• Korean Journal of Materials Research
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• v.13 no.1
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• pp.43-47
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• 2003

As and BF$_2$dopants are implanted for the formation of source/drain with dose of 1${\times}$10$^{15}$ ions/$\textrm{cm}^2$∼5${\times}$10$^{15}$ ions/$\textrm{cm}^2$ then formed cobalt disilicide with Co/Ti deposition and doubly rapid thermal annealing. Appropriate ion implantation and cobalt salicide process are employed to meet the sub-0.13 $\mu\textrm{m}$ CMOS devices. We investigated the process results of sheet resistance, dopant redistribution, and surface-interface microstructure with a four-point probe, a secondary ion mass spectroscope(SIMS), a scanning probe microscope (SPM), and a cross sectional transmission electron microscope(TEM), respectively. Sheet resistance increased to 8%∼12% as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{V}$ , while sheet resistance uniformity showed very little variation. SIMS depth profiling revealed that the diffusion of As and B was enhanced as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{＋}$ . The surface roughness of root mean square(RMS) values measured by a SPM decreased as dose increased in $CoSi_2$$n^{＋}$ , while little variation was observed in $CoSi_2$$p^{＋}$ . Cross sectional TEM images showed that the spikes of 30 nm∼50 nm-depth were formed at the interfaces of $CoSi_2$$n^{＋}$ / and $CoSi_2$/$p^{＋}$, which indicate the possible leakage current source. Our result implied that Co/Ti cobalt salicide was compatible with high dose sub-0.13$\mu\textrm{m}$ process.

• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.394-399
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• 2000

The effects of the type and thickness of underlayer on the crystallographic texture and the sheet resistance of aluminum thin film were studied. Ti and Ti/TiN were examined as the underlayer of aluminum. Ti and TiN were prepared by ionized physical vapor deposition (I-PVD) metalorganic chemical vapor deposition (MOCVD), respectively. The texture and the sheet resistance of metal thin film stacks were investigated at various thicknesses of Ti or TiN, and the sheet resistance was measured after annealing at $400^{\circ}C$ in an nitrogen ambient. For I-PVD Ti underlayer, the excellent texture of aluminum <111> was obtained even at top of 5 nm of Ti. However, the sheet resistance of the metal stack was greatly increased after annealing due to the interdiffusion and reaction of Al and Ti. MOCVD TiN between Ti and Al could suppress the Al-Ti reaction without severe degradation of aluminum <111> texture. Excellent texture of aluminum was obtained for the MOCVD TiN thinner than 4 nm.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.15 no.6
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• pp.231-238
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• 2015

In this paper, we have studied a sheet resistance property of N- and P-type thin films deposited on ITO glass by use of RF magnetron sputtering. The N-type samples which has the deposition condition of 150W RF power, shows the highest current value, and the samples deposited for 15 minutes shows a better Ohmic contact property. As the substrate temperature, RF power and deposition time are increased, the sheet resistance of the samples is increased, and the low sheet resistance sample shows a better I-V property. The P-type samples shows the highest current value by 150W RF power condition as similar as N-type samples. and the samples deposited for 20 minutes shows a better ohmic contact property. The sheet resistance of the both types samples is increased as increasing RF power and deposition time.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.3
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• pp.37-41
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• 2019

Sheet resistance reduction in the Ag nanowire (NW) coated films is accomplished with slight improvement of optical properties for the application of transparent conducting electrodes by using $O_2$ plasma treatment. The sheet resistance was optimized after 30 seconds $O_2$ plasma treatment, showing the 27 % of maximum decrease of sheet resistance. It is found that the $O_2$ plasma treatment get rid of the residual organic materials at the junction of Ag NWs. However, the Ag NWs may be also snapped by the excessive $O_2$ plasma treatment can showing the collapses of Ag NWs networks. Furthermore, the optical properties such as optical transmittance and haze were monotonically improved with the $O_2$ plasma treatment time until 90 seconds.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.11 no.6
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• pp.772-777
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• 2018

This paper used RF Magnetron Sputtering to deposition n-type and p-type to ITO glass. The N-type ohmic contact worked well under all conditions. Sheet resistance has been shown to increase sheet resistance as RF Power increases. After analyzing the surface of the deposited thin film, in the condition that RF Power was 250W and substrate temperature was $250^{\circ}C$, particles were measured to have a uniform and consistent thin film. P-type has good ohmic contact under all conditions and sheet resistance has been shown to increase as RF Power increases. As the RF Power grew, thickness increased and stabilized. PN junction thin film and NP junction thin film showed increased thickness and stabilized as sputtering time increased. As a result of thin film, conversion efficiency was at 0.2 when sputtering time was 10 minutes.

• Journal of Welding and Joining
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• v.26 no.2
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• pp.75-84
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• 2008

With the development of surface roughness textured steel for automotive body-in-white assemble, one of key issues is to understand the role of the surface roughness in textured steel sheets. To investigate effect of surface roughness on weldability in prepared steels, electrode force was varied. Steel sheets (T-H) with high surface roughness ($Ra\;=\;1.94\;{\mu}m$) reduced electrode life. It was attributed to the higher contact resistance at the electrode-sheet interface in the presence of the high surface roughness. The increased electrode diameter decreased current density, therefore reducing weld electrode life due to small weld button size. When an increased electrode force was used, a significant increase in the electrode life was observed in welding of high surface roughness steel sheet. This study suggested that contact resistance at the electrode-sheet interface was the dominant factor, as compared to the sheet-sheet interface for determining electrode life in welding of surface roughness textured steel.

• The Journal of the Convergence on Culture Technology
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• v.5 no.1
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• pp.341-346
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• 2019

The study aims to provide a study on the mixing ratios and manufacturing methods of biodegradable PLA sheets for mid - term introduction, A 3-layer process was introduced to produce a multifunctional multi-layer structure sheet having improved heat resistance, impact resistance and transparency while having anti-fogging functionality as a biodegradable PLA sheet used for the purpose of anti-fogging function. Inner layer, core layer and outer layer were mixed and extruded. The inner layer and core layer were studied for a biodegradable PLA multi-layer sheet structure having inner hardness and high heat resistance and outer layer for imparting antifogging function. By applying the results of this study, plastic PLA properties and heat-resistant temperature can be improved to replace and expand plastics.

• Journal of Electrical Engineering and Technology
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• v.12 no.1
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• pp.284-287
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• 2017

This paper introduces liquid crystal (LC) alignment and its electro-optical properties in the LC cells with silver nanowire (AgNW) networks. The AgNW network was used as an electrode of LC cell as a substitute for an indium-tin-oxide (ITO) film. LC alignment characteristics in the LC cell using AgNW networks, which have two different sheet resistances of $60{\Omega}/m^2$ and $80{\Omega}/m^2$, were observed. The LC alignment characteristics including pretilt angle, LC alignment state, and thermal stability are similar irrespective of sheet resistance of AgNW network. However, twisted-nematic (TN)-LC cell normally operated when using AgNW network with sheet resistance of $80{\Omega}/m^2$. Electrooptical properties of TN-LC cell exhibited competitive performance compared to those of TN-LC cell based on conventional ITO electrode, which allow new approaches to replace conventional ITO electrode in display technology.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.1 no.1
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• pp.71-78
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• 2002

Since the early 1980's the use of zinc-aluminum alloy-coated steel sheet(Galvalume) for vehicular corrosion protection has increased drastically. It is consisting of 55%Al-43.4% Zn-1.6%Si. Galvalume has a good corrosion resistance, heat reflectivity and shiny appearance, which has a dendritic structure of alloy layer. It has a good corrosion resistance due to dendritic structure. But, this also has a weak point against moisture during long period of transportation as sheeted and or coiled without any relation of chromating on the surface of steel sheet or not because of high humidity and temperature. Here, We studied the corrosion mechanism by the moisture.

• Journal of Welding and Joining
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• v.20 no.2
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• pp.116-124
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• 2002

The fatigue life is predicted on tensile-shear spot weldment made from Al-Mg alloy sheet with thickness of 0.8mm using Mitchell's method and uniform material law by $B{\ddot{a}}umel$ and Seeger based on local strain approach. The fatigue properties of critical HAZ region are estimated from the tensile property using simple hardness method. To predict the fatigue life of spot weldment, the local stresses and strains at the potential critical region are estimated by Neuber's rule. The predicted fatigue life based on uniform material law using HAZ's material properties provides good results within a factor of 3, conservatively.