• Journal of the Korean Applied Science and Technology
• /
• v.32 no.3
• /
• pp.405-411
• /
• 2015

Carbon composites for flexible fiber heating element were examined to improve the electrical conductivity in this study. Carbon composites using carbon black, denka black, super-c, super-p with/without CNF or dispersant such as BCS03 and Sikament-nn were prepared. Carbon composite slurry was coated on plane film and yarns(cotton, polyester) and the performances of prepared heating materials were investigated by checking electrical surface resistance, adhesion strength. The plane heating element using carbon black under natural drying condition($25^{\circ}C$) had better physical properties such as surface resistance(185.3 Ohm/sq) and adhesion strength(above 90%) than those of other carbon composite heating elements. From these results, polyester heating element coated by carbon black showed better electrical line resistance(33.2 kOhm/cm) than cotton heating element. Then, it was found that polyester heating element coated by carbon black with CNF(3 wt%) and BCS03(1 wt%) appeared best properties(0.604 kOhm/cm).

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.04a
• /
• pp.1117-1120
• /
• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Proceedings of the Korean Geotechical Society Conference
• /
• 2008.03a
• /
• pp.1061-1064
• /
• 2008

A completion of settling process takes a lot of time for dredged materials of high moisture content, such as contaminated sludge, in landfill site. In general, additives (e.g. flocculants) are used for reducing settling time of such colloidal material, which results in the increase of sludge volume, and hence much space is required in landfill site. This study is to suggest alternative method in order to enhance the settling process of cohesive clayey soils. A number of gravitational sedimentation tests as well as electrokinetic experiments were conducted to investigate the variation of initial moisture content on the settling behaviour of clay slurry. Surface settlement, electric current and local voltage gradient were monitored during the experiment, and moisture content and soil pH were measured after the experiment. From the results, the application of electrokinetics was found to be effective in volume reduction (i.e. increase of settling velocity and decrease of final moisture content) by comparison with gravitational settling process.

• Transactions on Electrical and Electronic Materials
• /
• v.8 no.1
• /
• pp.26-31
• /
• 2007

The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.

• Journal of the Korean Ceramic Society
• /
• v.49 no.1
• /
• pp.72-77
• /
• 2012

In the preparation of a hydroxyapatite [HAp]/gelatin [GEL] nanocomposite, the GEL matrix in aqueous solution of $H_3PO_4$ was modified by the introduction of aspartic acid [Asp], asparagine [Asn], and glycine [Gly]. The addition of Asp, Asn and Gly greatly affected the slurry formation of HAp/GEL nanocomposite and the resulting dry body showed variations in toughness with the addition of the different amino acids. The introduction of Asn into HAp/GEL nanocomposite was effective for producing the organic-inorganic interaction between HAp and GEL, and caused the increase of toughness. The formation reaction of the modified HAP/GEL nanocomposites was investigated by using XRD and FT-IR. The organic-organic interaction between the GEL matrix and the additives of Asp, Asn and Gly was confirmed from FT-IR analysis, and the organic-inorganic interaction between HAp nanocrystallites and the modified GEL matrix was also discussed, using FT-IR spectra patterns. Nanocrystallites of HAp were covalently bound with the GEL macromolecules and differently influenced by the modification species of Asp, Asn, and Gly.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.55 no.3
• /
• pp.116-121
• /
• 2006

Most high-k materials are well known not to be etched easily, Some problems such as low etch rate poor sidewall angle, plasma damage, and process complexity were emerged from the high-density DRAM fabrication. Chemical mechanical polishing (CMP) by a damascene process was proposed to pattern this high-k material was polished with some commercial silica slurry as a function of pH variation. Sufficient removal rate with adequate selectivity to realize the pattern mask of tera-ethyl ortho-silicate (TEOS) film for the vertical sidewall angle were obtained. The changes of X-ray diffraction pattern and dielectric constant by CMP process were negligible. The planarization was also achieved for the subsequent multi-level processes. Our new CMP approach will provide a guideline for effective patterning of high-k material by CMP technique.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.551-552
• /
• 2006

The miniature fuel cells have emerged as a promising power source for applications such as cellular phones, small digital devices, and autonomous sensors to embedded monitors or to micro-electro mechanical system (MEMS) devices. Several chemicals run candidate at a fuel in those systems, such as hydrogen. methanol, ethanol, acetic acid, and di-methyl ether (DME). Among them, hydrogen shows most efficient fuel performance. However, there are some difficulties in practical application for portable power sources. Therefore, more recently, there have been many efforts for development of micro-reformer to operate highly efficient micro fuel cells with liquid fuels such as methanol, ethanol, and DME In our experiments, we have integrated a micro-fuel processor system using low temperature co-fired ceramics (LTCC) materials. Our integrated micro-fuel processor system is containing embedded heaters, cavities, and 3D structures of micro- channels within LTCC layers for embedding catalysts (cf. Figs. 1 and 2). In the micro-channels of LTCC, we have loaded $CuO/ZnO/Al_2O_3$ catalysts using several different coating methods such as powder packing or spraying, dipping, and washing of catalyst slurry.

• 한국신재생에너지학회:학술대회논문집
• /
• 2009.11a
• /
• pp.396-396
• /
• 2009

Chalcopyrite semiconductor $CuInSe_2$ nanoparticles were prepared using a low temperature colloidal route by reacting the starting materials (CuI, $InI_3$ and $Na_2Se$) in solvents. After synthesised $CuInSe_2$ nanoparticles precursors were mixed with organic binder for the viscosity of the precursor slurry to be suitable for the doctor blade method. The mixture of $CuInSe_2$ and binder was deposited onto molybdenum-coated sodalime glass substrates to form thin film. The precursor thin films were preheated on the hot plate to remove remaining solvents and binder material. After subsequent thermal processing of the thin film under a selenium ambient, $CuInSe_2$ absorber layer with grain size significantly lager than that of the nanoparticles was formed.

• Journal of Powder Materials
• /
• v.22 no.6
• /
• pp.438-442
• /
• 2015

Porous thick film of alumina which is fabricated by freeze tape casting using a camphene-camphor-acrylate vehicle. Alumina slurry is mixed above the melting point of the camphene-camphor solvent. Upon cooling, the camphene-camphor crystallizes from the solution as particle-free dendrites, with the $Al_2O_3$ powder and acrylate liquid in the interdendritic spaces. Subsequently, the acrylate liquid is solidified by photopolymerization to offer mechanical properties for handling. The microstructure of the porous alumina film is characterized for systems with different cooling rate around the melting temperature of camphor-camphene. The structure of the dendritic porosity is compared as a function of ratio of camphene-camphor solvent and acrylate content, and $Al_2O_3$ powder volume fraction in acrylate in terms of the dendrite arm width.

• Journal of Animal Environmental Science
• /
• v.20 no.2
• /
• pp.69-76
• /
• 2014

This study was aimed at investigating a filtration bed system for the production of liquid fertilizer using wastewater generated after anaerobic digestion of animal manure. Slurry, Compost, & Biofiltration-Methane System, designed by Korean National Institute of Animal Science, is now a standard method to recycle anaerobic digestion wastewater. However, currently provided protocol to run the system needs continuous upgrades as the system is relatively new and can be more cost-effective if few adjustments are made. In this study, we tried to enhance the capability of the system to process anaerobic digestion wastewater by replacing the bed materials with the cheaper one, and determining the time point of operation from which filtrates can be utilized for fertilization.