• Journal of Mechanical Science and Technology
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• 제17권9호
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• pp.1268-1275
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• 2003

In this paper, a compact 3-DOF mobile microrobot with sub-micron resolution is presented. It has many outstanding features : it is as small as a coin ; its precision is of sub-micrometer resolution on the plane ; it has an unlimited travel range ; and it has simple and compact mechanisms and structures which can be realized at low cost. With the impact actuating mechanism, this system enable both fast coarse motion and highly precise fine motion with a pulse wave input voltage controlled. The 1 -DOF impact actuating mechanism is modeled by taking into consideration the friction between the piezoelectric actuator and base. This modeling technique is extended to simulate the motion of the 3-DOF mobile robot. In addition, experiments are conducted to verify that the simulations accurately represent the real system. The modeling and simulation results will be used to design the model-based controller for the target system. The developed system can be used as a robotic positioning device in the micromanipulation system that determines the position of micro-sized components or particles in a small space, or assemble them in the meso-scale structure.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2008년도 International Symposium on Remote Sensing
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• pp.336-339
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• 2008

Monthly mean data of Angstrom exponent and Aerosol optical thickness (AOT) from Sea-viewing Wide Field-of-view Sensor (SeaWiFS) measurements over the East Asian waters were analyzed. Increasing trend of the satellite-derived Angstrom exponent was found over 1998-2006 while AOT mean was observed stable during the same period. Statistical test showed that annual increase in Angstrom exponent of about 0.01 is statistically significant over three study sub-areas out of six surrounding waters of Japan. Comparison with Aqua/MODIS-derived Angstrom exponent time series over June 2002 through June 2008 showed consistent correlation, with similar statistical significance. The trend of Angstrom exponent was interpreted as increase in fraction of small aerosol particles to give quantitative estimates on the variability of aerosols. The mean increase is evaluated to be about +0.35%/yr or more in terms of the contribution of small particles to the total AOT, or sub-micron fraction (SMF).

• 천문학회보
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• 제41권1호
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• pp.48.3-49
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• 2016

Current high-resolution IR spectroscopy at ground-based observatories made it possible to observe $3-{\mu}m\;CH_4$ emission lines from the atmospheres of Jupiter, Saturn, and Titan through narrow atmospheric windows avoiding the counterparts of telluric $CH_4$ absorptions if proper Doppler shifts betwen Earth and these planetary objects are provided. We are also expecting low-resolution (R~300) infrared spectra of Jupiter from the upcoming observations by JUNO's infrared $2-5{\mu}m$ spectrograph during the encounter with Jupiter approximately starting from July 4, 2016. Although the spectral resolution is not enough to resolve the $3-{\mu}m$ P, Q, R branch lines of CH4, the gross envelopes of the P, Q, R branches should yield information on rotational temperatures. The rotational temperatures are useful because theycan be regarded as local temperatures, as discussed by Kim et al. (2014). Since the $3-{\mu}m\;CH_4$ emission is mostly formed at micro-bar pressure levels, the derived rotational temperatures represent the local temperatures near the hompause of Jupiter. We discuss possible sciences from the derived homopause temperatures in the auroral and non-auroral regions of Jupiter.

• 대한기계학회논문집B
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• 제29권4호
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• pp.504-511
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• 2005

The generation of fine relics of inorganic and metallic materials from precursor suspensions is of significant current interest as it holds the key to the fabrication of display and printed circuit board. Some novel printing methods depositing ceramic particles have been suggested in recent years. When a conducting liquid is supplied to a capillary nozzle at a low flow rate and when the interface between air and the liquid is charged to a sufficiently high electrical potential, the liquid meniscus takes the form of a stable cone, whose apex emits a microscopic jet. This is called as a cone-jet mode. In our experiments, an alumina particles flowing through a nozzle were subjected to electro-hydrodynamic printing in the cone-jet mode. The pattern of 'YONSEI' characters was tested at $10 {\mu}l/min$ of alumina ink flow rate and different applied voltages. At an applied voltage of 6 kV, feature size was in the range of $250 {\mu}m.$

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.31.2-31.2
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• 2011

We studied a method of manufacturing an anode to restrict contraction in reducing NiO/YSZ by uniformly mixing. In order to mix Ni and YSZ, a sub-micron Ni core surface was coated at high-speed by a mixture of nano-sized YSZ and a spherical core-shell was subsequently formed. The micron-sized core-shell anode powder was then heat treated at $400{\sim}1,450^{\circ}C$ in an air atmosphere and Ni was extruded and synthesized in nano-size. Subsequently, when the nano-sized mixture of the anode was heat treated and maintained at a temperature of $1,450^{\circ}C$, the anode was manufactured, where Ni and YSZ were uniformly distributed with the nano-structure. According to the nano-sized anode powder synthesis process, Ni particles were oxidized at $400{\sim}500^{\circ}C$ and became spherical by surface tension. In the case of the spherical core Ni powder, the heat treatment temperature rose to $1,250^{\circ}C$ and then a gap between the internal and external pressures occurred due to thermal and tensile stresses. A crack subsequently appeared on the surface, and the heat treatment temperature was increased continuously to increase the pressure gap and then the core Ni extruded as a nano-sized powder, Ni and YSZ uniformly distributed. It was found that the anode of 50~200 nm with a consistent structure obtained in this study has electric conductivity that is approximately 3 times larger than that of a commercial anode.

• 자원리싸이클링
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• 제7권5호
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• pp.13-18
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• 1998

전기로 제강분진의 물성을 파악하기 위하여 분진의 성분, 형상, 입도, 자성, 비중, 공극율 및 용출에 관한 성질을 조사하였다. 분진의 대부분은 서브 마이크론에서 수십 마이크론에 이르는 다양한 크기의 구형입자들이 서로 응집된 상태이고, 큰 입자에는 철분이 그리고 작은 입자에는 아연이 주로 농집되며, XRD 분석으로는 franklinite(${ZnFe}_{2}{O}_{4}$), magnetite(${Fe}_{3}{O}_{4}$), zincite(ZnO) 등의 결정이 확인된다. 분진을 습식으로 체가름하였을 때에 +200 mesh의 입단은 1.5% 정도이고 magnetite와 quartz의 결정을 함유하며, 200∼500 mesh는 magnetite, franklinite, zincite가 혼재되고, 분진의 약 82%를 차지하는 -500 mesh에는 franklinite와 zincite의 결정이 혼재한다. 공극율이 78% 정도인 분진을 약 1㎪로 압착하면 공극율은 68% 정도가 되고, 약 13㎪로 압착하면 53% 정도로 된다. 제강분진을 폐기물 처리공정 시험방법에 따라 용출시켰을 때에 허용기준치를 초과한 중금속은 카드뮴, 납, 수은이었다.

• 한국광학회지
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• 제21권1호
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• pp.6-11
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• 2010

아크릴레이트계 모노머를 사용한 최적화 된 포토폴리머에 안트라센 형광폴리머를 첨가하여 형광 특성을 가지는 포토폴리머를 제조하고, 514 nm 레이저를 이용하여 2-beam coupling 방법으로 형광 포토폴리머 필름 위에 회절격자를 형성하였다. 기록 시작 후 30초 이내에 선명한 fluorescent line pattern 이 형성되었으며, 회절격자 형성 뒤, 패턴이 형성된 부분에서 형광 세기의 증가가 관찰되었다. 기록 시 간섭 빔 앞에 mask pattern 을 이용하여 $50\;{\mu}m$ gap electrode 패턴을 형성하였다. 이 때 형성된 패턴은 micron scale gap패턴 안에 회절격자로부터 생성된 submicron scale의 grating line을 보였다. 이는 beam의 광 고분자 film 표면에 대한 각도($3.6^{\circ}$, $15^{\circ}$), 패턴에 사용된 광 고분자의 굴절률 등으로부터 Bragg's equation 을 사용하여 계산된 이론적인 grating 간격 ($0.6\;{\mu}m$) 과 오차범위 안에서 일치 하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1727-1729
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• 2004

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP precess, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). we investigated the performance of $WO_3$ CMP used silica slurry, ceria slurry, tungsten slurry. In this paper, the effects of addition oxidizer on the $WO_3$ CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.32-35
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• 1997

A recent development in the Flat Panel Display(FPD) industry requires an auto-alignment system which is operated in high speed and high precision. In the FPD production process, aligning photo-mask with respect to guide mark printed in the glass should be accomplished in the accuracy of sub-micron order. So the system has high bandwidth and needs a dedicated control system which is fast and robust enough to control linear motors in precise manner. Proposed auto-alignment system structure in this presentation which consists of the master controller board, the DSP position controller board which controls 3 axis precision linear motors, the servo system and the man machine interface software. Designed and tuned under repeated experiments, the proposed system showed a reasonable performance in the aspect of rise time and steady state error.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.302-305
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• 2000

It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.