
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    • 2018
  • We report the fabrication of organic field-effect transistors (OFETs) via spray coating of electrochemically exfoliated graphene (EEG) and conducting polymer hybrid as electrodes. To reduce the roughness and sheet resistance of the EEG electrodes, subsequent coating of conducting polymer (poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS)) and acid treatment was performed. After that, active channel layer was developed by spin coating of semiconducting poly(3-hexylthiophene) on the hybrid electrodes to define the bottom gate bottom contact configuration. The OFET devices with the EEG/PEDOT:PSS hybrid electrodes showed a reasonable electrical performances (field effect mobility = $0.15cm^2V^{-1}\;s^{-1}$, on/off current ratio = $10^2$, and threshold voltage = -1.57V). Furthermore, the flexible OFET devices based on the Polydimethlsiloxane (PDMS) substrate and ion gel dielectric layer exhibited higher electrical performances (field effect mobility = $6.32cm^2V^{-1}\;s^{-1}$, on/off current ratio = $10^3$, and threshold voltage = -1.06V) and excellent electrical stability until 1000 cycles of bending test, which means that the hybrid electrode is applicable to various organic electronic devices, such as flexible OFETs, supercapacitors, organic sensors, and actuators.

Properties of UV Curable Coating Film Containing Colloidal Silica Acrylate (콜로이드실리카아크릴레이트를 함유한 자외선 경화형 코팅필름의 특성)

  • Lee, Bong-Woo;Hong, Jin-Who;Bang, Moon-Soo;Oh, Hyung-Sik;Kim, Dae-Jun;Kim, Hyun-Joong
    • Journal of Adhesion and Interface
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    • v.4 no.1
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    • pp.9-17
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    • 2003
  • The UV hard coating materials are attracting more and more attention to modern industry, in terms of the development of low or non solvent coating materials which will contribute to economizing both materials and energy and to reducing pollution. This study was performed in order to invent UV curable coating materials containing colloidal silica which have actual industrial applications. As results of experiments, the oligomers type and the concentration of colloidal silica acrylate oligomer (SAOC) have an influence on various especially, The properties of UV hardening cooling, such as chemical, abrasion resistance and weatherability, were greatly enhanced, the impact properties of coated polycarbonate substrate were improved compared with the noncoated that. The UV cured films containing 30 wt% SAOC obtained showed the best properties.

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A Study on the Tribological Characteristics of Low Friction Coating Deposited on SUJ2 Bearing Steel (고탄소크롬 베어링강 2종(SUJ2) 베어링강에 증착된 저마찰 코팅의 트라이볼로지적 특성 연구)

  • Kang, Kyung-Mo;Shin, Dong-Gap;Park, Young-Hun;Kim, Se-Woong;Kim, Dae-Eun
    • Tribology and Lubricants
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    • v.34 no.6
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    • pp.254-261
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    • 2018
  • In order to reduce resistance torque and energy loss, minimizing friction between race surface and rolling elements of a bearing is necessary. Recently, to reduce friction in bearing element, solid lubricant coating for the bearing raceway surface has been receiving much attention. Considering the operating conditions of real bearings, verifying the effect of solid lubricant coatings under extreme conditions of high load that is more than 1 GPa is necessary. In this study, we evaluated the friction and wear characteristics of SUJ2 bearing steels deposited by carbon-based coatings (Si-DLC, ta-C), $MoS_2$ and graphite. In case of $MoS_2$ and graphite coatings, different surface treatments were applied to the coatings to verify the effect of surface treatment. A pin-on-disc type tribotester was used to evaluate the tribological characteristics of the coatings. It was possible to quantitatively estimate the friction and wear characteristics of solid lubricant under dry and lubrication conditions. The carbon-based coatings improved the friction and wear properties of SUJ2 bearing steels under the high load condition, but $MoS_2$ and graphite coatings were not suitable for high load conditions due to its low hardness. Different friction and wear behaviors were found for different substrate surface treatment method. Also, it was confirmed that solid lubricant coatings had a more positive effect than just applying the lubricant for improving the tribological characteristics.

Development of a Label-Free LC-MS/MS-Based Glucosylceramide Synthase Assay and Its Application to Inhibitors Screening for Ceramide-Related Diseases

  • Fu, Zhicheng;Yun, So Yoon;Won, Jong Hoon;Back, Moon Jung;Jang, Ji Min;Ha, Hae Chan;Lee, Hae Kyung;Shin, In Chul;Kim, Ju Yeun;Kim, Hee Soo;Kim, Dae Kyong
    • Biomolecules & Therapeutics
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    • v.27 no.2
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    • pp.193-200
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    • 2019
  • Ceramide metabolism is known to be an essential etiology for various diseases, such as atopic dermatitis and Gaucher disease. Glucosylceramide synthase (GCS) is a key enzyme for the synthesis of glucosylceramide (GlcCer), which is a main ceramide metabolism pathway in mammalian cells. In this article, we developed a liquid chromatography-tandem mass spectrometry (LC-MS/MS) method to determine GCS activity using synthetic non-natural sphingolipid C8-ceramide as a substrate. The reaction products, C8-GlcCer for GCS, could be separated on a C18 column by reverse-phase high-performance liquid chromatography (HPLC). Quantification was conducted using the multiple reaction monitoring (MRM) mode to monitor the precursor-to-product ion transitions of m/z $588.6{\rightarrow}264.4$ for C8-GlcCer at positive ionization mode. The calibration curve was established over the range of 0.625-160 ng/mL, and the correlation coefficient was larger than 0.999. This method was successfully applied to detect GCS in the human hepatocellular carcinoma cell line (HepG2 cells) and mouse peripheral blood mononuclear cells. We also evaluated the inhibition degree of a known GCS inhibitor 1-phenyl-2-decanoylamino-3-morpholino-1-propanol (PDMP) on GCS enzymatic activity and proved that this method could be successfully applied to GCS inhibitor screening of preventive and therapeutic drugs for ceramide metabolism diseases, such as atopic dermatitis and Gaucher disease.

Development of New Stacked Element Piezoelectric Polyvinylidene Fluoride Pressure Sensor for Simultaneous Heartbeat and Respiration Measurements (PVDF 압전소자를 이용한 심장박동 및 호흡수 동시측정센서개발)

  • Park, Chang-Yong;Kweon, Hyun-Kyu;Lee, So-Jin;Manh, Long-Nguyen
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.18 no.4
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    • pp.100-108
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    • 2019
  • In this paper, a new stacked element pressure sensor has proposed for heartbeat and respiration measurement. This device can be directly attached to an individual's chest; heartbeat and respiration are detected by the pulsatile vibration and deformation of the chest. A key feature of the device is the simultaneous measurement of heart rate and respiration. The structure of the sensor consists of two stacked elements, in which one element includes one polyvinylidene fluoride (PVDF) thin film bonded on polydimethylsiloxane (PDMS) substrate. In addition, for the measurement and signal processing, the electric circuit and the filter are simply constructed with an OP-amp, resistance, and a capacitor. One element (element1, PDMS) maximizes the respiration signal; the other (element2, PVDF) is used to measure heartbeat. Element1 and element2 had sensitivity of 0.163V/N and 0.209V/N, respectively, and element2 showed improved characteristics compared with element1 in response to force. Thus, element1 and element2 were optimized for measuring respiration heart rate, respectively. Through mechanical and vivo human tests, this sensor shows the great potential to optimize the signals of heartbeat and respiration compared with commercial devices. Moreover, the proposed sensor is flexible, light weight, and low cost. All of these characteristics illustrate an effective piezoelectric pressure sensor for heartbeat and respiration measurements.

Wear of 3D printed and CAD/CAM milled interim resin materials after chewing simulation

  • Myagmar, Gerelmaa;Lee, Jae-Hyun;Ahn, Jin-Soo;Yeo, In-Sung Luke;Yoon, Hyung-In;Han, Jung-Suk
    • The Journal of Advanced Prosthodontics
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    • v.13 no.3
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    • pp.144-151
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    • 2021
  • PURPOSE. The purpose of this in vitro study was to investigate the wear resistance and surface roughness of three interim resin materials, which were subjected to chewing simulation. MATERIALS AND METHODS. Three interim resin materials were evaluated: (1) three-dimensional (3D) printed (digital light processing type), (2) computer-aided design and computer-aided manufacturing (CAD/CAM) milled, and (3) conventional polymethyl methacrylate interim resin materials. A total of 48 substrate specimens were prepared. The specimens were divided into two subgroups and subjected to 30,000 or 60,000 cycles of chewing simulation (n = 8). The wear volume loss and surface roughness of the materials were compared. Statistical analysis was performed using one-way analysis of variance and Tukey's post-hoc test (α=.05). RESULTS. The mean ± standard deviation values of wear volume loss (in mm3) against the metal abrader after 60,000 cycles were 0.10 ± 0.01 for the 3D printed resin, 0.21 ± 0.02 for the milled resin, and 0.44 ± 0.01 for the conventional resin. Statistically significant differences among volume losses were found in the order of 3D printed, milled, and conventional interim materials (P<.001). After 60,000 cycles of simulated chewing, the mean surface roughness (Ra; ㎛) values for 3D printed, milled, and conventional materials were 0.59 ± 0.06, 1.27 ± 0.49, and 1.64 ± 0.44, respectively. A significant difference was found in the Ra value between 3D printed and conventional materials (P=.01). CONCLUSION. The interim restorative materials for additive and subtractive manufacturing digital technologies exhibited less wear volume loss than the conventional interim resin. The 3D printed interim restorative material showed a smoother surface than the conventional interim material after simulated chewing.