• Laser Solutions
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• v.6 no.3
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.10
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• pp.1869-1876
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• 1992

The effect of particle property on FOD(foreign object damage) and strength degradation in structural ceramics especially, silicon carbide was investigated by accelerating a spherical particle having different material and different size. The damage induced showed significant differences in their patterns with increase of impact velocity. Also percussion cone was formed at the back part of specimen when particle size became large and its impact velocity exceeded a critical value. The extent of ring cracks was linearly related to particle size, however the impact of steel particle produced larger ring cracks than that of SiC particle. Increasing impact velocity the residual strength showed different degradation behaviors according to particle and its size. In the region the impact site represents nearly elastic deformation behavior, the residual strength was dependent upon the depth of cone crack regardless of particle size. However in elastic- plastic deformation region, the radial cracks led to rapid drop in residual strength.

• Journal of the Korean Society of Industry Convergence
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• v.24 no.6_2
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• pp.909-917
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• 2021

This study was carried out experimentally on the production and properties of silicon nanopowders characteristics using a transferred type arc plasma apparatus. To investigate the properties of silicon nanopowder, the purity of argon gas(99.999%, 99.9%) and the partial pressure ratio of nitrogen gas(0~90%) were varied. The total pressure in chamber is 400Torr and the silicon chunk amount used as raw material is 300g. The power supplied to the cathode to generate arc plasma was 9~12kW/h, and the electrode was made of tungsten and graphite with a diameter of 13mm. The particle size, impurity elements and powder evaporation rate of the silicon powder were analyzed using the XRD, FE-SEM, TEM and electronic scale. According to the purity of argon gas, the silicon evaporation rate and the particle size were similar, and impurities were generated more in the case of 99.9% purity than 99.999%. When argon gas and nitrogen gas were mixed in the chamber, the silicon evaporation rate and particle size increased as the partial pressure ratio of nitrogen gas increased. In particular, when the partial pressure ratio of nitrogen gas was 80%, the silicon evaporation rate 80g/h, and the particle size was about 80~100nm.

• Bulletin of the Korean Chemical Society
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• v.35 no.5
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• pp.1523-1528
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• 2014

Silicon quantum dots (Si QDs) were synthesized by etching silicon nanopowder with aqueous hydrofluoric acid (HF) and nitric acid ($HNO_3$). Then, the hydride-terminated Si QDs (H-Si QDs) were functionalized by 1- octadecene (ODE). By only controlling the etching time, the maximum luminescence peak of octadecylterminated Si QDs (ODE-Si QDs) was tuned from 404 nm to 507 nm. The average optical gap was increased from 2.60 eV (ODE-Si QDs-5 min) for 5 min of etching to 3.20 eV (ODE-Si QDs-15 min) for 15 min of etching, and to 3.40 eV (ODE-Si QDs-30 min) for 30 min of etching. The electron affinities (EA), ionization potentials (IP), and quasi-particle gap (${\varepsilon}^{qp}_{gap}$) of the Si QDs were determined by cyclic voltammetry (CV). The quasi-particle gaps obtained from the CV were in good agreement with the average optical gap values from UV-vis absorption. In the case of the ODE-Si QDs-30 min sample, the difference between the quasi-particle gap and the average optical gap gives the electron-hole Coulombic interaction energy. The additional electronic levels of the ODE-Si QDs-30 min and ODE-Si QDs-15 min samples determined by the CV results are interpreted to have originated from the Si=O bond terminating Si QD.

• Journal of the Korean Ceramic Society
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• v.32 no.8
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• pp.901-908
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• 1995

In aqueous slurry processing of silicon nitride, the interaction of dispersant and binder used as polymeric processing additives on the silicon nitride particle surface was studied to identify the effect of these processing polymeric additives on the ceramic powder processing. The adsoprtion isotherm study of anionic organic molecule as dispersant and nonionic organic molecules as binder of silicon nitricde was studied to investigate the effect of these processing organic additives on the physicochemical properties of silicon nitride particles. As anionic molecule adsorbed onto silicon nitrice surface, the IEP of silicon nitride shifted toward acidic pH and changed the stability of silicon nitride particle. However, the adsorption of binder as nonionic organic molecule onto silicon nitride surface did not changed the IEP but caused the decrease of electrostatic potentials of silicon nitride. These distinctive adsorption behaviors of organic additives on silicon nitride particles can be closely correlated to the stability of silicon nitride particles suspended in aqueous media.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.6
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• pp.823-832
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• 2004

Atmospheric aerosol particles collected in Seoul on four single days, each in every seasons of 2001, were characterized and classified on the basis of their chemical species using low-Z particle electron probe X-ray microanalysis (low-Z particle EPMA). Low-Z particle EPMA technique can analyze both the size and the chemical species of individual aerosol particles of micrometer size and provide detailed information on the size distribution of each chemical species. The major chemical species observed in Seoul aerosol were aluminosilicate, silicon dioxide, calcium carbonate, organic, carbon-rich, marine originated, and ammonium sulfate particles, etc. The soil originated species, such as aluminosilicate, silicon dioxide, and calcium carbonate were the most popular in the coarse fraction, meanwhile, carbonaceous and ammonium sulfate were the dominant species found in the fine fraction. Marine originated species such as sodium nitrate was frequently encountered, up to 30% of the analyzed aerosol particles.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.126-129
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• 2007

The particle formation using pyrolysis has many advantages over other particle manufacturing techniques. The particles by pyrolysis have relatively uniform size and chemical composition. Also, we can easily produce high purity particles. Thus, we studied the formation of silicon particles by pyrolysis of 50% $SiH_4$ gas diluted in Ar gas. A pyrolysis furnace was used for the thermal decomposition of $SiH_4$ gas at $800^{\circ}C$ and atmospheric pressure. The aerosol flow from furnace is separated into two ways. The one is to the Scanning Mobility Particle Sizer (SMPS) for particle size distribution measurement and the other is to the particle deposition system. The produced silicon particles are deposited on the wafer in the deposition chamber. SEM measurement was used to compare the particle size distribution results from the SMPS. Depending on the experimental conditions, particles of high concentration in the $30\sim80$ nm size range were generated.

• Journal of the Korean Ceramic Society
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• v.26 no.4
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• pp.583-587
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• 1989

Various $\alpha$-silicon carbied and colloidal graphite particles were sintered at 155$0^{\circ}C$ in vacuum atmosphere by reaction bonding sintering method, and the physical properties and microstructural analysis of specimen were investigated. With decreasing particle size, sintered density and 3-point bending strength of materials were increased and 3.2${\mu}{\textrm}{m}$ specimen showed high density and strength, 3.05g/㎤, 40kg/$\textrm{mm}^2$, respectively. The results of X-ray diffractometer and optical micrographs analysis showed that graphite and silicon melt reacted to convert to fine $\beta$-SiC particle and the body was changed to dense material.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.4
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• pp.1033-1040
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• 1995

To simulate strength reliability and durability of ceramic parts under gas turbine application environments, particle impact damage behaviors in silicon carbide oxidized at 1673 K and 1523 K for 200 hours in atmosphere were investigated. The long-term oxidation produced a slight increase in the static fracture strength. Particle impact caused a spalling of oxide layer. The patterns of spalling and damage induced were dependent upon the property and impact velocity of the particle. Especially, the difference in spalling behaviors induced could be explained by introducing the formation mechanism of lateral crack and elastic-plastic deformation behavior at impact sit. At the low impact velocity regions, the oxidized SiC showed a little increase in the residual strength due to the cushion effect of oxide layer, as compared with the as-received SiC without oxide layer.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.637-644
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• 1989

Beta-sialon powder(Z=1) was synthesized by the simultaeous reduction and nitridation of the mixed powders of Hadong kaolin and silica. Silicon hydroxide was prepared from Si-alkoxide by a hydrolysis method and amorphous silica was obtained from the calcination of the prepared silicon hydroxide. Hadong kaolin was mixed with both the silicon hydroxide and amorphous silica, respectively. The average particle size was 4${\mu}{\textrm}{m}$ and the morphology of particle was rod-like and equiaxed in the case of beta-sialon powder prepared form Hadong kaolin and silicon hydroxide(COMPOSITION A), whereas the average particle size was 3${\mu}{\textrm}{m}$ and the morphology of particle was equiaxed in the case of beta-sialon powder prepared from Hadong kaolin and amorphous silica(COMPOSITION B). The synthesized beta-sialon powders were hot-pressed at 175$0^{\circ}C$ for 2 hours under 30 MPa in a nitrogen atmosphere after YAG composition(8wt%) was added to these powders as a sintering agent. The hot-pressed specimens were annealed a 140$0^{\circ}C$ for 4 hours in a nitrogen atmosphere. The mechanical properties of sintered bodies were investigated in terms of M.O.R., fracture toughness and hardness. The measured values are as follows. COMPOSITION A : M.O.R. 508MPa, KIC 3.5MN/m3/2, hardness 13.6GPa. COMPOSITION B : M.O.R. 653MPa, KIC 5.4MN/m3/2, hardness 13.5GPa.