• 한국전기전자재료학회논문지
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• 제18권1호
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• 한국가시화정보학회지
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• 제9권2호
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• pp.54-60
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• 2011

This paper is a basic study on volatile organic compounds(VOC) recovery system in a crude oil carrier. VOC is easily evaporated in cargo tankers during loading and transportation of crude oil, causes serious environmental contamination and a huge economic loss. An ejector system is designed to mix VOC gas into crude oil flow to reduce VOC concentration. Detail two-phase flow inside the ejector is simulated using a commercial CFD code. To verify the numerical prediction, a scale-down experiment is conducted. Instead of crude oil and VOC, water and air are used as the working fluids. Flow characteristics and main parameters are obtained by two-phase flow visualization and PIV measurements. Air volume flow rate induced by the ejector is compared with respect to the volume flow rate of water using experimental and numerical results. Overall performance of the two-phase ejector predicted by the CFD simulation agrees well with that of the experiment.

• 한국안전학회지
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• 제20권3호
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• pp.71-77
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• 2005

This study aims to find the safe vent area to prevent a destruction of building by gas explosion in a building. Explosion vessel which used in this experiment is 1/5 scale down model of simple livingroom and its dimension is 100cm in length 60cm in width and 45cm in height. Liquified petroleum gas(LPG) was injected to the vessel to the concentration of 4.5vol%, and injection rate were varied in 1L/min or 4L/min. Gas mixture was ignited by the 10kV electric spark. For analysis the characteristics of vented explosion pressure according to the vent size and vent shape, its size and shape were varied. From the experiment, it was found that explosion pressure in the vented explosion :in affected by the gas injection rate, vent area and vent shape. And the vent area to volume ratio(S/V) to prevent the building destruction by explosion pressure, it is recommended that the design of vent area happened by the explosion should be above 1/500cm in S/V. And if the vent area has complicate structure in same area, vented explosion pressure will be higher than a single vent, and possibility of building destruction will increase. Therefore to effectively vent the explosion pressure for protect a building and residents from the gas explosion hazards, the same vent area should have a singular and constant shape in the cross-sectional area of the vessel.

• 한국경영과학회지
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• 제31권4호
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• pp.139-155
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• 2006

The facility location problem of this paper is distinguished from the maximal covering location problem and the flxed-charge facility location problem. We propose the maximal profiting location problem (MPLP) that is the facility location problem maximizing profit with multi-product. We apply to the simulated annealing algorithm, the stochastic evolution algorithm and the accelerated simulated annealing algorithm to solve this problem. Through a scale-down and extension experiment, the MPLP was validated and all the three algorithm enable the near optimal solution to produce. As the computational complexity is increased, it is shown that the simulated annealing algorithm' is able to find the best solution than the other two algorithms in a relatively short computational time.

• Journal of Mechanical Science and Technology
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• 제19권2호
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• pp.716-727
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• 2005

Comprehensive measurements for velocity and temperature fields have been conducted. A Micro PIV 2-color LIF system have been setup to measure the buoyancy driven fields in a 1-mm heated channel with low Grashof-Prandtl numbers [$86]. Fluorescence microscopy is combined with an MPIV system to obtain enough intensity images and clear pictures from nano-scale fluorescence particles. The spatial resolution of the Micro PIV system is $75{\mu}m\;by\;67{\mu}m$ and error due to Brownian motion is estimated $1.05\%$. Temperature measurements have achieved the $4.7\;{\mu}m$ spatial resolution with relatively large data uncertainties the present experiment. The measurement uncertainties have been decreased down to less than ${\pm}1.0^{\circ}C$ when measurement resolution is equivalent to $76\;{\mu}m$. Measured velocity and temperature fields will be compared with numerical results to examine the feasibility of development as a diagnostic technique.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2007년도 춘계학술대회 논문집
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• pp.430-437
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• 2007

The experiments for aerodynamic characteristics on railway acoustic screen are performed using 1/61 scale-down mock-up facility. The train model for the experiment is high speed train (KTX) and the tested speed is about 300km/h. The tested train length is about 61cm which is corresponding to two units of train. The strength of pressure wave is measured using piezo typed pressure sensor. The measured pressure is compared with field test data and UIC 779-1 values.

• 한국기계가공학회지
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• 제12권1호
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• pp.15-21
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• 2013

The safety and stability of 5MW class offshore wind turbine Jack-up platform was investigated through ocean basin experiment. For simulating the environmental condition of yellow sea in the South Korea, diverse waves, winds and currents were performed based on Froude's number. Regular wave and irregular wave based on Froude's number were applied to the wind turbine structure. In experiments, the height and period of regular wave type were scaled down as the 1:50 ratio of real wave condition. Irregular wave type was simulated with TMA(Texel Storm, Marsen and Arsloe)spectrum. The vertical reaction force, resonance period and wave pressure applied to multi-supporters of wind offshore structure were measured experimentally. Finally, the results showed that the capsizing situation of the offshore structure was generated by the severe environmental condition.

• 대한조선학회논문집
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• 제49권2호
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• pp.203-211
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• 2012

The main object of this experiment is to estimate the hydrodynamic forces acting on a submerged streamlined body placed in a one-end-opened cylindrical tube moving with certain translational velocity. The best experimental design for this object is mimicking real situation, however sizes of model body and cylinder tube are just the same as those of real, for avoiding scale effects, mimicking real situation is not realizable. Hence, in this experiment, target body and cylindrical tube were designed to be towed with varying body position relative to cylindrical tube. For measuring hydrodynamic forces and flow velocity in the cylindrical tube, six one-component load cells and several one-hole Pitot tubes were used. Several conditions were checked with various end-plates those had different opening areas. Experiment results show that forces and flow velocity had different tendency with those expected, and the presence of a end-plate slows down the flow velocity in the cylindrical tube and affects pressure field in the tube to push the model submerged body forward of the tube. This tendency grows with decreasing opened area.

• KIEAE Journal
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• 제16권3호
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• pp.121-128
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• 2016

Purpose: The vacuum glazing should constantly retain the gap in vacuum state to maintain high thermal performance. To do so, pillars are used to prevent the glazing from clinging to each other by the atmospheric pressure and therefore surface of the vacuum glazing is consistently affected by residual stress. The vacuum glazing could be applied to curtain wall systems at spandrel area to fulfill a rigorous domestic standard on U-value of the external wall. However, this can lead to high glazing temperature increase by heat concentration at a back panel and finally thermal stress breakage. This study experimentally determined weakness of the vacuum glazing systems on the thermal stress breakage and investigated effect of the residual stress. Method: The experiment first built two scale-down mock-up facilities that replicate the spandrel area in curtain wall, and then installed single low-e glass and vacuum glazing respectively. The two mock-up facilities were exposed to outside to induce the thermal stress breakage. Result: The experiment showed that the temperature occurred the thermal stress breakage was $114.4^{\circ}C$ for the single low-e glass and $118.9^{\circ}C$ for the vacuum glazing respectively. The result also showed the vacuum glazing reached the critical point earlier than the single low-e glass, which means that the vacuum glazing has high potential to occur the thermal shock breakage. In addition, the small temperature difference between two glazing indicates that the residual stress scarcely affects breakage of the vacuum glazing.

• 한국체육학회지인문사회과학편
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• 제58권4호
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• pp.447-459
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• 2019

이 연구는 비활동 여성 30명을 대상으로 중강도 지속 운동(moderate-intensity continuous exercise; MICE)과 고강도 인터벌 운동(high-intensity interval exercise; HIIE) 시 감정적 반응과 신경전달물질의 차이를 규명하기 위해 실시되었다. 두 집단 모두 설계된 일회성 트레드밀 운동을 실시하였고, 동일한 운동을 1주일 간격으로 총 3회 반복 실시하였다. MICE는 환기역치(VT) 50% 수준에서 5분간 준비운동 후 90%VT 수준에서 25분간 지속운동을 실시하였고 다시 50%VT 수준에서 5분간 정리운동을 실시하였다. HIIE는 115%VT 수준에서 2분간 6회 반복하였고, 중간의 운동성 회복은 85%VT 수준에서 2분간 4회 반복하였다. 통계분석결과 MICE는 첫 번째 실험에서 운동 중 감정반응과 운동 후 즐거움에 대해 긍정적으로 나타났지만 세 번째 실험에서는 부정적으로 나타났다. 반대로 HIIE는 첫 번째 실험에서 운동 중 감정반응과 운동후 즐거움에 대해 부정적으로 나타났지만 세 번째 실험에서는 긍정적으로 나타났다. 신경전달물질의 경우 3번의 실험에서 두 집단 모두 운동전에 비해 운동 10분 후 유의하게 증가한 것으로 나타났다. 종합해볼 때 비활동 여성에게 HIIE 운동이 운동순응을 높이는 전략이 될 수 있다고 판단된다.