• Title/Summary/Keyword: smoother

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Scanning Tunneling Microscopy (STM)/Atomic Force Microscopy(AFM) Studies of Silicon Surfaces Treated in Alkaline Solutions of Interest to Semiconductor Processing

  • Park, Jin-Goo
    • Journal of the Korean institute of surface engineering
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    • v.28 no.1
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    • pp.55-63
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    • 1995
  • Alkaline solutions such as $NH_4$OH, choline and TMAH (($CH_3$)$_4$NOH) have been introduced in semiconductor wet processing of silicon wafers to control ionic and particulate impurities following etching in acidic solutions. These chemicals usually mixed with hydrogen peroxide and/or surfactants to control the etch rate of silicon. The highest etch rate was observed in $NH_4$OH solutions at a pH in alkaline solutions. It indicates that the etch rate depends on the content of $OH^{-}$ as well as cations of alkaline solutions. STM/AFM techniques were used to characterize the effect of alkaline solutions on silicon surface roughness. In SC1 (mixture of $NH_4$OH : $H_2$$O_2$ : $H_2$O) solutions, the reduction of the ammonium hydroxide proportion from 1 to 0.1 decreased the surface roughness ($R_{rms}$) from 6.4 to $0.8\AA$. The addition of $H_2$$O_2$ and surfactants to choline and TMAH reduced the values of $R_{p-v}$ and $R_{rms}$ significantly. $H_2$$_O2$ and surfactants added in alkaline solutions passivate bare silicon surfaces by the oxidation and adsorption, respectively. The passivation of surfaces in alkaline solutions resulted in lower etch rate of silicon thereby provided smoother surfaces.s.ces.s.

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Pulsed laser deposition of YBCO thin films using modified melt-textured grown targets (Modified melt-textured growth 법으로 제작한 타겟을 사용한 YBCO 박막의 펄스레이저 증착)

  • Kim, Chang-Hoon;Kim, In-Tae;Hong, Kug-Sun;Kim, Young-Hwan;Choi, Sang-Sam;Hahn, Taek-Sang
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.115-119
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    • 1999
  • Ba$_2Cu_3O_{7-{\delta}}$ (YBCO) thin films were deposited by pulsed laser deposition using differently prepared targets: One was a conventionally solid-state sintered (SSS) target and the other was a modified melt-textured grown (MTC) target. Compared with SSS targets, MTG targets showed a well-connected microstructure consisting of much larger grains and the surface was Bess roughened with the cumulative laser incidence. YBCO films deposited from MTC targets showed a denser and smoother surface of the basal film than the case of SSS targets. The investigations of ${\alpha}$-axis outgrowths in the films indicated that the deposition using MTG targets would result in a more homogeneous and stable film growth as compared to the SSS targets. Also, TEM analysis revealed that the film deposited from MTG targets had a less granular microstructure that would reduce weak-link effects in the film.

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Effect of Sputtering Working Pressure on the Optical and Electrical Properties of InZnO Thin-Film Transistors (스퍼터링 공정 압력이 InZnO 박막트랜지스터의 광학 및 전기적 특성에 미치는 영향)

  • Park, Ji-Min;Kim, Hyoung-Do;Jang, Seong Cheol;Kim, Hyun-Suk
    • Korean Journal of Materials Research
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    • v.30 no.4
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    • pp.211-216
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    • 2020
  • Amorphous In-Ga-Zn-O (a-IGZO) thin film transistors, because of their relatively low mobility, have limits in attempts to fulfill high-end specifications for display backplanes. In-Zn-O (IZO) is a promising semiconductor material for high mobility device applications with excellent transparency to visible light region and low temperature process capability. In this paper, the effects of working pressure on the physical and electrical properties of IZO films and thin film transistors are investigated. The working pressure is modulated from 2 mTorr to 5 mTorr, whereas the other process conditions are fixed. As the working pressure increases, the extracted optical band gap of IZO films gradually decreases. Absorption coefficient spectra indicate that subgap states increase at high working pressure. Furthermore, IZO film fabricated at low working pressure shows smoother surface morphology. As a result, IZO thin film transistors with optimum conditions exhibit excellent switching characteristics with high mobility (≥ 30㎠/Vs) and large on/off ratio.

A Study on the Electrical and Optical Properties of Micro-Pattern of Polypyrrole(PPy) by Using Vapor Phase Polymerization (기상중합법을 이용한 Polypyrrole(PPy) 필름의 전기적/광학적 특성 및 미세패턴 형성에 관한 연구)

  • Han, Yong-Hyeon;Yim, Jin-Heong
    • Polymer(Korea)
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    • v.34 no.5
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    • pp.450-453
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    • 2010
  • The electrical/optical properties and surface structures of polypyrrole (PPy) thin films, which were prepared by liquid phase polymerization (LPP) and vapor phase polymerization (VPP) of pyrrole using FTS as an initiatior are compared. The PPy thin film prepared by VPP showed superior surface resistance characteristics as compared with that prepared by LPP. We investigated the relation between surface morphology of PPy film and surface resistance by surface characteristic analysis. The surface of PPy thin film prepared by VPP was smoother than that prepared by LPP. Micro-patterned PPy thin film could be prepared effectively using VPP-combined ink-jet printing and soft lithography.

Long-Term Trend Analyses of Water Qualities in Nakdong River Based on Non-Parametric Statistical Methods (비모수 통계기법을 이용한 낙동강 수계의 수질 장기 경향 분석)

  • Kim, Joo-Hwa;Park, Seok-Soon
    • Journal of Korean Society on Water Environment
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    • v.20 no.1
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    • pp.63-71
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    • 2004
  • The long-tenn trend analyses of water qualities were performed for 49 monitoring stations located in Nakdong River. Water quality parameters used in this study are the monthly data of BOD(Biological Oxygen Demand), TN(Total Nitrogen) and TP(Total Phosphorus) measured from 1990 to 1999. The long-tenn trends were analyzed by Seasonal Mann-Kendall Test and Locally WEighted Scatter plot Smoother(LOWESS). Nakdong river was divided into four subbasins, including upstream watershed, midstream watershed, western downstream watershed and eastern downstream watershed. The results of Seasonal Mann-Kendall Test indicated that there would be no trends of BOD in upstream watershed, western and eastern downstream watershed. Trends of BOD were downward in midstream watershed. For TN and TP, there were upward trends in all of watersheds. But LOWESS curves suggested that BOD, TN and TP concentrations generally increased between 1990 and 1996, then resumed decreasing.

Smooth Path Generation using Hexagonal Cell Representation (육각형 격자를 사용한 부드러운 경로생성)

  • Jung, Dong-Won
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.12
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    • pp.1124-1132
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    • 2011
  • This paper deals with smooth path generation using B-spline for fixed-wing unmanned aerial vehicles manuevering in 2D environment. Hexagonal cell representation is employed to model the 2D environment, which features increased connectivity among cells over square cell representation. Subsequently, hexagonal cell representation enables smoother path generation based on a discrete sequence of path from the path planner. In addition, we present an on-line path smoothing algorithm incorporating B-spline path templates. The path templates are computed off-line by taking into account all possible path sequences within finite horizon. During on-line implementation, the B-spline curves from the templates are stitched together repeatedly to come up with a reference trajectory for UAVs. This method is an effective way of generating smooth path with reduced on-line computation requirement, hence it can be implemented on a small low-cost autopilot that has limited computational resources.

Comparison of Learning Immersion Experiences According to Cognitive Style in Online Edu-games (온라인 교육용 게임에서의 인지양식에 따른 학습 몰입경험 비교)

  • Kang, Eun-Kyougn;Kim, Han-Il
    • The Journal of Korean Association of Computer Education
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    • v.13 no.4
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    • pp.61-68
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    • 2010
  • One often thinks that those doing any activity on the Internet are likely to be addicted to it so that they tend to rather restrain the educational use of what the Internet can provide. However, the online edu-games deserve a good learning material which can not only provoke learners' interest but also draw out a smoother interaction between teachers and learners. Even the preliminary study on immersion verified that the Internet could work positively for the learners. Considering that online edu-games can be a useful tool for individual learning, more studies on immersion should be conducted focusing on the individualization in the future. This paper shows the differences among the components of learning immersion depending on the different individual cognitive styles in the online edu-games.

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Evaluation of Role Flangeability of Steel Sheet with respect to the Role Processing Condition (가공조건에 따른 강판의 구멍확장성 평가)

  • Lee, J.S.;Kim, Y.K.;Huh, H.;Kim, H.K.;Park, S.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2006.05a
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    • pp.359-362
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    • 2006
  • In this paper, hole expanding tests are carried out in order to identify the effect of the hole process condition on the hole expanding ratio. Specimens with two different hole conditions are prepared: one is produced with punching process; and the other is reamed after punching to get smoother hole surface. The experimental results show that the facture mechanism and the hole expanding ratio are quite different with respect to the hole condition. The hole expanding ratio of a punched specimen is much smaller than that of a reamed one due to the difference of surface roughness and internal defects. For the thorough investigation of those effects, tensile tests of a specimen with a hole are performed. The fracture strain is obtained with different hole conditions and a finite element analysis of the hole flanging process carried out. The experimental results are confirmed and reevaluated by finite element analysis of the hole flanging process with ductile fracture criterion proposed.

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Effects of Substrate Temperature and the $O_2$/Ar Ratio on the Characteristics of RF Magnetron Sputtered $RuO_2$ Thin Films

  • Park, Jae-Yong;Shim, Kyu-Ha;Park, Duck-Kyun
    • The Korean Journal of Ceramics
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    • v.2 no.1
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    • pp.43-47
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    • 1996
  • $RuO_2$ thin films deposited directly on Si substrate by RF magnetron sputtering method using $RuO_2$ target have been investigated. Special interest was focused on the effect of process parameter on the surface roughness of $RuO_2$ films. Crystallization behavior and electrical properties of the films deposited at $300^{\circ}C$ were superior to those deposited at room temperature. Metallic Ru phase was formed in pure Ar and this phase had resulted poor adhesion after post annealing process in oxidizing ambient. Microstructural analysis reveals that the size of the $RuO_2$ crystallites gets smaller and the surface becomes smoother as the $O_2$ partial pressure or film thickness decreases. Irrespective of the $O_2/Ar$ ratio, resistivity of $RuO_2$ films ranged in $50~70 {\mu}{\Omega}-cm$. As the film thickness decreases, there is a thickness where the resistivity rises abruptly. Such an onset thickness turned out to be dependent n the $O_2$/Ar ratio.

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The Study Effect to Attachment to Family-of-origin and Psychological Separation on Newly-Wedded Marital Adjustment (원가족 부모와의 애착 및 심리적 독립심 지각과 신혼기 결혼적응과의 관계에 관한 연구)

  • Lim, Yu-Jin;Park, Jeong-Yun;Yang-Hee, Kim
    • Journal of Families and Better Life
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    • v.26 no.5
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    • pp.143-154
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    • 2008
  • This study focused on the parent.child relationship and its, which has effect on the newly.wedded marital adjustment. Based on the relationship with analyzing attachment to parents, psychological separation, and newly.wedded marital adjustment, the research was conducted focusing on explored the relationships influences among these influences things. The subjects of this study were 216 in the newly-wedded couples with less than 5 years since of marriage. The major findings of this study were as follows: First, as a result of analysis of differences in marital adjustment according to attachment to parents revealed that, the group with stable attachment to parents showed the more a smoother adjustment in their relationships with the spouses after marriage. Second, as a result of analyzing analysis of the difference in marital adjustment according to psychological separation from parents indicated that, the higher psychological separation from parents showed the related to higher marital adjustment.