• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.11 s.254
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• pp.1369-1375
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• 2006

In this work, mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. The fabrication process for stainless steel micromachined devices keeps the membrane and substrate being at the environment of 8.65MPa pressure and $175^{\circ}C$ for a half hour and then subsequently cooled to $25^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the device fabricated using these technologies is 9.03 ppm $kPa^{-1}$ with a net capacitance change of 0.14 pF over a range 0$\sim$180 kPa.

• Proceedings of the KIPE Conference
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• 2008.06a
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• pp.646-648
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• 2008

The multi-films of a metallic film and a transparent conducting oxide (TCO, indium-tin oxide, ITO) film were formed on the stainless steel 316 and 304 plates by a sputtering method and an E-beam method and then the external metallic region of the stainless steel bipolar plates was converted into the metal nitride films through an annealing process. The multi-film formed on the stainless steel bipolar plates showed the XRD patterns of the typical indium-tin oxide, the metallic phase and the metal substrate and the external nitride film. The XRD pattern of the thin film on the bipolar plates modified showed two metal nitride phases of CrN and $Cr_2N$ compound. Surface microstructural morphology of the multi-film deposited bipolar plates was observed by AFM and FE-SEM. The electrical resistivity of the stainless steel bipolar plates modified was evaluated.

• Proceedings of the Membrane Society of Korea Conference
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• 1993.10a
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• pp.1-6
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• 1993

Pure silicalite membranes were prepared on porous sintered stainless steel and aluinina supports. The silicalite membrane showed the high alcohol permselectivity, indicating no existence of cracks within the membrane. The high alcohol permselectivity is attributable to the high hydrophobic character of silicalite.

• Proceedings of the Membrane Society of Korea Conference
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• 2003.07a
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• pp.25-28
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• 2003

Low cost composite metallic membranes for the hydrogen separation and production have been prepared by using thin Pd-Ag foils reinforced by metallic (stainless steel and nickel) structures. Especially, “supported membranes” have been obtained by a diffusion welding procedure in which Pd-Ag thin foils have been joined with perforated metals (nickel) and expanded metals (stainless steel): in these membranes the thin palladium foil assures both the high hydrogen permeability and the perm-selectivity while the metallic support provides the mechanical strength. A second studied method of producing "laminated membranes" consists of coating non-noble metal sheets with very thin palladium layers by diffusion welding and cold-rolling. Palladium thin coatings over these metals reduce the activation energy of the hydrogen adsorption process and make them permeable to the hydrogen. In this case, the dense non-noble metal has been used as a support structure of the thin Pd-Ag layers coated over its surfaces: a proper thickness of the metal assures the mechanical strength, the absence of defects (cracks, micro-holes) and the complete hydrogen selectivity of the membrane. membrane.

• Journal of the Korean institute of surface engineering
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• v.50 no.2
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• pp.98-107
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• 2017

Pd-based membranes have been widely used in hydrogen purification and separation due to their high hydrogen diffusivity and infinite selectivity. However, it has been difficult to fabricate thin and dense Pd-based membranes on a porous stainless steel(PSS) support. In case of a conventional PSS support having the large size of surface pores, it was required to use complex surface treatment and thick Pd coating more than $6{\mu}m$ on the PSS was required in order to form pore free surface. In this study, we could fabricate thin and dense Pd membrane with only $3{\mu}m$ Pd layer on a new PSS support manufactured by metal injection molding(MIM). The PSS support had low surface roughness and mean pore size of $5{\mu}m$. Pd membrane were prepared by advanced Pd sputter deposition on the modified PSS support using fine polishing and YSZ vacuum filling surface treatment. At temperature $400^{\circ}C$ and transmembrane pressure difference of 1 bar, hydrogen flux and selectivity of $H_2/N_2$ were $11.22ml\;cm^{-2}min^{-1}$ and infinity, respectively. Comparing with $6{\mu}m$ Pd membrane, $3{\mu}m$ Pd membrane showed 2.5 times higher hydrogen flux which could be due to the decreased Pd layer thickness from $6{\mu}m$ to $3{\mu}m$ and an increased porosity. It was also found that pressure exponent was changed from 0.5 on $6{\mu}m$ Pd membrane to 0.8 on $3{\mu}m$ Pd membrane.

• Membrane Journal
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• v.32 no.1
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• pp.66-73
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• 2022

In this study, a method for stabilizing treated water was conducted while maintaining high flux using a metal flat membrane module made of stainless steel. This module had a pore size of 13 ㎛, so it was possible to operate at a high flux from 60 LMH to 100 LMH. However, although SS leaked about 30~50 ppm during initial operation, aggregation was possible because SS acted as aggregation nucleus. While polymer membrane permeate does not have aggregation nucleus, so coagulation is possible but not flocculation. Typically clay or bentonite, which is used as aggregation nucleus, is additionally administered. In this study, the total phosphorus treatment and the quality of the treated water were to promote stability because flocculation was achieved only with SS leakage without the need for such a aggregation nucleus. Finally, the feasibility of operating a metal membrane filter capable of high flux in stable treated water to be applied to the MBR system.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1177-1182
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• 2012

The corrosion resistance of 316L stainless steel coated with NiO-YSZ (Ni added yttria stabilized zirconia) was examined in a proton exchange membrane fuel cell (PEMFC) environment. The NiO-YSZ coating was carried out using a sol-gel dip coating method, and the corrosion resistance and interfacial contact resistance (ICR) were determined by the composition and morphology of the NiO-YSZ film. The corrosion resistance increased with increasing Ni content in the NiO-YSZ film, but rapid corrosion was observed when the YSZ film contained more than 15 wt % Ni due to surface cracks. The polarization resistance was improved by several orders of magnitude when 316L stainless steel was coated with a 15 wt % NiO-YSZ film compared to bare 316L. The ICR of the NiO-YSZ film was decreased to that of bare 316L when the YSZ film contained 25 wt % NiO, suggesting the possible application of NiO-YSZ coated stainless steel for a bipolar plate.

• Membrane Journal
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• v.24 no.3
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• pp.177-184
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• 2014

Silica membranes with high permeability were prepared using colloidal and polymeric silica sols on a porous stainless steel-tube support by a DRFF and SRFF method. Silica sols were derived with tetraethylorthosilicate (TEOS) by sol-gel method and analyzed with DLS, FE-SEM, and $N_2$ adsorption. The coating of the intermediate layer with colloidal silica sol on the stainless steel-tube support led to a denser surface morphology of the membrane along with a considerable reduction in the number of surface defect. As the polymeric silica sol enclosed the colloidal silica sol with spherical particles during the SRFF method, the separation-layer-coated silica membrane showed a denser surface than the intermediate layer. Moreover, the silica membranes showed high hydrogen gas permeability of $(6.63-9.21){\times}10^{-5}mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ with low $H_2/N_2$ perm-selectivity (2.9-3.1) at room temperatures.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.118-127
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• 2012

TiN or Ti/TiN was coated on stainless steel as bipolar plate in polymer electrolyte membrane fuel cells (PEMFCs) to improve their corrosion resistance and electric conductivity, and their properties were examined under fuel cell operating condition. After 200 hours operation, the behaviors for the corrosion, crack and dissolution of coating layer were investigated by various techniques. The corrosion and exfoliation of coating layer were considerably generated except for SUS316L-Ti/TiN after fuel cell operation even if the electric conductivity and corrosion resistance of coated stainless steel bipolar plates were improved. The adoption of Ti layer between TiN layer and the surface of stainless steel enhanced the adhesion of TiN layer and decreased the possibility of corrosion by the increase of coating layer.

• Transactions of the Korean hydrogen and new energy society
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• v.14 no.4
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• pp.291-297
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• 2003

As an alternative bipolar plate material for polymer electrolyte membrane fuel cell (PEMFC), TiN-coated 316 stainless was evaluated in terms of electrical contact resistance and water contact angle. Performance and lifetime of the TiN-coated 316 bipolar plates were measured in comparison with those of graphite and bare 316 bipolar plates. At a cell voltage of 0.6 V, current density of the single cells using graphite, AISI 316, and TiN/316 bipolar plates was 996, 796, and $896mA/cm^2$, respectively. By coating 316 stainless steel with TiN layer, performance degradation rate determined to be the voltage degradation rate at a cell voltage of 0.6 V was reduced from 2.3 to 0.43 mV/h.