• Title/Summary/Keyword: sapphire

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Thickness optimization of the bulk GaN single crystal grown by HVPE processing variable control (HVPE 법에서의 공정변수 조절에 의한 bulk GaN 단결정의 두께 최적화)

  • Park, Jae Hwa;Lee, Hee Ae;Lee, Joo Hyung;Park, Cheol Woo;Lee, Jung Hun;Kang, Hyo Sang;Kang, Suk Hyun;Bang, Sin Young;Lee, Seong Kuk;Shim, Kwang Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.2
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    • pp.89-93
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    • 2017
  • GaN single crystals were grown by controlling of various processing parameters such as growing temperature, V/III ratio and growing rate. We optimized thickness of bulk GaN single crystal by analyzing defect of surface and inside of the GaN single crystal for application to high brightness and power device. 2-inch bulk GaN single crystals were grown by HVPE (hydride vapor phase epitaxy) on sapphire and their thickness was 0.3~7.0 mm. Crystal structure of the grown bulk GaN was analyzed by XRD (X-ray diffraction). The surface characteristics of the grown bulk GaN were observed by OM (optical microscope) and SEM (scanning electron microscopy) with measuring EPD (etch pits density) of the GaN crystals.

Effects of GaN Buffer Layer Thickness on Characteristics of GaN Epilayer (GaN 완충층 두께가 GaN 에피층의 특성에 미치는 영향)

  • Jo, Yong-Seok;Go, Ui-Gwan;Park, Yong-Ju;Kim, Eun-Gyu;Hwang, Seong-Min;Im, Si-Jong;Byeon, Dong-Jin
    • Korean Journal of Materials Research
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    • v.11 no.7
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    • pp.575-579
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    • 2001
  • GaN buffer layer and epilayer have been grown on sapphire (0001) by metal organic chemical vapor deposition (MOCVD). GaN buffer layer ranging from 26 nm to 130 nm in thickness was grown at 55$0^{\circ}C$ prior to the 4 $\mu\textrm{m}$ thick GaN epitaxial deposition at 110$0^{\circ}C$. After GaN buffer layer growth, buffer layer surface was examined by atomic force microscopy (AFM). As the thickness of GaN buffer layer was increased, surface morphology of GaN epilayer was investigated by scanning electron microscopy (SEM). Double crystal X-ray diffraction (DCXRD) and Raman spectroscopy were employed to study crystallinity of GaN epilayers. Optical properties of GaN epilayers were measured by photoluminescence (PL). The epilayer grown with a thin buffer layer had rough surface, and the epilayer grown with a thick buffer layer had mirror-like surface of epilayer. Although the stress on the latter was larger than on the former, its crystallinity was much better. These results imply that the internal free energy is decreased in case of the thick buffer layer. Decrease in internal free energy promotes the lateral growth of the GaN film, which results in the smoother surface and better crystallinity.

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Structural and optical properties of ZnO epilayers grown on oxygen- and hydrogen-plasma treated sapphire substrates (산소와 수소 플라즈마로 처리한 사파이어 기판 위에 성장된 ZnO 박막의 구조적.광학적 특성)

  • Lee, S.K.;Kim, J.Y.;Kwack, H.S.;Kwon, B.J.;Ko, H.J.;Yao, Takafumi;Cho, Y.H.
    • Journal of the Korean Vacuum Society
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    • v.16 no.6
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    • pp.463-467
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    • 2007
  • Structure and optical properties of ZnO epilayers grown on oxygen- and hydrogen-plasma treated sapphire substrates by plasma-assisted molecular beam epitaxy (denoted as samples A and B, respectively) have been investigated by various techniques. The crystal quality and structural properties of the surface for the ZnO epilayers were investigated by high-resolution X-ray diffraction and atomic force microscope. For investigating the optical properties of excitonic transition of ZnO, we carried out photoluminescence experiments as a function of temperature. The free exciton, bound exciton emission and their phonon replicas were investigated as a function of temperature from 10 to 300 K, and the intensity of excitonic PL peak emission from the sample A is found to be higher than that of sample B. From the results, we found that sample A has better crystal structure quality and optical properties as compared to sample B. The number of oxygen vacancies may be decreased in sample A, resulting in an enhancement of the crystal quality and a higher intensity of excitonic emission band as compared to sample B.

Comparison of growth and properties of GaN with various AlN buffer layers on Si (111) substrate (Si (111) 기판 위에 다양한 AIN 완충층을 이용한 GaN 성장과 특성 비교)

  • 신희연;이정욱;정성훈;유지범;양철웅
    • Journal of the Korean Vacuum Society
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    • v.11 no.1
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    • pp.50-58
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    • 2002
  • The growth of GaN films on Si substrate has many advantages in that Si is less expensive than sapphire substrate and that integration of GaN-based devices with Si substrate is easier The difference of lattice constant and thermal expansion coefficient between GaN and Si is larger than those between GaN and sapphire. However, which results in many defects into the grown GaN. In order to obtain high duality GaN films on Si substrate, we need to reduce defects using the buffer layer such as AlN. In this study, we prepared three types of AlN buffer layer with various crystallinity on Si (111) substrate using MOCVD, Sputtering and MOMBE methods. GaN was grown by MOCVD on three types of AlN/Si substrate. Using TEM and XRD, we carried out comparative investigation of growth and properties of GaN deposited on the various AlN buffers by characterizing lattice coherency, crystallinity, growth orientation and defects formed (voids, stacking faults, dislocations, etc). It is found that the crystallinity of AlN buffer layer has strong effects on growth of GaN. The AlN buffer layers grown by MOCVD and MOMBE showed the reduction of out-of-plane misorientation of GaN at the initial growth stage.

A Study on THz Generation and Detection Characteristics of InGaAs Semiconductor Epilayers (InGaAs 반도체 박막의 테라헤르쯔(THz) 발생 및 검출 특성 연구)

  • Park, D.W.;Kim, J.S.;Noh, S.K.;Ji, Young-Bin;Jeon, T.I.
    • Journal of the Korean Vacuum Society
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    • v.21 no.5
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    • pp.264-272
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    • 2012
  • In this paper, we report THz generation and detection characteristics investigated by InGaAs semiconductor epilayers, as results of a basic study obtained from the InGaAs-based THz transmitter/receiver (Tx/Rx). High-temperature and low-temperature (LT) grown InGaAs epilayers were prepared by the molecular beam epitaxy technique for the characterization of THz generation and detection, respectively, and the surface emission based on the photo-Dember effect was tried for THz generation. THz wave was generated by irradiation of a Ti:Sapphire fs pulse laser (60 ps/83 MHz), and a LT-GaAs Rx was used for the THz detection. The frequency band shown in the spectral amplitudes Fourier-transformed from the measured current signals was ranging in 0.5~2 THz, and the signal currents were exponentially increased with the Tx beam power. The THz detection characteristics of LT-InGaAs were investigated by using an Rx with dipole (5/20 ${\mu}m$) antenna, and the cutoff frequency was ~2 THz.

Output power characteristics of a CW Nd:YVO4/KTP laser pumped by a tunable Ti:Sapphire laser (파장가변 티타늄 사파이어 레이저로 펌핑하는 연속발진 Nd:YVO4/KTP 레이저의 출력 특성)

  • 추한태;안범수;김규욱;이치원
    • Korean Journal of Optics and Photonics
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    • v.13 no.2
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    • pp.140-145
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    • 2002
  • We measured the absorption rate of a Nd:YVO$_4$crystal with a thickness of 1 mm and the output power characteristics of a cw Nd:YVO$_4$/KTP laser with respect to the change of wavelength and the polarizations of a tunable Ti:sapphire pump laser with a linewidth of 0.2 nm. In the case of S-polarization (E┴$\pi$) and P-polarization (E∥$\pi$) of a pump laser, the maximum absorption rate of the crystal was 82% at 809.4 nm and 98% at 808.8 nm, and slope efficiencies for the output power of the Nd:YVO$_4$laser (1064 nm) were 43% and 52%, respectively. The maximum Nd:YYO$_4$laser output power of 516 mW was obtained from the P-polarization pump laser of 1000 mW. As a result of an intracavity frequency-doubling, slope efficiency for the output power of the Nd:YVO$_4$/KTP green laker (532nm) was 23% and the maximum output power of 205 mW with the beam quality (M$^2$) of 1.42 was obtained from the P-polarization pump laser of 1000 mW.

Quantitative analysis of mutans streptococci adhesion to various orthodontic bracket materials in vivo (다양한 교정용 브라켓 원재료에 부착하는 mutans streptococci 양의 비교분석)

  • Yu, Jin-Kyoung;Ahn, Sug-Joon;Lee, Shin-Jae;Chang, Young-Il
    • The korean journal of orthodontics
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    • v.39 no.2
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    • pp.105-111
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    • 2009
  • Objective: To estimate the effects of bracket material type on enamel decalcification during orthodontic treatment, this study analyzed the adhesion level of mutans streptococci (MS) to orthodontic bracket materials in vivo. Methods: Three different types of orthodontic bracket materials were used: stainless steel, monocrystalline sapphire, and polycrystalline alumina. A balanced complete block design was used to exclude the effect of positional variation of bracket materials in the oral cavity. Three types of plastic individual trays were made and one subject placed the tray in the mouth for 12 hours. Then, the attached bacteria were isolated and incubated on a mitis salivarius media containing bacitracin for 48 hours. Finally, the number of colony forming units of MS was counted. The experiments were independently performed 5 times with each of the 3 trays, resulting in a total of 15 times. Mixed model ANOVA was used to compare the adhesion amount of MS. Results: There was no difference in colony forming units among the bracket materials irrespective of jaw and tooth position. Conclusions: This study suggested that the result of quantitative analysis of MS adhesion to various orthodontic bracket materials in vivo may differ from that of the condition in vitro.

The growth of GaN on the metallic compound graphite substrate by HVPE (HVPE 방법에 의한 금속 화합물 탄소체 기판 위의 GaN 성장)

  • Kim, Ji Young;Lee, Gang Seok;Park, Min Ah;Shin, Min Jeong;Yi, Sam Nyung;Yang, Min;Ahn, Hyung Soo;Yu, Young Moon;Kim, Suck-Whan;Lee, Hyo Suk;Kang, Hee Shin;Jeon, Hun Soo;Sawaki, Nobuhiko
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.5
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    • pp.213-217
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    • 2013
  • The GaN layer was typical III-V nitride semiconductor and was grown on the sapphire substrate which cheap and convenient. However, sapphire substrate is non-conductivity, low thermal conductivity and has large lattice mismatch with the GaN layer. In this paper, the poly GaN epilayer was grown by HVPE on the metallic compound graphite substrate with good heat dissipation, high thermal and electrical conductivity. We tried to observe the growth mechanism of the GaN epilayer grown on the amorphous metallic compound graphite substrate. The HCl and $NH_3$ gas were flowed to grow the GaN epilayer. The temperature of source zone and growth zone in the HVPE system was set at $850^{\circ}C$ and $1090^{\circ}C$, respectively. The GaN epilayer grown on the metallic compound graphite substrate was observed by SEM, EDS, XRD measurement.

GHz Bandwidth Characteristics of Rectangular Spiral type Thin Film Inductors (사각 나선형 박막 인덕터의 GHz 대역 특성)

  • Kim, J.;Jo, S.
    • Journal of the Korean Magnetics Society
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    • v.14 no.1
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    • pp.52-57
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    • 2004
  • In this research, characteristics of air core rectangular spiral type inductors of ㎓ band are numerical analyzed. The basic structure of inductors is a rectangular spiral having 390${\mu}{\textrm}{m}$${\times}$390${\mu}{\textrm}{m}$ size, 5.5 turns, line width of 10 ${\mu}{\textrm}{m}$ and line space of 10 ${\mu}{\textrm}{m}$. Frequency characteristics were simulated up to 10 ㎓. The substrate was modeled as Si, Sapphire, glass and GaAs and the conductor as Cu. The thickness of the conductor was fixed at 2. The number of turns was n.5 to make the input and output terminals to be on the opposite sides. The initial inductance of the basic inductor structure was 13.0 nH, maximum inductance 60.0 nH and resonance frequency 4.25 ㎓. As the dielectric constant of the substrate was increased, the initial inductance varied only slightly, but the resonance frequency decreased considerably. As the number of turns was varied from 1.5 to 9.5, the initial inductance was increased linearly from 2.9 nH to 15.9 nH and, then, saturated at 16.9 nH. The Q factor increased only slightly. The line width and line space of inductors were varied from 5 ${\mu}{\textrm}{m}$ to 20 ${\mu}{\textrm}{m}$, which resulted in the decrease of the initial and maximum inductances. But the resonance frequency was increased. Q factor displayed an increase and a decrease, respectively, when the line width and line space were increased.

Second Harmonic Rotational Anisotropy of Polycrystalline Fe Films on Glass Substrates (유리 위에 증착된 다결정 Fe 자성박막의 이차조화파 회전 이방성)

  • Lee, Feel;Jeong, Jae-Woo;Lee, Hun-Sung;Lee, Kyung-Dong;Kim, Ji-Wan;Shin, Sung-Chul
    • Journal of the Korean Magnetics Society
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    • v.19 no.2
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    • pp.47-51
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    • 2009
  • The surface structure of polycrystalline Fe films of various thicknesses on glass substrates have been studied using a Ti: Sapphire laser at 780 nm. We found that the surface structure possesses C$_s$ crystal structure close to $C_{2v}$ through symmetry consideration. We present one-fold intensity profile with one mirror plane in second harmonic (SH) intensity as a proof of $C_s$ symmetry. $C_s$ and $C_{2v}$ surface symmetries usually appear at the (110) surface of a cubic diamond single crystal [1]. Therefore this surface symmetry would be related to bcc (110) growth orientation coinciding with XRD measurement. Further we treated surface normalized SH asymmetry with various thicknesses. The SH asymmetry increases with increasing of film thickness. From these results, it is observed that the surface structure of thin polycrystalline Fe film below 5 nm is almost isotropic, while in the case of the thicker Fe films, surface structure have $C_s$ symmetry structure close to $C_{2v}$.