• 제목/요약/키워드: structural measurement error

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Design for Enhanced Precision in 300 mm Wafer Full-Field TTV Measurement (300 mm 웨이퍼의 전영역 TTV 측정 정밀도 향상을 위한 모듈 설계)

  • An-Mok Jeong;Hak-Jun Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.3
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    • pp.88-93
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    • 2023
  • As the demand for High Bandwidth Memory (HBM) increases and the handling capability of larger wafers expands, ensuring reliable Total Thickness Variation (TTV) measurement for stacked wafers becomes essential. This study presents the design of a measurement module capable of measuring TTV across the entire area of a 300mm wafer, along with estimating potential mechanical measurement errors. The module enables full-area measurement by utilizing a center chuck and lift pin for wafer support. Modal analysis verifies the structural stability of the module, confirming that both the driving and measuring parts were designed with stiffness exceeding 100 Hz. The mechanical measurement error of the designed module was estimated, resulting in a predicted measurement error of 1.34 nm when measuring the thickness of a bonding wafer with a thickness of 1,500 ㎛.

Measuring Rebar Position Error and Marking Work for Automated Layout Robot Using LiDAR Sensor (마킹 로봇의 자동화를 위한 LiDAR 센서 기반 철근배근 오차 측정 및 먹매김 수행 프로세스 연구)

  • Kim, Taehoon;Lim, Hyunsu;Cho, Kyuman
    • Journal of the Korea Institute of Building Construction
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    • v.23 no.2
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    • pp.209-220
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    • 2023
  • Ensuring accuracy within tolerance is crucial for a marking robot; however, rebar displacement frequently occurs during the structural work process, necessitating corrections to layout lines or rebar locations. To guarantee precision and automation, the marking robot must be capable of measuring rebar error and determining appropriate adjustments for marking lines and rebar placement. Consequently, this study proposes a method for measuring rebar location error using a LiDAR sensor and implementing a layout assessment process based on the measurement results. The rebar recognition experiment using the LiDAR sensor yielded an average error of 5mm, demonstrating a reliable level of accuracy for wall rebars. Additionally, this research proposed a process that enables the robot to evaluate rebar and marking corrections based on the error range. The findings of this study can contribute to the automated operation of marking robots while accounting for construction errors, potentially leading to improvements in structural quality.

VIBRATION DISPLACEMENT MEASUREMENT TECHNOLOGY FOR CYLINDRICAL STRUCTURES USING CAMERA IMAGES

  • SON, KI-SUNG;JEON, HYEONG-SEOP;PARK, JIN-HO;PARK, JONG WON
    • Nuclear Engineering and Technology
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    • v.47 no.4
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    • pp.488-499
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    • 2015
  • Acceleration sensors are usually used to measure the vibration of a structure. Although this is the most accurate method, it cannot be used remotely because these are contact-type sensors. This makes measurement difficult in areas that cannot be easily approached by surveyors, such as structures located in high or dangerous areas. Therefore, a method that can measure the structural vibration without installing sensors is required for the vibration measurement of structures located in these areas. Many conventional studies have been carried out on non-contact-type vibration measurement methods using cameras. However, they have been applied to structures with relatively large vibration displacements such as buildings or bridges, and since most of them use targets, people still have to approach the structure to install the targets. Therefore, a new method is required to supplement the weaknesses of the conventional methods. In this paper, a method is proposed to measure vibration displacements remotely using a camera without having to approach the structure. Furthermore, an estimation method for the measurement resolution and measurement error is proposed for the vibration displacement of a cylindrical structure measured using the proposed measurement method. The proposed methods are described, along with experimental results that verify their accuracy.

Reconstruction Characteristics of Impact Force by Inverse Analysis (역분석에 의한 충격력 재현 특성)

  • 조창기;이규섭;류봉조;이종원
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.04a
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    • pp.640-644
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    • 1997
  • This poaper descibes a method for reconstructing the impact force by inverse analysis. The inverse problem of reconstructing the impact force using experimentally measured structural responses tends to be ill-conditioned. In practical application, impact response data involve niise caused by the measurement system. We present a method to minimize the mean square error of reconstructed forcd. The agreement is very satisfactory in all the comparisons. This verifies the proposed method.

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Development of Thickness Measurement Method From Concrete Slab Using Ground Penetrating Radar (GPR 기반 콘크리트 슬래브 시공 두께 검측 기법 개발)

  • Lee, Taemin;Kang, Minju;Choi, Minseo;Jung, Sun-Eung;Choi, Hajin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.26 no.3
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    • pp.39-47
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    • 2022
  • In this paper, we proposed a thickness measurement method of concrete slab using GPR, and the verification of the suggested algorithm was carried out through real-scale experiment. The thickness measurement algorithm developed in this study is to set the relative dielectric constant based on the unique shape of parabola, and time series data can be converted to thickness information. GPR scanning were conducted in four types of slab structure for noise reduction, including finishing mortar, autoclaved lightweight concrete, and noise damping layer. The thickness obtained by GPR was compared with Boring data, and the average error was 1.95 mm. In order to investigate the effect of finishing materials on the slab, additional three types of finishing materials were placed, and the following average error was 1.70 mm. In addition, sampling interval from device, the effect of radius on the shape of parabola, and Boring error were comprehensively discussed. Based on the experimental verification, GPR scanning and the suggested algorithm have a great potential that they can be applied to the thickness measurement of finishing mortar from concrete slab with high accuracy.

A new multi-stage SPSO algorithm for vibration-based structural damage detection

  • Sanjideh, Bahador Adel;Hamzehkolaei, Azadeh Ghadimi;Hosseinzadeh, Ali Zare;Amiri, Gholamreza Ghodrati
    • Structural Engineering and Mechanics
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    • v.84 no.4
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    • pp.489-502
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    • 2022
  • This paper is aimed at developing an optimization-based Finite Element model updating approach for structural damage identification and quantification. A modal flexibility-based error function is introduced, which uses modal assurance criterion to formulate the updating problem as an optimization problem. Because of the inexplicit input/output relationship between the candidate solutions and the error function's output, a robust and efficient optimization algorithm should be employed to evaluate the solution domain and find the global extremum with high speed and accuracy. This paper proposes a new multi-stage Selective Particle Swarm Optimization (SPSO) algorithm to solve the optimization problem. The proposed multi-stage strategy not only fixes the premature convergence of the original Particle Swarm Optimization (PSO) algorithm, but also increases the speed of the search stage and reduces the corresponding computational costs, without changing or adding extra terms to the algorithm's formulation. Solving the introduced objective function with the proposed multi-stage SPSO leads to a smart feedback-wise and self-adjusting damage detection method, which can effectively assess the health of the structural systems. The performance and precision of the proposed method are verified and benchmarked against the original PSO and some of its most popular variants, including SPSO, DPSO, APSO, and MSPSO. For this purpose, two numerical examples of complex civil engineering structures under different damage patterns are studied. Comparative studies are also carried out to evaluate the performance of the proposed method in the presence of measurement errors. Moreover, the robustness and accuracy of the method are validated by assessing the health of a six-story shear-type building structure tested on a shake table. The obtained results introduced the proposed method as an effective and robust damage detection method even if the first few vibration modes are utilized to form the objective function.

Structural Safety Assessment Using Equation Error Function and Response Error Function (방정식 오차함수와 응답 오차함수를 사용한 구조 안전성 평가)

  • Park, Woo-Jin
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.10 no.10
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    • pp.2819-2830
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    • 2009
  • Load bearing structural members in a wide variety of applications accumulate damage over their service life. During experiment much effort and cost is needed for measuring structural safety assessment. The sparseness and errors of measured data have to be considered during the safety estimation of structures. This paper introduces parameter estimation and damage identification algorithm by a system identification using static and dynamic response. The equation error estimator and response error widely used in system identification are based on the minimization of least squared error between measured and calculated responses by a mathematical model of a structure. Since each estimator has a specific form of application in noisy environment and proposes different definitions for these forms. To study the behaviour of the estimators in noisy environment Using Monte Carlo simulation, and a data measured pertubation scheme is adopted to investigate the influence of measurement errors on identification results. The assessment result by static and dynamic response were compared, and the efficiency and applicabilities of the proposed algorithm are demonstrated through simulated static and dynamic responses of a dimensional truss type structures.

A novel sensitivity method to structural damage estimation in bridges with moving mass

  • Mirzaee, Akbar;Shayanfar, Mohsenali;Abbasnia, Reza
    • Structural Engineering and Mechanics
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    • v.54 no.6
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    • pp.1217-1244
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    • 2015
  • In this research a theoretical and numerical study on a bridge damage detection procedure is presented based on vibration measurements collected from a set of accelerometers. This method, referred to as "Adjoint Variable Method", is a sensitivity-based finite element model updating method. The approach relies on minimizing a penalty function, which usually consists of the errors between the measured quantities and the corresponding predictions attained from the model. Moving mass is an interactive model and includes inertia effects between the model and mass. This interactive model is a time varying system and the proposed method is capable of detecting damage in this variable system. Robustness of the proposed method is illustrated by correct detection of the location and extension of predetermined single, multiple and random damages in all ranges of speed and mass ratio of moving vehicle. A comparative study on common sensitivity and the proposed method confirms its efficiency and performance improvement in sensitivity-based damage detection methods. In addition various possible sources of error, including the effects of measurement noise and initial assumption error in stability of method are also discussed.

Application of Vibration Method for Estimation of Tension Force of Stay Cables in World-Cup Stadiums (월드컵경기장 지지케이블의 장력추정을 위한 진동법의 적용성 평가)

  • Chang, Kug-Kwan
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.13 no.6 s.58
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    • pp.156-165
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    • 2009
  • This study is to consider the character of cables in six World-Cup stadiums constructed in 2002 and to inspect problems on measurement natural frequencies interpretation and application of existing theory. The results of the experiment were shown that it was possible to determine the tension force of the real cables with an accuracy of 8% by taking the cable bending stiffness. But for the range of cable affected greatly by bending stiffness(${\xi}{\leq}7$), it was appeared the tendency to increase estimated error and was considered to need additional study of this range. Estimated tension error could not be improved so much in comparison to the case using single mode of vibration even through multiple modes of vibration were used.

A Study on Matching Method of Hull Blocks Based on Point Clouds for Error Prediction (선박 블록 정합을 위한 포인트 클라우드 기반의 오차예측 방법에 대한 연구)

  • Li, Runqi;Lee, Kyung-Ho;Lee, Jung-Min;Nam, Byeong-Wook;Kim, Dae-Seok
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.29 no.2
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    • pp.123-130
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    • 2016
  • With the development of fast construction mode in shipbuilding market, the demand on accuracy management of hull is becoming higher and higher in shipbuilding industry. In order to enhance production efficiency and reduce manufacturing cycle time in shipbuilding industry, it is important for shipyards to have the accuracy of ship components evaluated efficiently during the whole manufacturing cycle time. In accurate shipbuilding process, block accuracy is the key part, which has significant meaning in shortening the period of shipbuilding process, decreasing cost and improving the quality of ship. The key of block accuracy control is to create a integrate block accuracy controlling system, which makes great sense in implementing comprehensive accuracy controlling, increasing block accuracy, standardization of proceeding of accuracy controlling, realizing "zero-defect transferring" and advancing non-allowance shipbuilding. Generally, managers of accuracy control measure the vital points at section surface of block by using the heavy total station, which is inconvenient and time-consuming for measurement of vital points. In this paper, a new measurement method based on point clouds technique has been proposed. This method is to measure the 3D coordinates values of vital points at section surface of block by using 3D scanner, and then compare the measured point with design point based on ICP algorithm which has an allowable error check process that makes sure that whether or not the error between design point and measured point is within the margin of error.