• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.204-209
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• 1998

The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics Stylus instrument method, STM, SEM, Laser interferometer method which are used for measuring the quasi-static error of machine tools. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general studies, people who works on the spot has many problems on the data value. Therefor we will help working more accurately on the spot by measuring, analyzing, displaying the deflection of the table and support shaft when we load on the table and the support shaft of machining center using laser interferometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tendency by verifing the tendency of the error measured through the comparison of the simulated error using ANSYS, a common finite element analysis program, which is able to measure heat deformation, material deformation, and error resulted form this study.

• Journal of the Ergonomics Society of Korea
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• v.29 no.4
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• pp.605-610
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• 2010

In order to design a touch interface for the elderly, human performance of input tasks on the touch screen was investigated by the laboratory experiment. Input times and input errors were measured in the experimental conditions that were changed according to age, key size, interkey space and input tool(finger or stylus pen). In the most of all experimental conditions, the task performance of the elderly was lower than that of the young. However, there were significantly different performance patterns between both groups. As the difficulty of task was getting higher, the task performance of the elderly was sharply decreased; pressing small key button by finger sharply increased input time and error rate, compared to that of the young. Therefore, the square key size suitable to the elderly may be over $8.0{\times}8.0mm$. While the interkey space did not influence to the input task performance of the young, the task performance of the elderly was influenced. The elderly showed big difference of task performance according to input tool. However, the young were less influenced by input tool.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.61-67
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• 2001

The finishing process for die is an important process because it has influence on final quality of products. Recently s study on development of 5-axis die automated finishing machine has been progressed. But die must be moved from the cutting machine to the die automated finishing machine. So manufacturing cost and time increase and machining error occurs by transfer. So, in this study, a 3-axis machining center was applied to die finishing. Because cutting tool can be changed to finishing tool by ATC, both of cutting and finishing process are possible on the machine. However, this application results in the decrease of finishing for the improvement of form accuracy. So this study focused on the generation of finishing tool path suitable to 3-axis die finishing for the improvement of form accuracy. The form accuracy evaluation is performed by the measurement of removal depth using a stylus profilometer. From the result, it is confirmed that form accuracy was improved less than 2$\mu$m of removal depth error.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.99-99
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• 1999

투명전도막인 Ito(Indium Tin Oxide)는 flat panel display 와 solar cell 같은 optoelectronic 이나 microelectronic device에서 널리 이용되어 지고 있다. 현재 상용화되고 있는 거의 대부분의 ITO 박막은 sputtering법에 의해 제조되고 있으나 공정상의 이유로 15$0^{\circ}C$이상의 기판온도가 요구되어진다. 그런, 실제 display device 제조공정에서는 비정질 실리콘 박막이나 유기막 위에 ITO박막을 제작할 필요성이 증대되어 지고 있고, 또한 다른 전자소자에 있어서도 상온 ITO 박막 형성 공정에 대한 필요성이 증대되고 있다. 이러한 이유로 본 실험에서는 IBAE(Ion Beam Assisted Evsporation)을 이용하여 저온 ITO박막을 유기막 위에 증착하는 공정에 대한 연구를 수행하였다. 이렇게 증착된 ITO 박막의 결정성은 비정질이었다. 또한, 모든 display device 제작에는 식각공정이 필수인데 기존에 사용되고 있는 wet etching 법은 등방성 식각특성 때문에 미세 pattern 형성에 부적합？, 따라서 비등방성 식각에 용이한 plasma etching법을 사용하여 저온 증착된 ITO 박막의 식각특성을 알아보았다. 실험에 사용된 식각장비는 자장 강화된 유도결합형 플라즈마 식각장비(MEICP)를 사용하였으며, 13.56MHz의 RF power를 사용하였다. 식각조건으로 source power는 600W~1000W, 기판 bias boltage는 -100V~-250V를 가하였으며, Ar, CH4, O2, H2, BCl3의 식각 gases, 5mTorr~30mTorr의 working pressure 변화 그리고 기판 온도에 따른 식각특성을 관찰하였다. ITO 가 증착된 기판으로는 유기물 중 투명전도성 박막에 기판으로서 사용가능성이 클 것으로 기대되어지는 PET(polyethylene-terephtalate), PC(polycarbonate), 아크릴을 사용하여 기판 변화가 식각특성에 미치는 영향에 대해서 각각 관찰하였다. 식각속도의 측정은 stylus profiler를 이용하여 측정하였으며 식각후에 표면상태는 scanning electron spectroscopy(SEM)을 이용하여 관찰하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.223-223
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• 1999

PZT(PbZr1-xTixO3) 박막은 고유전율과 같은 remanent polarization을 가져서 고집적 소자의 커패시터 유전율층 또는 비휘발성 메모리 소자의 제조에 이용되고 있으나, fatigue 와 aging 문제로 인하여 새로운 물질의 개발이 필요한데, 그 대표적으로 연구되고 있는 것이 PMN-PT(Pb(Mg1/3Nb2/3)O-PbTiO3) 이다. 본 실험에서는 sol-gel 법에 의하여 제조된 PMN-PT막을 ICP(Inductively coupled plasma)에 의하여 식각하였고 mask층으로는 PR을 사용하였다. 식각 가스로는 Ar, Cl, BCl를 단독 또는 혼합하여 사용하였으며, 식각 특성을 보기 위하여 RF Power, Substrate bias, Operation pressure, Substrate temperature를 변화시켰다. 식각속도는 stylus profiler를 이용하여 측정하였고, 단면 profile은 scanning electron microscopy (SEM)를 이용하여 관찰하였다. 식각 메커니즘을 규명하고자 식각된 박막의 표면을 X-ray photoelectron spectroscopy (XPS)로 관찰하였고, optical emission spectroscopy (OES)로 플라즈마 특성을 규명하고자 하였다. 식각속도는 Ar 또는 Cl2 플라즈마에 BCl3 가스를 혼합하였을 경우 증가되었고, BCl3 가스를 단독으로 사용하여도 높은 식각속도를 나타내었으며, BCl3의 첨가량이 늘어날수록 PR의 식각속도는 감소하여 높은 선택비를 보였다. 90% BCl3/10%Cl2 플라즈마에서 2800$\AA$/min의 식각속도 그리고 1.37:1의 PR 선택비를 얻을 수 있었다. Power나 기판 bias 증가에 따라 식각속도는 증가하였으나 기판 온도변화에는 민감하지 않았다. BCl3 rich에서의 식각속도 증가와 선택비 증가는 B2O3의 형성에 의한 것으로 생각된다.

• The Journal of the Korea Contents Association
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• v.13 no.1
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• pp.55-63
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• 2013

NUI(Natural User Interfaces) has been developed through CLI(Command Line Interfaces) and GUI(Graphical User Interfaces). NUI uses many different input modalities, including multi-touch, motion tracking, voice and stylus. In order to adopt NUI to legacy GUI applications, he/she must add device libraries, modify relevant source code and debug it. In this paper, we propose a gesture-based interface model that can be applied without modification of the existing event-based GUI applications and also present the XML schema for the specification of the model proposed. This paper shows a method of using the proposed model through a prototype.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.11
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• pp.893-898
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• 2016

Plastic array lens are cheap to manufacture; however, plastic is not resistant to high temperatures and moisture. Optical glass represents a better solution but is a more-expensive alternative. Glass array lens can be produced using lithography or precision-molding techniques. The lithography process is commonly used, for instance, in the semiconductor industry; however, the manufacturing costs are high, the processing time is quite long, and spherical aberration is a problem. To obtain high-order aspherical shapes, mold-core manufacturing is conducted through ultra-precision grinding machining. In this paper, a $4{\times}1$ mold core was manufactured using an ultra-precision machine with a jig for the injection molding of an aspherical array lens. The machined mold core was measured using the Form TalySurf PGI 2+ contact-stylus profilometer. The measurement data of the mold core are suitable for the design criterion of below 0.5 um.

• Tribology and Lubricants
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• v.33 no.6
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• pp.251-255
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• 2017

In this study, we aimed to clarify the wettability and anisotropic flow characteristics of rice leaves as a basic study for engineering applications of anisotropic flow characteristics of rice leaf surface. To investigate the surface structure of rice leaf, the micro grooves and asperities of rice leaves were analyzed and quantified by scanning electron microscope, Confocal laser scanning microscopy, and stylus profilometer. The analysis of the structure of rice leaf surface confirmed that asymmetrical cone - like protrusions in leaf veins were inclined toward the leaf tip. The static contact angle test showed that the contact angle at the midline vein or leaf vein location where the micropapilla is concentrated is about $20^{\circ}$ higher than the leaf blade position. The contact angles of fresh and dried rice leave were also compared. The dried rice leaves showed a contact angle of about $5^{\circ}$ to $15^{\circ}$ higher than that of fresh leaves, suggesting that the volume of the protrusions decreased as the water was removed, thus reducing the contact area with the droplet. In the contact angle history test the hysteresis in the leaf tip direction was found to be much lower than that in the leaf petiole direction. This results can be explained that asymmetrical cone - like protrusions had a significant effect on the droplet flow characteristics through contact angle hysteresis experiment.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.6
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• pp.1303-1311
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• 1988

Described is method for development of an optical roughness measurement sensor for in-subequality assurance in the precision grinding. Main approach is made based upon the Brckmann's light scattering theory, in which general solutions of the optical scattering behaviour are given under many simplifying assumptions on the model of the surfaces illuminated. For the ground surface, the assumptions are verified through computer simulation and experimental work in order to examine the validity of Beckmann's theory on predicting the optical responses according to the roughness variation. As a result, an optical monitoring strategy is derived which can evaluate the roughness value of the ground surface by statistically detecting the pattern of intensity distribution of the scattered light. Finally, the strategy is proven by comparing with the results using the stylus method.