• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.35-38
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.3
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• pp.418-424
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• 2014

A large number of wire rope has been used in various industries such as cranes and elevators. When wire used for a long time, wire defects occur such as disconnection and wear. It leads to an accident and damage to life and property. To prevent this accident, we proposed a wire rope fault detection system in this paper. We constructed the whole system choosing the leakage fault detection method using hall sensors and the method is simple and easy maintenance characteristics. Fault diagnosis and analysis were available through analog filter and amplification process. The amplified signal is transmitted to the computer through the data acquisition system. This signal could be obtained improved results through the digital filter process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.607-612
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• 2000

Roundness measurement method using three displacement sensors makes in-process roundness measurement possible on the NC machine because it eliminates the vibration signal and eccentricity signal from measured roundness signal from the workpiece. But if measured signals contain noises, high precision measurement of the roundness isn't possible. In this study, a high precision in-process roundness measurement system is developed, which applies a Kalman filter to the roundness measurement method using three displacement sensors and can be used to measure vibration of the spindle.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.8-13
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• 2000

Die polishing technology is very critical to determine quality and performance of the final products. Die polishing processes have not been automated because the automation requires a great deal of experience and skill of experts. Thus, to implement a fully automated polishing process, the development of polishing status monitoring system replacing the skill of experts is critical. AE is known to be closely related to material removal rate(MRR). As the surface is rougher, MRR gets larger and AE increased. The surface roughness can be indirectly estimated using the AE signal measured during automatic die polishing process. In this study, The polishing state monitoring system using AEms signal was developed. This system can be not only to monitor the abnormal state but also to estimate a state of surface roughness of polishing surface qualitatively.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.301-304
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• 2002

This paper has been studied an A/D conversion system for precision weighing signal process In weighing system. A/D conversion has some problem.; offset drift voltage with environment situation and nonzero value of initial output voltage. The Offset voltage in analog circuit produces a drift of an output voltage before A/D conversion stage. This paper suggested the method of reducing the offset voltage by switching analog chopping circuit and making the initial output close to zero to enhance the swing range by D/A converter. Also, we have designed active filter and digital filter with Auto Zero Tracking algorithm for better signal process of the weighing system.

• Journal of Biomedical Engineering Research
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• v.13 no.2
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• pp.125-132
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• 1992

Background EEG signals can be represented as the sum of a conventional AR process and an innovation process. It Is know that conventional estimation techniques, such as least square estimates (LSE) or Gaussian maximum likelihood estimates (MLE-G ) are optimal when the innovation process satisfies the Gaussian or presumed distribution. When the data are contaminated by outliers, however, these assumptions are not met and the power spectrum estimated by conventional estimation techniques may be fatally biased. EEG signal may be affected by artifacts, which are outliers in the statistical term. So the robust filtering estimation technique is used against those artifacts and it performs well for the contaminated EEG signal.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.383-388
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• 1995

The ARC light has been measured using photo-detect system under different TIG welding condition. Light detect system consists of photo diode, ND Filter, OP Amp. A/D convertor and PC. The purpose of this experiment is to show the relationship between ARC light and process variables such as welding current, torch travel speed, etc. The results can be applied to estimate the condition of welding process and the quality of welding products. The signal of ARC light has periodic patterns in good TIG welding condition whereas in abnormal condition the signal has different pattern. Amount of Ar shielding gas and distance from electrode to specimen affect the signal pattern significantly.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.72-78
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• 2001

Roundness measurement method using three displacement sensors makes in-process roundness measurement possible on the NC machine because it eliminates the vibration signal and eccentricity signal from measured roundness signal from the workpiece. But there are noises in measured signals, it isn't possible to measure the roundness with high precision. In this study, a high precision in-process roundness measurement system is development, which can eliminate vibrations of the spindle by using three displacement sensors and which can also estimate the noisy roundness measurement signals by applying Kalman filter.

• Journal of Biomedical Engineering Research
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• v.12 no.4
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• pp.249-254
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• 1991

In the study on the quantitative diagnosis using ultrasound, the stability and precision of tissue characterized parameters are important for the clinical application. We estimate attenuation coefficient introducing homomorphlc process Into the modified spectral differnce method about silicon-madu phantom. We compare the results with those estimated uslng the method used for obtaining the attenuation map image before. Homomorphic process has the effect smoothing the reflected echo signal spectrum, therefore eliminat os the random pattern of the signal spectrum generated by the scatterers. As a result, it Is shown that the stability is enhanced

• Journal of the Korean Society for Precision Engineering
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• v.12 no.10
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• pp.149-156
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• 1995

This paper presents a method of detecting chatter vibration in end-mill process. The detecting system consists of an adaptive signal processing scheme which uses an autore- gressive time-series model and a neural network is proposed and is verified its effectiveness by using acceleration and cutting force signals recorded during slotting in end-mill operations. Expeerimental results indicate that the proposed system provides excellent detection when chatter is occured within the ranges of cutting conditions considered in this study and an effectiveness of the integration of signals is confirmed.