• Journal of the Korean Magnetics Society
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• v.11 no.6
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• pp.239-244
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• 2001

Recently, RF inductor having researched by many workers, we fabricated and investigated properties of RF inductors. In order to improve the Q-factor (Quality), we try to apply the patterned Fe$_{78.81}$Ta$_{8.47}$N$_{12.71}$ soft magnetic thin film of 5000 which shows magnetic anisotropy of 30 Oe. Thus, patterned magnetic film was artificially increased magnetic anisotropy lead to increasing of ferro-magnetic resonance frequency up to GHz band. Coil as part of inductor was fabricated by lift off process. The dimension of RF inductor was designed 47un, rectangular shape, and measured properties. In the case of Ti/Ag air core type inductor shows Q of 9, inductance of 8.4 nH at 2 GHz. Magnetic film employed inductor shows inductance of 9 nH and FMR resonance frequency was 700 MHz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.132-135
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

• Journal of Magnetics
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• v.13 no.2
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• pp.53-56
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• 2008

This study proposes a simple nano-patterning process for the fabrication of magnetic nanodot arrays on a large area substrate. Ni nanodots were fabricated on a large area (4 inches in diameter) Si substrate using the soft lithographic technique using self-assembled surface micelles of Polystyrene-block-Poly(methyl methacrylate) (PS-b-PMMA) diblock copolymer formed at the air/water interface as a mask. The hexagonal array of micelles was successfully transferred to a Ni thin film on a Si substrate using the Langmuir-Blodgett technique. After ion-mill dry etching, a magnetic Ni nanodot array with a regular hexagon array structure was obtained. The Ni nanodot array showed in-plane easy axis magnetization and typical soft magnetic properties.

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.146.2-146.2
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• 2007

• Proceedings of the Korean Magnestics Society Conference
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• 1997.05a
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• pp.52-53
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• 1997

• Proceedings of the Korean Magnestics Society Conference
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• 1992.10a
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• pp.92-93
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• 1992

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.11a
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• pp.132-132
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• 2002

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.200-201
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• 2002

Recently, a countermeasure for the electromagnetic noise emission on RF integrated transmission line using the loss generation of ferromagnetic thin films is briefly suggested$\^$1,2/. Without the magnetic film, the noise harmonics of the signal pass through the transmission line with only a little attenuation. The ideal role of magnetic film is not to raise insertion losses in the pass-band and to give as large attenuation as possible to eliminate the noise harmonics at the stop-band, the frequency range higher than the meaningful signal as shown in Fig. 1. and Fig. 2. (omitted)

• Journal of Sensor Science and Technology
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• v.16 no.5
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• pp.389-393
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• 2007

Soft ferromagnetic materials are very useful for many sensors using magnetic materials demanding high permeability, low coercivity and low hysteresis loss. Among them, FeCoSiBNi amorphous magnetic films show a good impedance change (about 5.01 %/Oe, at 10 MHz) by the exterinal magnetic field in this experiment. The magnetic films are produced by melt-spun method, one of the rapid solidification process. Ribbon shape wires were made from the films, and let them annealed in DC magnetic field to increase the maximum Giant Magneto Impedance ratio. Field annealing decreases the stress and changes the effective anisotropy. Thus, we can find that the impedance change (200.47 %) is improved and the fabricated magnetic wire has characteristics of good sensor element.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.1
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• pp.52-58
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• 2004

Magneto-Impedance(MI) sensor is a highly sensitive sensor, which was able to detect a weak geomagnetic field. It also has a merit to be able to build in the low power system. In this study, their magnetic permeability and anisotropy field(H$\sub$k/) as a function of some different thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ respectively for 2 hours. Magnetic properties of films are measured by using a M-H loop tracer. Magnetic permeability of a film is measured over the frequency range from 1 ㎒ to 750㎒. By thickening a CoZrNb film relatively, magnetic permeability and impedance are examine to design the. MI sensor which drives at 50㎒, and thereof fabricated the MI sensor which drives at the 50㎒.