• Title/Summary/Keyword: sheet-resistance

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Property of Nickel Silicides with Hydrogenated Amorphous Silicon Thickness Prepared by Low Temperature Process (나노급 수소화된 비정질 실리콘층 두께에 따른 저온형성 니켈실리사이드의 물성 연구)

  • Kim, Jongryul;Choi, Youngyoun;Park, Jongsung;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.46 no.11
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    • pp.762-769
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    • 2008
  • Hydrogenated amorphous silicon(a-Si : H) layers, 120 nm and 50 nm in thickness, were deposited on 200 $nm-SiO_2$/single-Si substrates by inductively coupled plasma chemical vapor deposition(ICP-CVD). Subsequently, 30 nm-Ni layers were deposited by E-beam evaporation. Finally, 30 nm-Ni/120 nm a-Si : H/200 $nm-SiO_2$/single-Si and 30 nm-Ni/50 nm a-Si:H/200 $nm-SiO_2$/single-Si were prepared. The prepared samples were annealed by rapid thermal annealing(RTA) from $200^{\circ}C$ to $500^{\circ}C$ in $50^{\circ}C$ increments for 30 minute. A four-point tester, high resolution X-ray diffraction(HRXRD), field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and scanning probe microscopy(SPM) were used to examine the sheet resistance, phase transformation, in-plane microstructure, cross-sectional microstructure, and surface roughness, respectively. The nickel silicide on the 120 nm a-Si:H substrate showed high sheet resistance($470{\Omega}/{\Box}$) at T(temperature) < $450^{\circ}C$ and low sheet resistance ($70{\Omega}/{\Box}$) at T > $450^{\circ}C$. The high and low resistive regions contained ${\zeta}-Ni_2Si$ and NiSi, respectively. In case of microstructure showed mixed phase of nickel silicide and a-Si:H on the residual a-Si:H layer at T < $450^{\circ}C$ but no mixed phase and a residual a-Si:H layer at T > $450^{\circ}C$. The surface roughness matched the phase transformation according to the silicidation temperature. The nickel silicide on the 50 nm a-Si:H substrate had high sheet resistance(${\sim}1k{\Omega}/{\Box}$) at T < $400^{\circ}C$ and low sheet resistance ($100{\Omega}/{\Box}$) at T > $400^{\circ}C$. This was attributed to the formation of ${\delta}-Ni_2Si$ at T > $400^{\circ}C$ regardless of the siliciation temperature. An examination of the microstructure showed a region of nickel silicide at T < $400^{\circ}C$ that consisted of a mixed phase of nickel silicide and a-Si:H without a residual a-Si:H layer. The region at T > $400^{\circ}C$ showed crystalline nickel silicide without a mixed phase. The surface roughness remained constant regardless of the silicidation temperature. Our results suggest that a 50 nm a-Si:H nickel silicide layer is advantageous of the active layer of a thin film transistor(TFT) when applying a nano-thick layer with a constant sheet resistance, surface roughness, and ${\delta}-Ni_2Si$ temperatures > $400^{\circ}C$.

Effects of PTFE and W Addition on the Anti-Wear Properties of Ni-P Coatings (PTFE 및 W 첨가가 Ni-P 도금의 내마모 특성에 미치는 영향)

  • Kim, Myung-Sik;Hong, Jin-Won;Bae, Kyoo-Sik
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.2 s.19
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    • pp.25-28
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    • 2007
  • Electroless Ni-P coating is widely used for chemical, electronic, and semiconductor equipment parts because of its corrosion resistance. The incorporation of chemically-inert PTFE particles into the Ni-P films improves properties such as, non-stick, anti-adhesive and better corrosion resistance. However, soft PTFE particles degrade the hardness, wear and abrasion resistance. In this study, effects of PTFE and W addition to the Ni-P-coatings were compared by the XRD, SEM, sheet resistance, contact angle, and microhardness measurements. The change in sheet resistance was negligible, but contact angle was doubled by the addition of PTFE and W. The microhardness was lower for Ni-P-PTFE, but higher for Ni-P-PTFE-W coatings, compared to that of Ni-P coatings.

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Dissolution Resistance Property of Modified Asphalt Waterproofing Sheet Coated with Polyamide Film by SEM-EDX Analysis (폴리아마이드 필름이 코팅된 개량 아스팔트 방수시트의 SEM-EDX 분석을 통한 유기용제 저항성 확인)

  • An, Ki-Won;Yoo, Jae-Yong;Oh, Sang-Keun
    • Journal of the Korea Institute of Building Construction
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    • v.17 no.5
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    • pp.437-444
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    • 2017
  • In the composite waterproofing method in which a polyurethane coating waterproofing material is applied on the modified asphalt waterproofing sheet, the organic solvent is diluted in the coating waterproofing material in order to improve the workability. However, since the organic solvent is not volatilized before the curing of the polyurethane coating waterproofing material, the organic solvent causes dissolution of asphalt layer, thereby causing oil leakage. As a result, a polyamide film having a high dissolution resistance property was laminated on modified asphalt sheet, and through testing the dissolution resistance was visually confirmed and quantitative analysis of the polyamide film by SEM-EDX analysis was also used to confirmed the dissolution resistance of the polyamide film.

THE APPLICATION OF ALUMINUM SHEET FOR THE PROTECTIVE HEAT SHIELD (ALLMINUM PROTECTIVE HEAT SHIELD 적용연구)

  • 이중윤;이호기;이경남
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 1996.10a
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    • pp.166-173
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    • 1996
  • There are kinds of materials for protective heat shield, i.e.Zn-coated steel, AI-coated steel and aluminum alloy sheets. This study compare formability, corrosion resistance, heat protectability, weight, and cost of these materials for heat protective shield. Generally aluminum alloy sheets are less formable than steel sheets, but A1100 alloy sheet shows almost same press quality of steel parts, using the press dies which producing steel parts. The heat shields using aluminum alloy sheet and steel sheet show almost same heat protectibility. It is the conclusion that Zn-coated merit, and AI-coated steel sheet and aluminum alloy sheet can be used to protect functional corrosion in severely corrosive market area. The material cost of AI-coated steel sheet and aluminum alloy sheet for a mid-size car is almost same, so aluminum alloy sheet is more recommendable in the point of weight reduction of vehicle.

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Corrosion Resistance by Organic/Inorganic Hybrid Solution for Cold Rolled Steel of SPCC and SPFC590 for Automobile (자동차용 냉연강판 SPCC와 냉연고장력강판 SPCF590의 유/무기 하이브리드 용액에 의한 내식특성)

  • Lee, So-Young;Lee, Kwang-Ho;Jeong, Hee-Rok;Nam, Ki-Woo
    • Journal of Power System Engineering
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    • v.19 no.5
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    • pp.38-44
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    • 2015
  • The cold-rolled steel sheet for automobile is liable to corrosion, and will be painting in a variety of ways for the anticorrosive. This paper was coated on cold rolled steel (SPCC and SPFC590) for automobiles using five kinds of organic/inorganic hybrid solution. This was evaluated corrosion resistance and so on by the salt spray. Corrosion area was less according to increasing of curing time in 2 types of steel plate with 5 types of the coating solution. No.1 solution was showed the best corrosion resistance regardless of the kinds of the steel sheet. It is judged that the melamin hardner had the role of bridge between $SiO_2$ polysilicate and urethan resin. Other properties were excellent in all solution.

Properties of ITO/Cu/ITO Multilayer Films for Application as Low Resistance Transparent Electrodes

  • Kim, Dae-Il
    • Transactions on Electrical and Electronic Materials
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    • v.10 no.5
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    • pp.165-168
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    • 2009
  • Transparent and conducting ITO/Cu/ITO multilayered films were deposited by magnetron sputtering on unheated polycarbonate (PC) substrates. The thickness of the Cu intermediate film was varied from 5 to 20 nm. Changes in the microstructure and optoelectrical properties of ITO/Cu/ITO films were investigated with respect to the thickness of the Cu intermediated layer. The optoelectrical properties of the films were significantly influenced by the thickness of the Cu interlayer. The sandwich structure of ITO 50 nm/Cu 5 nm/ITO 45 nm films had a sheet resistance of $36{\Omega}$/Sq. and an optical transmittance of 67% (contain substrate) at a wavelength of 550 nm, while the ITO 50 nm/Cu 20 nm/ITO 30 nm films had a sheet resistance of $70{\Omega}$/Sq. and an optical transmittance of 36%. The electrical and optical properties of ITO/Cu/ITO films were determined mainly by the Cu film properties. From the figure of merit, it is concluded that the ITO/Cu/ITO films with a 5 nm Cu interlayer showed the better performance in transparent conducting electrode applications than the conventional ITO films.

Characteristics of Dissimillar Three-Sheet Resistance Spot Welding for Advanced High Strength Steel with Cover Plate (커버 플레이트를 이용한 이종 3겹 저항 점 용접성 평가)

  • Shim, Junghyun;Rhee, Sehun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.25 no.5
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    • pp.373-379
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    • 2016
  • Low carbon steel is usually used as the outer panel with low base metal resistance compared to the inner reinforced panel made with high strength steel, which makes it difficult to form a robust nugget. To overcome welding problems of a dissimilar three-sheet combination made of SGACEN, DP980 and CP1180, a cover plate was inserted between the upper electrode and SGACEN. The quality of the nugget was analyzed by comparing the welding signals and cross sectional images under maximum heat input both with and without the cover plate. To analyze the mechanical of weld properties, a hardness test analysis was conducted. To enhance the reliability of experimental results, temperature distributions were obtained using a simulation program. The method of inserting a cover plate led to a change in the heat input, which induced a larger nugget size between SGACEN and DP980.

Characteristics of copper/C films on PET substrate prepared by ECR-MOCVD at room temperature (상온 ECR-MOCVD에 의해 제조되는 Cu/C박막특성)

  • Lee, Joong-Kee;Jeon, Bup-Ju;Hyun, Jin;Byun, Dong-Jin
    • Journal of the Korea Institute of Military Science and Technology
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    • v.6 no.3
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    • pp.44-53
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    • 2003
  • Cu/C films were prepared at room temperature under $Cu(hfac)_2-Ar-H_2$ atmosphere in order to obtain metallized polymer by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The room temperature MOCVD on polymer substrate could be possible by collaboration of ECR and a DC bias. Structural analysis of the films by ECR was found that fine copper grains embedded in an amorphous polymer matrix with indistinctive interfacial layer. The increase in $H_2$ contents brought on copper-rich film formation with low electric resistance. On the other hand carbon-rich films with low sheet electric resistance were prepared in argon atmosphere. The electric sheet resistance of Cu/C films with good interfacial property were controlled at $10^8$~$10^0$ Ohm/sq. ranges by the $H_2$/Ar mole ratio and the shielding effectiveness of the film showed maximum up to 45dB in the our experimental range.

Evaluation on Strength Characteristics of Automobile Steel Sheet by Electrode Resistance Spot Weld (전기저항 점용접한 자동차 강판의 강도특성평가)

  • Yoon, Han-Ki;Hu, Kwan-Do;Ryu, Deok-Seang
    • Journal of Power System Engineering
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    • v.17 no.4
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    • pp.115-119
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    • 2013
  • The resistance spot welding of high strength steel degrades the weldability because of its high strength with rich chemical composition and coating layer to protect from corrosion. And the weld Expulsion is prone to occur and severely affect the nugget guality when the initial gap between automatic borrowing galvanied steel sheets(SGARC35) and Zn-coateel trip steels(GA580TRIP and GA980 TRIP) exist in resistance spot welding(RSW). RSW is one of the most popular welding processes used to join sheet metals. but weld guality sometimes do creases due to welding condition. in this paper to verity tue weldability using spot welding with the hemispherically concaved electrode, tensile shear strength and cross-tensile strength were measured by a universal test machine. in addition, the nugget size on cross-sectional area of the weld was observed by optical and electron microscopy. As a result, the nugget size of this specimen is increased with increasing welding current and Max load of tensile-shear strength is increased with welding current is increasing.

The Performance and Application of Carbon Fiber Sheet for the Repair and Reinforcement Material (보수.보강재로서의 탄소섬유시트 보강섬유의 활용기술)

  • Kwon, Young-Jin;Jang, Tea-Min;Kim, Chul-Ho;Park, Deuk-Kon;Choi, Long
    • Proceedings of the Korea Concrete Institute Conference
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    • 1996.04a
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    • pp.418-421
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    • 1996
  • Carbon Fiber Sheet is very attractive for the upgrading damaged reinforced concrete due to its good tensile strength, handabilbity and resistance to corrosion. This paper discusses the applicability of continous carbon fiber sheet for a reinforcement of existeing reinforced concrete structure located in Pusan. Examples of site data and actual concrete rehabilitation project at slab structure related to construction method used carbon fiber sheet will be given.

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