• 한국진공학회지
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• 제19권3호
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• pp.190-198
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• 2010

450 mm의 웨이퍼 공정용 플라즈마 장비의 개발을 위하여 안테나 형상, 챔버의 직경, 웨이퍼까지의 거리에 따른 플라즈마 균일도를 Ar과 $CF_4$에 대하여 축대칭 2차원으로 수치 모델링하였다. 챔버의 종횡비를 직경, 기판까지의 거리, 배기구의 면적으로 나누어서 결정하고 여기에 안테나 구조를 변경하여서 최적의 플라즈마 균일도를 갖는 조건을 도출하였다. Drift diffusion식과 준중성 조건을 이용한 간략화를 이용하였으며 표면 재결합과 식각 반응을 이온에너지의 함수로 처리하였다. 반응기판 표면에서의 플라즈마 밀도 균일도는 기판 홀더와 챔버 벽면과의 거리, 기판과 소스와의 거리가 멀수록 좋아졌으며, 안테나의 디자인이 4 turn으로 1층인 경우, 두 번째, 네 번째 turn만 사용하여 전류비 1 : 4에서 기판표면에서의 플라즈마 균일도를 4.7%까지 낮출 수 있었다. Ar과 $CF_4$의 반경 방향으로 전자 온도 균일도 50%, 전자 밀도 균일도 19%의 차이가 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.80-83
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• 2003

Transcribability of pit or land groove structures in replicating an optical disk substrate greatly affects the performance of a high-density optical disk. However, a solidified layer, generated during the polymer filling, deteriorates transcribability because the solidified layer prevents the polymer melt in filling the sub-micro patterns. Therefore, the development of the solidified layer during filling stage of injection molding must be delayed. For this delay, passive heating by insulation layer has been used. In the present study, to examine the development of the solidified layer delayed by passive heating, the flow of polymer melt with passive heating was analyzed. Passive heating markedly delayed the development of the solidified layer, reduced the viscosity of the polymer melt, and increased the fluidity of the polymer melt in the vicinity of the stamper surface with the sub-micro patterns. As a result, we predict that passive heating can improve transcribability of an optical disk substrate. To verify our prediction, we fabricated an optical disk substrate by using passive heating of a mold and measured the transcribability.

• BMB Reports
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• 제45권8호
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• pp.452-457
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• 2012

Diketoreductase (DKR) from Acinetobacter baylyi contains two tryptophan residues at positions 149 and 222. Trp-149 and Trp-222 are located along the entry path of substrate into active site and at the dimer interface of DKR, respectively. Single and double substitutions of these positions were generated to probe the roles of tryptophan residues. After replacing Trp with Ala and Phe, biochemical and biophysical characteristics of the mutants were thoroughly investigated. Enzyme activity and substrate binding affinity of W149A and W149F were remarkably decreased, suggesting that Trp-149 regulates the position of substrate at the binding site. Meanwhile, enzyme activity of W222F was increased by 1.7-fold while W222A was completely inactive. In addition to lower thermostability of Trp-222 mutants, molecular modeling of the mutants revealed that Trp-222 is vital to protein folding and dimerization of the enzyme.

• 전자공학회논문지D
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• 제36D권5호
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• pp.54-61
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• 1999

SPICE MOS 모델을 외부 다이오드를 추가하는 방식을 사용하여, 기판 분포저항을 고려한 MOS 트랜지스터의 매크로 모델 형태를 제안하였다. 본 매크로 모델을 사용하여 W=200㎛, L=0.8㎛의 NMOS 트랜지스터를 기준으로 시행한 s-파라미터의 시뮬레이션치를 s-파라미터 측정치에 fitting 하는 과정을 통해 RF 영역에 적용 가능한 모델 세트를 확보하고 RF 영역에서의 기판 저항의 분포 효과를 분석하였다. s-파라미터로부터 환산된 AC 저항 및 커패시턴스와 같은 물리적 파리미터의 시뮬레이션치를 측정치와 비교함으로써 시뮬레이션된 s-파라미터의 신빙성을 확인하였다. 10GHz 이하의 주파수 영역에 대해서는 접합 다이오드가 포함되어 있는 기존 SPICE의 MOS 모델을 그대로 사용하고 게이트 노드와 기판 노드에 적절한 lumped 저항 한 개씩을 추가하는 간단한 형태의 매크로 모델을 사용하는 것이 적절하다고 판단된다.

• 전자공학회논문지T
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• 제36T권2호
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• pp.8-13
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• 1999

본 논문은 MOSFET에서 2차원적 전위분포가 채널방향을 따라 준-선형적으로 변한다는 GCA(Gradual Channel Approximation)를 진성영역에서 수직 공핍층 폭이 준-선형적으로 변한다는 가정으로 대치하여 단채널 MOSFET에서도 적용 가능한 문턱전압의 해석적 모형을 제안하였다. 제안된 문턱전압 표현식은 유효 채널길이, 드레인전압, 기판(substrate) 바이어스 전압, 기판 도핑농도, oxide 두께 등에 대한 의존성을 통합적으로 나타내었으며, 계산된 결과는 BSIM3v3의 결과와 유사한 경향을 보이고 있다.

• Journal of Microbiology and Biotechnology
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• 제25권1호
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• pp.44-49
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• 2015

Thermostable enzymes derived from Thermotoga maritima have attracted worldwide interest for their potential industrial applications. Structural analysis and docking studies were preformed on T. maritima β-glucosidase enzyme with cellobiose and pNP-linked substrates. The 3D structure of the thermostable β-glucosidase was downloaded from the Protein Data Bank database. Substrates were downloaded from the PubCehm database and were minimized using MOE software. Docking of BglA and substrates was carried out using MOE software. After analyzing docked enzyme/substrate complexes, it was found that Glu residues were mainly involved in the reaction, and other important residues such as Asn, Ser, Tyr, Trp, and His were involved in hydrogen bonding with pNP-linked substrates. By determining the substrate recognition pattern, a more suitable β-glucosidase enzyme could be developed, enhancing its industrial potential.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1912-1915
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• 2007

The disjoining pressure is critical in modeling the transport phenomena in small scales. They are very useful in characterizing the non-continuum effects that are not negligible in heat and mass transports in the film of less than submicro-scales. We present he disjoining pressure of thin film absorbed on solid substrate using Molecular Dynamics Simulation (MD). The disjoining pressure with respect to the film thickness is accurately calculated in the resolution of a molecular scale. The characteristics of the pressure are discussed regarding the molecular nature of the fluid system like molecular diameter and intermolecular interaction. Also, the MD results are compared with those based on the macroscopic approximation of the slab-like density profile. Significant discrepancy is observed when the effective film thickness is less than several molecular diameter

• 전기학회논문지
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• 제59권1호
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• pp.108-112
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• 2010

Design of experiment (DOE) method is employed for a systematic and highly efficient optimization of Ga-doped ZnO thin films synthesized by pulsed laser deposition (PLD) process. We sequentially adopted fractional-factorial design (FD) and central composite design (CCD) of the DOE methods. In fractional-FD stage, significant factors to make conductive electrode are found to target-substrate (T-S) distance and oxygen partial pressure. Moreover, correlation among the process factors is elucidated using surface profile modeling. Electrical properties of the GZO films grown on a glass substrate had been optimized to find that the lowest electrical resistivity of about $1.8'10^{-4}Wcm$ which was acquired with the T-S distance and the oxygen pressure of 4 cm and 7 mTorr, respectively. During the DOE-fueled optimization process, the transparency of the GZO films is ensured higher than 85 %.

• 소성∙가공
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• 제13권3호
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• pp.230-235
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• 2004

A new design based on the appropriate geometry of molded part and type of runner system under the optimal processing conditions was proposed to minimize the micro weld lines on the sub deco surface molded by two shot molding. Theoretical and experimental studies were conducted to examine the cause of the weld lines during the overmolding process in two shot molding. Various dimensions and geometries of substrate$(1^{st}shot)$ and the wall thickness of overmold$(2^{nd}shot)$ have been proposed to avoid the weld lines which are the most inevitable appearance defects occurred on the sub deco. The each design proposal was analyzed by mold flow analysis after part modeling. The analysis results were compared with molded part from mass production tool. It could be seen that from the analysis that the proper geometry of plastic part and type of runner system considering pressure drop under the optimal processing conditions were the most influential factors to avoid weld lines occured on the sub deco.

• Structural Engineering and Mechanics
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• 제64권6권
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• pp.683-693
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• 2017

According to a generalized nonlocal strain gradient theory (NSGT), dynamic modeling and free vibrational analysis of nanoporous inhomogeneous nanoplates is presented. The present model incorporates two scale coefficients to examine vibration behavior of nanoplates much accurately. Porosity-dependent material properties of the nanoplate are defined via a modified power-law function. The nanoplate is resting on a viscoelastic substrate and is subjected to hygro-thermal environment and in-plane linearly varying mechanical loads. The governing equations and related classical and non-classical boundary conditions are derived based on Hamilton's principle. These equations are solved for hinged nanoplates via Galerkin's method. Obtained results show the importance of hygro-thermal loading, viscoelastic medium, in-plane bending load, gradient index, nonlocal parameter, strain gradient parameter and porosities on vibrational characteristics of size-dependent FG nanoplates.