• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.85-90
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• 2007

This paper presents the growth conditions and characteristics of polycrystalline 3C-SiC (silicon carbide) thin films for M/NEMS applications related to harsh environments. The growth of the 3C-SiC thin film on the oxided Si wafers was carried out by APCVD using HMDS (hexamethyildisilane: $Si_{2}(CH_{3})_{6})$ precursor. Each samples were analyzed by XRD (X-ray diffraction), FT-IR (fourier transformation infrared spectroscopy), RHEED (reflection high energy electron diffraction), GDS (glow discharge spectrometer), XPS (X-ray photoelectron spectroscopy), SEM (scanning electron microscope) and TEM (tunneling electro microscope). Moreover, the electrical properties of the grown 3C-SiC thin film were evaluated by Hall effect. From these results, the grown 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therefore, the 3C-SiC thin film is suitable for extreme environment, Bio and RF M/NEMS applications in conjunction with Si fabrication technology.

• Journal of Sensor Science and Technology
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• v.22 no.3
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• pp.185-190
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• 2013

We report on direct finding of how the morphology (i.e. filopodia width) of $CD4^+$ T lymphocytes correlates with the size of the quartz nanohohole arrays (QNHAs, 140, 200, 270, and 550 nm in diameter) via scanning electron microscopy (SEM). This research exhibits that the filopodia of $CD4^+$ T-lymphocytes extended on the QNHA substrates were observed to increase in width by increasing the size of QNHA in diameter from 140 to 550 nm. This strong linear response ($R^2$=0.988, n = 6) in filopodia's width of surface-bound $CD4^+$ T-cells with topographical structures of QNHA can be explained by contact guidance between the cells and solid-state substrates. Furthermore, this research suggests that the protruded filopodia of surface-bound T-lymphocytes can be used as a biosensor for sensing the topographical information of the nano-patterned substrates.

• Journal of Sensor Science and Technology
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• v.29 no.2
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• pp.89-92
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• 2020

Polytetrafluoroethylene (PTFE) fibers are widely used in the textile industry, filter media, membrane distillation, electronic appliances, and construction. In this study, PTFE-polyethylene oxide (PEO) fibrous membranes were fabricated by emulsion electrospinning; subsequently, pure PTFE nanofibers were obtained via sintering. PTFE-PEO electrospinning solutions were prepared using different weight ratios to determine the optimized condition. As the ratio of the PEO increased, the fiber structure improved. Scanning electron microscopy and Fourier-transform infrared spectroscopy observations indicate that PEO is removed and PTFE fused gradually to form bonds among them during sintering. The obtained pristine PTFE membrane demonstrated hydrophobicity at 143.6° water contact angle and oleophilicity at 0° oil contact angle, which is known to be utilized for oil/water separation. A simple separation experiment was performed to remove oil droplets from water. The PTFE membrane exhibited good chemical stability and a high surface-area-to-volume nanofiber ratio. These excellent properties suggest that it is applicable to oil/water separation in harsh chemical environments.

• Proceedings of the KSRS Conference
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• 1999.11a
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• pp.331-336
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• 1999

The optical sensors of Electro-Optical Camera (EOC) and Ocean Scanning Multi-spectral Imager (OSMI) aboard the Korea Multi-Purpose SATellite (KOMPSAT) will be placed in a sun synchronous orbit in 1999. The EOC and OSMI sensors are expected to produce the land mapping imagery of Korean territory and the ocean color imagery of world oceans, respectively. Utilization of the EOC and OSMI data would encompass the various fields of science and technology such as land mapping, land use and development, flood monitoring, biological oceanography, fishery, and environmental monitoring. Readiness of data support for user community is thus essential to the success of the KOMPSAT program. As part of testing such readiness prior to the KOMPSAT launch, we have performed the preliminary acceptance test for the KOMPSAT data processing system using the simulated EOC and OSMI data sets. The purpose of this paper is to demonstrate the readiness of the KOMPSAT data processing system, and to help data users understand how the KOMPSAT EOC and OSMI data are processed and archived. Test results demonstrate that all requirements described in the data processing specification have been met, and that the image integrity is maintained for all products. It is however noted that since the product accuracy is limited by the simulated sensor data, any quantitative assessment of image products can not be made until actual KOMPSAT images will be acquired.

• Journal of Sensor Science and Technology
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• v.15 no.5
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• pp.303-308
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• 2006

Aggregation-induced emissions of polymetalloles have been investigated since they are very attractive in their possible optoelectronic applications such as P-LED's and Sensors. Size of nanoparticulates was measured by using scanning electron micrograph and was about 200-300 nm. Phenylmethylpolysilane (PMPS) and polymetalloles emit the light at 360 nm and 520 nm, respectively. However, the aggregates of polymetallole containing PMPS exhibit an enhanced emission band at 520 nm, indicating that the energy transfer occurs from PMPS to polymetalloles in aggregates. Emission intensity of PMPS/polymetallole nanoparticulates at 520 nm increases depending on the aliquot of PMPS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Journal of the Korean Society for Heat Treatment
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• v.5 no.3
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• pp.149-156
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• 1992

Transformation behavior and reversible shape memory effct of Ti-Ni-Cu alloys with various Cu content has been investigated by means of electrical resistivity measurement, differential scanning calorimetry. X-ray diffraction and strain gage sensor. The transformation sequence in Ti-Ni-Cu alloys substituted by Cu for Ni up to 5at.% occurs to $B2{\leftrightarrow}B19^{\prime}$ and it proceeds in two stages by addition of 10 at.%Cu. i.e. $B2{\leftrightarrow}B19{\leftrightarrow}B19^{\prime}$. But the content of Cu increases up to 20at.%, it has been transformed in one stage ; $B2{\leftrightarrow}B19$. The shape change of Ti-40Ni-10Cu alloy which was constrain aged in circular form bended in $B2{\leftrightarrow}B19$ transformation but it spreaded out in $B19{\leftrightarrow}B19^{\prime}$ transformation. The amount of reversible shape change (${\Delta}{\varepsilon}$) of Ti-47Ni-3Cu alloy constrain aged at $400^{\circ}C$ after solution treatment has a maximum value of about $5.6{\times}10^{-3}$, but that of cold rolled and constrain aged specimens exhibits a little value independent of Cu concentrations.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.249-253
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• 2018

Infrared transparent ZnS ceramics were synthesized through hydrothermal synthesis ($180^{\circ}C$, 70 h) and sintered using a hot press process at $750^{\circ}C-1000^{\circ}C$. We carried out x-ray diffraction, scanning electron microscopy, and Fourier transform-infrared spectroscopy to confirm the optical properties of the ZnS ceramics after sintering at various temperatures. The phase of ZnS nanopowders was a single phase (cubic) without the hexagonal phase. However, as sintering temperature increased, the formation and increment of hexagonal structures was confirmed. The ZnS ceramic sintered at a temperature of $750^{\circ}C$ showed poor transmittance because it was not completely sintered and because of the pore effect. The ZnS ceramic with the highest transmittance (approximately 69%) was sintered at $800^{\circ}C$. As sintering temperature increased, transmittance gradually decreased owing to the increase in the formation of the hexagonal phase.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.315.2-315.2
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• 2014

Pt-functionalized ZnS nanowires were synthesized on Au-deposited c-plane sapphire substrates by thermal evaporation of ZnS powders followed by wet Pt coating and annealing. The $NO_2$ gas sensing properties of multiple-networked Pt-functionalized ZnS nanowire sensors were examined. Scanning electron microscopy showed the nanowires with diameters of 20-80 nm. Transmission electron microscopy and X-ray diffraction showed that the nanowires were wurtzite-structured ZnS single crystals. The Pt-functionalized ZnS nanowire sensors showed enhanced sensing performance to $NO_2$ gas at $150^{\circ}C$ compared to pristine ZnS nanowire sensors. Pristine and Pt-functionalized ZnS nanowire sensors showed responses of 140-211% and 207-488%, respectively, to 1-5 ppm $NO_2$, which are better than or comparable to those of many oxide semiconductor sensors. In addition, the underlying mechanism of the enhancement of the sensing properties of ZnS nanowires by Pt functionalization is discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.189.1-189.1
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• 2014

Lead zirconium titanate (PZT) is usually used as bulk and thin films. Due to high flexibility and piezoelectric, ferroelectric and pyroelectric properties, PZT fiber has attracted in a variety of fields such as sensor devices, non-electromechanical systems and non-volatile ferroelectric memory devices. And PZT fiber can be numerously synthesized and almost with the diameter of PZT fiber thicker than $10{\mu}m$. However, the electrospinnig method is cost effective and convenient. PZT obtained by electrospinning methodhas the diameter from sub-micro to nanometer. In this paper, the PZT/PVP nanofibers were synthesized with three precursors, lead nitrate, zirconium ethoxide and titanium isopropoxide. And the PZT nanofibers were fabricated after removal of PVP by annealing process at various temperature. The obtained PZT nanofibers were characterized by means of X-ray photoelectron spectroscopy (XPS) for chemical properties, X-ray diffraction (XRD) for crystallinity and phase, scanning electron microscopy (SEM) for morphologies. The diameter of PZT nanofibers were measured with SEM. From the SEM images, we confirmed that diameter of PZT nanofibers was hundreds of nanometers and decreased with increasing the annealing temperature. When the annealing temperature increased, the crystallinity of PZT nanofibers changed from pyrochlore to perovskite structure.