• Title/Summary/Keyword: sensor density

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Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by Using Cl2 BCl3 Neutral Beam Etching

  • Kim, Chan-Gyu;Yeon, Je-Gwan;Min, Gyeong-Seok;O, Jong-Sik;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.480-480
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    • 2011
  • 양극산화(anodization)는 금속을 전기화학적으로 산화시켜 금속산화물로 만드는 기술로서 최근 다양한 크기의 나노 구조를 제조하는 기술로 각광받고 있으며, 이러한 기술에 의하여 얻어지는 anodic aluminum oxide(AAO)는 magnetic data storage, optoelectronic device, sensor에 적용될 수 있는 nano device 뿐만 아니라 nanostructure를 제조하기 위한 template 및 mask로써 최근 광범위 하게 연구되고 있다. 또한, AAO는 Al2O3의 단단한 구조를 가진 무기재료이므로 solid mask로써 다른 porous materials 보다 뛰어난 특성을 갖고 있다. 또한 electron-beam lithography 및 block co-polymer 에 의한 patterning 과 비교하여 매우 경제적이며, 재현성이 우수할 뿐만 아니라 대면적에서 나노 구조의 크기 및 형상제어가 비교적 쉽기 때문에 널리 사용되고 있다. 그러나, AAO 형성 시 생기게 되는 반구형 모양의 barrier layer는 물질(substance)과 기판과의 direct physical and electrical contact을 방해하기 때문에 해결해야 할 가장 큰 문제점 중 하나로 알려져 있다. 따라서 본 연구에서는 실리콘 기판위의 형성된 AAO의 barrier layer를 Cl/BCl3 gas mixture에서 Neutral Beam Etching (NBE)과 Ion Beam Etching (IBE) 로 각각 식각한 후 그 결과와 비교하였다. NBE와 IBE 모두 Cl2/BCl3 gas mixture에서 BCl3 gas의 첨가량이 60% 일 경우 etch rate이 가장 높게 나타났고, optical emission spectroscopy (OES)로 Cl2/BCl3 플라즈마 내의 Cl radical density와 X-ray photoelectron spectroscopy (XPS)로 AAO 표면 위를 관찰한 결과 휘발성 BOxCly의 형성이 AAO 식각에 크게 관여함을 확인 할 수 있었다. 또한, NBE와 IBE 실험한 다양한 Cl2/BCl3 gas mixture ratio 에서 AAO가 식각이 되지만, 이온빔의 경우 나노사이즈의 AAO pore의 charging에 의해 pore 아래쪽의 위치한 barrier layer를 어떤 식각조건에서도 제거하지 못하였다. 하지만, NBE에서는 BCl3-rich Cl2/BCl3 gas mixture인 식각조건에서 AAO pore에 휘발성 BOxCly를 형성하면서 barrier layer를 제거할 수 있었다.

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Fabrication of n-ITO/p-PSL heterojunction type photodetectors and their characteristics (n-ITO/p-PSL 이종접합형 광검출 소자의 제조 및 그 특성)

  • Kim, Hang-Kyoo;Shin, Jang-Kyoo;Lee, Jong-Hyun;Song, Jae-Won
    • Journal of Sensor Science and Technology
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    • v.4 no.1
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    • pp.3-8
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    • 1995
  • n-ITO/p-PSL heterojunction photodetector have been fabricated on the Si wafer by using ITO(indium tin oxide) and PSL(porous silicon layer). They were anodized selectively by using silicon nitride and Ni-Cr/Au and were passivated by using ITO as well as being isolated by using mesa structure. With white light from 0 to 3000 Lux, the photocurrent varied linearly with incident light intensity. The reverse characteristics of fabricated devices were very stable up to a bias voltage of -40V and dark current density was about $40nA/mm^{2}$. When the device was exposed by Xe lamp whose wavelength range from 400nm to 1100nm, the maximum photo responsivity was about 0.6A/W between 600 and 700nm. Variation of the characteristics of fabricated devices after 5 weeks was negligible.

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BLAC speed contol using precision Velocity Estimation through the Rotor Position ObservationR (관측 위치를 지령치로 하는 새로운 속도추정 알고리즘을 이용한 BLAC 속도제어)

  • Lee, Sang-Hun;Song, Hyin-Jig;Park, Chan-Kyu
    • Journal of the Korean Society of Industry Convergence
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    • v.17 no.3
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    • pp.93-102
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    • 2014
  • Recently the interest in permanent magnet alternating motor using for electric compressor become great. Especially the research on Interior Permanent Magnet Motor has been doing actively for its advantages in the energy density and the efficiency. In order to control the output of motor to the desired value, the current control or speed control of motor are required. The accurate detection of rotor position and speed information are necessary for the control of motor. In general, the encoder, hall sensor, and resolver are used to obtain the information of motor position and speed and the speed detection algorithm, M/T method, is applied. However, the M/T method causes the error depending on rotor speed. Therefore, this M/T speed detection method is not perfect. In this paper, it is proposed that the PI control with a 1st transfer function and the integration element between velocity and position are composed in series and this feeds back to the reference value of position angle. The proposed algorithm is a function of the integral elements 2nd term, speed element, is used as an output. Thus, it is possible to detect the correct speed by configuring like the mechanical structure similarly. The proposed algorithm is verified by using PSIM DLL and is applied to the BLAC motor drive. And also it is confirmed that this system estimates the accurate speed regardless of rotor speed changes. As a example, the experimental results and simulations shows that the proposed method is very effective.

Comparison of organic EL characteristics of low mass dye and polymer material with the same chromophore (동일한 발광기를 가진 저분자색소와 고분자물질의 유기 EL특성의 비교)

  • Kim, Dong-Uk
    • Journal of Sensor Science and Technology
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    • v.8 no.2
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    • pp.177-183
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    • 1999
  • A Polymer material, PU-BCN and a low molar mass material D-BCN with the same chromophore were evaluated by fabricating various electroluminescent(EL) devices. A molecular structure of the chromophore was composed as two cyano groups for electron-injection and transport and two triphenylamine groups for hole-injection and transport. Various kinds of EL devices with two different types of EL materials, PU-BCN and D-BCN were fabricated, which were an Indium-tin oxide(ITO)/PU-BCN or D-BCN/MgAg device as a single-layer device(SL) and an ITO/PU-BCN or D-BCN/oxadiazole ferivative/MgAg as a double-layer device(DL-E) and an ITO/triphenylamine derivative/D-BCN/MgAg as a double-layer device(DL-H) device. Two kinds of materials, PU-BCN and D-BCN showed the same emission characteristics in the high current density and excellent EL characteristics even in the SL devices. Maximum EL peaks revealed red emission of about 640 nm, which were corresponded with the fluorescence peaks of the films of two materials.

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Growth and study on photocurrent of valence band splitting for AgGaSe2 single crystal thin film by hot wall epitaxy (Hot Wall Epitaxy(HWE)법에 의한 AgGaSe2 단결정 박막 성장과 가전자대 갈라짐에 대한 광전류 연구)

  • Lee, Gyoan-Gyu;Hong, Kwang-Joon
    • Journal of Sensor Science and Technology
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    • v.15 no.6
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    • pp.397-405
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    • 2006
  • Single crystal $AgGaSe_{2}$ layers were grown on thoroughly etched semi-insulating GaAs(100) substrate at $420^{\circ}C$ with hot wall epitaxy (HWE) system by evaporating $AgGaSe_{2}$ source at $630^{\circ}C$. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of single crystal $AgGaSe_{2}$ thin films measured with Hall effect by van der Pauw method are $4.05{\times}10^{16}/cm^{3}$, $139cm^{2}/V{\cdot}s$ at 293 K, respectively. The temperature dependence of the energy band gap of the $AgGaSe_{2}$ obtained from the absorption spectra was well described by the Varshni's relation, $E_{g}(T)$=1.9501 eV-($8.79{\times}10^{-4}{\;}eV/K)T^{2}$/(T+250 K). The crystal field and the spin-orbit splitting energies for the valence band of the $AgGaSe_{2}$ have been estimated to be 0.3132 eV and 0.3725 eV at 10 K, respectively, by means of the photocurrent spectra and the Hopfield quasicubic model. These results indicate that the splitting of the ${\Delta}So$ definitely exists in the ${\Gamma}_{5}$ states of the valence band of the $AgGaSe_{2}$. The three photocurrent peaks observed at 10 K are ascribed to the $A_{1}-$, $B_{1}-$, and $C_{1}-$exciton peaks for n=1.

Growth of ZnO thin film by pulsed laser deposition and photocurrent study on the splitting of valance band (펄스 레이저 증착(PLD)법에 의한 ZnO 박막 성장과 가전자대 갈라짐에 대한 광전류 연구)

  • Hong, Kwang-Joon
    • Journal of Sensor Science and Technology
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    • v.14 no.3
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    • pp.160-168
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    • 2005
  • ZnO epilayer were synthesized by the pulesd laser deposition(PLD) process on $Al_{2}O_{3}$ substrate after irradiating the surface of the ZnO sintered pellet by the ArF(193 nm) excimer laser. The epilayers of ZnO were achieved on sapphire ($Al_{2}O_{3}$) substrate at a temperature of $400^{\circ}C$. The crystalline structure of epilayer was investigated by the photoluminescence. The carrier density and mobility of ZnO epilayer measured with Hall effect by van der Pauw method are $8.27{\times}1016cm^{-3}$ and $299cm^{2}/V{\cdot}s$ at 293 K, respectively. The temperature dependence of the energy band gap of the ZnO obtained from the absorption spectra was well described by the Varshni's relation, $E_{g}(T)$=3.3973 eV-($2.69{\times}10^{-4}$ eV/K)$T^{2}$/(T+463K). The crystal field and the spin-orbit splitting energies for the valence band of the ZnO have been estimated to be 0.0041 eV and 0.0399 eV at 10 K, respectively, by means of the photocurrent spectra and the Hopfield quasicubic model. These results indicate that the splitting of the ${\Delta}so$ definitely exists in the ${\Gamma}_{6}$ states of the valence band of the ZnO. The three photocurrent peaks observed at 10 K are ascribed to the $A_{1}-$, $B_{1}-$, and $C_{1}-$exciton peaks for n = 1.

Growth and photocurrent study on the splitting of the valence band for ZnIn2S4 single crystal thin film by hot wall epitaxy (Hot Wall Epitaxy (HWE)법에 의한 ZnIn2S4 단결정 박막 성장과 가전자대 갈라짐에 대한 광전류 연구)

  • Hong, Kwang-Joon
    • Journal of Sensor Science and Technology
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    • v.16 no.6
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    • pp.419-427
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    • 2007
  • Single crystal $ZnIn_{2}S_{4}$ layers were grown on a thoroughly etched semi-insulating GaAs(100) substrate at $450^{\circ}C$ with the hot wall epitaxy (HWE) system by evaporating the polycrystal source of $ZnIn_{2}S_{4}$ at $610^{\circ}C$ prepared from horizontal electric furnace. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of single crystal $ZnIn_{2}S_{4}$ thin films measured with Hall effect by van der Pauw method are $8.51{\times}10^{17}\;electron/cm^{-3}$, $291{\;}cm^{2}/v-s$ at 293 K, respectively. The photocurrent and the absorption spectra of $ZnIn_{2}S_{4}$/SI(Semi-Insulated) GaAs(100) are measured ranging from 293 K to 10 K. The temperature dependence of the energy band gap of the $ZnIn_{2}S_{4}$ obtained from the absorption spectra was well described by the Varshni's relation, $E_g(T)$=2.9514 eV. ($7.24{\times}10^{-4}\;eV/K$)$T^{2}$/(T+489 K). Using the photocurrent spectra and the Hopfield quasicubic model, the crystal field energy(${\Delta}cr$) and the spin-orbit splitting energy(${\Delta}so$) for the valence band of the $ZnIn_{2}S_{4}$ have been estimated to be 167.8 meV and 14.8 meV at 10 K, respectively. The three photocurrent peaks observed at 10 K are ascribed to the $A_{1}$-, $B_{1}$-, and $C_{41}$-exciton peaks.

Shock Attenuation Mechanism in Drop Landing According to the Backpack Weight Changes (드롭랜딩 시 backpack 중량 변화에 따른 충격 흡수 기전)

  • Choi, Chi-Sun;Nam, Ki-Jeong;Shin, In-Sik;Seo, Jung-Suk;Eun, Seon-Deok;Kim, Suk-Bum
    • Korean Journal of Applied Biomechanics
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    • v.16 no.2
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    • pp.25-35
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    • 2006
  • The purpose of this study was to investigate the shock attenuation mechanisms while varying the loads in a backpack during drop landing. Ten subjects (age: $22.8{\pm}3.6$, height: $173.5{\pm}4.3$, weight: $70.4{\pm}5.2$) performed drop landing under five varying loads (0, 5kg. 10kg. 20kg. 30kg). By employing two cameras (Sony VX2100) the following kinematic variables (phase time, joint rotational angle and velocity of ankle, knee and hip) were calculated by applying 2D motion analysis. Additional data, i.e. max vertical ground force (VGRF) and acceleration, was acquired by using two AMTI Force plates and a Noraxon Inline Accelerometer Sensor. Through analysing the power spectrum density (PSD), drop landing patterns were classified into four groups and each group was discovered to have a different shock attenuation mechanism. The first pattern that appeared at landing was that the right leg absorbed most of the shock attenuation. The second pattern to appear was that subject quickly transferred the load from the right leg to the left leg as quickly as possible. Thus, this illustrated that two shock attenuation mechanisms occurred during drop landing under varying load conditions.

Analysis on Receiving Performance Degradation of Ground Station in Lunar Mission (달 잡음에 의한 지상 시스템 수신 성능 열화 분석)

  • Park, Durk-Jong;Yeom, Kyung-Whan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.25 no.2
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    • pp.208-216
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    • 2014
  • Ground station in lunar mission is responsible to receive telemetry signal including sensor data from lunar orbiter and/or lander. At preliminary stage of developing this ground station, receiving performance such as antenna size and noise temperature should be designed on the basis of link budget analysis. When the antenna of ground station is pointing to the moon to communicate with lunar orbiter and/or lander, noise level is supposed to be increasing due to the lunar flux density. It means that the moon is working as a noise source to degrade receiving performance when antenna is pointing to the moon. Antenna noise temperature contributed by the moon was firstly calculated and secondary validated by using test configuration in this paper. Consequently, it was shown that antenna noise temperature caused by the moon was quietly matched with measured one and G/T degradation of receiving system in lunar mission can be calculated depending on antenna size and frequency.

Monte Carlo Localization for Mobile Robots Under REID Tag Infrastructures (RFID 태그에 기반한 이동 로봇의 몬테카를로 위치추정)

  • Seo Dae-Sung;Lee Ho-Gil;Kim Hong-Suck;Yang Gwang-Woong;Won Dae-Hee
    • Journal of Institute of Control, Robotics and Systems
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    • v.12 no.1
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    • pp.47-53
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    • 2006
  • Localization is a essential technology for mobile robot to work well. Until now expensive sensors such as laser sensors have been used for mobile robot localization. We suggest RFID tag based localization system. RFID tag devices, antennas and tags are cheap and will be cheaper in the future. The RFID tag system is one of the most important elements in the ubiquitous system and RFID tag will be attached to all sorts of goods. Then, we can use this tags for mobile robot localization without additional costs. So, in this paper, the smart floor using passive RFID tags is proposed and, passive RFID tags are mainly used for identifying mobile robot's location and pose in the smart floor. We discuss a number of challenges related to this approach, such as tag distribution (density and structure), typing and clustering. When a mobile robot localizes in this smart floor, the localization error mainly results from the sensing range of the RFID reader, because the reader just ran know whether a tag is in the sensing range of the sensor. So, in this paper, we suggest two algorithms to reduce this error. We apply the particle filter based Monte Carlo localization algorithm to reduce the localization error. And with simulations and experiments, we show the possibility of our particle filter based Monte Carlo localization in the RFID tag based localization system.