• 제목/요약/키워드: sol-gel processing

검색결과 190건 처리시간 0.072초

FRAM 소자용 PZT박막의 강유전특성에 관한 연구 (A study on the Improvement of Ferroeletric Characteristics of PZT thin film for FRAM Device)

  • 이병수;정무영;신백균;이덕출;이상희;김진식
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.1881-1883
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    • 2005
  • In this study, PZT thin films were fabricated using sol-gel Processing onto $Si/SiO_2/Ti/Pt$ substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}\;A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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비휘발성 메모리용 강유전체 박막에 관한 연구 (A study on the PZT thin films for Non-volatile Memory)

  • 이병수;박종관;김용운;박강식;김승현;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1562-1564
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    • 2003
  • In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C,\;650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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Synthesis and Characterization of Yttrium-doped Core-Shell SiO2 Nanoparticles by Reverse Micelle and Sol-gel Processing

  • Kim, Jun-Seop;Chu, Min-Cheol;Cho, Seong-Jai;Bae, Dong-Sik
    • 한국세라믹학회지
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    • 제45권9호
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    • pp.512-517
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    • 2008
  • In this study, yttrium-doped $SiO_2$ nanoparticles are synthesized using a reverse micelle technique combined with metal alkoxide hydrolysis and condensation. Spherical Y-doped $SiO_2$ nanoparticles with a uniform size distribution are prepared using selfassembly molecules in conjunction with the hydrolysis and condensation of organometallic precursors. The water/surfactant molar ratio influenced the Y-doped $SiO_2$ particles distribution of the core-shell composite particles and the distribution of Y doped $SiO_2$ particles was broadened as the water to surfactant ratio increased. The particle size of Y increase linearly as the $Y(NO_3)_3$ solution concentration increased. The average size of the cluster was found to depend on the micelle size, the nature of the solvent, and the concentration of the reagent. The effects of synthesis parameters, such as the molar ratio of water to surfactant and the molar ratio of water to TEOS, are discussed.

Preparation and Field-Induced Electrical Properties of Perovskite Relaxor Ferroelectrics

  • Fan, Huiqing;Peng, Biaolin;Zhang, Qi
    • Transactions on Electrical and Electronic Materials
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    • 제16권1호
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    • pp.1-4
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    • 2015
  • (111)-oriented and random oriented $Pb_{0.8}Ba_{0.2}ZrO_3$ (PBZ) perovskite relaxor ferroelectric thin films were fabricated on Pt(111)/$TiO_x$/$SiO_2$/Si substrate by sol-gel method. Nano-scaled antiferroelectric and ferroelectric two-phase coexisted in both (111)-oriented and random oriented PBZ thin film. High dielectric tunability (${\eta}=75%$, E = 560 kV/cm) and figure-of-merit (FOM ~ 236) at room temperature was obtained in (111)-oriented thin film. Meanwhile, giant electrocaloric effect (ECE) (${\Delta}T=45.3K$ and ${\Delta}S=46.9JK^{-1}kg^{-1}$ at $598kVcm^{-1}$) at room temperature (290 K), rather than at its Curie temperature (408 K), was observed in random oriented $Pb_{0.8}Ba_{0.2}ZrO_3$ (PBZ) thin film, which makes it a promising material for the application to cooling systems near room temperature. The giant ECE as well as high dielectric tunability are attributed to the coexistence of AFE and FE phases and field-induced nano-scaled AFE to FE phase transition.

이산화티타늄-발광체 복합소재 제조 및 가시광선 광촉매 반응 (Preparation of the Titanium Dioxide-Phosphor Composite and its Photocatalytic Reaction under Visible Light)

  • 박진우;김정식
    • 한국세라믹학회지
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    • 제45권11호
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    • pp.688-693
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    • 2008
  • This paper presents a study on the photocatalytic reaction about the composite particles of $TiO_2$-coated phosphors under visible light irradiation. Nanocrystalline titanium dioxide layers were directly coated on the alkaline earth aluminate phosphor, $CaAl_2O_4:Eu^{2+},\;Nd^{3+}$ particles by an sol-gel processing method. The photocatalytic reaction was analyzed with the degradation of methylene blue (MB) aqueous solution under UV and visible light irradiations. $TiO_2$-coated phosphor powders showed different photocatalytic mechanism, compared with pure $TiO_2$ (P-25, Degussa). Under UV-irradiation, $TiO_2$-coated phosphor powders showed slow photocatalytic reactivity in the early stage and fast in the latter, compared with that of pure $TiO_2$. However, $TiO_2$-coated phosphor powders showed much faster photocatalytic reactivity than that of pure $TiO_2$ under visible irradiation. In addition, the characterizations of the $TiO_2$-coated phosphor powders were conducted by a X-ray diffractometer (XRD), transmission electron microscope (TEM), and energy dispersive spectroscopy (EDS).

Mechanical Properties of 2-D Silica-Silica Continuous Fiber-reinforced Ceramic-matrix Composite Fabricated by Sol-Gel Infiltration

  • Kim, Ha-Neul;Kim, Dong-Jun;Kang, Eul-Son;Kim, Do-Kyung
    • 한국재료학회지
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    • 제19권7호
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    • pp.391-396
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    • 2009
  • 2-dimensional silica-silica Continuous Fiber-reinforced Ceramic.matrix Composites (CFCCs) were fabricated by a sol-gel infilitration method that has a changing processing condition, such as the repetitions of infilitration. In order to investigate the relationship between the processing condition and the mechanical properties of composites, the mechanical properties of specimens were measured by means of a 4-point flexural strength test while the evidence of strength degradation were microstructurally characterized. There seemed to be a minimum density value that existed at which the delamination between the fabrics would not occur. In the case that the density of silica CFCCs exceeded 1.55 g/$cm^3$, the flexural strength also exceeded approximately 18 MPa at least. By applying the Minimum Solid Area (MSA) analysis of the porous structure, the correlation between the relative density and the mechanical properties of composites will be discussed.

Enhancement of NOx photo-oxidation by Fe-doped TiO2 nanoparticles

  • Martinez-Oviedo, Adriana;Ray, Schindra Kumar;Gyawali, Gobinda;Rodriguez-Gonzalez, Vicente;Lee, Soo Wohn
    • Journal of Ceramic Processing Research
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    • 제20권3호
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    • pp.222-230
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    • 2019
  • Microwave hydrothermal-assisted sol-gel method was employed to synthesize the Fe doped TiO2 photocatalyst. The morphological analysis suggests anatase phase nanoparticles of ~20 nm with an SBET area of 283.99 ㎡/g. The doping of Fe ions in TiO2 created oxygen vacancies and Ti3+ species as revealed through the XPS analysis. The reduction of the band gap (3.1 to 2.8 eV) is occurred by doping effect. The as-prepared photocatalyst was applied for removal of NOx under solar light irradiation. The doping of Fe in TiO2 facilitates 75 % of NOx oxidation efficiency which is more than two-fold enhancement than the TiO2 photocatalyst. The possible reason of enhancement is associated with high surface area, oxygen vacancy, and reduction of the band gap. Also, the low production of toxic intermediates, NO2 gas, is further confirmed by Combustion Ion Chromatography. The mechanism related NOx oxidation by the doped photocatalyst is explained in this study.

Structural and electrical properties of (Ba0.7Sr0.3)TiO3 thin films for the application of electro-caloric devices

  • Kwon, Min-Su;Lee, Sung-Gap;Kim, Kyeong-Min;Choi, Seungkeun
    • Journal of Ceramic Processing Research
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    • 제20권4호
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    • pp.395-400
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    • 2019
  • This study was conducted on the structural and electrical properties of (Ba0.7Sr0.3)TiO3 thin films prepared by the sol-gel and spin-coating methods in order to investigate their applicability to electrocaloric devices. All specimens showed a tetragonal crystal structure and lattice constants of a = 3.972 Å, c = 3.970 Å. The mean grain size of specimens sintered at 800 ℃ was about 30 nm, and the average thickness of 5 times coated specimens was 304~311 nm. In the specimen sintered at 750 ℃, The relative dielectric constant and loss of specimens measured at 20 ℃ were 230 and 0.130, respectively, while dependence of the dielectric constant on unit DC voltage was -8.163 %/V. The remanent polarization and coercive fields were 95.5 μC/㎠ and 161.3 kV/cm at 21 ℃, respectively. And, the highest electrocaloric property of 2.69 ℃ was observed when the electric field of 330 kV/cm was applied.