• 한국군사과학기술학회지
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• 제6권3호
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• pp.44-53
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• 2003

Cu/C films were prepared at room temperature under $Cu(hfac)_2-Ar-H_2$ atmosphere in order to obtain metallized polymer by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The room temperature MOCVD on polymer substrate could be possible by collaboration of ECR and a DC bias. Structural analysis of the films by ECR was found that fine copper grains embedded in an amorphous polymer matrix with indistinctive interfacial layer. The increase in $H_2$ contents brought on copper-rich film formation with low electric resistance. On the other hand carbon-rich films with low sheet electric resistance were prepared in argon atmosphere. The electric sheet resistance of Cu/C films with good interfacial property were controlled at $10^8$~$10^0$ Ohm/sq. ranges by the $H_2$/Ar mole ratio and the shielding effectiveness of the film showed maximum up to 45dB in the our experimental range.

• Corrosion Science and Technology
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• 제7권6호
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• pp.301-306
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• 2008

Surface composite layers of 1.9~2.9 mm in thickness were fabricated by depositing metamorphic powders on a carbon steel substrate and by irradiating with a high-energy electron beam. In the surface composite layers, 48~64 vol.% of $Cr_{2}B$ or $Cr_{1.65}Fe_{0.35}B_{0.96}$ borides were densely precipitated in the austenite or martensite matrix. These hard borides improved the hardness of the surface composite layer. According to the otentiodynamic polarization test results of the surface composites, coatings, STS304 stainless steel, and carbon steel substrate, the corrosion potential of the surface composite fabricated with 'C+' powders was highest, and its corrosion current density was lowest, while its pitting potential was similar to that of the STS304 steel. This indicated that the overall corrosion resistance of the surface composite fabricated with 'C+' powders was the best among the tested materials. Austenite and martensite phases of the surface composites and coatings was selectively corroded, while borides were retained inside pits. In the coating fabricated with 'C+' powders, the localized corrosion additionally occurred along splat boundaries, and thus the corrosion resistance of the coating was worse than that of the surface composite.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.338-338
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• 2007

Photo-conductive properties of CdS films deposited on glass substrates by a reactive sputtering in Ar atmosphere were characterized as a function of working pressure and the film thickness. The XRD measurements of CdS films revealed obvious (002) preferred orientation. In 300nm-thick of films, difference between dark and photo-resistance increases with increasing working pressure within the films. The films at 5 mTorr of working pressure show a dark resistance of approximately $1\;{\times}\;10^6\;{\Omega}/{\square}$ and a photo-resistance of $3\;{\times}\;10^4\;{\Omega}/{\square}$. The decrease dark- and photo-resistance of films as thickness decrease were $1.4\;{\times}\;10^6$ and $3\;{\times}\;10^4\;{\Omega}/{\square}$, respectively. CdS films deposited on glass substrates are considered tobe suitable for photo-conductivity materials in stealth radome applications.

• 한국표면공학회지
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• 제52권3호
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• pp.156-162
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• 2019

Electroless Ni-P coatings are widely used in the chemical, mechanical, and electronic industries because of their excellent wear and abrasion resistance. In this study, The influence of pH values on properties of Ni-P-PTFE composite coatings was investigated. To improve mold lubrication, Ni-P-PTFE composite coatings at different pH value were studied. The morphology and phase structure of Ni-P-PTFE composite coatings were analyzed by scanning electron microscopy(SEM) and X-ray diffractometry(XRD). The result showed that Ni-P-PTFE composite coating is composed of Ni, P and PTFE. It exhibits an amorphous structure and good Corrosion Resistance to the substrate. Ni-P-PTFE composite coatings have higher open circuit potential than that of the substrate, which obtained at pH value of 5.0 optimal integrated properties.

• 한국재료학회지
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• 제31권8호
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• pp.439-444
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• 2021

The oxidation resistance of the diffusion aluminide bond coat (BC) is compromised largely by interdiffusion (ID) effects on coated turbine blades of aeroengines. The present study is designed to understand the influence of ID on βNiAl coatings or BC. In this regard, nickel substrate and CMSX-4 superalloy are deposited. In total, four sets of BCs are developed, i.e. pure βNiAl (on Ni substrate), simple βNiAl (on CMSX-4 substrate), Zr-βNiAl (on CMSX-4 substrate) and Pt-βNiAl (on CMSX-4 substrate). The main aim of this study is to understand the interdiffusion of Al, Zr and Pt during preparation and oxidation. In addition, the beneficial effects of both Zr and platinum are assessed. Pure βNiAl and simple βNiAl show Ni-out-diffusion, whereas for platinum inward diffusion to the substrate is noticed under vacuum treatment. Interestingly, Zr-βNiAl shows the least ID in all BCs and exhibit stability under both vacuum and oxidation treatments. However, its spallation resistance is slightly lower than that of Pt-βNiAl BC. All BCs show similar oxide growth trends, except for Zr-βNiAl, which exhibits two-stage oxidations, i.e. transient and steady-state. Moreover, it is suggested that the localized spallation in all BCs is caused by βNiAl - γ'-Ni₃Al transformation.

• 한국재료학회지
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• 제29권11호
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• pp.670-676
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• 2019

We study substrate support structures and materials to improve uptime and shorten preventive maintenance cycles for chemical vapor deposition equipment. In order to improve the rolling of the substrate support, the bushing device adopts a ball transfer method in which a large ball and a small ball are mixed. When the main transfer ball of the bushing part of the substrate support contacts the substrate support, the small ball also rotates simultaneously with the rotation of the main ball, minimizing the resistance that can be generated during the vertical movement of the substrate support. As a result of the improvement, the glass substrate breakage rate is reduced by more than 90 ~ 95 %, and the equipment preventive maintenance and board support replacement cycles are extended four times or more, from once a month to more than four months, and the equipment uptime is at least 15 % improved. This study proposes an optimization method for substrate support structure and material improvement of chemical vapor deposition equipment.

• Corrosion Science and Technology
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• 제15권3호
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• pp.120-124
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• 2016

The effect of alloying element Ca (0, 1, and 2 wt%) on corrosion resistance and bioactivity of the as-received and anodized surface of rolled plate AM60 alloys was investigated. A plasma electrolytic oxidation (PEO) was carried out to form anodic oxide film in $0.5mol\;dm^{-3}\;Na_3PO_4$ solution. The corrosion behavior was studied by polarization measurements while the in vitro bioactivity was tested by soaking the specimens in Simulated Body Fluid (1.5xSBF). Optical micrograph and elemental analysis of the substrate surfaces indicated that the number of intermetallic particles increased with Ca content in the alloys owing to the formation of a new phase $Al_2Ca$. The corrosion resistance of AM60 specimens improved only slightly by alloying with 2 wt% Ca which was attributed to the reticular distribution of $Al_2Ca$ phase existed in the alloy that might became barrier for corrosion propagation across grain boundaries. Corrosion resistance of the three alloys was significantly improved by coating the substrates with anodic oxide film formed by PEO. The film mainly composed of magnesium phosphate with thickness in the range $30-40{\mu}m$. The heat resistant phase of $Al_2Ca$ was believed to retard the plasma discharge during anodization and, hence, decreased the film thickness of Ca-containing alloys. The highest apatite forming ability in 1.5xSBF was observed for AM60-1Ca specimens (both substrate and anodized) that exhibited more degradation than the other two alloys as indicated by surface observation. The increase of surface roughness and the degree of supersaturation of 1.5xSBF due to dissolution of Mg ions from the substrate surface or the release of film compounds from the anodized surface are important factors to enhance deposition of Ca-P compound on the specimen surfaces.

• 마이크로전자및패키징학회지
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• 제24권3호
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• pp.19-26
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• 2017

Polydimethylsiloxane (PDMS) 기판과 금속박막 사이의 중간층으로 parylene F를 사용한 신축패키지 구조에서 Au, Pt, Cu 박막의 신축변형에 따른 저항변화를 분석하였다. Parylene F 중간층을 코팅한 PDMS 기판에 스퍼터링한 150 nm 두께의 Au 박막과 Pt 박막은 각기 $1.56{\Omega}$ 및 $5.53{\Omega}$의 초기저항을 나타내었으며, 30% 인장변형률에서 각 박막의 저항증가비 ${\Delta}R/R_o$은 각기 7 및 18로 측정되었다. Cu 박막은 $18.71{\Omega}$의 높은 초기저항을 나타내었으며 인장변형에 따라 저항이 급격히 증가하다 5% 인장변형률에서 open 되어, Au 박막과 Pt 박막에 비해 매우 열등한 신축 특성을 나타내었다.

• 생명과학회지
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• 제18권1호
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• pp.69-74
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• 2008

국내에서 사육중인 말에서 채취한 시료로부터 Stapylococcus aureus를 분리 동정한 결과 39.2%(58/148)의 분리율을 나타내었다. S. aureus의 혈장응고효소 생산능 시험에서는 98.3%가 양성반응을 나타내었고 신선 혈장의 희석농도는 1:2에서 가장 높은 양성반응을 나타내었다. 본 연구에서 최종 동정된 S. aureus의 기본적인 생화학 성상은 일반적으로 알려져 있는 S. aureus의 특성과 유사한 결과를 얻을 수 있었으나, urease test의 경우 전체 균주의 73% 만이 양성 결과를 나타내어 균주별로 다양한 반응 양상을 관찰 할 수 있었다. 또한 34종의 substrate에 대한 분해 양상에 대한 검사 결과 fructose, maltose, ${\alpha}$-hydroxy butyric acid, thymidine-5'-mono phosphate, uridine-5'-mono phosphate 등의 substrate에 대해서는 모든 균주가 이용능력을 가지고 있었지만 ribose, sorbitol, xylose, xylitol 등의 substrate에 대해서는 모든 균주가 기질 이용능력을 가지고 있지 않는 것으로 확인되었다. 그리고 PCR에 의한 S. aureus를 동정한 결과 108bp 크기의 band를 확인하였다. 국내 말에서 분리한 58주의 S. aureus에 대한 약제 내성 양상을 조사한 결과 spectinomycin, sulfonamides, erythromycin, tetracyclin, ciprofloxacin, neomycin, enofloxacin, penicillin 등의 약제에 높은 저항성을 나타내었다.

• 한국인터넷방송통신학회논문지
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• 제15권6호
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• pp.231-238
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• 2015

본 연구는 RF 마그네트론 스퍼터링을 이용하여 ITO glass 위에 N-Type과 P-Type 박막을 증착하여 증착조건에 따른 면저항 특성을 확인하였다. N-Type의 I-V특성은 RF Power가 150 W 일 때 전류의 값이 가장 높은 것으로 나타났고, 15분을 증착하였을 때 기울기가 일정하게 나타나면서 Ohmic contact이 잘 이루어지는 것을 확인 할 수 있었다. 기판온도와 RF Power 및 증착시간이 증가함에 따라 면저항이 증가하는 것으로 나타났고, 면저항이 작은 값일수록 I-V 특성이 잘 나타났다. P-Type 에서도 N-Type과 비슷한 양상을 보이는데, RF Power가 150 W일때 전류가 가장 높은 것으로 나타났고, 20분을 증착하였을 때 Ohmic contact이 잘 이루어지는 것을 확인 할 수 있었다. 면 저항 또한 N-Type과 비슷하게 RF Power와 증착시간이 증가함에 따라 면저항이 증가하는 것을 확인 할 수 있었다.