• Title/Summary/Keyword: spin-coated

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Nano-patterning technology using an UV-NIL method (UV-NIL(Ultraviolet-Nano-Imprinting-Lithography) 방법을 이용한 나노 패터닝기술)

  • 심영석;정준호;손현기;신영재;이응숙;최성욱;김재호
    • Journal of the Korean Vacuum Society
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    • v.13 no.1
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    • pp.39-45
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    • 2004
  • Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. A 5${\times}$5${\times}$0.09 in. quartz stamp is fabricated using the etch process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. FAS(Fluoroalkanesilane) is used as a material for anti-adhesion surface treatment on the stamp and a thin organic film to improve adhesion on a wafer is formed by spin-coating. The low viscosity resin droplets with a nanometer scale volume are dispensed on the whole area of the coated wafer. The UV-NIL experiments have been performed using the EVG620-NIL. 370 nm - 1 m features on the stamp have been transferred to the thin resin layer on the wafer using the multi-dispensing method and UV-NIL process. We have measured the imprinted patterns and residual layer using SEM and AFM to evaluate the potential of the process.

Cobalt Oxide-Tin Oxide Composite: Polymer-Assisted Deposition and Gas Sensing Properties (PAD법으로 제작된 산화코발트-산화주석 복합체의 가스 감응 특성)

  • An, Sea-Yong;Li, Wei;Jang, Dong-Mi;Jung, Hyuck;Kim, Do-Jin
    • Korean Journal of Materials Research
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    • v.20 no.11
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    • pp.611-616
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    • 2010
  • A cobalt oxide - tin oxide nanocomposite based gas sensor on an $SiO_2$ substrate was fabricated. Granular thin film of tin oxide was formed by a rheotaxial growth and thermal oxidation method using dc magnetron sputtering of Sn. Nano particles of cobalt oxide were spin-coated on the tin oxide. The cobalt oxide nanoparticles were synthesized by polymer-assisted deposition method, which is a simple cost-effective versatile synthesis method for various metal oxides. The thickness of the film can be controlled over a wide range of thicknesses. The composite structures thus formed were characterized in terms of morphology and gas sensing properties for reduction gas of $H_2$. The composites showed a highest response of 240% at $250^{\circ}C$ upon exposure to 4% $H_2$. This response is higher than those observed in pure $SnO_2$ (90%) and $Co_3O_4$ (70%) thin films. The improved response with the composite structure may be related to the additional formation of electrically active defects at the interfaces. The composite sensor shows a very fast response and good reproducibility.

Pretilt angle and EO Characteristics of Liquid Crystal via Ion-beam Irradiation Angles (이온빔 조사각도에 따른 액정의 프리틸트각과 전기 광학적 특성)

  • Lee, Kang-Min;Lee, Won-Kyu;Oh, Byeong-Yun;Kim, Byoung-Yong;Han, Jin-Woo;Jeon, Ji-Yeon;Han, Jeong-Min;Lee, Sang-Keuk;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.04a
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    • pp.44-44
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    • 2008
  • To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, non contact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure polyimide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}$ for all of irradiation angles. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

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Fabrication of Transparent Electrode Film for Organic Photovoltaic using Ag grid and Conductive Polymer (Ag grid와 전도성 고분자를 이용한 인쇄기반 OPV용 투명전극 형성)

  • Yu, Jongsu;Kim, Jungsu;Yoon, Sungman;Kim, Dongsoo;Kim, Dojin;Jo, Jeongdai
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.116.1-116.1
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    • 2011
  • Materials with a combination of high electrical conductivity and optical transparency are important components of many electronic and optoelectronic devices such as liquid crystal displays, solar cells, and light emitting diodes. In this study, to fabricate a low-resistance and high optical transparent electrode film for organic photovoltaic, the following steps were performed: the design and manufacture of an electroforming stamp mold, the fabrication of thermal roll imprinted (TRI) poly-carbonate (PC) patterned films, the manufacture of high-conductivity and low-resistance Ag paste which was filled into patterned PC film using a doctor blade process and then coated with a thin film layer of conductive polymer by a spin coating process. As a result of these imprinting processes the PC films obtained a line width of $10{\pm}0.5{\mu}m$, a channel length of $500{\pm}2{\mu}m$, and a pattern depth of $7.34{\pm}0.5{\mu}m$. After the Ag paste was used to fill part of the patterned film with conductive polymer coating, the following parameters were obtained: a sheet resistance of $9.65{\Omega}$/sq, optical transparency values were 83.69 % at a wavelength of 550 nm.

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Development of the Organic Solar Cell Technology using Printed Electronics (인쇄전자 기술을 이용한 유기 태양전지 기술 개발)

  • Kim, Jungsu;Yu, Jongsu;Yoon, Sungman;Jo, Jeongdai;Kim, Dongsoo
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.113.1-113.1
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    • 2011
  • PEMS (printed electro-mechanical system) is fabricated by means of various printing technologies. Passive and active compo-nents in 2D or 3D such as conducting lines, resistors, capacitors, inductors and TFT(Thin Film Transistor), which are printed withfunctional materials, can be classified in this category. And the issue of PEMS is applied to a R2R process in the manu-facturing process. In many electro-devices, the vacuum process is used as the manufacturing process. However, the vacuum process has a problem, it is difficult to apply to a continuous process such as a R2R(roll to roll) printing process. In this paper, we propose an ESD (electro static deposition) printing process has been used to apply an organic solar cell of thin film forming. ESD is a method of liquid atomization by electrical forces, an electrostatic atomizer sprays micro-drops from the solution injected into the capillary with electrostatic force generated by electric potential of about several tens kV. ESD method is usable in the thin film coating process of organic materials and continuous process as a R2R manufacturing process. Therefore, we experiment the thin films forming of PEDOT:PSS layer and active layer which consist of the P3HT:PCBM. The organic solar cell based on a P3HT/PCBM active layer and a PEDOT:PSS electron blocking layer prepared from ESD method shows solar-to-electrical conversion efficiency of 1.42% at AM 1.5G 1sun light illumination, while 1.86% efficiency is observed when the ESD deposition of P3HT/PCBM is performed on a spin-coated PEDOT:PSS layer.

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Newly Synthesized Silicon Quantum Dot-Polystyrene Nanocomposite Having Thermally Robust Positive Charge Trapping

  • Dung, Mai Xuan;Choi, Jin-Kyu;Jeong, Hyun-Dam
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.221-221
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    • 2013
  • Striving to replace the well known silicon nanocrystals embedded in oxides with solution-processable charge-trapping materials has been debated because of large scale and cost effective demands. Herein, a silicon quantum dot-polystyrene nanocomposite (SiQD-PS NC) was synthesized by postfunctionalization of hydrogen-terminated silicon quantum dots (H-SiQDs) with styrene using a thermally induced surface-initiated polymerization approach. The NC contains two miscible components: PS and SiQD@PS, which respectively are polystyrene and polystyrene chains-capped SiQDs. Spin-coated films of the nanocomposite on various substrate were thermally annealed at different temperatures and subsequently used to construct metal-insulator-semiconductor (MIS) devices and thin film field effect transistors (TFTs) having a structure p-$S^{++}$/$SiO_2$/NC/pentacene/Au source-drain. C-V curves obtained from the MIS devices exhibit a well-defined counterclockwise hysteresis with negative fat band shifts, which was stable over a wide range of curing temperature ($50{\sim}250^{\circ}C$. The positive charge trapping capability of the NC originates from the spherical potential well structure of the SiQD@PS component while the strong chemical bonding between SiQDs and polystyrene chains accounts for the thermal stability of the charge trapping property. The transfer curve of the transistor was controllably shifted to the negative direction by chaining applied gate voltage. Thereby, this newly synthesized and solution processable SiQD-PS nanocomposite is applicable as charge trapping materials for TFT based memory devices.

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Eu-doped LGF Luminescent Down Converter Possible for TiO2 Dye Sensitized Solar Cells

  • Kim, Hyun-Ju;Song, Jae-Sung;Lee, Dong-Yun;Lee, Won-Jae
    • Transactions on Electrical and Electronic Materials
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    • v.5 no.3
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    • pp.89-92
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    • 2004
  • For improving solar efficiencies, down conversion of high-energy photons to visible lights is discussed. The losses due to thermalization of charge carriers generated by the absorption of high-energy photons, can largely be reduced in a solar cell if more than one electron-hole pair can be generated per incident photon. The solar cell was constructed of dye-sensitized anatase-based TiO$_2$, approximately 30nm particle size, 6$\mu\textrm{m}$thickness, and 6${\times}$6$\textrm{mm}^2$ active area, Pt counter electrode and I$_3$$\^$-/I$_2$$\^$-/ electrolyte. After correction for losses due to light reflection and absorption by the conducting glass, the conversion of photons to electric current is practically quantitative in the plateau region of the curves. The incident photon to current conversion efficiency(IPCE) of N3 used as a dye in this work is about 80% at around 590nm and 610nm which is the emission spectrum of Eu doped LGF. The Eu doped LGF powder was prepared by conventional ceramic process, and used as a down converter for DSC after spin coated on the slide glass and fired.

Epoxy Planarization Films for the Stainless Steel Substrates for Flexible Displays (플렉시블 디스플레이용 Stainless Steel 기판의 에폭시 평탄막 연구)

  • Hong, Yong-Teak;Jung, Seung-Joon;Choi, Ji-Won
    • Polymer(Korea)
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    • v.31 no.6
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    • pp.526-531
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    • 2007
  • This paper reports the first results of a series of planarization film study for the stainless steel (SS) substrates for flexible displays. Diglycidyl ether of bisphenol A (DGEBA) and octa(dimethylsiloxypropylglycidylether) silsesquioxane (OG) were chosen for the organic and the hybrid epoxies respectively and diaminodiphenylmethane (DDM) was used as a curing agent at 1:2 stoichiometric ratio. These materials were spin-coated on SS substrates and thermal-cured. TGA study indicated that both the pristine and the cured OG were more thermally stable than DGEBA. AFM study showed that the smooth surfaces of $1{\sim}2\;nm$ roughness can be prepared for both DGEBA and OG when the films were thick ($>\;1\;{\mu}$). The electrical properties such as dielectric constant, capacitance and the leakage current with respect to the applied voltage were all stable even after the stress of $100\;V/100^{\circ}C$ was applied for $0{\sim}10000$ seconds indicating that the insulating properties of DGEBA and OG films were very reliable.

Preparation of Hard Coating Solutions by Sol-Gel Reaction of Glycidoxypropyl Trimethoxysilane and Methacryloxypropyl Trimethoxysilane (Glycidoxypropyl Trimethoxysilane과 Methacryloxypropyl Trimethoxysilane의 Sol-Gel 반응을 이용한 하드코팅 용액의 제조)

  • Oh, Seung Kyun;Chung, Jae Shik;Lee, Bum Suk;Song, Ki Chang
    • Korean Chemical Engineering Research
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    • v.46 no.2
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    • pp.274-278
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    • 2008
  • Hard coating solutions were prepared from glycidoxypropyl trimethoxysilane (GPTMS) and methacryloxypropyl trimethoxysilane (MPTMS) precursors with different molar ratios of 10:0, 9:1, 7:3, 5:5, 3:7, and 0:10, respectively, by the sol-gel method. The polycarbonate (PC) sheets were spin-coated, and cured at $130^{\circ}C$ for 3 h. The effect of the GPTMS:MPTMS molar ratios of the mixture was investigated on the properties of coating films. The highest pencil hardness and adhesion to PC sheets of coating films were found for solution with GPTMS:MPTMS molar ratio of 5:5. Also, the pencil hardness of coating films was increased with increasing the $H_2O$ content in the coating solutions.

Preparation of Water-Repellent Coating Solutions from Tetraethoxysilane and Methyltriethoxysilane by Sol-Gel Method (졸-겔법에 의해 Tetraethoxysilane과 Methyltrimethoxysilane으로부터 발수코팅제 제조)

  • Kim, Dong Gu;Lee, Byung Wha;Song, Ki Chang
    • Korean Chemical Engineering Research
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    • v.56 no.3
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    • pp.327-334
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    • 2018
  • Water-repellent coating solutions were prepared by sol-gel method using tetraethoxysilane (TEOS) and methyltrimethoxysilane (MTMS) as precursors. The solutions were spin-coated on a cold-rolled steel sheet and thermally cured to prepare a non-fluorine water-repellent coating films. The effects of molar ratios of MTMS/TEOS, water concentration and ammonia concentration on the hydrophobic properties of the coating films were studied. The contact angle of water on coating films prepared by varying the molar ratio of MTMS/TEOS to 1~20 showed a maximum value of $108^{\circ}$ when the MTMS/TEOS molar ratio was 10. With increasing water content, the coating films showed the larger contact angles and the better the water repellency. As the amount of ammonia added was increased, the contact angles of coating films were increased, showing the better the water repellency. It is considered that the larger the amount of ammonia added, the larger the size of the silica particles generated, which increases the surface roughness of the silica particles, thereby increasing the water repellency.