• Title/Summary/Keyword: roughness pitch

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Studies on the AFM analysis of Cu CMP processes for pattern pitch size and density after global planarization (패턴 피치크기 및 밀도에 따른 Cu CMP 공정의 AFM 분석에 관한 연구)

  • 김동일;채연식;윤관기;이일형;조장연;이진구
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.9
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    • pp.20-25
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    • 1998
  • Cu removal rates for various SiO$_2$ trench pitch sizes and densities and AFM images of surface profiles after global planarization using Cu CMP technology are investigated. In the experimental results, Cu removal rates are increasing as the pattern densities and pattern pitches are getting high and low, respectively, and then decreasing after local planarization. The rms roughness after global planarization are about 120$\AA$. AFM images with a 50% pattern density for 1${\mu}{\textrm}{m}$ and 2${\mu}{\textrm}{m}$ pitches show that thicknesses of 120~330$\AA$ Cu interconnects have been peeled off and oxide erosion of Cu/Sio$_2$ sidewall is observed. However, AFM images with a 50% pattern density for 10${\mu}{\textrm}{m}$ and 15${\mu}{\textrm}{m}$ pitches show that 260~340$\AA$ thick Cu interconnects have been trenched at the boundaries of Cu/Sio$_2$ sidewall.

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The Effect of Voice Therapy for the Treatment of Functional Aphonia: A Preliminary Study (기능적 실성증에 대한 음성치료의 효과 분석: 기초 연구)

  • Kim, No Eul;Kim, Jun Seok;Oh, Jae Hwan;Kim, Dong Young;Woo, Joo Hyun
    • Journal of the Korean Society of Laryngology, Phoniatrics and Logopedics
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    • v.32 no.2
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    • pp.75-80
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    • 2021
  • Background and Objectives Functional aphonia refers to in which by presenting whispering voice and almost producing very high-pitched tensed voices are produced. Voice therapy is the most effective treatment, but there is a lack of consensus for application of voice therapy. The purpose of this study was to examine the vocal characteristics of functional aphonia and the effect of voice therapy applied accordingly. Materials and Method From October 2019 to December 2020, 11 patients with functional aphonia were treated using voice therapy which was processing three stages such as vocal hygiene, trial therapy, and behavioral therapy. Of these, 7 patients who completed the voice evaluation before and after voice therapy was enrolled in this study. By retrospective chart review, clinical information such as sex, age, symptoms, duration, social and medical history, process of voice therapy, subjective and objective findings were analyzed. Voice parameters before and after voice therapy were compared. Results In GRBAS study, grade, rough, and asthenic, and in Consensus Auditory-Perceptual Evaluation of Voice, overall severity, roughness, pitch, and loudness were significantly improved after voice therapy. In Voice handicap index, all of the scores of total and sub-categories were significantly decreased. In objective voice analysis, jitter, cepstral peak prominence, and maximum phonation time were significantly improved. Conclusion The voice therapy was effective for the treatment of functional aphonia by restoring patient's vocalization and improving voice quality, pitch and loudness.

Heat Transfer in a Two Wall Divergent Rectangular Channel with V-Shaped Ribs on One Wall (한 벽면에 V형 리브가 있는 2면 확대 사각채널의 열전달)

  • Lee, Myung-Sung;Ahn, Soo-Whan
    • Journal of Power System Engineering
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    • v.19 no.5
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    • pp.32-37
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    • 2015
  • The present study is to investigates the convective heat transfer characteristics and pressure drop inside the rib-roughened cooling passage of gas turbine blades. The divergent rectangular channel is fabricated with V-shaped ribs on one wall only and the inlet hydraulic diameter to outlet hydraulic diameter ratio($D_{ho}/D_{hi}$) of 1.49 is used. The current investigation has covered a Reynolds number (Re) range of 22,000~75,000, relative roughness height ($e/D_h$) of 0.1~0.2, and rib angle of attack (a) of $30^{\circ}$, $45^{\circ}$, and $60^{\circ}$ for a fixed relative pitch of 10. Results show that the Nusselt numbers are the greatest in the $60^{\circ}$-angled ribs; however, the total friction factors are the highest in the $30^{\circ}$-angled ribs.

Effect of Rib Height on Turbulence and Convective Heat Transfer (리브의 높이가 난류 및 열전달특성에 미치는 영향)

  • Nine, Md.J.;Kim, S.J.;Jeong, H.M.;Chung, H.S.;Rahman, M.Sq.
    • Journal of Power System Engineering
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    • v.16 no.6
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    • pp.30-37
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    • 2012
  • Effect of rib heights is found as significant parameter to enhance convective heat transfer performance under laminar and low turbulent regime. Circular ribs with different ribheight to channel height ratios, e/H = 0.05, 0.1, 0.15, are fabricated over the copper substrate respectively in a rectangular duct having 7.5 cross sectional aspect ratio. Only one rib pitch to rib height ratio (P/e = 10) has been chosen for all different height ribs. The result shows that the arithmetic average of turbulence intensity decreases with decreasing roughness height calculated between two ribs under laminar and low turbulent region. It occurs because the area of recirculation and reattachment zone also decreases with decreasing rib height. Optimum thermal enhancement factor is derived by 0.1 rib height to channel height ratio under low turbulent region but 0.15 rib height to channel height ratio gives maximum subjected to laminar flow.

Objective and Subjective Voice Examination in Korean Medicine

  • Yu, Junsang
    • Journal of Pharmacopuncture
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    • v.17 no.3
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    • pp.57-61
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    • 2014
  • Objectives: When a person speaks, voice problems usually include pain or discomfort and/or difficulties in terms of the pitch, the loudness and the quality of the voice. When patients with voice problems induced by stroke, Parkinson's disease, and systemic diseases involving the voice are examined, generally, of the Four Diagnoses (四診), a Diagnosis of Hearing can be used in current Korean medicine. The effects of acupuncture and herb medicine on voice problems have been reported for over 20 years. However, when it comes to improvements, objective and subjective evaluation methods need to be explained. Methods: Subjective methods for evaluating voice were studied through a literature search of old medicinal books containing Korean medicine diagnostics, and an objective evaluation method using Praat software is presented. Results: Korean medicine doctors analyze the patient's voice in clinical settings unconsciously on a daily basis. However, most voice diagnoses depend on the doctor's subjective evaluation. Voice qualities can be evaluated by using the Eight Principles (八綱), including Yin-Yang; the Five Elements (Phases); the Grade, Roughness, Breathy, Asthenic, Strained (GRBAS) score, and the Visual Analogue Scale (VAS) as subjective methods, and an acoustic analysis using the Praat program can be used as an objective method. Conclusion: A more complete voice examination can be achieved by using subjective and objective methods at the same time. For an objective explanation and management of patient's voice problems or systemic disorders, an objective method should be used in Korean medicine, which already has many subjective diagnostic methods. More research needs to be conducted, and more clinical evidence needs to be collected in the future.

A Study on Plasma Display Panel Barrier Rib Fabrication by Silicone Rubber Tooling and electromagnetic Wave (실리콘고무형과 전자기파에 의한 PDP격벽의 성형에 관한 연구)

  • 정해도;손재혁;조인호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.20-23
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    • 2001
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper, Stripes of grooves of which width 48${\mu}{\textrm}{m}$, depth 124$\mu\textrm{m}$ , pitch 274$\mu\textrm{m}$ was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6nm Ra in grooving Si. Barrier ribs were formed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waveness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

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A Study on Effect of the Grinding in SCM420H Planetary Gear (SCM420H 유성기어의 연삭효과에 관한 연구)

  • An, In-Hyo;Hur, Nam-Soo;Lee, In-Bum;Lyu, Sung-Ki
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.5
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    • pp.54-59
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    • 2012
  • This study dealt with effect of the grinding in SCM420H planetary gears. The hardness, tooth profile, lead and roughness of the gear surface can be improved by grinding process. Therein, the grinding techniques are widely used especially as one of the physical surface improvement methods. As the results, the gear grinding process reduced vibration and noise, and increased the life of the gear. And the gear grinding improved the surface of gear tooth in a short time and low cost, thus, it is a very important process in manufacturing industry. But nowadays, it is hard to find the detail information of gear grinding process. The test piece is a planetary gear which is used in the industrial machine. The manufacture process of the test piece contains hobbing, shaving, carburizing and grinding. This study investigated the effect of the grinding process to the physiognomy and the fatigue strength of test piece which was made by SCM420H.

Experimental and Numerical Investigation on Heat Transfer and Fluid Flow Characteristics in the Ribbed Square Channel (거친 사각채널에서 열전달과 유체유동 특성에 관한 실험 및 수치해석)

  • Kang, Ho-Keun;Baer, Sung-Taek;Lee, Dae-Hee;Ahn, Soo-Whan
    • Journal of Advanced Marine Engineering and Technology
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    • v.30 no.2
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    • pp.275-283
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    • 2006
  • Experiment and three dimensional numerical investigations of incompressible turbulent flow through square channels with one- and two-sided ribbed walls are performed to determine pressure drop and heat transfer. The CFX(version 5.7) software package is used for the computation. The ribbed walls have a $45^{\circ}$ inclined square rib. Uniform heat flux is maintained on whole inner heat transfer channel area. The numerical results coincide with experimental data that obtained for $7,600{\le}Re{\le}24.900$, the pitch-to-rib height ratio (p/e) of 8.0. and the rib height-to-channel hydraulic diameter ratio ($e/D_h$) of 0.0667. The results show that values of local heat transfer coefficient and friction factor in the channel with two-sided ribbed wall are higher than those in the channel with one-sided ribbed walls.

Characteristics of Micro Groove grinding for the Mold of PDP Barrier Ribs (PDP 격벽용 금형의 마이크로 홈 연삭 특성)

  • 조인호;정상철;박준민;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.963-966
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    • 2000
  • Plasma display panel (PDP) is a type of flat panel display utilizing the light emission that is produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalk from adjacent sub-pixels. Mold for forming barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing process such as screen printing, sand-blasting and photosensitive glass methods. Mold for PDP barrier ribs have stripes of micro grooves transferring stripes of glass-material wall. In this paper. Stripes of grooves of which width 48 um, depth 124um, pitch 274um was acquired by machining the material of WC with dicing saw blade. Maximum roughness of the bottom and sidewall of the grooves was respectively 120 nm, 287 nm. Maximum tilt angle caused by difference between upper-most width and lower-most width was 2$^{\circ}$. Maximum Radius of curvature of bottom was 7.75 ${\mu}{\textrm}{m}$. This results meets the specification for barrier ribs of 50 inch XGA PDP. Forming the glass paste will be followed by using mold in the near future.

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Improvement of COF Bending-induced Lead Broken Failure in LCD Module (LCD Module내 COF Bending에 따른 Lead Broken Failure의 개선)

  • Shim, Boum-Joo;Choi, Yeol;Yi, Jun-Sin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.3
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    • pp.265-271
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    • 2008
  • TCP(Tape Carrier Package), COG (Chip On Glass), COF(Chip On Film) are three methods for connecting LDI(LCD Driver IC) with LCD panels. Especially COF is growing its portion of market place because of low cost and fine pitch correspondence. But COF has a problem of the lead broken failure in LCD module process and the usage of customer. During PCB (Printed Circuit Board) bonding process, the mismatch of the coefficient of thermal expansion between PCB and D-IC makes stress-concentration in COF lead, and also D-IC bending process during module assembly process makes the level of stress in COF lead higher. As an affecting factors of lead-broken failure, the effects of SR(Solder Resister) coating on the COF lead, surface roughness and grain size of COF lead, PI(Polyimide) film thickness, lead width and the ACF(Anisotropic Conductive Film) overlap were studied, The optimization of these affecting manufacturing processes and materials were suggested and verified to prevent the lead-broken failure.