• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 B
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• pp.1531-1533
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• 2004

Standby power is progressively important in the developed countries including Korea. The status of standby power of korean home electronic wares has been unknown. In this paper, standby power consumption of home electronics in Korea has been firstly surveyed and reported. Over 800 pieces of electrical equipments that consume standby power in 53 households were investigated. The average standby power per equipment and total standby power per household were 3.66W and 57.0W, respectively. It was revealed that Audio systems and network appliances such as xDSL modem, set-top box generally consume high standby power.

• 한국산학기술학회논문지
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• 제21권5호
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• pp.28-38
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• 2020

반도체 증착장비는 일반적인 대량생산 제품과는 차별화되는 특징을 보이는 복합제품시스템(CoPS)의 주요 예시 중 하나로, 사용자 요구에 대한 충실한 이해가 필수적이다. 이에 본 연구에서는 Kano 모델을 활용하여 증착장비의 품질속성에 대한 사용자와 생산자의 만족 특성을 비교분석하고자 하였다. 사용자 및 생산자 기업의 엔지니어와 관리자들을 대상으로 Kano 설문을 수행하고 분석한 결과, 사용자 측과 생산자 측의 품질 만족 특성이 다르게 나타났다. 총 22개의 소분류 품질속성 가운데, 제조사 측은 22개 모두에 대해 매력적(A) 품질속성으로 평가한 반면, 사용자 측에서는 A 6개, 무관심(I) 10개, 당연적(M) 2개, 기타 경계치값 2개 등으로 평가하여 큰 차이를 보였다. 특히 제조사 측에서는 생산성능, 신뢰성, 편의성, 가격 및 원가 모두에 대해 매력적(A) 품질속성으로 평가한 반면, 사용자 측에서는 신뢰성에 대해서만 매력적 또는 당연적(M)으로 평가하고 나머지는 무관심(I)으로 평가하는 경우가 많았다. 이러한 결과는 이 분야 사용자와 생산자 간 품질속성에 대한 인식이 다르게 나타나고 있으며, 이에 대한 개선 및 전략적 활용의 필요성이 있음을 시사한다. 또한 상기의 결과는 CoPS는 규모의 경제와 비용절감보다는 제품 자체의 성능이 중요함을 시사한다. 따라서 증착장비 제조사들은 복합제품시스템의 특징을 반영한 혁신전략을 마련할 필요가 있다.

• 대한안전경영과학회지
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• 제9권1호
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• pp.197-211
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• 2007

The power of semiconductor, Korea is continuously constructing semiconductor production line for keeping a front-runner status. however, studies and data about potential risks in semiconductor factory are still short. If fire does not initially suppressed, the fire causes a great damage. To decrease fire risk factors, in addition to fire fighting safety equipment, more important thing is how to design and construct fire protection system. The current fire protection codes about semiconductor factory come under functional law, and this law is short of consideration about particularity of factory. The existing prescriptive fire codes depending on experience compose without evident engineering verifications, thus equipments which is created by the current prescriptive fire code may bring about a variety of problems. For example, the design under the current regulation can not cope with the excessive investments, low efficiencies, and the diversifying construction designs and be applied to the quick changes of new technologies. Ergo, an optimal design for fire protection is to equip fire protection arrangements with condition and environment of production field. Manufacturing factory of semiconductors is a windowless airtight space. And for cleanliness, there exists strong flow of cooperation. Therefore, there is a need for fire safety design that meets the characteristic of a clean room. Accordingly, we are to derive smoke flow according to cooperation process within a clean room and construction plan of an optimal sensor system. In this study, in order to confirm the performance of proposed smoke-exhaust equipment and suggest efficient smoke exhaust device when there is a fire of 1MW of methane in the clean room of company H, we have implemented fire simulation using fluid dynamics computation.

• Journal of Power Electronics
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• 제16권4호
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• pp.1426-1437
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• 2016

In different industrial and mission oriented applications, redundant or standby semiconductor systems can be implemented to improve the reliability of power electronics equipment. The proper structure for implementation can be one of the redundant or standby structures for series or parallel switches. This selection is determined according to the type and failure rate of the fault. In this paper, the reliability and the mean time to failure (MTTF) for each of the series and parallel configurations in two redundant and standby structures of semiconductor switches have been studied based on different failure rates. The Markov model is used for reliability and MTTF equation acquisitions. According to the different values for the reliability of the series and parallel structures during SC and OC faults, a comprehensive comparison between each of the series and parallel structures for different failure rates will be made. According to the type of fault and the structure of the switches, the reliability of the switches in the redundant structure is higher than that in the other structures. Furthermore, the performance of the proposed series and parallel structures of switches during SC and OC faults, results in an improvement in the reliability of the boost dc/dc converter. These studies aid in choosing a configuration to improve the reliability of power electronics equipment depending on the specifications of the implemented devices.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.132-137
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• 2006

With the help of the development of digital-multimedia in the middle of 1990's, FDP(Flat Panel Display) had attracted considerable attention. Collimation proximity exposure system that transfers the pattern on wafer or glass exactly using mask and light with appropriate wavelength is core process in semiconductor and liquid display element. The performances of resolution required in precision exposure system are evaluated by resolving power, depth of focus and storage area. Most of development has targeted on these three factors. The optical design including lamp house has played an important role on the performance of exposure process. In this study, we evaluate the cooling system, concerning on exposure device with mercury lamp among the kernel equipment for the production of LCD, to prevent the instability of lighting due to long term accumulation of excessive heating inside the lamp house. Numerical analysis is conducted on full-scale model. The characteristics of three-dimensional flow, pressure and temperature distribution on exposure system are graphically depicted to estimate the whole cooling system for lamp house and to establish the design criteria.

• 한국환경과학회지
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• 제14권3호
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• pp.335-343
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• 2005

The objective of this research is to evaluate a feasibility of wastewater reuse by membrane treatment with vibrating membrane separation equipment. Molecular weight of compounds in wastewater, permeability of membrane and retentate characterization after membrane filtration were investigated in order to determine appropriate membrane pore size and materials for wastewater treatment. Selected membrane was evaluated with vibration membrane separation equipment to optimize operating conditions. The following conclusion are drawn. 1. We got as following test results after the distribution of particles in the semiconductor wastewater, are made up of $1\~20{\mu}m$. Si, gold and Al in turn are contained in semiconductor wastewater. 2. Recovery rate is changeless under increasing recovery rate in operation. Though a value can be if pressure can be changed, the highest value of permeate rate is presented in 150 psi. 3. The AS-100(polysulpone) was selected as the most appropriate membranes for the treatment of semi-conductor wastewater to VSEP system. The fouling almost did not occur during this experiments. The analyses of treated water with VSEP system showed conductivity: 0.059,us/cm, TDS: 40mg/l, COD: 20mg/l, SS : 5mg/l, n-Hexane: 8.3mg/l. Comparing previous systems, operating expenses is decreased by more $50\%$.

• 전력전자학회논문지
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• 제15권4호
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• pp.274-281
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• 2010

본 논문에서는 반도체 플라즈마 식각 시스템의 균일도 향상을 위한 CCP와 ICP 결합 임피던스정합 장치를 제안한다. 이중주파수 전원공급 장치는 CCP와 ICP로 구성되어 있고 첫 번째 구성은 고집적화를 위해 페라이트 코어를 사용한 유도 결합 플라즈마(ICP : Inductively Coupled Plasma)방식이며, 두 번째 구성은 셀 전체의 균일도 향상을 위한 용량 결합 플라즈마(CCP : Capacitively Coupled Plasma)방식이다. 제안된 시스템은 반도체 장비 산업에서 요구되는 높은 생산성을 실현할 수 있다. 본 논문에서는 제안된 시스템의 타당성을 검증하기 위해 CCP와 ICP 결합 임피던스정합 장치를 제작하였고, 이론적 분석과 27.12MHz 와 400kHz의 조건에서 시뮬레이션 및 실험을 진행하였다

• 한국산학기술학회논문지
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• 제12권4호
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• pp.1812-1816
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• 2011

본 연구에서는 약액 주입 후 미 도포로 인한 복합적인 공정불량을 예방하기 위하여 100nm 이하의 나노 반도체 제조공정에서 필수적인 스피너(spinner) 장비를 위한 약액 흐름제어 시스템을 개발하였다. 본 연구개발을 통하여 실시간으로 상태요소들을 감시할 뿐만 아니라 상태요소의 비정상적 변화나 웨이퍼 가공불량이 발생할 경우 해당 유니트를 정지시킴과 동시에 원격지에 있는 엔지니어에게 경보를 전송함으로써 즉각적인 대처가 가능하여 모듈의 수율을 향상시킬 수 있을 것으로 기대된다. 또한 세부 동작 시퀀스를 제어하기 위한 H/W와 S/W 시스템을 생산라인에 실장하고 성능점검 및 인증을 수행한 결과 5가지의 유형별 비정상적 프로세스를 정확히 검출하였다.

• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.59-64
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• 2022

Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficient vibration isolation performance in the low frequency band, so an active vibration control system that can overcome these problems is used recently. In this paper, PID controller is used to control the active vibration isolator. Methods for setting the gain of the PID controller include the Zeigler-Nichols method, the pole placement method. These methods have the disadvantage of requiring a lot of time or knowing the system model accurately. This paper proposes the gain auto tuning method of the active vibration isolator applied with the PSO algorithm, which is an optimization algorithm that is easy to implement and has stable convergence performance with low calculations. It is expected that it will be possible to improve vibration isolation performance and reduce the time required for gain tuning by applying the proposed PSO algorithm to the active vibration isolator.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.133-137
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• 2023

This study the problem of deposition uniformity observed during Mist-CVD deposition experiments. The TRIZ's ADRIGE algorithm, a problem-solving technique, is utilized to systematically analyze the issue and propose solutions. Through problem and resource analysis, technical contradictions are identified regarding the precursor's volume and its path when it encounters the substrate. To resolve these contradictions, the concept of applying the principle of dimensional change to transform the precursor's three-dimensional path into a one-dimensional path is suggested. The chosen solution involves the design of an enhanced Mist-CVD system, which is evaluated for feasibility and analyzed using computational fluid dynamics. The analysis confirms that the deposition uniformity consistently follows a pattern and demonstrates an improvement in uniformity. The improved Mist-CVD equipment is validated through analysis, providing evidence of its feasibility and yielding satisfactory results.