• Title/Summary/Keyword: silica-sol

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OBSERV ATION OF MICRO-STRUCTURE AND OPTICAL PROPERTISE OF TITANIUM DIOXIDE THIN FILMS USING OPTICAL MMEHODS

  • Kim, S.Y.;Kim, H.J.
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.788-796
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    • 1996
  • $TiO_2$ films prepared by RF magnetron sputtering, electron beam evaporation, ion assisted deposition (IAD) and sol-gel method are prepared on c-Si substrate and vitreous silica substrate respectively. From the transmission spectra of $TiO_2$ films on vitreous silica substrate in the spectral region from 190 nm to 900 nm, k($\lambda$) of $TiO_2$ is obtained. Using k($\lambda$) in the interband transition region the coefficients of the quantum mechanical dispersion relation of an amorphous $TiO_2$ and hence n($\lambda$) including the optically opaque region of above fundamental transition energy are obtained. The spectroscopic ellipsometry spectra of $TiO_2$ films in the spectral region of 1.5-5.0eV are model analyzed to get the film packing density variation versus i) substrate material, ii) film thickness and iii) film growth technique. The complex refractive index change of these $TiO_2$ films versus water condensation is also studied. Film micro-structures by SE modelling results are compared with those by atomic force microscopy images and X-ray diffraction data.

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Effect of Surfactant on the Dispersion Stability of Slurry for Semiconductor Silicon CMP (계면활성제가 반도체 실리콘 CMP용 슬러리의 분산안정성에 미치는 영향)

  • Yun, Hye Won;Kim, Doyeon;Han, Do Hyung;Kim, Dong Wan;Kim, Woo-Byoung
    • Journal of Powder Materials
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    • v.25 no.5
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    • pp.395-401
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    • 2018
  • The improvement of dispersion stability for the primary polishing slurry in a CMP process is achieved to prevent defects produced by agglomeration of the slurry. The dispersion properties are analyzed according to the physical characteristics of each silica sol sample. Further, the difference in the dispersion stability is confirmed as the surfactant content. The dispersibility results measured by Zeta potential suggest that the dispersion properties depend on the content and size of the abrasive in the primary polishing slurry. Moreover, the optimum ratio for high dispersion stability is confirmed as the addition content of the surfactant. Based on the aforementioned results, the long-term stability of each slurry is analyzed. Turbiscan analysis demonstrates that the agglomeration occurs depending on the increasing amount of surfactant. As a result, we demonstrate that the increased particle size and the decreased content of silica improve the dispersion stability and long-term stability.

Synthesis and Characterization of Zeolite Composite Membranes (I):Synthesis of ZSM-5 Type Zeolites (제올라이트 복합 분리막의 합성 및 특성화(I): ZSM-5계 제올라이트의 합성)

  • 현상훈;김준학;송재권
    • Journal of the Korean Ceramic Society
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    • v.33 no.9
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    • pp.1064-1072
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    • 1996
  • The synthetic conditions and characteristics of ZSM-5 type zeolites (ZSM-5/silicalite) for the preparation of the zeolite composite membranes for gas separation were investigated. ZSM-5 zeolites could be synthesized by the hydrothermal treatment of the mixture of colloidal silica sol aluminum nitrate sodium hydroxide and TPABr at a temperature range of 150-17$0^{\circ}C$ in the autoclave. Silicalties were done from the solution of water glass water and TPABr. Their crystalline structures transformed from orthorhombic to monoclinic from and their pore structures of three-dimensional channels were opened as TPABr filling channels was burned off at the calcination temperature of 50$0^{\circ}C$. The specific surface area of the calcined zeolite was about 360 m3/g and its surface property was hydrophobic. Crystal sizes of ZSM-5 and silicalite were 0.5-1.0${\mu}{\textrm}{m}$ and 8-10${\mu}{\textrm}{m}$ respectively having no change due to the calcination. In particular the shape and the size of the ZSM-5 type zeolite were sensitively varied with silica sources and concentrations of reaction solutions/sols.

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A Study on CMP Mechanism of $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) Thin Films ($Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) 박막의 CMP 메커니즘 연구)

  • Shin, Sang-Hun;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1450-1451
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    • 2006
  • In this paper, we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) ferroelectric fan was fabricated by the sol-gel method. Removal rate and non-uniformity (WIWNU%) were examined by change of silica slurries pH(10.3, 11.3, 12.3). Surface roughness of BLT thin films before and after CMP process was inquired into by atomic force microscopy (AFM). Effects of silica slurries pH(10.3, 11.3, 12.3) were investigated on the CMP performance of BLT film by the surface analysis of X-ray photoelectron spectroscopy(XPS).

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Microstructure and Properties of Organic-Inorganic Hybrids(PDMS/SiO$_2$) Through Variations in Sol-Gel Processing (졸-겔공정의 변수조절을 통해 제조된 유기-무기복합체 (PDMS/SiO$_2$)의 미세구조와 특성)

  • Eun, Hui-Tae;Hwang, Jin-Myeong
    • Korean Journal of Materials Research
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    • v.11 no.2
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    • pp.94-103
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    • 2001
  • SiO$_2$ and PDMS/SiO$_2$ xerogels which are derived PDMS into TEOS have been synthesized by sol-gel process and controlled pore size and distribution through 2 step acid/base catalyzed processes using HCI and NH$_4$OH as a catalyst. In HCl catalyzed SiO$_2$ and PDMS/SiO$_2$ xerogels, pH and gellation time of xerogel were 2.3~2.5 and 12~13 days, respectively, and the shape of xerogel was identified to pellet type and column type. Under acidic condition of final reaction solution, the hydrolysis rate is accelerating, resulting in long gel times. The shape of xerogel is pellet type. In contrast, under less acidic condition, the condensation rate is accelerating, resulting in shorter gel times and the shape of xerogel is column type. The surface area and average Pore size were changed 400$\rightarrow$600($\m^2$/g) and 15$\rightarrow$28$\AA$, respectively, depending to the increase of the mole ratio of HCl/NH$_4$OH, and represented uniform pore size distribution. It is that all the alkoxide groups are hydrolyzed by HCl after the first step and the condensation rate is enhanced by NH$_4$OH. The regular backbone structures of silica are formed at low temperature and the uniform pores are produced by heat treatment.

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Preparation of Hydrophobic Coating Layers Using Organic-Inorganic Hybrid Compounds Through Particle-to-Binder Process (유-무기 하이브리드 화합물과 Particle-Binder 공정을 이용한 소수성 코팅막 제조)

  • Hwang, Seung-Hee;Kim, Hyo-Won;Kim, Juyoung
    • Journal of Adhesion and Interface
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    • v.21 no.4
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    • pp.143-155
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    • 2020
  • Hydrophobic Organic-Inorganic (O-I) hybrid materials prepared by sol-gel process have been widely used at functional coating fields such as coatings for anti-corrosion, anti-icing, self-cleaning, anti-reflection. The key point for fabricating hydrophobic surface is to optimize the surface energy and roughness of the coating films. There are typical processes to control the surface energy and roughness which are 'In situ fabricating', 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating'. In this study, particle-binder process was used for in-situ fabrication of hydrophobic coating films. Various O-I hybrid compounds prepared using several kinds of alkoxysilane compounds were used as a binder for silica nanoparticles at particle-binder process. To study effect of fluorine content and weight ratio of particle : binder on the hydrophobicity and surface morphology, Hydrophobic coating films were prepared onto glass substrate at various content of fluorine content of O-I hybrid binder and weight ratio of particle : binder. The coating films prepared using O-I hybrid binder (GPTi-HF10) having 10 wt% of fluorine content showed the highes water contact angle (107.52±1.6°). The coating films prepared at 1:3 weight ratio of GPTi-HF10 : silica nanoparticle exhibited the highest water contact angle (130.84±1.99°).

Preparation of Silica Films by Surface Tension Control (표면장력 제어를 이용한 실리카 박막의 제조)

  • Lee, Jae-Jun;Kim, Yeong-Ung;Jo, Un-Jo;Kim, In-Tae;Je, Hae-Jun;Park, Jae-Gwan
    • Korean Journal of Materials Research
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    • v.9 no.8
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    • pp.804-809
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    • 1999
  • Silica films were prepared on Si single crystal substrates by a sol-gel process without DMF using TEOS as a starting material. Films were fabricated by spin coating technique. For films having a composition of TEOS : HCI(1:0.05mol), gelation time, the thickness of films, the formation of cracks and the microstructure of the films were investigated as a function of the molar ratio of $CH_3OH and H_2O$. With 8mol $CH_3OH$, the longest gelation time was measured to be 640hr. The thickness of the coated films was decreased with increasing content of $CH_3OH$. The films were sintered at $500^{\circ}C$ for 1hr with a heating rate of $0.6^{\circ}C$/min. The coated films showed worm-like grains and partially cracked microstructures at an amount of $CH_3OH$ 2mol and 4mol. The addition of more than 8 mole of $CH_2OH$ resulted in crack-free silica films. This suggests that crack-free films can be fabricated by controlling the surface tension energy of the sol solutions without DMF.

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Lamellar-bio nano-hybrid; The Study for Stability of Catechin (Green Tea: EGCG) Using 3-Dimensional Liposome (라멜라-바이오 나노하이브리드: 3 Dimension-liposome을 이용한 카테킨(EGCG)에 안정화에 대한 연구)

  • Hong Geun, Ji;Jung Sik, Choi;Hee Suk, Kwon;Sung Rack, Cho;Byoung Kee, Jo
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.30 no.2
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    • pp.201-205
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    • 2004
  • In these several years, as many people have been attracted by the functional cosmetics, there are a lot of study to enhance the stability of active ingredients for light, heat, oxygen, etc. in the academic and industrial field. Especially, catechin is well known as strong anti-oxidant, anti-inflammatory and reducing agent for oxidative stress but it is very unstable for light, heat, oxygen. etc. In this study, the stability and skin penetration of catechin are improved by 3-dimensional method. As I-dimension, porous silica is prepared using sol-gel method, and then catechin is adsorbed in pores of silica. As 2-dimension, solid lipid nanoparticles (SLN) are obtained using non-phospholipid vesicles. Finally 3-dimension is completion through lamellar phase self-organization that combines SLN catechin with skin lipid matrix. We used laser light scattering system, cyro-SEM, chromameter, HPLC and image analyzer to analyze our 3-dimentional systems. According to chromameter date, the color stability of 3-dimensional catechin is enhanced by 5-10 times compared with general liposome systems. We also confirmed through HPLC analysis that 3-dimensional catechin is more long lasting. The effect of skin penetration and wrinkle reduction are improved, too.

Surface Modification of Nano Porous Silica Particle for Enzyme Immobilization (효소 고정화를 위안 실리카 나노세공 입자의 표면개질)

  • Cho, Hyung-Min;Kim, Jong-Kil;Kim, Ho-Kun;Lee, Eun-Kyu
    • KSBB Journal
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    • v.21 no.5
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    • pp.360-365
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    • 2006
  • The objectives of this study were to develop nano-pore silica particles and to modify its surface for use as an enzyme immobilization matrix. Sol-gel reaction was used to produce silica particles of various nano pore sizes with hydroxyl groups on their surfaces. The surface was modified with aldehyde that was confirmed by fluorescence imaging. Trypsin was covalently immobilized by reductive amination. Surface density of the immobilized trypsin was ca. $350{\mu}g/m^2$, which was approximately 17- and 35-fold higher than those from the surfaces with hydroxyl and amine group, respectively. About 90% of the initial enzyme activity was maintained after the 12th use of repeated use. When compared with the commercial matrices, the nano-pore silica particle was superior in terms of immobilization yield and specific activity. This study suggests the nano porous silica particles can be used as enzyme immobilization matrix for industrial applications.

Size Effect of Hollow Silica Nanoparticles as Paint Additives for Thermal Insulation (단열 페인트 첨가제로써 중공형 실리카 나노입자의 크기에 따른 효과)

  • Kim, Jisue;Kim, Younghun
    • Clean Technology
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    • v.28 no.1
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    • pp.18-23
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    • 2022
  • Using air as an insulator due to its low heat transfer coefficient has been studied and has been widely commercialized to save energy in the field of thermal insulation technology. In this study, we analyzed the heat insulating effect of hollow silica nanoparticles mixed in non-uniform size, and the maximum heat insulating efficiency of these particles given the limited number of particles that can be mixed with a medium such as paint. The hollow silica nanoparticles were synthesized via a sol-gel process using a polystyrene template in order to produce an air layer inside of the particles. After synthesis, the particles were analyzed for their insulation effect according to the size of the air layer by adding 5 wt % of the particles to paint and investigating the thermal insulation performance by a heat transfer experiment. When mixing the particles with white paint, the insulation efficiency was 15% or higher. Furthermore, the large particles, which had a large internal air layer, showed a 5% higher insulation performance than the small particles. By observing the difference in the insulation effect according to the internal air layer size of hollow silica nanoparticles, this research suggests that when using hollow particles as a paint additive, the particle size needs to be considered in order to maximize the air layer in the paint.