• Korean Journal of Materials Research
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• 제21권3호
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• pp.156-160
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• 2011

FePt nanoparticles suspension was synthesized by reduction of platinum acetylacetonate and decomposition of iron pentacarbonyl in the presence of oleic acid and oleyl amine. FePt nanoparticles were coated on a substrate by convective assembly from the suspension. To prevent the coalescence during the annealing of FePt nanoparticles double convective coatings were tried. First convective coating was for silica particle assembly on a silicon substrate and second one was for FePt nanoparticles on the previously coated silica layers. It was observed by scanning electron microscopy (SEM) that FePt nanoparticles were dispersed on the silica particle surface. After annealing at $700^{\circ}C$ for 30 minutes under nitrogen atmosphere, FePt nanoparticles on silica particles were maintained in a dispersed state with slight increase of particle size. On the contrary, FePt nanoparticles that were directly coated on silicon substrate showed severe particle growth after annealing due to the close-packing of nanoparticles during assembly. The size variation during annealing was also verified by X-ray diffractometer (XRD). It was suggested that pre-coating, which offered solvent flux oppose to the capillary force between FePt nanoparticles, was an effective method to prevent coalescence of nano-sized particles under high temperature annealing.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.203-207
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• 2007

In this paper efficient method for particle removal from silicon wafers by usage of HF and ozone was studied. It was found that at least 0.3 vol% concentration of HF was required for particle removal and removal efficiency increased with the application of megasonic in ozonated water. Additional cleaning with minute amount of ammonia (0.01 vol%) after HF/Ozone step showed over 99% in removal efficiency. It is proposed that the superior cleaning efficiency of HF-Ozone-ammonia is due to micro-etching of silicon surface and impediment of particle re-adsorption in alkali environment. Compared to SC-1 cleaning method micro roughness has also been slightly improved. Therefore it is expected that HF-ozone-ammonia cleaning method is a viable alternative to the conventional wet cleaning methods.

• Tribology and Lubricants
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• 제39권2호
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• pp.72-75
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• 2023

Silicon carbide (SiC) is used as a substrate material for power semiconductors; however, SiC chemical mechanical polishing (CMP) requires considerable time owing to its chemical stability and high hardness. Therefore, researchers are attempting to increase the material removal rate (MRR) of SiC CMP using various methods. Mixed-abrasive CMP (MAS CMP) is one method of increasing the material removal efficiency of CMP by mixing two or more particles. The aim of this research is to study the mathematical modeling of the MRR of MAS CMP of SiC with SiO₂ and TiO₂ particles. With a total particle concentration of 32 wt, using 80-nm SiO₂ particles and 25-nm TiO₂ particles maximizes the MRR at 8 wt of the TiO₂ particle concentration. In the case of 5 nm TiO₂ particles, the MRR tends to increase with an increase in TiO₂ concentration. In the case of particle size 10-25 nm TiO₂, as the particle concentration increases, the MRR increases to a certain level and then decreases again. TiO₂ particles of 25 nm or more continuously decreased MRR as the particle concentration increased. In the model proposed in this study, the MRR of MAS CMP of SiC increases linearly with changes in pressure and relative speed, which shows the same result as the Preston's equation. These results can contribute to the future design of MAS; however, the model needs to be verified and improved in future experiments.

• Journal of the Korean Electrochemical Society
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• 제11권1호
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• pp.37-41
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• 2008

The effects of carbon-coated silicon anode on the electrochemical properties and structural change were investigated. The carbon-coated silicon powders have been prepared by thermal decomposition under argon/10wt% propylene mixed gas flow at $700^{\circ}C$. The surface and crystal structure of the synthesized materials were examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Raman spectroscopy. Lithium cells with electrodes made from the uncoated and the carbon coated silicon anode were assembled and tested. The carbon-coated silicon particles merged together well after the insertion/extraction of lithium ions, and showed a relatively low irreversible capacity compared with the uncoated silicon particle.

• Journal of the Korean Ceramic Society
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• 제20권2호
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• pp.166-172
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• 1983

In this study the sillicon-alloyed isotropic pyrolytic carbon was deposited in the tumbling bed from the pyrolysis of propane and silicon tetrachloride and investigated whether the silicon-alloyed isotropic pyrolytic carbon deposited in this study was usable as bionaterial or not. The silicon-allyed isotropic pyrolytic carbon was varied by controlling the process variables such as propane con-concentration and the argon flow rate flowing in to the silicon tetrachloride bubbler at a fixed reaction bed tempera-ture of 120$0^{\circ}C$ a rotation of reaction tube of 40 rpm a bed particle weight of 7.5 g and a total flow rate of 21/min; the propane concentration was varied from 10 to 70 and the argon flow rate flowing into the silicon tetrachloride bubble from 0 to 1000 cc/min. The results show that the silicon-alloyed isotropic pyrolytic carbon was obtained at all conditions investigated, . And then the alloyed silicon content is rangion from 7 to 14.5 wt%. The density and deposition rate of deposited silicon-alloyed isotropic carbon increased axxording to silicon content and propane concentration. And the apparent crystal-size(Lc) of pyrolytic carbon is not changed with silicon content. The density and apparant crystallite size are respec-tively in the range of 1.94 to 2.06 and 20 to 25$\AA$ It is shown that the silicon-alloyed isotropic pyrolytic carbon ob-tained in this experiment is usable as biomaterial.

• Journal of the Korean Crystal Growth and Crystal Technology
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• 제15권2호
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• pp.45-50
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• 2005

During oxidation process, several type of defects are formed on the surface of the silicon crystal which was damaged mechanically before oxidation. As the size of abrasive particle increases multiple dislocation loops are produced favorably over oxidation-induced stacking faults, which are dominantly produced when ground with finer abrasive particle. These defects are not related with the crystal growth process like Czochralski or directional solidification. During directional solidification process, twins and stacking faults are the two major defects observed in the bulk of the silicon crystal. On the other hand, slip dislocations produced by the thermal stress are not observed. Thus, not only in single crystalline silicon crystal but also in multi-crystalline silicon, extrinsic gettering process with programmed production of surface defects might be highly applicable to silicon wafers for purification.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.288-291
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• 2014

MRE(Magneto-rheological Elastomer) is a material which shows reversible and various modulus in magnetic field. Comparing to conventional rubber vibration isolator, MREs are able to absorb broader frequency range of vibration. These characteristic phenomena result from the orientation of magnetic particle (i.e., chain-like formation) in rubber matrix. In this study, Silicon was used as a matrix in order to manufacture MREs. Magnetic reactive powder(MRP), having rapid magnetic reaction, was selected as a magnetic particle to give magnetic field reactive modulus. The mechanical properties of manufactured MREs were measured with the application of magnetic field. The analysis of MR effect was carried out by FFT analyzer with various induced magnetic field. As the addition of CIP and induced magnetic field intensity increased, increment of MR effect was observed.

• Proceedings of the IEEK Conference
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Journal of Integrative Natural Science
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• 제7권4호
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• pp.221-226
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• 2014

Optically encoded porous silicon smart particles were successfully fabricated from the free-standing porous silicon thin films using ultrasono-method. DBR PSi was prepared by an electrochemical etch of heavily doped $p^{{+}{+}}$-type silicon wafer. DBR PSi was prepared by using a periodic pseudo-square wave current. The surface-modified DBR PSi was prepared by either thermal oxidation or thermal hydrosilylation. Free-standing DBR PSi films were generated by lift-off from the silicon wafer substrate using an electropolishing current. Free-standing DBR PSi films were ultrasonicated to create DBR-structured porous smart particles. Optical characteristics of porous smart particles were measured by FT-IR spectroscopy. The surface morphology of porous smart particles was determined by FE-SEM.

• Journal of Powder Materials
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• 제28권5호
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• pp.423-428
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• 2021

Here, we report the development of a new and low-cost core-shell structure for lithium-ion battery anodes using silicon waste sludge and the Ti-ion complex. X-ray diffraction (XRD) confirmed the raw waste silicon sludge powder to be pure silicon without other metal impurities and the particle size distribution is measured to be from 200 nm to 3 ㎛ by dynamic light scattering (DLS). As a result of pulverization by a planetary mill, the size of the single crystal according to the Scherrer formula is calculated to be 12.1 nm, but the average particle size of the agglomerate is measured to be 123.6 nm. A Si/TiO₂ core-shell structure is formed using simple Ti complex ions, and the ratio of TiO₂ peaks increased with an increase in the amount of Ti ions. Transmission electron microscopy (TEM) observations revealed that TiO₂ coating on Si nanoparticles results in a Si-TiO₂ core-shell structure. This result is expected to improve the stability and cycle of lithium-ion batteries as anodes.