• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.47-51
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• 2011

We investigated the substrate surface polishing by the spherical rigid abrasive under the compression using classical molecular dynamics modeling. We performed three-dimensional molecular dynamic simulations using the Morse potential functions for the various slide-to-roll ratios, from 0 to 1, and then, the compressive forces acting on the spherical rigid abrasive were calculated as functions of the time and the slide-to-roll ratio. The friction coefficients obtained from the classical molecular dynamics simulations were compared to those obtained from the experiments; and found that the molecular dynamic simulation results with the slide-to-roll ratio of 0 value were in good agreement with the experimental results.

• Tribology and Lubricants
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• v.14 no.1
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• pp.85-93
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• 1998

The Bair & Winer's limiting shear stress rheological model is incorporated into the Reynolds equation to successfully predict the traction and film thickness for an isothermal line contact using the primary rheological properties. The modified WLF viscosity model and Barus viscosity model are also adapted for the realistic prediction of EHD tractional behavior. The influences of the limiting shear stress and slide-roll ratio on the pressure spike, film thickness, distribution of shear stress and nonlinear variation of traction are examined. A good agreement between the disc machine experiments and numerical traction prediction has been established. The film thickness due to non-Newtonian effects does not deviate significantly from the fdm thicknesss with Newtonian lubricant.

• Journal of the Semiconductor & Display Technology
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• v.12 no.1
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• pp.61-65
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• 2013

We investigated the wearable dynamics of diamond spherical abrasive during the substrate surface polishing under the pad compression via classical molecular dynamics modeling. We performed three-dimensional molecular dynamics simulations using the Morse potential functions for the copper substrate and the Tersoff potential function for the diamond abrasive. The pad hardness had a big impact on the wearable dynamics of the abrasive. The moving speed of the abrasive decreased with increasing hardness of the pad. As the hardness decreased, the abrasive was indented into the pad and then the sliding motion of the abrasive was increased. So the pad hardness was greatly influenced on the slide-to-roll ratio as well as the wearable rate.