• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.641-644
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• 2009

We demonstrated a solvent-assisted soft-lithographic patterning method for producing patterned structure and patterned ordering with lyotropic liquid crystalline polymer (LCP) film. Experimental results showed that the liquid crystalline ordering of lyotropic film could be controlled by shearing effects of the fluidic solvent though the patterned mold channels. In this work, two types of lyotropic LCPs were used to investigate the effects of the alkyl chain length of the lyotropic LCP on producing liquid crystalline ordering through the solvent-assisted fluidic patterning.

• 공업화학
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• 제16권2호
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• pp.238-242
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• 2005

본 연구에서 soft lithographic mothed 기술을 사용하여 마이크로채널을 만들기 위해 polydimethylsiloxane (PDMS)와 SU-8 감광제를 사용하였다. 외부전압과 채널너비에 대한 영향을 조사하기 위하여 마이크로채널의 너비를 $100{\mu}m,\;200{\mu}m,\;300{\mu}m$로 제작하였으며, 각각의 마이크로채널에 외부전압을 걸어 유체의 속도를 측정하였다. 그 결과 동일한 너비를 갖는 마이크로채널에 외부전압을 변화시켰을 때, 외부전압이 증가할수록 유체의 속도가 증가하였다. 이는 외부전압이 증가할수록 계면에서의 전기이중층이 압축되어 제타전위의 값이 증가하기 때문인 것으로 해석된다. 또한, 동일한 외부전압에서 마이크로채널의 너비가 증가할수록 유체의 속도가 증가하는 것으로 나타났다. 이는 채널 너비의 증가가 내부의 저항을 감소시켜 유체의 속도가 보다 빠르게 나타나는 것으로 판단된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.144.2-144.2
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• 2013

With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.176.2-176.2
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• 2014

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.165-165
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• 2014

In this study, we demonstrated that the soft lithographic patterning processing of chemical vapor deposition (CVD) graphene and rGO sheets as large scale, low cost, high quality and simplicity for future industrial applications. Recently, a previous study has reported that single layer graphene grown via CVD was patterned and transferred to a target surface by controlling the surface energy of the polydimethylsiloxane (PDMS) stamp [1]. Using this approach, the surface of a relief-patterned elastomeric stamp was functionalized with hydrophilic dimethylsulfoxide (DMSO) molecules to enhance the surface energy of the stamp and to remove the graphene-based layer from the initial substrate and transfer it to a target surface [2]. Further, we developed a soft lithographic patterning process via surface energy modification for advanced graphene-based flexible devices such as transistors or simple and efficient chemical sensor consisting of reduced graphene oxide (rGO) and a metallic nanoparticle composite. A flexible graphene-based device on a biocompatible silk fibroin substrate, which is attachable to an arbitrary target surface, was also successfully fabricated.

• 공업화학
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• 제17권1호
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• pp.28-32
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• 2006

본 연구에서는 polydimethylsiloxane (PDMS)와 glass로 이루어진 마이크로채널의 너비와 깊이 및 외부전압에 따른 특성을 알아보기 위하여 각각의 마이크로채널에서의 유량 변화를 조사하였다. PDMS와 SU-8 감광제를 사용하는 soft lithographic method 기술을 사용하여 마이크로채널을 만들었다. 채널의 깊이 $50{\mu}m$와 $100{\mu}m$에 대하여, 채널의 너비를 $100{\mu}m$, $200{\mu}m$, $300{\mu}m$로 하여 제작하였으며, 각각의 마이크로채널에 0.3 kV, 0.35 kV, 0.4 kV 그리고 0.45 kV의 외부전압을 걸어 유량 변화를 측정하였다. 실험 결과, 동일한 너비를 갖는 마이크로채널에서는 외부전압이 증가함에 따라 유량이 증가하였다. 이는 외부전압이 증가함에 따라 전기장이 증가하기 때문이다. 동일한 외부전압에서 마이크로채널의 너비가 증가할수록 유량이 증가하는 경향이 나타났고, 이는 채널 너비의 증가가 내부의 저항을 감소시키는 효과를 가져온 것으로 사료된다. 또한, 동일하게 단면적을 두 배로 증가시켜 깊이와 너비의 영향을 조사한 결과, 저 전압에서는 깊이의 영향이 크게 나타났으며 고 전압에서는 너비의 영향이 크게 나타났다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.299-302
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• 2007

We propose a soft-lithographic patterning method for producing a multi-domain liquid crystal (LC) alignment. The LC alignment polyimide layers are periodically patterned in the pixel boundaries by a micromolding-in-capillaries method. In our structure, the initially homeotropic LC orientations in the pixel areas are changed to axially symmetric LC domains due to the symmetric pretilt of LC molecules on the pixel boundaries.

• 순환기질환의공학회:학술대회논문집
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• 순환기질환의공학회 2004년도 제4회 학술대회 초록집
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• pp.17-18
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• 2004

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1719-1722
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• 2006

We proposed a soft-lithographic method for aligning a liquid crystal (LC) in patterned azimuthal orientations. It is demonstrated that a thermoplastic polystyrene layer is patterned from a thermally stable polyimide layer via pressure-assisted capillary force lithography, which provides multidirectional LC alignment condition simply followed by a unidirectional rubbing process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.705-708
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• 2003

To observe a hydrated biological specimen, an environmental chamber was necessary to keep the specimen in a wet state under vacuum surroundings. The specimen holder is as follows designed consequently. The specimen holder consisted of two Si wafers, the centers of which were Si$_3$N$_4$(100nm thickness) windows of a 0.3mm square. The windows were made by a photo-lithographic method. The transmission of a window at 400eV is about 70%. A hydrated biological specimen was put between the two windows. When the chamber was closed, two wafers were contact at the metal mesh by the pressure of O-rings, and the specimen holder moved by the three micrometers.