• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.257-258
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• 2007

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.56-60
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• 1996

This paper presents the initial results of development of a inertial navigation grade silicon pendulous accelerometer. This effort focused on developing a bulk-micromachined silicon pendulum and designing a PI-servo controller. Performance data presented in this paper includes threshold, bias short term stability and nonlinearity of scale factor. This accelerometer developed is demonstrated the feasibility of meeting one-nautical-mile-per-hour accuracy.