• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.5
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• pp.1096-1105
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• 1994

A hypereutectic Aluminum-Silicon Alloy is widely used in the parts of automobile because of high-resistance and good strength. In this study, the cutting of hypereutectic A1-Si alloy for economical production was investigated by simulation. Tool life and the extraction rate of Si particles is inversely proportional to the depth of cut. When decreasing the depth of cut, the reduction of single crystal diamond tool cost and tool change time is achieved.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.56-62
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• 2008

The biocompatibility and the fatigue strength of Co-Cr-Mo alloy are excellent, so it is used well for the material of artificial joints. The head of artificial joint needs mirror surface for reduction of abrasive resistance. Mirror finishing of Co-Cr-Mo alloy with geometrically defined single crystal diamond cutting tools is handicapped by micro chipping of tool edge. In general, it is said that the micro chipping of diamond tool is caused by work hardening of Co-Cr-Mo alloy for the cut. In the present research, mirror finishing of Co-Cr-Mo alloy by applying ultrasonic elliptical vibration cutting was carried out. The experimental results show that the micro chipping of diamond tool was suppressed and the tool wear was remarkably reduced as compared with the ordinary diamond cutting without elliptical vibration motion. It was confirmed that the good mirror surface of maximum surface roughness of 25 nmP-V was obtained for the cutting length of about 14 m. It is expected that mirror finishing of Co-Cr-Mo alloy can be achieved by applying ultrasonic elliptical vibration cutting practically.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1515-1522
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• 1990

Ultra precision cutting should be satisfied with two conditions of Mirror Like and shape grade, and especially Mirror Like depends on surface roughness. In this study, in order to develop Mirror Cutting for Al alloy, this was done with edge form of single crystal diamond tool divided into R type and S type. Surface roughness machined by S type tool is more satisfactory than by R type tool, being the lowest value of 13.8nm. In addition, Mirror surface can reach above 90% of reflection rate by both R type and S type tool, but machined surface by R type tool has much more fine fracture portions rather than by S type tool. Even though feed rate decreases from 5.mu.m to 1.mu.m, surface roughness doesn't show improvement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.538-541
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• 2003

Ultra-precision machining was carried out on a electroless nickel materials using single crystal diamond tools. The effects of the cutting velocity, the tool length, the tool nose radius, the feed rate and depth of cut on the surface roughness were studied. In this paper, the cutting condition for getting nano order smooth surface of electroless nickel have been examined experimentally by the ultra-precision machine and single crystal diamond tools. And also. the surface roughness was measured by the three dimension

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.416-421
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• 2003

To obtain the surface roughness with range from l0nm to In n need a ultra-Precision machine, cutting condition and the study of materials. And n have to also consider the chip and vibration of diamond tool during processing. In this paper, the cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning and single crystal diamond tool. In generally, the cutting conditions have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.207-213
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• 2014

A study was carried out to fabricate the cutting tool geometry with micro/nanoscale on the single crystal diamond tool by using the FIB. The FIB technique is an ideal tool for TEM sample preparation that allows for the fabrication of electron-transparent foils. The FIB is appropriate techniques to sample and subsequently define the chemical composition and the structural state of mineral inclusion on the micro/nanoscale. The combination of FIB with a SEM allows for 3D information to be obtained from samples including 3D imaging. Cutting strategies were demonstrated to improve the performance of cutting tool geometry and to generate high aspect ratio micro cutting tool. A finely focused beam of 30keV Ga+ ions was used to mill cutting tool shapes for various micro patterns. Therefore FIB sputtering is used to shape a variety of cutting tools with dimensions in the $1-5{\mu}m$ range and cutting edge radii of curvature of under 50nm.

• Journal of Powder Materials
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• v.20 no.5
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• Design & Manufacturing
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• v.14 no.3
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• pp.63-70
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• 2020

As the consumer market in the VR(virtual reality) and the head-up display industry grows, the demand for 5-axis machines and grooving machines using on a ultra-precision machining increasing. In this paper, ultra-precision diamond tools satisfying the cutting edge width of 500 nm were developed through the process research of a focused ion beam. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam. In order to reduce the influence of the Gaussian beam emitted from the focused ion beam, the lift-off process technology used in the semiconductor process was used. 2.9 ㎛ of Pt was coated on the surface of the diamond tool. The sub-micron tool with a cutting edge of 492.19 nm was manufactured through focused ion beam machining technology. Toshiba ULG-100C(H3) equipment was used to process fine-pattern using the manufactured ultra-precision diamond tool. The ultra-precision machining experiment was conducted according to the machining direction, and fine burrs were generated in the pattern in the forward direction. However, no burr occurred during reverse machining. The width of the processed pattern was 480 nm and the price of the pitch was confirmed to be 1 ㎛ As a result of machining.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.5
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• pp.64-69
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• 2014

This article presents machining experiments to assess the relationship between the profile accuracy and the workpiece hardness using a natural diamond tool on an ultra-precision diamond turning machine. The study is intended to secure a corner cube prism pattern for reflective film capable of high-quality outcomes. The optical performance levels and edge images of corner cubes having various hardness levels of the copper-coated layer on a carbon steel plate are analyzed. The hardness of the workpiece has a considerable effect on the profile accuracy. The higher the hardness of the workpiece, the better the profile accuracy and the worse the edge wear of the diamond tool.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.