• 한국재료학회지
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• 제26권11호
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• pp.656-661
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• 2016

4H- and 6H-SiC grown by physical vapor transport method were investigated by transmission electron microscopy (TEM). From the TEM diffraction patterns observed along the [11-20] zone axis, 4H- and 6H-SiC were identified due to their additional diffraction spots, indicating atomic stacking sequences. However, identification was not possible in the [10-10] zone axis due to the absence of additional diffraction spots. Basal plane dislocations (BPDs) were investigated in the TEM specimen prepared along the [10-10] zone axis using the two-beam technique. BPDs were two Shockley partial dislocations with a stacking fault (SF) between them. Shockley partial BPDs arrayed along the [0001] growth direction were observed in the investigated 4H-SiC. This arrayed configuration of Shockley partial BPDs cannot be recognized from the plan view TEM with the [0001] zone axis. The evaluated distances between the two Shockley partial dislocations for the investigated samples were similar to the equilibrium distance, with values of several hundreds of nanometers or even values as large as over a few micrometers.

• Composites Research
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• 제35권1호
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• pp.23-30
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• 2022

폴리카보실란은 탄화규소 섬유 방사와 세라믹 제조를 위해 필요한 중요한 전구체이며, 이 전구체는 제조방법 및 공정에 따라 고내열성 및 내산화성 및 연속적인 탄화규소 섬유 생산 능력이 달라진다. 탄화규소 섬유는 폴리카보실란의 합성, 정제 및 분자구조제어기술, 그리고 이를 이용한 용융방사 및 안정화, 열처리 공정을 통해 제조된다. 본 논문에서는 폴리카보실란 전구체를 다양한 용매처리를 통하여 전구체 내에 존재하는 미반응물 및 저분자량의 정제효과를 파악하였으며, 또한 다양한 온도에서의 열처리에 따른 폴리카보실란 전구체의 중합 및 네트워크 재배열에 의한 변화에 대해 열적 분석을 실시하였다. 특히, 폴리카보실란 전구체의 유변물성 특성을 통해 용매처리 및 열처리에 따른 복합점도 및 구조적 배열의 변화를 분석하였다.

• 한국전기전자재료학회논문지
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• 제27권8호
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• pp.486-490
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• 2014

$Al_2O_3$ films on silicon carbide were fabricated by Aerosol deposition with annealing temperature at $800^{\circ}C$ and $1,000^{\circ}C$. The effect of thermal treatment on physical properties of $Al_2O_3$ thin films has been investigated by XRD (X-ray diffraction), AFM (atomic force microscope), SEM (scanning electron microscope), and AES (auger electron spectroscopy). Also electrical properties have been investigated by Keithley 4,200 semiconductor parameter analyzer to explain the interface trapped charge density ($D_{it}$), flatband voltage ($V_{FB}$) and leakage current ($I_o$). $Al_2O_3$ films become crystallized with increasing temperature by calculating full width at half maximum (FWHM) of diffraction peaks, also surface morphology is observed by topography measurement in non-contact mode AFM. $D_{it}$ was $2.26{\times}10^{-12}eV^{-1}.cm^{-2}$ at $800^{\circ}C$ annealed sample, which is the lowest value in all samples. Also the sample annealed at $800^{\circ}C$ has the lowest leakage current of $4.89{\times}10^{-13}A$.

• Tribology and Lubricants
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• 제35권5호
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• 한국생산제조학회지
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• 제7권1호
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• pp.34-40
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• 1998

Conductive metal matrix composite(MMC) material of 30% silicon carbide particulated based on aluminum matrix was machined by die sinking electrical discharge machining(EDM) process according to different current and duty factor for reverse polarity of electrode. Material removal rate(MRR) was examined by process under various operation conditions. The surface morphology was evaluated by surface roughness parameter and scanning electron microscopy(SEM) research. The MRR was suddenly increased over 11 ampere of current, and it was slightly changed over 0.3 of duty factor. The maximum surface roughness of EDMed surface was affected by the duty factor. The SEM photograghs of EDMed surface showed wide recast distribution region of melting materials as increased of current and duty factor.

• 전기의세계
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• 제21권2호
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• pp.25-33
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• 1972

The main focus of this paper is on the study of voltage-current characteristics in disk-type siliconcarbide resistors. For each of the 15 different sintering and other process conditions, 10 samples were prepared. Experiments performed with each sample consist of supplying sinusoidal AC current of a few miliamperes after conditioning-shots with 400ma. Experimental data were examined with regard to the relationship between the process conditions and the nonlinear resistivity. The examination suggests several possibilities of improving the nonlinlinear characteristics of siliconcarbide resistors while maintaining low resitance. One of those possible conditions is to sinter the powdered SiC and the binding materials approximately 2 hours in nitrogen. In addition to describing the nonlinear characteristics of siliconcarbide resistors, this paper also presents the distortion characteristics of current waves vs. the nonlinear exponent, n. Photographical results show that the more nonlinear characteristics samples have, the more distorted current waves are.

• 한국세라믹학회지
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• 제47권3호
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• pp.232-236
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• 2010

In recent years abrasive water jet (AWJ) has received significant attention as a technology used in the manufacturing industry for cutting materials. In this paper we report the development of a new preparation method of abrasives for water jet by using an air bubbling sedimentation rate control technique. The SiC abrasives prepared by an air bubbling sedimentation rate control technique using latex resin are found to be superior to the conventional abrasives not only in surface roughness uniformity but also in lifetime. The AWJ test results also show that the former has also better impact-resistance and wear-resistance than the latter.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.452-455
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• 2007

This paper provides an overview on the characteristics of a-SiC:H barrier film deposited for flexible display applications. Key characteristics such as high crack resistance, high thermal/hydro stability, excellent adhesion to the polymer substrate, as well as very low permeance has been demonstrated. The excellence of this barrier film has been shown from competitive analysis compared with other barrier coating materials. Finally, flexible Polymer Light Emitting Diode (PLED) test pixels have been fabricated on the barrier coated plastic substrate, demonstrating the viability of the device with lifetime data.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2019년도 추계학술대회
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• pp.25-27
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• 2019

본 논문은 전기 자동차 급속 충전기 구현을 위한 커플드 인덕터 기반 18kW급 2상 인터리브드 벅 컨버터 설계에 관하여 설명한다. 전류 리플 및 물리적인 크기 감소를 위한 2상 커플드 인덕터와 고효율 달성을 위한 Silicon Carbide(SiC) MOSEFT 기반 2상 인터리브드 벅 컨버터의 설계에 관하여 상세히 기술한다. 제안하는 2상 인터리브드 벅 컨버터의 동작을 위하여 모의 실험과 실험을 진행하였고 이론적인 설계 방법과 실제 실험 결과가 일치하는 것을 확인하였다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.150-151
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• 2006

Laser pyrolysis is a very suitable method for the synthesis of a wide range of nanoparticles. A pilot unit based on this process has been recently developed at CEA. This paper reports results showing the possibility to produce SiC and $TiO_2$ nanoparticles at rates of respectively 1 and 0.2 kg/h and also the possibility to adjust the mean grain size of the particles and their structure by changing the laser intensity and reactants flow rates. First tests of liquid recovery have been also successfully performed to limit the risks of nanoparticles dissemination in the environement during their recovery.