• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
• /
• pp.1203-1206
• /
• 2004

마이크로 컬럼은 차세대 리소그라피 기술의 하나로 마이크로 컬럼의 기능이 기존의 전자빔 컬럼을 능가하여 주목을 받는다. 초소형 전자빔 컬럼은 기존의 전자빔 컬럼과 비교하여 수차, 렌즈의 크기 및 원형에 성능이 보다 민감하게 반응하므로 정확한 정렬과 가공 기술은 초소형 전자빔 마이크로 컬럼의 성능에 매우 중요하다. 그러나, 기준치 piezoelectric transducer (PZT)나 scanning tunneling microscopy (STM)을 이용한 정렬 기술은 매우 복잡하고 어려운 단점이 있다. 본 연구에시는 레이저 회절 패턴방식과 레이저 정밀 가공으로 실리콘 렌즈와 파이렉스 spacer를 정확하게 교대로 조립하였으며, 이 방법으로 완성된 마이크로 컬럼의 STEM동작을 조사하였다.

• Journal of Electrochemical Science and Technology
• /
• 제4권4호
• /
• pp.153-156
• /
• 2013

Charge transfer between STM tip and Au(100) has been investigated by using a Scanning Tunneling Microscopy (STM) technique in dry, $H_2O$, and $D_2O$ atmospheres. Dry atmosphere was indicated by humidity as low as 5 % and high humidity as high as 98% was managed by injecting $H_2O$ and $D_2O$ to the chamber. The current decayed more slowly in high humidity than in dry atmosphere. The plateau currents were found to appear at separations larger than ca. $5{\AA}$ where the current decay stopped depending on applied bias voltages. The polarity dependence was observed at the STM junction between Pt-Ir tip and the gold. On the contrary, little dependence was seen at the one between Au tip and the substrate electrode.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
• /
• pp.170-170
• /
• 1999

We studied Nb growth mode on Cu(100) surface by scanning tunneling microscopy (STM) at room temperature. Nb/Cu is immiscible at room temperature and thus is an ideal system for studying surface alloy formation. Initially deposited Nb atoms are incorporated subsurface on Cu(100). After annealing, they are preferentially found at step edges and appear as bright dots surrounded by dark rings. Ordering emerges from step edges as annealed. Ordered ({{{{ SQRT { 5} }$\times${{{{ SQRT { 5} }}}})R 26.6$^{\circ}$phase Nb structure is formed at $\theta$<0.2ML after annealing to 50$0^{\circ}C$. At higher coverage, $\theta$>0.25, annealing leads to p(2$\times$2) phase. due to large mismatch in lattice parameters, the domain is limited to a few tens of nm2. Growth kinetics of the system will be discussed.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
• /
• pp.173-173
• /
• 1999

The initial growth mode of Nb on Ag(110) in sub-monolayer region is studied using Scanning Tunneling microscopy. E-beam evaporated Nb is deposited onto the substrate at RT, and STM measurements are carried out at RT and 78K. With Nb being immiscible in bulk Ag, 3D islands formation begins at early stage and no particular ordered structure is found. At very low coverages, however, many interesting phenomena are observed in association with Nb clusters. Small Nb clusters as deposited displays very strong size dependence against atom-manipulation by the STM tip. In addition, the apparent corrugation of clusters below the critical size exhibits dramatic dependence on the imaging bias, disappearing completely over a wide range of the bias. Possible physical mechanism responsible for such behavior will be discussed.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.57-57
• /
• 2010

Sb(111) is a spin textured surface due to the strong spin-orbit coupling, often viewed as a proto-type topological insulator. We used scanning tunneling microscopy (STM) to characterize various Mn-induced subsurface defects existing at the surface of Mn-doped Sb at 50 K. Our STM images show that every defect exhibits 3-fold symmetry with a single rotational orientation and can be categorized by their shapes and sizes. We found more than 10 types of subsurface defects with distinctive orders, which allows the resolution of the vertical positions of the magnetic dopants lying more than 10 layers down from the surface. We will discuss about our findings in comparison with theoretical results.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2002년도 하계학술대회 논문집 C
• /
• pp.1572-1574
• /
• 2002

In this paper, we discuss the electrical properties of self-assembled (2'-amino-4,4-di(ethynylp henyl)-5'-nitro-1-(thioacetyl)benzene), which has been well known as a conducting molecule having possible application to molecular level NDR device. The phenomenon of negative differential resi(NDR) is characterized by decreasing current th a junction at increasing voltage, also fabricatio MIM-type molecular electronic device and the Molecular Level Using Scanning Tunneling Microscopy.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.243-243
• /
• 2012

Self-assembled monolayers (SAMs) prepared by aromatic thiols on gold surfaces have much larger potential for electronic device applications due to their electronic properties. In this study, the formation and structures of SAMs prepared by benzenethiol (BT), toluenethiol (TT), 2-fluorobenzenethiol (2-FBT), 3-fluorobenzenethiol (3-FBT), 4-fluorobenzenethiol (4-FBT), 4-chlorobenzenethiol (4-CBT), 4-fluorobenzenemethanethiol (4-FBMT), and 4-chlorobenzenemethanethiol (4-CBMT) on Au(111) were examined using scanning tunneling microscopy (STM) and Kelvin probe (KP) to explore the structure and electronic interface properties of eight differently substituted aromatic thiol SAMs on Au(111). And these values are compared with gas phase dipole moments computed by quantum chemical calculations for individual thiol molecules. It was revealed that all eight thiol-molecules form uniform SAMs on Au(111) at $75^{\circ}C$ compared to lower solution temperature by STM observation. The work function change obtained in the KP measurements and calculated molecular dipole moments have the linear relationship while the 4-FBMT and 4-CBMT deviate from this tendency.

• 한국분말재료학회지
• /
• 제10권3호
• /
• pp.190-194
• /
• 2003

Thin Ag films deposited onto $SiO_2/Si$ substrates by DC magnetron sputtering and thereafter annealed ,it temperatures 100-50$0^{\circ}C$ are investigated by scanning tunneling and atomic forte microscopy. It is shown that the film surface topography and microstructure are considerably changed as a result of annealing. To provide a quantitative estimation of the surface topography changes of Ag films the surface fractal dimension was calculated. Elasticity and hardness of the films are studied by a nanoindentation technique. The films are found to have value of elastic modulus close to that of bulk silver while their hardness and yield stress are essentially higher.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
• /
• pp.151-151
• /
• 2000

We have studied the atomic structure of Si(100)-c(4$\times$4) reconstruction using scanning tunneling microscopy(STM). The c(4$\times$4) reconstruction can be formed by annealing the hydrogen exposured surface at temperatures between 850 and 960 K. At this temperature ranges, adsorbed hydrogen atoms are all desorbed. Therefore, the c(4$\times$4) reconstruction is due to the Si dimers on surface. The filled and empty state images of the STM were interpreted in terms of Si dimers in c(4$\times$4) primitive cell forming the reconstruction. Based on the STM images and hydrogen adsorption experiment on c(4$\times$40 surface, we suggest that Si dimers in c(4$\times$40 unit cell are perpendicular ad-dimer to the underlying Si dimer rows.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
• /
• pp.159-159
• /
• 2000

Initial growth mode of Nb on Cu(100) is studied by scanning tunneling microscopy (STM) and density functional theory. Nb/Cu is immiscible at room temperature, but isolated Nb atoms are expected to be incorporated up to the second layer by DFT. STM shows that Nb atoms mix with Cu atoms in the first layer at room temperature and diffuse into the second layer upon annealing. In the second layer, Nb/induced features are preferentially found at step edges and appear as bright dots surrounded by dark rings. Details of comparison between experiment and theory will be discussed.