• Title/Summary/Keyword: scanning measurements

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3차원적 도핑 분포 측정을 위한 SCM 응용 방법 (The SCM Method for Three-Dimensional Dopant Profiles)

  • Lee Jun-Ha;Lee Hoong-Joo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.1
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    • pp.7-11
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    • 2006
  • Through SCM modeling, we found that the depletion layer in silicon was of a form of a spherical capacitor with the SCM tip biased. Two-dimensional (2D) finite differential method code with a successive over relaxation (SOR) solver has been developed to model the measurements by SCM of a semiconductor wafer that contains an ion-implanted impurity region. Then, we theoretically analyzed the spherical capacitor and determined the total depleted-volume charge Q, capacitance C, and the rate of capacitance change with bias dC/dV. It is very important to observe the depleted carriers' movement in the silicon layer by applying the bias to the tip. So, we calculated the depleted-volume charge, considering different factors such as tip size, oxide thickness, and applied bias (dc+ac), which have an influence on potential and depletion charges.

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Characterization and Gas-sensing Performance of Spray Pyrolysed In2O3 Thin Films: Substrate Temperature Effect

  • khatibani, A. Bagheri;Ziabari, A. Abdolahzadeh;Rozati, S.M.;Bargbidi, Z.;Kiriakidis, G.
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.3
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    • pp.111-115
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    • 2012
  • Spray pyrolysis method was applied for the preparation of indium oxide ($In_2O_3$) thin films, by varying the substrate temperature range from 400-$600^{\circ}C$. All the samples were characterized at room temperature by using X-Ray diffraction, Scanning electron microscopy, Atomic Force Microscopy, Hall Effect and UV-Visible spectrophotometry. The optimal substrate temperature required for obtaining films of high crystallographic quality was $575^{\circ}C$. By comparing optical transmittance and electrical conductivity it was observed that the best figure of merit for these films was achieved for the same temperature and electrical resistivity was in the order of ${\rho}=1.47{\times}10^{-1}[{\Omega}cm]$. Gas sensing measurements of the films in ethanol showed enhancement with surface roughness and sheet resistance.

Studies on Dissolution Rate of Drugs (XVII)-Dissolution Characteristics of Chlorpropamide Dispersed in Sodium Deoxycholate- (의약품의 용출에 관한 연구(제 17보)-데옥시콜린산나트륨에 분산된 클로르프로파미드의 용출 특성-)

  • Moon, Gi-Ju;Seo, Seong-Hoon;Kim, Soo-Uck
    • Journal of Pharmaceutical Investigation
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    • v.19 no.3
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    • pp.155-161
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    • 1989
  • Coprecipitates of chlorpropamide (CPA)-sodium deoxycholate (DC-Na) were prepared at various ratios of CPA to the DC-Na. The X-ray diffraction and DSC measurements indicated that CPA in 1:1 and 1:3 w/w CPA-DC-Na coprecipitates did not exist in amorphous form, but the others were amorphous. The dissolution rate of CPA from the CPA-DC-Na coprecipitates increased in distilled water and KP V 2nd disintegration test fluid (pH 6.8), but decreased extremely in KP V 1st disintegration test fluid (pH 1.2). The dissolution rates of CPA-DC-Na coprecipitates were compared with those of CPA alone and CPA-DC-Na physical mixtures. Especially, it was found that the dissolution rate of CPA markedly increased in the case of 1:5 CPA-DC-Na coprecipitate. The concentration of CPA dissolved from CPA-DC-Na coprecipitate reached a plateau within 5-10 min, and thereafter gradually decreased, indicating that CPA released from the coprecipitate was recrystallized.

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Annealing Effects of Seed Layers on the Properties of ZnO Nanorods (ZnO 나노로드 특성에 미치는 시드 막 열처리 영향)

  • Ma, Tae-Young;Park, Ki-Cheol
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.67 no.6
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    • pp.753-758
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    • 2018
  • We investigated annealing effects of seed layers on the properties of ZnO nanorods grown on the seed layers. ZnO nanorods were grown by a hydrothermal method. ~100 nm-thick ZnO films were sputtered on oxidized Si wafers and quartz as seed layers. The ZnO films were annealed at $400^{\circ}C$, $600^{\circ}C$, and $800^{\circ}C$, respectively. ZnO nanorods were grown at $90^{\circ}C$ for 3 hours in the mixed solution of zinc nitrate hexahydrate and hexamethylenetetramine. X-ray diffraction was carried out to estimate the crystallinity and strain of ZnO films and nanorods. A field emission scanning electron microscope was employed to observe the morphology of the films and nanorods. PL(photoluminescence) measurements were conducted with 266 nm light. It was found that the annealing of seed layers increase the growth rate of nanorods, and change compressive strain of nanorods to tensile strain. The intensity of PL in the UV region reduced by using the annealed seed layers.

Antarctic Sea Ice Distribution from Integrated Microwave Sensings

  • Hwang, Jong-Sun;Yoon, Ho-Il;Min, Kyung-Duck;Kim, Jeong-Woo;Hong, Sung-Min
    • Proceedings of the KSRS Conference
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    • 2002.10a
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    • pp.633-633
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    • 2002
  • We investigated the distributions of sea ice using various microwave remote sensing techniques in the part of Drake passage, Antarctica, between the area 45-75$^{\circ}$W and 55-66$^{\circ}$S. We used Topex/Poseidon(T/P) radar altimeter, ERS-1 altimeter, ERS-2 scatterometer, Nimbus-7 Scanning Multichannel Microwave Radiometer (SMMR), and DMSP Special Sensor Microwave/Imager(SSM/I) data. The sea ice distributions were estimated between May and Jun., 1995 and Oct. and Nov., 1998. The two altimeter measurements (T/P and ERS-1) showed good coherence with the results from the radiometer data in the given period when the ice concentration of 20% and greater was selected. The scatterometer data also showed good correlation with altimetry-implied sea ice surface. The maximum and minimum values of sea ice distribution were appeared in Aug. and Feb., respectively. In general, the sea ice distributions estimated from radar altimeter, radioneter, and scatterometer are well correlated.

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Etch Pit Growth on Aluminum of Cathode Film for Aluminum Electrolytic Capacitor (알루미늄 전해 커패시터용 음극박의 에칭 피트 성장)

  • Kim, Hong-Il;Choi, Ho-Gil;Kim, Sung-Han;Kim, Young-Sam;Shin, Jin-Sik;Park, Soo-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.407-408
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    • 2005
  • High surface area electrodes for aluminum electrolytic capacitors are produced by AC electrochemical processes. Optimization of crystallographic etch pit growth on aluminium during AC etching of cathode film for aluminium as electrolytic capacitor has been established. In this work, we present the observations of pit distributions by galvanostatic measurements. The effects of electrolyte concentration, current density, frequency, various pre-treatments and etching time have been studied. The specimen was pretreated in 0.5M NaOH and 1M HCl at $40\sim60^{\circ}C$, and transferred into a cell containing 1M HCl, then various mol $H_2SO_4$ etchant was added. Pit size distributions were determined with scanning electron microscopy (SEM).

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Realization of 1D-2DEG Composite Nanowire FET by Selective Area Molecular Beam Epitaxy (선택적 분자선 에피택시 방법에 의한 1D-2DEG 혼성 나노선 FET의 구현)

  • Kim, Yun-Joo;Kim, Eun-Hong;Seo, Yoo-Jung;Kim, Dong-Ho;Hahn, Cheol-Koo;Ogura, Mutsuo;Kim, Tae-Geun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.167-168
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    • 2006
  • High quality 3D-heterostructures were constructed by selective area (SA) molecular beam epitaxy (MBE) using a specially patterned GaAs (001) substrate. MBE growth parameters such as substrate temperature, V/III ratio, growth ratio, group V sources ($As_2$, $As_4$) were varied to calibrate the selective area growth conditions. Scanning micro-photoluminescence ($\mu$-PL) measurements and following analysis revealed that the gradually (adiabatically) coupled 2DEG-1D-1DEG field effect transistor (FET) system was realized. This 3D-heterostructure is very promising for the realization of the meso-scopic electronic devices and circuits since it makes it possible to form direct ohmic contact to the (quasi) 1DEG.

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Fabrication and characterization of CdS film, nanowires and nanobelts grown by VPE

  • Son, Moon-A;Lee, Dong-Jin;Kang, Tae-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.69-69
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    • 2010
  • The research is the structural and optical characteristics of the Cadmium Sulfide(CdS) film, nanowires and nanobelts grown on the $Al_2O_3$ substrate using the vapor phase epitaxy method. The field-emission scanning electron microscopy(FE-SEM) were used to identify the shape of the surface of the nanostructures and x-ray diffraction(XRD) and transmission electron microscopy (TEM) were used to evaluate the structural characterisitcs. As a result, the XRD was confirmed the CdS peak and the substrate peak and TEM showed single crystals with wurtzite hexagonal structure on the nanostructures. As for the optical characteristic of the nanostructures, photoluminescence(PL) and micro-raman spectrum were measured. The PL measurements confirmed the emission peak related bound exciton to neutral donor($D^0X$) peak and free exciton(FX) peak. The micro-raman spectrum showed that the peak of the nanostructures were similar to the pure crystalline CdS peak and each peak were overtone of LO phonon of the hexagonal CdS of the longitudinal optical(LO) phonon mode. Therefore, it is confirmed that the CdS nanostructures grown in this research have superior crystallinity.

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Influence of RTA treatments on optical properties of ZnO nanorods synthesized by wet chemical method

  • Shan, Qi;Ko, Y.H.;Lee, H.K.;Yu, J.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.190-190
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    • 2010
  • Zinc oxide is the most attractive material due to the large direct band gap (3.37 eV), excellent chemical and thermal stability, and large exciton binding energy (60 meV). Recently, ZnO nanorods were used as the high efficient antireflection coating layer of solar cells based on silicon (Si). In this reports, we studied the effects of rapid thermal annealing (RTA) treatment on optical properties of ZnO nanorods. For fabrication of ZnO nanorods, there are many methods such as hydrothermal method, sol-gel method, and metal organic chemical vapor deposition method. Among of them, we used the conventional wet chemical method which is simple and low temperature growth. In order to synthesize the ZnO nanorods, the ZnO films were deposited on Si substrate by RF magnetron sputtering at room temperature and the samples were dipped to aqua solution containing the zinc nitrate and hexamethylentetramines (HMT). The synthesis process was achieved in keeping with temperature of $90-95^{\circ}C$ and under constant stirring. The morphology of ZnO nanorods on glass and Si was characterized by scanning electron microscopy. For the analysis of antireflection performance, the reflectance and transmittance were measured by spectrophotometer. And for analyzing the effects of RTA treatment on ZnO nanorods, crystalline properties were investigated by X-ray diffraction measurements and optical properties was estimated by photoluminescence spectra.

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Detection of PspA by Interdigitated Nanogap Devices

  • Park, Jimin;Park, Dae Keun;Lee, Cho Yeon;Kang, Aeyeon;Oh, Jihye;Kim, Gyuhee;Lee, Sangho;Yun, Wan Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.268.2-268.2
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    • 2013
  • Nanogap interdigitated electrodes (NIDEs) can serve as an alternative platform for the biomolecular detection [1]. In this work, the NIDEs were adopted in a simple and sensitive detection of Pneumococcal surface protein A (PspA). The NIDEs were fabricated by the combination of photo and chemical lithography. Photolithographically-defined initial gap of about 200 nm was narrowed down to a few tens of nanometers by surface-initiated growth of the initial electrodes (chemical lithography) [2]. Bare silicon oxide surface between the electrodes was chemically modified to immobilize capturing antibodies and, after exposure to the samples, the device was immersed in a solution containing the probe-antibody-conjugated Au nanoparticles (Au NPs). The conductance change accompanied with the Au NP immobilization was interpreted as the existence of PspA. Detection limit of the measurements and further improvement of the detection efficiency were discussed with the results from I-V analysis, scanning electron microscopy, and atomic force microscopy.

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