• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2000-2002
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• 2002

신장병의 조기진단을 위해서 체내의 요소 농도의 정확한 측정은 매우 중요하며, 이러한 이유에서 많은 연구자들은 보다 빠르고 정확한 체내의 요소농도 측정을 위한 바이오센서를 개발 중이다. 본 논문은 반도체 공정을 이용하여 산화막(4.000${\AA}$)이 성장된 p-형 실리콘 웨이퍼를 사용하였다. RF sputter를 사용하여 티타늄과 백금을 증착한 백금 박막전극을 제작하였다. 그 위에 전도성 고분자인 Polypyrrole(PPy)과 전도도를 증가시키기 위하여 구리를 도펀트로 사용 scan rate 40mV/S $0.8{\sim}-0.8V$ 전위영역에서 산화적 전기 중합법 (anodical electropolymerization)을 이용하여 전극을 형성하였다. 요소를 2개의 암모늄 이온과 1개의 탄산 이온으로의 가수분해반응을 촉매하는 효소로써 유레이즈(urease)를 전기적 흡착방법을 이용하여 고정화하고 이에 요소농도의 변화에 대하여 시간대 전류법 (chronoamperometry:CA)을 사용하여 감도를 측정하였다. 최적화된 조건하에서 요소농도에 비례하여 Cu-doped PPy electrode로부터 얻어진 확산한계전류는 $4.5{\mu}A$/decade의 기울기를 나타내었다. 전극의 표면은 SEM(Scanning Electron Microscopy)과 EDX(Energy Dispersive X-Ray Spectrometer)를 이용하여 분석 하였다.

• Journal of Sensor Science and Technology
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• v.9 no.6
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• pp.455-460
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• 2000

Zinc oxide(ZnO) thin films were cathodically deposited on ITO glass from an aqueous zinc nitrate electrolyte. Three main fabrication parameters were taken into account : deposition potential, solution concentration and growth temperature. Different layers of ZnO thin films grown by varying the three parameters were studied by X-ray diffraction, scanning electron microscope and optical absorption spectroscopy. The prepared ZnO thin films were shown as a hexagonal wurtzite structure on the X-ray diffraction patterns and the good quality of ZnO thin films were obtained by potentiostatic cathodic deposition at -0.7V vs. Ag/AgCl reference electrode onto ITO glass from aqueous 0.1 mol/liter zinc nitrate electrolyte at $60^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.360-365
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• 2017

In this study, a heat treatment process was applied to ZnS nano-powder to improve the optical properties of ZnS ceramic, and the characteristics of heat treatment time were studied. The ZnS nano-powders were synthesized by hydrothermal synthesis. The heat treatment was carried out at $550^{\circ}C$ for 0.5, 1, 2, and 4 hours in a vacuum atmosphere ($10^{-2}torr$). X-ray diffraction and scanning electron microscope analyzes confirmed the change of crystal phase and grain size to confirm the structural change with heat treatment time. The heat treated ZnS nano-powder was sintered by hot pressing, and the change of optical properties of the ZnS ceramic was analyzed by infrared spectroscopy.

• Journal of Sensor Science and Technology
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• v.8 no.4
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• pp.347-353
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• 1999

We constructed an interferometer for precise measurement of the ball diameter, and measured the diameter of steel ball with a diameter of 78 mm. The interferometer was consisted of etalon to instal ball between two parallel plates and placed on the monolithic flexure to be moved parallel. The ball diameter was calculated from phase difference of one pair of signals interfered between the both sides of ball and two parallel plates, and the signals was observed by photodetectors with scanning the etalon. The results showed that the diameter of steel ball was 78.1893544 mm and measurement uncertainty of 29 nm in confidence level of 95.5%.

• Journal of Sensor Science and Technology
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• v.18 no.6
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• pp.461-466
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• 2009

This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of $3/2\lambda$. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of $20\times10\times1$ mm size and confirmed the flexural vibration of the $3/2\lambda$ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.48-48
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• 2018

습도는 대기중에 분포되어있는 물 분자의 양으로 사람이 살아가는데 있어 막대한 영향을 주는 환경적 요소중 하나이다. 산업적 가스의 순도에 막대한 영향을 끼치기도 하고, 반도체 산업에서 불량률과도 밀접한 관련이 있다. 또한, 식품학이나 기상학, 농사와도 밀접한 관련이 있어서 습도를 측정하는 것은 중요시 되고 있다. 이를 위해서 많은 물질들이 사용되고, 연구되었다. 산화 구리, 산화 아연, 산화 납 등의 산화금속 물질들이나 전도성 고분자, 실리콘 기반의 물질들이 주로 사용되고 있는데, 그 중 산화 금속이 쉬운 합성 방법과 낮은 단가, 명확한 작동 원리로 인해 널리 사용되고 있다. 산화 아연의 경우 넓은 direct band gap energy와 우수한 내화학성으로 인해 주로 사용되는데 그 중 1차원 물질인 nanowire의 경우 비등성 구조와 높은 비표면적을 갖는 특성으로 인해 산화 아연의 nanowire 구조가 많이 사용된다. 본 연구에서는 열처리 공정을 이용하여 산화아연의 nanowire 구조를 합성하였고, 합성된 nanowire는 양쪽의 미세전극을 직접적으로 연결하여 간편한 방식으로 소형 소자를 만들 수 있다는 장점이 있다. 열처리 공정 이전에 전기도금 방식을 이용하여 아연층을 증착 하였다. 전기도금 조건은 0.1 M의 염화 아연과 1 M의 염화 칼륨으로 구성된 용액에 -1.1 V를 인가하였다. 합성된 아연층은 열처리 공정에 의해 산화아연의 nanowire 구조체로 변환되고, SEM (scanning electron microscope)를 통해 표면 형상을 관찰 하였고, XRD (X-ray diffraction)을 통해 미세구조를 확인하였다. -1 V부터 1 V 범위의 전압을 흘려주어 형성된 소자의 전기적 특성을 확인하였고, 1 V를 인가하였을 때, 습도 변화에 따른 센서 소자의 저항변화를 통해 습도 센서로서의 특성을 확인 하였다.

• Journal of Sensor Science and Technology
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• v.15 no.6
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• pp.406-410
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• 2006

The films of indium oxide $In_{2}O_{3}$) were deposited onto $SiO_{2}$ coated Si wafers by a thermal evaporation method. Substrate temperature was varied from $25^{\circ}C$ to $300^{\circ}C$. Deposition rate increased to $250^{\circ}C$ and then decreased rapidly. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The films deposited at $250^{\circ}C$ were found to have a nanobelt structure. Resistor-type gas-sensors were fabricated with $In_{2}O_{3}$ films using Pt as electrodes. The resistance variation of $In_{2}O_{3}$ films with the concentration of NO gas was measured. The $In_{2}O_{3}$ films deposited at $250^{\circ}C$ showed the highest sensitivity to the NO gas.

• Journal of Sensor Science and Technology
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• v.15 no.6
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• pp.386-390
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• 2006

This paper describes the ohmic contact formation of polycrystalline 3C-SiC films deposited on thermally grown Si wafers. In this work, a TiW (titanium tungsten) film as a contact material was deposited by RF magnetron sputter and annealed with the vacuum process. The specific contact resistance (${\rho}_{c}$) of the TiW contact was measured by using the C-TLM (circular transmission line method). The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature as also analyzed by XRD (X-ray diffraction) and SEM (scanning electron microscope). All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30 min., the lowest contact resistivity of $2.90{\times}10{\Omega}cm^{2}$ was obtained due to the improved interfacial adhesion. Therefore, the good ohmic contact of polycrystalline 3C-SiC films using the TiW film is very suitable for high-temperature MEMS applications.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.10 no.2
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• pp.444-461
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• 2016

A power-saving mechanism for smartphone devices is developed by analyzing the features of data that are received from Internet of Things (IoT) sensors devices to optimize the data processing policies. In the proposed GreenIoT architecture for power-saving in IoT, the power saving and feedback mechanism are implemented in the IoT middleware. When the GreenIoT application in the power-saving IoT architecture is launched, IoT devices collect the sensor data and send them to the middleware. After the scanning module in the IoT middleware has received the data, the data are analyzed by a feature evaluation module and a threshold analysis module. Based on the analytical results, the policy decision module processes the data in the device or in the cloud computing environment. The feedback mechanism then records the power consumed and, based on the history of these records, dynamically adjusts the threshold value to increase accuracy. Two smart living applications, a biomedical application and a smart building application, are proposed. Comparisons of data processed in the cloud computing environment show that the power-saving mechanism with IoT architecture reduces the power consumed by these applications by 24% and 9.2%.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.12
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• pp.1060-1064
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• 2002

We have studied the effect of crystallization temperature, composition and film thickness, which are the fundamental processing parameters of lead zirconate titanate(PZT) thin film fabrication, in the respect of the piezoelectric properties by our pneumatic loading method(PLM). A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system(MEMS) and thin film sensor devices, a few reports for the piezoelectric characterization are provided for the last decade unlikely the bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750$\^{C}$ and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, X-ray diffraction and scanning electron microscopy. The effect of Zr/Ti composition has been also studied. This gives us the fact that the maximum piezoelectricity is found near Morphotropic Phase Boundary(MPB) as bulk PZT system does.