• Title/Summary/Keyword: semiconductor and LCD manufacturing

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A Study on Dynamic Characteristic Analysis for the Industrial Monorail Vehicle (산업용 단선 궤도 차량의 주행 동특성에 관한 연구)

  • Lee Soo-Ho;Jung Il-Ho;Lee Hyung;Park Joong-Kyung;Park Tae-Won
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.7 s.238
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    • pp.1005-1012
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    • 2005
  • An OHT(Over Head Transportation) vehicle is an example of the industrial monorail vehicle, and it is used in the automobile, semiconductor, LCD manufacturing industries. OHT vehicle is moved by main wheels and guide rollers. The major function of the main wheel is to support and drive the OHT vehicle. The roles of the guide roller is the inhibition of derailment and steering of the OHT vehicle. Since the required vehicle velocity becomes faster and the required load capacity is increased, the durability characteristics of the wheel and roller, which was made of urethane, need to be increased. So it is necessary to estimate the fatigue life cycle of the wheel and roller. In this study, OHT dynamic model was developed by using the multi body dynamic analysis program ADAMS. Wheel and roller are modeled by the 3-D surface contact module. Especially, motor cycle tire mechanics is used in the wheel contact model. The OHT dynamic model can analyze the dynamic characteristic of the OHT vehicle with various driving conditions. And the result was verified by a vehicle traveling test. As a result of this study, the developed model is expected to predict wheel dynamic load time history and makes a contribution to design of a new monorail vehicle.

A Rotordynamic Analysis of Dry Vacuum Pump Rotor-Bearing System for High-Speed Operation (고속 운전용 건식진공펌프 로터-베어링 시스템의 전체동역학 해석)

  • Kim, Byung-Ok;Lee, An-Sung;Noh, Myung-Keun
    • The KSFM Journal of Fluid Machinery
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    • v.10 no.3 s.42
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    • pp.47-54
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    • 2007
  • A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

Implementation of Line Scan Camera based Training Equipment for Technical Training of Automated Visual Inspection System (자동 시각 검사 시스템 기술훈련을 위한 라인스캔 카메라 기반의 실습장비 제작)

  • Ko, Jin-Seok;Mu, Xiang-Bin;Rheem, Jae-Yeol
    • Journal of Practical Engineering Education
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    • v.6 no.1
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    • pp.37-42
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    • 2014
  • The automated visual inspection system (machine vision system) for quality assurance is important factory automation equipment in the manufacturing industries, such as display, semiconductor, etc. There is a lot of demand for the machine vision engineers. However, there are no technical training courses for machine vision technologies in vocational schools, colleges and universities. In this paper, we present the implementation of line scan camera based equipment for technical training of the automated visual inspection system. The training system consists of the X-Y stage which is widely used in machine vision industries and its variable image resolution are set to $10-30{\mu}m$. Additionally, this training system can attach the industrial illumination, either the direct illuminator or coaxial illuminator, for verifying the effect of illuminations. This means that the trainee can have a practical training in various equipment conditions and the training system is similar to the automated visual inspection system in industries.

Prediction of the Flow Coefficient of a PFA Lined Ball Valve Using the CFD Simulation Method (CFD 해석방법을 이용한 PFA 라이닝 볼밸브의 유량계수 예측)

  • Jeon, Hong-Pil;Lee, Won-Seob;Kim, Chul-Soo;Lee, Jong-Chul
    • The KSFM Journal of Fluid Machinery
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    • v.19 no.4
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    • pp.35-38
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    • 2016
  • A PFA lined ball valve, which is machined with fluorinated resin PFA to its inner part for improving corrosion resistance, non-stickness, heat-resistance, has been widely used in semiconductor/LCD manufacturing processes with the high purity chemicals as working fluid. Due to the safety concerns, the experiments for measuring the flow coefficient of a PFA lined ball valve should be conducted with water at room temperature according to IEC standards. However, it is required to know the real flow coefficient with the real working fluid, because the flow coefficient is critical to correctly design valves in piping system. In this study, we calculated the flow coefficient of a PFA lined ball valve 40A with hydrochloric acid ($40^{\circ}C$ 36% HCl) as the working fluid using a commercial CFD package, ANSYS CFX v15. The computational results had a good agreement with the measured data and showed a little difference between water and hydrochloric acid as the working fluid of a PFA lined ball valve.

Technical Training on Automated Visual Inspection System for Factory Automation Quality Assurance (공장 자동화 품질관리를 위한 자동 시각 검사 시스템의 기술 훈련)

  • Ko, JinSeok;Rheem, JaeYeol
    • The Journal of Korean Institute for Practical Engineering Education
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    • v.4 no.2
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    • pp.91-97
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    • 2012
  • The automated visual inspection system (machine vision system) for quality assurance is an important factory automation equipment in the manufacturing industries, such as display, semiconductor, etc. The world market of the machine vision components is expected 18 billon dollars in 2015. Therefore, there is a lot of demand for the machine vision engineers. However, there are no technical training courses for machine vision technologies in vocational schools, colleges and universities. In this paper, we propose a technical training program for the machine vision technology. The total time of training is 30 to 60 hours and the training program can operate flexibly by student's major, a priori knowledge and education level.

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Machine Scheduling Models Based on Reinforcement Learning for Minimizing Due Date Violation and Setup Change (납기 위반 및 셋업 최소화를 위한 강화학습 기반의 설비 일정계획 모델)

  • Yoo, Woosik;Seo, Juhyeok;Kim, Dahee;Kim, Kwanho
    • The Journal of Society for e-Business Studies
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    • v.24 no.3
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    • pp.19-33
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    • 2019
  • Recently, manufacturers have been struggling to efficiently use production equipment as their production methods become more sophisticated and complex. Typical factors hindering the efficiency of the manufacturing process include setup cost due to job change. Especially, in the process of using expensive production equipment such as semiconductor / LCD process, efficient use of equipment is very important. Balancing the tradeoff between meeting the deadline and minimizing setup cost incurred by changes of work type is crucial planning task. In this study, we developed a scheduling model to achieve the goal of minimizing the duedate and setup costs by using reinforcement learning in parallel machines with duedate and work preparation costs. The proposed model is a Deep Q-Network (DQN) scheduling model and is a reinforcement learning-based model. To validate the effectiveness of our proposed model, we compared it against the heuristic model and DNN(deep neural network) based model. It was confirmed that our proposed DQN method causes less due date violation and setup costs than the benchmark methods.

TIR Holographic lithography using Surface Relief Hologram Mask (표면 부조 홀로그램 마스크를 이용한 내부전반사 홀로그래픽 노광기술)

  • Park, Woo-Jae;Lee, Joon-Sub;Song, Seok-Ho;Lee, Sung-Jin;Kim, Tae-Hyun
    • Korean Journal of Optics and Photonics
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    • v.20 no.3
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    • pp.175-181
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    • 2009
  • Holographic lithography is one of the potential technologies for next generation lithography which can print large areas (6") as well as very fine patterns ($0.35{\mu}m$). Usually, photolithography has been developed with two target purposes. One was for LCD applications which require large areas (over 6") and micro pattern (over $1.5{\mu}m$) exposure. The other was for semiconductor applications which require small areas (1.5") and nano pattern (under $0.2{\mu}m$) exposure. However, holographic lithography can print fine patterns from $0.35{\mu}m$ to $1.5{\mu}m$ keeping the exposure area inside 6". This is one of the great advantages in order to realize high speed fine pattern photolithography. How? It is because holographic lithography is taking holographic optics instead of projection optics. A hologram mask is the key component of holographic optics, which can perform the same function as projection optics. In this paper, Surface-Relief TIR Hologram Mask technology is introduced, and enables more robust hologram masks than those previously reported that were formed in photopolymer recording materials. We describe the important parameters in the fabrication process and their optimization, and we evaluate the patterns printed from the surface-relief TIR hologram masks.

Calcium Removal from Effluent of Electronics Wastewater Using Hydrodynamic Cavitation Technology (수리동력학적 캐비테이션을 이용한 전자폐수 처리수에 함유된 칼슘저감에 관한 연구)

  • Park, Jin-Young;Kim, Sun-Jip;Lee, Yong-Woo;Lee, Jae-Jin;Hwang, Kyu-Won;Lee, Won-Kwon
    • Journal of Korean Society of Environmental Engineers
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    • v.29 no.6
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    • pp.715-721
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    • 2007
  • Residual calcium concentration is high, in general, at the effluent of the fluoride removal process in the electronics industry manufacturing semiconductor and LCD. To increase the stability of the membrane process incorporated for reuse of wastewater, the residual calcium is required to be pre-removed. Hyperkinetic Vortex Crystallization(HVC) process was installed in the electronics industry manufecturing semi conductor as a pilot scale for accelerating calcification of calcium ion. Compared to the conventional soda ash method, the 31% higher calcium removal efficiency was achieved when HVC was applied at the same sodium carbonate dosage. In order to maintain the economic calcium removal target of 70% preset by manufacturer, the dosing concentration of the soda ash was 530 mg/L based on influent flowrate. The seed concentration in the reactor was one of the critical factors and should be maintained in the range of $800\sim1,200mg$ SS/L to maximize the calcium removal efficiency. The calcite production rate was 0.30 g SS/g $Na_2CO_3$ in the average. The economic HVC passing time of the mixture was in the range of $2\sim5$ times. Relatively, stable calcium concentration was maintained in the range of $30\sim72$ mg/L(average 49 mg/L) although the calcium concentration in the feed was severely fluctuated with $74\sim359$ mg/L(average 173 mg/L). The HVC process was characterized as environment-friendly technology reducing chemical dosage and chemical sludge production and minimizing maintenance cost.