• Title/Summary/Keyword: roughness height

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A Study on the Removal of Cu and Fe Impurities on Si Substrate (Si 기판에서 구리와 철 금속불순물의 제거에 대한 연구)

  • Choi, Baik-Il;Jeon, Hyeong-Tag
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.837-842
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    • 1998
  • As the size of the integrated circuit is scaled down the importance of Si cleaning has been emphasized. One of the major concerns is abut the removal of metallic impurities such as Cu and Fe on Si surface. In this study, we intentionally contaminated Cu and Fe on the Si wafers and cleaned the wafer by cleaning splits of the chemical mixture of $\textrm{H}_2\textrm{O}_2$ and HF and the combination of HF treatment with UV/$\textrm{O}_3$ treatment. The contamination level was monitored by TXRF. Surface microroughness of the Si wafers was measured by AFM. The Si wafer surface was examined by SEM. AES analysis was carried out to analyze the chemical composition of Cu impurities. The amount of Cu impurities after intentional contamination was abut the level of $\textrm{10}^{14}$ atoms/$\textrm{cm}^2$. The amount of Cu was decreased down to the level of $\textrm{10}^{10}$ atoms/$\textrm{cm}^2$ by cleaning splits. The repeated treatment exhibited better Cu removal efficiency. The surface roughness caused by contamination and removal of Cu was improved by repeated treatment of the cleaning splits. Cu were adsorbed on Si surface not in a thin film type but in a particle type and its diameter was abut 100-400${\AA}$ and its height was 30-100${\AA}$. Cu was contaminated on Si surface by chemical adsorption. In the case of Fe the contamination level was $\textrm{10}^{13}$ atoms/$\textrm{cm}^2$ and showed similar results of above Cu cleaning. Fe was contaminated on Si surface by physical adsorption and as a particle type.

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The effect of Zirconium Nitride coating on shear bond strength with denture base resin in Co-Cr alloy and titanium alloy (질화 지르코늄 코팅이 코발트 크롬 합금과 타이타늄 합금에서 의치상 레진과의 전단결합강도에 미치는 영향)

  • Park, Chan;Lee, Kyoung-Hun;Lim, Hyun-Pil
    • Journal of Dental Rehabilitation and Applied Science
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    • v.32 no.3
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    • pp.194-201
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    • 2016
  • Purpose: The purpose of this study was to evaluate of Zirconium Nitride (ZrN) coating on shear bond strength with denture base resin in Co-Cr and Ti-6Al-4V alloy. Materials and Methods: Co-Cr and Ti-6Al-4V alloy disks (10 mm in diameter, 2.5 mm in thickness; each other: n = 14) were prepared and divided with 2 groups each other by ZrN coating. After primer was applied to disks surface, denture base resin with diameter 6 mm, height 5 mm was bonded on metal disk surface. After surface roughness was measured by Profiler, shear bond strength was determined with Universal testing machine and analyzed with two-way ANOVA. The specimen surfaces and failure mode were examined using a scanning electron microscope. Results: ZrN coated groups showed significantly higher rough surface than non-coated groups (P < 0.05). Irrespective of alloy materials, shear bond strength of ZrN coated groups were lower than non-coated groups (P < 0.001). The scanning electron microscope (SEM) of ZrN coated groups showed mixed and adhesive fractures. Conclusion: ZrN coating weakened bonding strength between denture base resin and Co-Cr, Ti-6Al-4V alloy.

Estimation of Weight Distribution of Rockfall Block by Joint Measurement And Study on Its Application to Rockfall Simulation (절리조사결과에 의한 현장 낙석무게분포추정 및 추정결과의 낙석시뮬레이션 적용성 검토)

  • Kim, Dong-Hee;Ryu, Dong-Woo;Kim, Su-Chul;Yoon, Sang-Kil;Lee, Woo-Jin
    • Journal of the Korean Geotechnical Society
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    • v.23 no.11
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    • pp.67-76
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    • 2007
  • The characteristics of rockfall are determined by virtually all factors and conditions e.g. the physical figure of the slope such as inclination, height, roughness, the elemental figure of the slope such as vegetation and material deposited, and the shape and weight of the rockfall itself. Although it is one of the major factors to be considered in rockfall simulation, little attention has been given to the weight of the rockfall. And, since the size of the rockfall is dominated by joint spacing, the distribution of the rockfall block weight can be predicted as a function of the joint spacing. In this study, the weight distribution of rockfall was estimated by using the method of volumetric joint count, $J_{\nu}$, based on joint spacing, and $RQD-J_{\nu}$. The results indicate that the weight distributions were analogous in two methods, and the distribution was to be $75.3{\sim}76.7%$ for 200 kilograms or lesser, $15.0{\sim}16.6%$ for $200{\sim}400$ kilograms, and $6.7{\sim}9.7%$ for 400 kilograms or more, which show good matches with the actual on-site weight distribution. Therefore, the weight distribution of rockfall suggested in this paper is able to be considered as appropriate data for rockfall simulation.

Research on the Development of Microneedle Arrays Based on Micromachining Technology and the Applicability of Parylene-C (미세가공 기술 기반의 마이크로니들 어레이 개발 및 패럴린 적용 가능성에 관한 연구)

  • Dong-Guk Kim;Deok-kyu Yoon;Yongchan Lee;Min-Uk Kim;Jihyoung Roh;Yohan Seo;Kwan-Su Kang;Young Hun Jeong;Kyung-Ah Kim;Tae-Ha Song
    • Journal of Biomedical Engineering Research
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    • v.44 no.6
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    • pp.404-413
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    • 2023
  • In this research, we studied the development of a SUS304 microneedle array based on microfabrication technology and the applicability of Parylene-C thin film, a medical polymer material. First of all, four materials commonly used in the field of medical engineering (SUS304, Ti, PMMA, and PEEK) were selected and a 5 ㎛ Parylene-C thin film was deposited. The applicability of Parylene-C coating to each material was confirmed through SEM analysis, contact angle measurement, surface roughness(Ra) measurement, and adhesion test according to ASTM standards for each specimen. Parylene-C thin film was deposited based on chemical vapor deposition (CVD), and a 5 ㎛ Parylene-C deposition process was established through trial and error. Through characteristic experiments to confirm the applicability of Parylene-C, SUS304 material, which is the easiest to apply Parylene-C coating without pretreatment was selected to develop a microneedle array based on CNC micromachining technology. The CNC micromachining process was divided into a total of 5 steps, and a microneedle array consisting of 19 needles with an inner diameter of 200 ㎛, an outer diameter of 400 ㎛, and a height of 1.4 mm was designed and manufactured. Finally, a 5 ㎛ Parylene-C coated microneedle array was developed, which presented future research directions in the field of microneedle-based drug delivery systems.

Rotary Veneer Peeling of Some Softwoods and Its Veneer Drying (수종(數種)의 침엽수재(針葉樹材)의 로타리 단판(單板) 절삭(切削)과 건조(乾燥))

  • Jung, Hee-Suk;Lee, Nam-Ho;Yeo, Hwan-Myeong;Lee, June-Ho;Yoo, Tae-Kyung
    • Journal of the Korean Wood Science and Technology
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    • v.24 no.1
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    • pp.34-47
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    • 1996
  • Veneers of two nominal thicknesses, 1.5 and 2.5mm, were rotary peeled from Japanese larch (Larix leptolepis). Dahurian larch (Larix gmelinei) and Radiata pine (Pinus radiata) bolts unheated and heated in the water vat temperature of $66^{\circ}C$ by rising a final temperature at 10cm core of $60^{\circ}C$ to remain core diameter of 11.4cm. 1.5 and 2.5mm thick veneer cut from the heated Japanese larch were significantly thinner than those of the unheated bolt and 2.5mm thick veneer cut from the heated Dahurian larch were significantly thicker than that of the unheated bolt. 1.5mm thick Dahurian larch veneer and 1.5 and 2.5mm thick Radiata pine veneers showed insignificant difference between the unheated and heated bolts, respectively. Check distance on the loose side of 1.5mm thick veneer cut from the heated Radiata pine was significantly wider than that of the unheated bolt. However check distances on the loose side of 1.5 and 2.5mm thick Japanese larch and Dahurian larch veneers and 2.5mm thick Radiata pine veneers showed insignificant difference between the unheated and heated bolts. Also the depth of check on the loose side of three species showed insignificantly difference between the unheated and heated bolts. Arithmatic mean deviation($R_a$) and maximum height($R_{max}$) of the profile on the loose side of dried veneer by preheating the bolt compared with unheated bolts were different among apecies and between veneer thickness. The preheating treatment slightly affected qualities of these thin veneers such as 1.5 and 2.5mm. The yield of 2.5mm thick veneer from the heated radiata pine was significantly higher than that of the unheated bolt. However the yield of 2.5mm thick veneer for other two species and 1.5mm thick veneer for three species showed insignificant difference between the unheated and heated bolts. The yield of 2.5mm thick veneer for three species were higher than those of 1.5mm thick veneer. The average yields of green veneer of Japanese larch. Dahurian larch and Radiata pine were 57.1, 55.1 and 54.0 percent, respectively. Variables such as initial MC. drying time and veneer thickness had strong effect for Japanese larch veneer, less effect for Radiata pine veneer and nuch less effect on final MC for Dahurian larch veneer in jet drying. Correlation between the current MC and the drying time of Dahurian larch with low variation of initial MC was higher than those of Japanese larch and Radiata pine veneer with high variation of initial MC in high temperature drying. Thickness shrinkages of 2.5mm thick veneer for Japanese larch and Radiata pine were higher than those of 1.5mm thick veneers, but shrinkages of Dahurian larch veneer were similar between two nominal veneer thicknesses.

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Characteristics of Channelbed and Woody Debris on Mountainous Stream (산지급류소하천(山地急流小河川)에 있어서 하상미지형(河床微地形)과 유목(流木) 특성(特性))

  • Chun, Kun-Woo;Kim, Min-Sik;Park, Wan-Geun;Ezaki, Tsugio
    • Journal of Korean Society of Forest Science
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    • v.86 no.1
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    • pp.69-79
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    • 1997
  • The purpose of this study is to acquire essential data to reduce the amount of woody debris resulted from the debris flow. This research examined topographic characteristics of the channelbed affecting generation, movement and storage of woody debris and woody characteristics related to number, sizes, shapes, decay, storage direction to mountainous stream. 1. The number of woody debris had a tendency to increase in proportion to stream width, but it was hardly affected by longitudinal gradient of stream. Especially, the greater amount of woody debris was stored at wide section of the stream with compound channel, and it was found in deposits of channelbed rather than in the present channel. 2. Total woody debris over 10cm in diameter and over 2m in length was 402 units and storage number was 35.3 units per 100m of stream. Average diameter of breast height and length were 14cm and 4m, respectively. The woody debris appeared shorter in length and greater in diameter at down-stream than up-stream. 3. Since woody debris met sediments and bed-materials of great roughness in moving, the greater amount of woody debris without root was found in up-stream and down-stream, but deformed woody debris was discovered in upper stream. Decay of woody debris was more severe in down-stream and woody debris on rotting process was found down-stream. 4. Storage direction of woody debris was mainly parallel to center line of stream, and rate of parallel and perpendicularity was 276 and 126 units, respectively. But, as woody debris storing to the perpendicular direction was unstable, the traveling debris could easily be stored. Therefore, some counterplan was required to prevent the traveling woody debris. 5. Tree species of woody debris was mainly larch, which occupied about two third of total woody debris(256 units). The woody debris of larch is easy to move due to hitting of channelbed materials or lower channelbed fluctuation because the lower part of larch is weaker than its upper part. Therefore, the section of the tree species planting in the riparian vegetation needs much more carefulness.

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Prioritization of Species Selection Criteria for Urban Fine Dust Reduction Planting (도시 미세먼지 저감 식재를 위한 수종 선정 기준의 우선순위 도출)

  • Cho, Dong-Gil
    • Korean Journal of Environment and Ecology
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    • v.33 no.4
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    • pp.472-480
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    • 2019
  • Selection of the plant material for planting to reduce fine dust should comprehensively consider the visual characteristics, such as the shape and texture of the plant leaves and form of bark, which affect the adsorption function of the plant. However, previous studies on reduction of fine dust through plants have focused on the absorption function rather than the adsorption function of plants and on foliage plants, which are indoor plants, rather than the outdoor plants. In particular, the criterion for selection of fine dust reduction species is not specific, so research on the selection criteria for plant materials for fine dust reduction in urban areas is needed. The purpose of this study is to identify the priorities of eight indicators that affect the fine dust reduction by using the fuzzy multi-criteria decision-making model (MCDM) and establish the tree selection criteria for the urban planting to reduce fine dust. For the purpose, we conducted a questionnaire survey of those who majored in fine dust-related academic fields and those with experience of researching fine dust. A result of the survey showed that the area of leaf and the tree species received the highest score as the factors that affect the fine dust reduction. They were followed by the surface roughness of leaves, tree height, growth rate, complexity of leaves, edge shape of leaves, and bark feature in that order. When selecting the species that have leaves with the coarse surface, it is better to select the trees with wooly, glossy, and waxy layers on the leaves. When considering the shape of the leaves, it is better to select the two-type or three-type leaves and palm-shaped leaves than the single-type leaves and to select the serrated leaves than the smooth edged leaves to increase the surface area for adsorbing fine dust in the air on the surface of the leaves. When considering the characteristics of the bark, it is better to select trees that have cork layers or show or are likely to show the bark loosening or cracks than to select those with lenticel or patterned barks. This study is significant in that it presents the priorities of the selection criteria of plant material based on the visual characteristics that affect the adsorption of fine dust for the planning of planting to reduce fine dust in the urban area. The results of this study can be used as basic data for the selection of trees for plantation planning in the urban area.