• Title/Summary/Keyword: statistical design of experiments

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Effect of Process Parameters on Surface Roughness in Lapping Operation (래핑의 공정변수가 표면거칠기에 미치는 영향)

  • Choi, Mansung
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.4
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    • pp.9-13
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    • 2013
  • Lapping is a very complicated and random process resulting from the variation of abrasive grains in its sizes and shapes and from the numerous factors having an effect on the process quality. This paper presents a study of a $2^4$ full factorial experimental design and analysis to optimize surface quality in lapping operation. The optimization of the factors to obtain minimum surface roughness was carried out by incorporating effect plots, main effect plots, interaction plots, analysis of variance(ANOVA), surface plots, and contour plots. The statistical design experiments, designed to reduce the total number of experiments required, indicated that, within the selected conditions, all the parameters influenced at a significance level of 5%. In addition, some of the possible interactions between these parameters also influenced the lapping process, especially those that were of third order. A regression model was suggested and fitted the experimental data very well.

Electrical and Optical Properties in Transparent Conducting Oxides: Effect of Ultra Violet Irradiation

  • So, Byung-Soo;Hwang, Jin-Ha
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1 s.18
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    • pp.65-69
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    • 2007
  • A design of experiments was applied in order to investigate the effect of processing variables in UV irradiation on the electrical/optical properties in indium-zinc oxide thin films, The processing variables, equivalently input variables are listed as UV irradiation time, oxygen flow rate, and chamber pressure. The statistical significance of Ultra Violet (UV) treatment was confirmed using a paired-t test. The full factorial $2^3$ design was employed to determine significant main and interaction effects in UV irradiation process. The chamber pressure and the interaction between UV irradiation time and $O_2$ flow rate were found to be statistically significant at the significance level of 0.1. Furthermore, the optimized approach was proposed in achieving the improved conductivity after UV irradiation.

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Statistical Qualitative Analysis on Chemical Mechanical Polishing Process and Equipment Characterization

  • Hong, Sang-Jeen;Hwang, Jong-Ha;Seo, Dong-Sun
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.3
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    • pp.115-118
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    • 2011
  • Process characterization of the chemical mechanical polishing (CMP) process for undensified phosphosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been addressed to experimenters to understand the relationship between input variables and responses of interest in a simple and efficient way. It is typically beneficial for determining the adequate size of experiments with multiple process variables and making statistical inferences for the responses of interests. Equipment controllable parameters to operate the machine include the down force (DF) of the wafer carrier, pressure on the backside of the wafer, table and spindle speed (SS), slurry flow rate, and pad condition. None of them is independent; thus, the interaction between parameters also needs to be indicated to improve process characterization in CMP. In this paper, we have selected the five controllable equipment parameters, such as DF, back pressure (BP), table speed (TS), SS, and slurry flow (SF), most process engineers recommend to characterize the CMP process with respect to material removal rate (RR) and film uniformity as a percentage. The polished material is undensified PSG. PSG is widely used for the plananization in multi-layered metal interconnects. We identify the main effect of DF, BP, and TS on both RR and film uniformity, as expected, by the statistical modeling and analysis on the metrology data acquired from a series of $2^{5-1}$ fractional factorial design with two center points. This revealed the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that the process control based on better understanding of the process is the key to success in semiconductor manufacturing, typically when the wafer size reaches 300 mm and is continuously scheduled to expand up to 450 mm in or little after 2012.

The Electrical Properties of Mutilayer Chip Capacitor with X7R by Addition of Rare-Earth Ions (Y2O3, Er2O3) using Design of Experiments (실험계획법을 적용한 X7R 적층 칩 커패시터의 희토류(Y2O3, Er2O3) 첨가에 따른 전기적 특성)

  • Yoon, Jung-Rag;Moon, Hwan;Lee, Heun-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.3
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    • pp.216-221
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    • 2010
  • Employing statistical design of experiments, the difference in doping behaviors of rare-earth ions and their effects on the dielectric property and microstructure of $BaTiO_3$-MgO-$MnO_2$-($Ba_{0.4}Ca_{0.6}$) $SiO_3-Re_2O_3$ (Re = $Y_2O_3$, $Er_2O_3$) system were investigated. Through the statistical analysis we have found that the amount of $Re_2O_3$ are significantly affecting on the dielectric properties. The $Re_2O_3$ improved the dielectric constant, dielectric loss and R*C constant, so the appropriate contents of $Y_2O_3$ and $Er_2O_3$ were 0.8 ~ 1.2 mol% and 0.8 ~ 1.3 mol%, respectively. The MLCC(mutilayer chip capacitor) with $2.0{\times}1.2{\times}1.2mm$ size and 475 nF was also suited for X7R with the above composition. It showed that the dielectric constant and RC constant were 2,839 and 3,675 ${\Omega}F$, respectively in the sintering condition at $1250^{\circ}C$ in $Po_2$ $10^{-7}$ Mpa.

Literature Review on the Experimental Designs in KSQM for 50 Years (품질경영학회 50주년 특별호: 실험계획법 분야 연구 리뷰)

  • Kim, Sang Ik;Lee, Sang Bok;Lim, Yong Bin;Jang, Dae Heung
    • Journal of Korean Society for Quality Management
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    • v.44 no.2
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    • pp.245-264
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    • 2016
  • Purpose: This article focuses on the reviewing the papers published in the Journal of the Korean Society for Quality Control (JKSQC) and the Journal of the Korean Society for Quality Management (JKSQM) since 1965, in the area of design of experiments. In this paper, moreover, some other contents of another statistical quality control areas is included. Methods: The reviewed articles are classified into the three main categories: theory and application of experimental designs, response surface methodology and mixture experiments, and roust designs. Some omitted papers in the other areas of reviewing works are also included in this paper, and the contents and relationships of the published articles are examined and summarized in each sub-field. Results: We summarize the reviewed papers in the chronological road-maps for each sub-field, and outline the relations of the connected papers. We provide comments on the contents and the contributions of the reviewed papers. The future direction of the research in the theory and application areas of experimental designs can be provided by the contents of this research. Conclusion: The diverse topics on the improving the quality in the various industry fields are studied and published on the theory, methodology and the empirical application in the fields of designs of experiments. We can see that the Korean Society for Quality Management (KSQM) has tremendously contributed on the improvement of quality in the manufacturing and service industries by publishing the reviewed articles in this paper.

Statistical Optimization of Production Medium for Enhanced Production of Succinic Acid Produced by Anaerobic Fermentations of Actinobacillus succinogenes (Actinobacillus succinogenes의 혐기성배양에 의해 생합성 되는 숙신산의 생산성 향상을 위한 통계적 생산배지 최적화)

  • Park, Sang-Min;Chun, Gie-Taek
    • KSBB Journal
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    • v.29 no.3
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    • pp.165-178
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    • 2014
  • Statistical medium optimization has been carried out for the production of succinic acid in anaerobic fermentations of Actinobacillus succinogenes. Succinic acid utilized as a precursor of many industrially important chemicals is a fourcarbon dicarboxylic acid, biosynthesized as one of the fermentation products of anaerobic metabolism by A. succinogenes. Through OFAT (one factor at a time) experiments, corn steep liquor (CSL), a very cheap agricultural byproduct, was found to have significant effects on enhanced production of succinic acid, when supplemented along with yeast extract. Hence, using these factors including glucose as a carbon/energy source, interactive effects were investigated through $2^n$ full factorial design (FFD) experiments, showing that the concentration of each component (i.e., glucose, yeast extract and CSL) should be higher. Further statistical experiments were conducted along the steepest ascent path, followed by response surface method (RSM) in order to find out optimal concentrations of each constituent. Consequently, optimized concentrations of glucose, yeast extract and CSL were observed to be 180 g/L, 15.08 g/L and 20.75 g/L respectively (10 g/L of $NaHCO_3$ and 100 g/L of $MgCO_3$ to be supplemented as bicarbonate suppliers), with the estimated production level of succinic acid to be 92.9 g/L (about 3.5 fold higher productivity as compared to the initial medium). Notably, the RSM-estimated production level was almost similar to the amount of succinic acid (92.9 g/L vs. 89.1 g/L) produced through the actual fermentation process performed using the statistically optimized production medium.

A Study on the Optimal Position of Vehicle Side Mirrors according to the Perception of Visual Information (시각정보의 인식도에 의한 자동차 Side Mirror의 최적 위치결정에 관한 연구)

  • 김도회;이근희
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.14 no.24
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    • pp.123-132
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    • 1991
  • This study deals with the experiment of perceiving visual information according to the positions of vehicle side mirrors. In the design of vehicle, the consideration of safety is very important. Therefore we consider the positions of side mirrors to use visual information effectively which is important factor to driver. This paper presents the position of side mirror to elevate the degree of visual perception for the circumstances of danger by experiments. To exhibit the circumstances of danger. 4 LED(Light Emitted Diode) art located at each side(right. left front. hack) of vehicle. A subject pushes the LED switch to see that if he perceives the circumstance of danger. To record the circumstance of randomly generated danger, computer interface card is used to control 4 LED and swithch on IBM PC/AT Experiments are divided into 2 parts. The 1st experiment present the independence of right & left side mirror. The 2nd experiment present optimal position of right & left side mirror. The vehicle used in experiment is model EL of H Co.. Statistical process of experimental data using SPSS(Statistical Package for Social Sciences)/PC package concludes that 1) the optimal position of right side mirror is 54cm forward of exist position. 2) for the left side mirror, the position of 120cm forward of exist position shows the worst degree of perception. and the optimal position does not exist in statistical meaning.

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Pooling-Across-Environments Method for the Generation of Composite-Material Allowables (환경조건간 합동을 이용한 복합재료 허용치 생성 기법)

  • Rhee, Seung Yun
    • Journal of Aerospace System Engineering
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    • v.10 no.3
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    • pp.63-69
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    • 2016
  • The properties of composite materials, when compared to those of metallic materials, are highly variable due to many factors including the batch-to-batch variability of raw materials, the prepreg manufacturing process, material handling, part-fabrication techniques, ply-stacking sequences, environmental conditions, and test procedures. It is therefore necessary to apply reliable statistical-analysis techniques to obtain the design allowables of composite materials. A new composite-material qualification process has been developed by the Advanced General Aviation Transport Experiments (AGATE) consortium to yield the lamina-design allowables of composite materials according to standardized coupon-level tests and statistical techniques; moreover, the generated allowables database can be shared among multiple users without a repeating of the full qualification procedure by each user. In 2005, NASA established the National Center for Advanced Materials Performance (NCAMP) with the purpose of refining and enhancing the AGATE process to a self-sustaining level to serve the entire aerospace industry. In this paper, the statistical techniques and procedures for the generation of the allowables of aerospace composite materials will be discussed with a focus on the pooling-across-environments method.

Optimum Design Based on Sequential Design of Experiments and Artificial Neural Network for Enhancing Occupant Head Protection in B-Pillar Trim (센터 필라트림의 FMH 충격성능 향상을 위한 순차적 실험계획법과 인공신경망 기반의 최적설계)

  • Lee, Jung Hwan;Suh, Myung Won
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.11
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    • pp.1397-1405
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    • 2013
  • The optimal rib pattern design of B-pillar trim considering occupant head protection can be determined by two methods. One is the conventional approximate optimization method that uses the statistical design of experiments (DOE) and response surface method (RSM). Generally, approximated optimum results are obtained through the iterative process by trial-and-error. The quality of results strongly depends on the factors and levels assigned by a designer. The other is a methodology derived from previous work by the authors, called the sequential design of experiments (SDOE), to reduce the trial-and-error procedure and to find an appropriate condition for using artificial neural network (ANN) systematically. An appropriate condition is determined from the iterative process based on the analysis of means. With this new technique and ANN, it is possible to find an optimum design accurately and efficiently.

Development of Statistical Models for Resistance of Reinforced Concrete Members (철근콘크리트 부재 저항능력의 통계적 모델 개발)

  • Kim, Jee Sang;Kim, Jong Ho
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.31 no.4A
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    • pp.323-329
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    • 2011
  • Most current design codes of concrete structures adopt the partial safety factor format to assure the proper safety margin or reliability against various limit states as a practical design tool. The safety factors, load and resistance factors and so on, are determined based on the theory of structural reliability, which takes into account the statistical uncertainties of both loads and resistances. The establishment of statistical models for load and resistance should be preceded the application of reliability theory. In this paper, especially the influence of the statistical variations of resistance models, which are described in terms of strength of concrete, strength of reinforcements and sectional dimensions and so on, are examined and the probabilistic models for resistance of reinforced concrete members were developed. The statistical data were collected on local tests and experiments in Korea and the Monte Carlo simulation (MCS) technique was used. The results of this paper may be useful and valuable in calibration of design code in this country.